Method of producing highly strained PECVD silicon nitride thin films at low temperature
    1.
    发明授权
    Method of producing highly strained PECVD silicon nitride thin films at low temperature 失效
    在低温下生产高应变PECVD氮化硅薄膜的方法

    公开(公告)号:US07585704B2

    公开(公告)日:2009-09-08

    申请号:US10907454

    申请日:2005-04-01

    IPC分类号: H01L21/82

    摘要: A method for increasing the level of stress for amorphous thin film stressors by means of modifying the internal structure of such stressors is provided. The method includes first forming a first portion of an amorphous film stressor material on at least a surface of a substrate, said first portion having a first state of mechanical strain defining a first stress value. After the forming step, the first portion of the amorphous film stressor material is densified such that the first state of mechanical strain is not substantially altered, while increasing the first stress value. In some embodiments, the steps of forming and densifying are repeated any number of times to obtain a preselected and desired thickness for the stressor.

    摘要翻译: 提供了通过改变这种压力源的内部结构来增加非晶薄膜应力的应力水平的方法。 该方法包括首先在基底的至少一个表面上形成非晶膜应力材料的第一部分,所述第一部分具有限定第一应力值的第一机械应变状态。 在成形步骤之后,非晶态应力材料的第一部分被致密化,使得在增加第一应力值的同时,基本上不改变机械应变的第一状态。 在一些实施例中,形成和致密化的步骤重复任意次数,以获得应激源的预选和期望的厚度。

    METHOD OF PRODUCING HIGHLY STRAINED PECVD SILICON NITRIDE THIN FILMS AT LOW TEMPERATURE
    2.
    发明申请
    METHOD OF PRODUCING HIGHLY STRAINED PECVD SILICON NITRIDE THIN FILMS AT LOW TEMPERATURE 失效
    在低温下生产高应变PECVD硅氮化物薄膜的方法

    公开(公告)号:US20060223290A1

    公开(公告)日:2006-10-05

    申请号:US10907454

    申请日:2005-04-01

    IPC分类号: H01L21/265 H01L21/31

    摘要: A method for increasing the level of stress for amorphous thin film stressors by means of modifying the internal structure of such stressors is provided. The method includes first forming a first portion of an amorphous film stressor material on at least a surface of a substrate, said first portion having a first state of mechanical strain defining a first stress value. After the forming step, the first portion of the amorphous film stressor material is densified such that the first state of mechanical strain is not substantially altered, while increasing the first stress value. In some embodiments, the steps of forming and densifying are repeated any number of times to obtain a preselected and desired thickness for the stressor.

    摘要翻译: 提供了通过改变这种压力源的内部结构来增加非晶薄膜应力的应力水平的方法。 该方法包括首先在基底的至少一个表面上形成非晶膜应力材料的第一部分,所述第一部分具有限定第一应力值的第一机械应变状态。 在成形步骤之后,非晶态应力材料的第一部分被致密化,使得在增加第一应力值的同时,基本上不改变机械应变的第一状态。 在一些实施例中,形成和致密化的步骤重复任意次数,以获得应激源的预选和期望的厚度。

    LEAK DETECTION SYSTEM AND METHOD OF USE THEREOF

    公开(公告)号:US20220003626A1

    公开(公告)日:2022-01-06

    申请号:US16995955

    申请日:2020-08-18

    IPC分类号: G01M3/00

    摘要: A leak detection system and method of use thereof is disclosed based on shock wave propagation in a fluid. In one form, the system includes at least one shock wave generator for introducing at least one shock wave signal into a fluid medium; at least one detector for detecting signals in the fluid medium; and at least one processor configured to identify excitation signals in the fluid medium caused by the at least one shock wave signal, wherein the identification of excitation signals is indicative of a fluid leak.

    Method and system for efficient support low duty mode in femtocells
    8.
    发明授权
    Method and system for efficient support low duty mode in femtocells 有权
    在毫微微小区中有效支持低功耗模式的方法和系统

    公开(公告)号:US09264988B2

    公开(公告)日:2016-02-16

    申请号:US13392844

    申请日:2010-08-27

    摘要: A method and system for handling working of a Low Duty Cycle (LDC) mode of one or more Base Stations (BS) in a wireless communication network. The method includes defining one or more LDC patterns based plurality of LDC parameters associated with one or more BS where the plurality of LDC parameters includes an active period, an inactive period and a start frame offset of the one or more BS in the wireless communication network. The method then sends the one or more LDC patterns notifying Available Interval and Unavailable Interval of each of the one or more patterns to a Mobile Station (MS) by broadcasting one or more LDC patterns, unicasting the one or more LDC pattern to the MS, multicasting the one or more LDC pattern to a group of MSs or send the one or more LDC patterns to one or more MS in a pre-provisioned way.

    摘要翻译: 一种用于在无线通信网络中处理一个或多个基站(BS)的低占空比(LDC)模式的工作的方法和系统。 该方法包括基于与一个或多个BS相关联的多个LDC参数定义一个或多个LDC模式,其中多个LDC参数包括无线通信网络中的一个或多个BS的活动周期,非活动时段和起始帧偏移 。 该方法然后通过广播一个或多个LDC模式将一个或多个模式中的每一个通知可用间隔和不可用间隔的一个或多个LDC模式发送到移动站(MS),将一个或多个LDC模式单播到MS, 将一个或多个LDC模式多播到一组MS,或者以预先提供的方式将一个或多个LDC模式发送到一个或多个MS。

    Methods and apparatus to identify the accessibility of base stations in communication systems
    9.
    发明授权
    Methods and apparatus to identify the accessibility of base stations in communication systems 有权
    识别通信系统中基站可访问性的方法和装置

    公开(公告)号:US09215036B2

    公开(公告)日:2015-12-15

    申请号:US12771872

    申请日:2010-04-30

    摘要: A system and method for identifying the accessibility of a base station in a communication system. The system includes at least one Closed Subscriber Group (CSG)-Open (hybrid) base station. The base station can apply a base station identifier, such as a CSG identifier, as a cyclic redundancy check (CRC) mask to a first broadcast channel communication and can include the base station identifier in the payload of, or as a CRC mask applied to, a second broadcast channel communication. A mobile station can determine from the base station identifier in the first broadcast communication if the mobile station is a member authorized closed access to the base station. The mobile station can determine from the base station identifier in second first broadcast communication if the mobile station is a non-member authorized open access to the base station.

    摘要翻译: 一种用于识别通信系统中基站的可访问性的系统和方法。 该系统包括至少一个封闭用户组(CSG) - 开(混合)基站。 基站可以将诸如CSG标识符的基站标识符作为循环冗余校验(CRC)掩码应用于第一广播信道通信,并且可以将基站标识符包括在应用于 ,第二广播频道通信。 移动台可以从第一广播通信中的基站标识符确定移动台是否是被授权的对基站的封闭访问。 如果移动台是对基站的非会员授权的开放接入,则移动台可以从第二第一广播通信中的基站标识符确定。

    Performing authorization control in a cloud storage system
    10.
    发明授权
    Performing authorization control in a cloud storage system 有权
    在云存储系统中执行授权控制

    公开(公告)号:US09158465B2

    公开(公告)日:2015-10-13

    申请号:US13096589

    申请日:2011-04-28

    摘要: A method, apparatus and computer program product for performing authorization control in a cloud storage system. The method comprises: receiving an access request to a file block, wherein the file block is embedded with tag data comprising at least file block authorization information; retrieving the file block; extracting the file block authorization information from the tag data; determining whether the access request matches the file block authorization information; and performing the access request if the access request matches the file block authorization information. Effective authorization control may be performed in a cloud storage system.

    摘要翻译: 一种用于在云存储系统中执行授权控制的方法,装置和计算机程序产品。 该方法包括:接收对文件块的访问请求,其中所述文件块嵌入至少包括文件块授权信息的标签数据; 检索文件块; 从标签数据中提取文件块授权信息; 确定所述访问请求是否匹配所述文件块授权信息; 以及如果访问请求与文件块授权信息匹配,则执行访问请求。 可以在云存储系统中执行有效的授权控制。