公开(公告)号：US5847486A

公开(公告)日：1998-12-08

申请号：US746638

申请日：1996-11-13

申请人： Michio Kadota ,  Toshimaro Yoneda ,  Naoki Mizoguchi

发明人： Michio Kadota ,  Toshimaro Yoneda ,  Naoki Mizoguchi

IPC分类号： H03H9/145 ,  H03H9/02 ,  H03H9/25 ,  H03H9/64 ,  H01L41/08

CPC分类号： H03H9/02559

摘要： An inexpensive Love-wave device having a wide frequency difference between its resonant and antiresonant frequencies includes a Y-cut substrate made from LiNbO.sub.3 for X propagation. An interdigital transducer including a thin film of Ta or W is located on the substrate for exciting a Love wave.

摘要翻译： 在谐振频率和反谐振频率之间具有宽频率差的便宜的爱波器件包括由用于X传播的LiNbO 3制成的Y切割基片。 包括Ta或W的薄膜的叉指换能器位于衬底上用于激发爱波。

公开(公告)号：US06369667B1

公开(公告)日：2002-04-09

申请号：US09561757

申请日：2000-04-26

申请人： Michio Kadota ,  Toshimaro Yoneda ,  Koji Fujimoto

发明人： Michio Kadota ,  Toshimaro Yoneda ,  Koji Fujimoto

IPC分类号： H03H964

CPC分类号： H03H9/02551 ,  H03H3/08 ,  H03H9/14538

摘要： A surface acoustic wave device includes a quartz substrate having Euler angles (0°, &thgr;, 90°±5°) in which &thgr; is in a range of 119°≦&thgr;≦140°, and an IDT for exciting an SH wave is formed on the quartz substrate by use of an electrode material containing as a major component at least one of Ag, Mo, Cu, Ni, Cr, and Zn and having a density of at least about 7 g/cm3. The film thickness of the IDT is such that the attenuation constant is approximately zero.

摘要翻译： 表面声波装置包括具有欧拉角（0，θ，90 5）的石英基板，其中θ在119 <θ= 140的范围内，并且在石英基板上形成用于激发SH波的IDT 通过使用包含Ag，Mo，Cu，Ni，Cr和Zn中的至少一种作为主要成分并具有至少约7g / cm 3的密度的电极材料。 IDT的膜厚度使得衰减常数近似为零

公开(公告)号：US06625855B1

公开(公告)日：2003-09-30

申请号：US09678928

申请日：2000-10-04

申请人： Eiichi Takata ,  Yasuji Yamamoto ,  Toshimaro Yoneda ,  Michio Kadota

发明人： Eiichi Takata ,  Yasuji Yamamoto ,  Toshimaro Yoneda ,  Michio Kadota

IPC分类号： H04R1700

CPC分类号： H03H3/08 ,  Y10T29/42 ,  Y10T29/49005

摘要： A method for producing a surface acoustic wave device, includes the steps of preparing a piezoelectric substrate, forming a thin film electrode on the piezoelectric substrate, etching the thin film electrode for forming an IDT, trimming at least one of the piezoelectric substrate and the IDT to adjust an operation frequency of the surface acoustic wave device, and rapidly altering the surface of the IDT for stabilizing the surface of the IDT.

摘要翻译： 一种表面声波装置的制造方法，其特征在于，包括以下步骤：在压电基板上形成薄膜电极，蚀刻形成IDT的薄膜电极，修整压电基板和IDT中的至少一个 调整声表面波器件的工作频率，并快速地改变IDT的表面以稳定IDT的表面。

公开(公告)号：US06617752B2

公开(公告)日：2003-09-09

申请号：US09964831

申请日：2001-09-27

申请人： Takeshi Nakao ,  Koji Fujimoto ,  Michio Kadota ,  Toshimaro Yoneda

发明人： Takeshi Nakao ,  Koji Fujimoto ,  Michio Kadota ,  Toshimaro Yoneda

IPC分类号： H03H925

CPC分类号： H03H9/6483 ,  H03H3/08 ,  H03H9/25 ,  H03H9/6436 ,  H03H9/6459 ,  Y10T29/42 ,  Y10T29/49121 ,  Y10T29/49126 ,  Y10T29/49128

摘要： In a surface acoustic wave device using a Shear Horizontal type surface acoustic wave, at least one interdigital transducer (IDT) is made of a material having a larger mass-load effect than that of aluminum. The metallization ratio of the IDT and the normalization film thickness h/&lgr; of the IDT are controlled such that ripple caused by a transversal mode wave is about 0.5 dB or less, where “h” indicates the film thickness of the electrodes and “&lgr;” indicates the wavelength of a surface acoustic wave.

公开(公告)号：US06218763B1

公开(公告)日：2001-04-17

申请号：US09378655

申请日：1999-08-20

申请人： Koji Fujimoto ,  Michio Kadota ,  Toshimaro Yoneda

发明人： Koji Fujimoto ,  Michio Kadota ,  Toshimaro Yoneda

IPC分类号： H03H925

CPC分类号： H03H9/02559 ,  H03H9/64

摘要： A surface acoustic wave resonator includes a piezoelectric substrate and an interdigital transducer disposed thereon. The surface acoustic wave resonator operates using a shear horizontal wave, and the interdigital transducer includes an electrode film made of a metal containing W or Ta as its main component and a thin film made of Al.

摘要翻译： 声表面波谐振器包括压电基片和设置在其上的叉指换能器。 表面声波谐振器使用剪切水平波进行操作，并且叉指式换能器包括由以W或Ta为主要成分的金属制成的电极膜和由Al制成的薄膜。

公开(公告)号：US06564439B1

公开(公告)日：2003-05-20

申请号：US09546862

申请日：2000-04-10

申请人： Eiichi Takata ,  Yasuji Yamamoto ,  Toshimaro Yoneda ,  Michio Kadota

发明人： Eiichi Takata ,  Yasuji Yamamoto ,  Toshimaro Yoneda ,  Michio Kadota

IPC分类号： H04R1700

CPC分类号： H03H3/10 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/4908 ,  Y10T29/49155 ,  Y10T29/49789 ,  Y10T29/49798

摘要： A method of manufacturing a surface acoustic wave element includes the steps of providing a piezoelectric body having an interdigital transducer, where the interdigital transducer is made of a metal having a higher density than the piezoelectric body, and performing ion bombardment of the interdigital transducer and the piezoelectric body simultaneously so as to reduce the thickness of the interdigital transducer and the piezoelectric body.

摘要翻译： 一种表面声波元件的制造方法，其特征在于，具备提供具有叉指式换能器的压电体，其中，叉指式换能器由具有比压电体高的密度的金属构成，并进行叉指式换能器的离子轰击， 压电体同时地减小叉指式换能器和压电体的厚度。

公开(公告)号：US06369491B1

公开(公告)日：2002-04-09

申请号：US09654114

申请日：2000-08-31

申请人： Masatoshi Nakagawa ,  Makoto Tose ,  Yoshihiro Koshido ,  Michio Kadota ,  Toshimaro Yoneda ,  Takeshi Nakao

发明人： Masatoshi Nakagawa ,  Makoto Tose ,  Yoshihiro Koshido ,  Michio Kadota ,  Toshimaro Yoneda ,  Takeshi Nakao

IPC分类号： H03H915

CPC分类号： H03H9/14541 ,  H03H9/02669 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908 ,  Y10T29/49128

摘要： A surface acoustic wave device includes a piezoelectric plate and at least one interdigital electrode provided on the piezoelectric plate. The interdigital electrode includes a first metallic thin film and a second metallic thin film laminated on the first metallic thin film and containing tantalum as a principal component, and at least a portion of the tantalum of the second metallic thin film is &agr;-tantalum.

公开(公告)号：US06185801B1

公开(公告)日：2001-02-13

申请号：US09192774

申请日：1998-11-16

申请人： Michio Kadota ,  Toshimaro Yoneda ,  Koji Fujimoto

发明人： Michio Kadota ,  Toshimaro Yoneda ,  Koji Fujimoto

IPC分类号： H01L4100

CPC分类号： H03H9/25 ,  H03H3/10 ,  Y10T29/42

摘要： A method of manufacturing a surface acoustic wave device having a piezoelectric substrate and an interdigital transducer provided thereon, includes the steps of forming a coating layer made of inorganic material or organic material on the piezoelectric substrate so as to cover the interdigital transducer and etching the coating layer via a laser light to adjust an operation frequency of the surface acoustic wave device.

摘要翻译： 一种制造具有压电基板和设置在其上的叉指式换能器的声表面波装置的方法包括以下步骤：在压电基板上形成由无机材料或有机材料制成的涂层，以覆盖指数间换能器并蚀刻涂层 层，经由激光调节声表面波装置的工作频率。

公开(公告)号：US20050184622A1

公开(公告)日：2005-08-25

申请号：US11097086

申请日：2005-03-31

申请人： Takeshi Nakao ,  Toshimaro Yoneda ,  Michio Kadota

发明人： Takeshi Nakao ,  Toshimaro Yoneda ,  Michio Kadota

IPC分类号： H03H9/25 ,  H03H3/10 ,  H03H9/05 ,  H03H9/15 ,  H03H9/64 ,  H04B1/40 ,  H03H9/145

CPC分类号： H03H9/6459 ,  H03H9/1071

摘要： A surface acoustic wave device includes a surface acoustic wave element housed in a main body of a package. The surface acoustic wave element is electrically connected to electrode lands of the package via bonding wires, and the bonding wires are arranged so as not to pass over both of IDTs and reflectors of the surface acoustic wave device.

摘要翻译： 表面声波装置包括容纳在封装主体中的表面声波元件。 声表面波元件通过接合线电连接到封装的电极焊盘，并且接合线布置成不通过声表面波器件的IDT和反射器两者。

公开(公告)号：US06789297B2

公开(公告)日：2004-09-14

申请号：US10054907

申请日：2002-01-25

申请人： Eiichi Takata ,  Yasuji Yamamoto ,  Toshimaro Yoneda ,  Michio Kadota

发明人： Eiichi Takata ,  Yasuji Yamamoto ,  Toshimaro Yoneda ,  Michio Kadota

IPC分类号： H04R1700

CPC分类号： H03H3/10 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/4908 ,  Y10T29/49155 ,  Y10T29/49789 ,  Y10T29/49798

摘要： A method of manufacturing a surface acoustic wave element includes the steps of providing a piezoelectric body having an interdigital transducer, where the interdigital transducer is made of a metal having a higher density than the piezoelectric body, and performing ion bombardment of the interdigital transducer and the piezoelectric body simultaneously so as to reduce the thickness of the interdigital transducer and the piezoelectric body.