Ink jet head
    6.
    发明授权
    Ink jet head 失效
    喷墨头

    公开(公告)号:US5734395A

    公开(公告)日:1998-03-31

    申请号:US481528

    申请日:1995-09-11

    IPC分类号: B41J2/045 B41J2/16 B41J2/05

    摘要: An ink jet head includes a common electrode formed on a semiconductor substrate. A charge is applied to the common electrode and an electrode disposed on another substrate in opposition to a diaphragm formed in the semiconductor substrate to electrostatically deform the diaphragm and eject ink. The common electrode comprises a single layer or multiple layer metallic coating forming ohmic contact on the semiconductor substrate. In addition, a group III or group V element is doped to a high concentration at the area on the semiconductor substrate where the common electrode is formed. The diaphragm can therefore vibrate at high speed. An ink jet head capable of high speed printing can be provided because supply and elimination of the charge to the diaphragm can be accomplished at high speed.

    摘要翻译: PCT No.PCT / JP93 / 01849 Sec。 371 1995年9月11日第 102(e)1995年9月11日PCT PCT 1993年12月21日PCT公布。 公开号WO94 / 15791 日期1994年7月21日喷墨头包括形成在半导体衬底上的公共电极。 相对于在半导体衬底中形成的隔膜相对于公共电极和设置在另一衬底上的电极,电荷使隔膜静电变形并喷射墨水。 公共电极包括在半导体衬底上形成欧姆接触的单层或多层金属涂层。 此外,在形成公共电极的半导体衬底上的区域上,将III族或V族元素掺杂到高浓度。 因此隔膜可以高速振动。 可以提供能够高速打印的喷墨头,因为可以高速地实现对隔膜的电荷的供应和消除。

    Micropump with valve structure
    7.
    发明授权
    Micropump with valve structure 失效
    微型阀门结构

    公开(公告)号:US5259737A

    公开(公告)日:1993-11-09

    申请号:US724697

    申请日:1991-07-02

    摘要: A micropump for pumping liquid from an entry channel to an exit channel is disclosed. The micropump is formed in a semiconductor substrate sealed by two glass substrates. The micropump includes first and second chambers and flow channel means coupled between the two chambers. The micropump also includes a valve coupled between the entry channel and the first chamber. The valve includes a flexible valve membrane positioned closer to a second side of the semiconductor substrate than to its first side for causing the valve to be or not to be in contact with the second side of the semiconductor substrate for closing or opening the valve on the glass substrate. Additionally, the micropump includes a diaphragm forming part of a flexible wall of the second chamber and positioned closer to the second side of the semiconductor substrate than to its first side. The diaphragm is responsive to external pressure for causing liquid to be pumped from the entry channel to the exit channel. Thus, the height of the valve is reduced, preventing deformation due to strength such as its own weight and may impact due to a dropping. As a result, the valve sealing is improve on the glass substrate. Therefore, the micropump can accurately discharge a small quantity of liquid.

    摘要翻译: 公开了一种用于将液体从进入通道泵送到出口通道的微型泵。 微型泵形成在由两块玻璃基板密封的半导体基板中。 微型泵包括连接在两个室之间的第一和第二室和流动通道装置。 微型泵还包括连接在入口通道和第一室之间的阀。 阀包括位于比半导体衬底的第二侧更靠近第一侧的柔性阀膜,用于使阀与半导体衬底的第二侧接触或不与第二侧接触,以关闭或打开阀 玻璃基板。 此外,微型泵包括形成第二室的柔性壁的一部分并且比其第一侧更靠近半导体衬底的第二侧的膜片。 隔膜响应于外部压力,以使液体从入口通道泵送到出口通道。 因此,阀的高度减小,防止由于其自身重量等强度而引起的变形,并且可能由于跌落而撞击。 结果,玻璃基板上的阀密封得到改善。 因此,微型泵可以精确地排出少量的液体。

    Light modulator and method of manufacturing the same
    8.
    发明授权
    Light modulator and method of manufacturing the same 失效
    光调制器及其制造方法

    公开(公告)号:US06891654B2

    公开(公告)日:2005-05-10

    申请号:US10171620

    申请日:2002-06-17

    CPC分类号: G02B26/0841

    摘要: A method of manufacturing a light modulator in which micromirrors are tilted by an electrostatic force generated by an electrical potential difference between drive electrodes and the micromirrors. The method includes integrally forming support sections disposed at fulcrum points for tilting the micromirrors and axis portions forming axes for tilting the micromirrors.

    摘要翻译: 一种制造光调制器的方法,其中微镜被由驱动电极和微反射镜之间的电位差产生的静电力倾斜。 该方法包括一体地形成设置在支点处的支撑部分,用于倾斜微反射镜和形成用于倾斜微反射镜的轴线的轴部分。

    Optical tunable filter and method for manufacturing the optical tunable filter
    9.
    发明申请
    Optical tunable filter and method for manufacturing the optical tunable filter 有权
    光可调滤波器及其制造方法

    公开(公告)号:US20050094297A1

    公开(公告)日:2005-05-05

    申请号:US10946621

    申请日:2004-09-21

    CPC分类号: H01P1/20381

    摘要: An optical tunable filter includes a first substrate 3 having a light transmitting property which includes a movable portion 31, a second substrate 20 having a light transmitting property which is provided so as to be opposed to the first substrate, a first gap 21 and a second gap 22 which are respectively provided between the movable portion 31 and the second substrate 20, an interference portion which causes interference of incident light between the movable portion 31 and the second substrate 20 through the second gap 22, and a driving portion which changes a distance of the second gap 22 by displacing the movable portion 31 with respect to the second substrate 20 using the first gap 21. This makes it possible to provide an optical tunable filter having a simpler structure and a smaller size, which can be manufactured through a simplified manufacturing process without using a release hole and can achieve stable driving of a movable portion, and a method for manufacturing such an optical tunable filter.

    摘要翻译: 光可调谐滤光器包括具有透光性的第一基板3,其包括可移动部分31,具有与第一基板相对的透光性的第二基板20,第一间隙21和第二基板 分别设置在可动部31和第二基板20之间的间隙22,通过第二间隙22引起可动部31和第二基板20之间的入射光的干涉的干涉部,以及改变距离 通过使用第一间隙21使可动部31相对于第二基板20移位。 这使得可以提供一种具有更简单的结构和更小尺寸的光学可调滤波器,其可以通过简化的制造工艺而不使用释放孔来制造并且可以实现可移动部分的稳定驱动,以及制造这种 光学可调滤波器。

    Optical tunable filter and method of manufacturing the same
    10.
    发明授权
    Optical tunable filter and method of manufacturing the same 有权
    光可调滤波器及其制造方法

    公开(公告)号:US07304800B2

    公开(公告)日:2007-12-04

    申请号:US11002441

    申请日:2004-12-02

    IPC分类号: H01P1/20

    CPC分类号: G02B26/001 G01J3/26

    摘要: An optical tunable filter is provided including a first substrate having light transmission properties and having a movable part and a supporting member that movably supports the movable part and having a smaller thickness than the movable part, a second substrate having light transmission properties and opposed to the first substrate, a first gap and a second gap provided between the movable part and the second substrate, an interference part causing interference between the movable part and the second substrate through the second gap and a drive member changing an interval of the second gap by moving the movable part to the second substrate by making use of the first gap.

    摘要翻译: 提供一种光可调谐滤光器,包括具有透光性的第一基板和具有可移动部分和可移动地支撑可移动部分并且具有比可移动部分更小的厚度的支撑部件,具有透光性并且与 第一基板,设置在可动部分和第二基板之间的第一间隙和第二间隙,干涉部分,通过第二间隙引起可动部分和第二基板之间的干涉;以及驱动部件,通过移动来改变第二间隙的间隔 通过利用第一间隙将可动部分移动到第二基板。