公开(公告)号：US20160277003A1

公开(公告)日：2016-09-22

申请号：US15171181

申请日：2016-06-02

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Taku KIKUCHI ,  Shin SAIJO ,  Hisashi YAMAZAKI ,  Masahiro FUKUSHIMA ,  Yuji MIWA

IPC: H03H9/05 ,  H01L41/047 ,  H03H9/145

CPC classification number: H03H9/058 ,  H01L41/0475 ,  H01L2224/24 ,  H03H3/08 ,  H03H9/1071 ,  H03H9/14541

Abstract: An elastic wave device includes a multilayer film provided on a support substrate and including a piezoelectric thin film and a layer other than the piezoelectric thin film, an interdigital transducer electrode provided on one surface of the piezoelectric thin film, and an external connection terminal electrically connected to the interdigital transducer electrode. In a plan view, the multilayer film is partially absent or omitted in a region outside a region where the interdigital transducer electrode is provided, and the elastic wave device further includes a first insulating layer provided on the support substrate in at least a portion of a region where the multilayer film is absent or omitted.

Abstract translation: 弹性波装置包括设置在支撑基板上的多层膜，包括压电薄膜和压电薄膜以外的层，设置在压电薄膜的一个表面上的叉指式换能器电极和电连接的外部连接端子 到指数式换能器电极。 在平面图中，在设置叉指式换能器电极的区域外的区域部分地不存在或省略多层膜，弹性波装置还包括设置在支撑基板上的至少一部分中的第一绝缘层 多层膜不存在或省略的区域。

公开(公告)号：US20160294354A1

公开(公告)日：2016-10-06

申请号：US15180234

申请日：2016-06-13

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shin SAIJO ,  Hisashi YAMAZAKI ,  Koji YAMAMOTO ,  Seiji KAI ,  Munehisa WATANABE

IPC: H03H9/145 ,  H03H3/08

CPC classification number: H03H9/14544 ,  H03H3/08 ,  H03H9/02574 ,  H03H9/02992 ,  H03H9/0514 ,  H03H9/0542 ,  H03H9/0552 ,  H03H9/1014 ,  H03H9/1071 ,  H03H9/132 ,  H03H9/145

Abstract: In an elastic wave device, a multilayer film including a piezoelectric thin film is provided on a support substrate, an interdigital transducer electrode is provided on one surface of the piezoelectric thin film, a wiring electrode is connected to the interdigital transducer electrode, the wiring electrode includes a lead electrode portion and a pad electrode portion, an external connection terminal is located above the pad electrode portion, the external connection terminal is electrically connected to the pad electrode portion, and the external connection terminal is bonded onto the pad electrode portion on the support substrate so that at least the piezoelectric thin film of the multilayer film is not present below the pad electrode portion.

Abstract translation: 在弹性波装置中，在支撑基板上设置包括压电薄膜的多层膜，在压电薄膜的一个表面上设置叉指式换能器电极，将布线电极连接到叉指式换能器电极，布线电极 包括引线电极部分和焊盘电极部分，外部连接端子位于焊盘电极部分的上方，外部连接端子电连接到焊盘电极部分，并且外部连接端子接合到焊盘电极部分上 支撑基板，使得至少多层膜的压电薄膜不存在于焊盘电极部分的下方。

公开(公告)号：US20130232747A1

公开(公告)日：2013-09-12

申请号：US13873301

申请日：2013-04-30

Applicant: MURATA MANUFACTURING CO., LTD.

Inventor： Naohiro NODAKE ,  Hideaki TAKAHASHI ,  Shin SAIJO

IPC: H01L41/29

CPC classification number: H01L41/29 ,  H01L41/22 ,  H01L41/27 ,  H03H3/04 ,  H03H3/10 ,  H03H9/0222 ,  H03H2003/0414 ,  H03H2003/045 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49155

Abstract: In the boundary acoustic wave device, an IDT electrode, a first dielectric layer, and a second dielectric layer are provided on a piezoelectric substrate. The first dielectric layer is made of a deposited film. A thickness of the IDT electrode is about 10% or more of λ. A difference between a height of the first dielectric layer, measured from an upper surface of the piezoelectric substrate, above a center of an electrode finger of the IDT electrode and a height of the first dielectric layer, measured from the upper surface of the piezoelectric substrate, above a center of a gap between adjacent electrode fingers, i.e., a magnitude of unevenness in an upper surface of the first dielectric layer, is about 5% or less of λ.

Abstract translation: 在弹性边界波装置中，在压电基板上设置IDT电极，第一电介质层和第二电介质层。 第一电介质层由沉积膜制成。 IDT电极的厚度为λ的约10％以上。 从压电基板的上表面测量的第一介电层的高度与IDT电极的电极指的中心之间的距离和第一介电层的高度之间的差异是从压电基板的上表面 在相邻电极指之间的间隙的中心上方，即第一介电层的上表面中的不均匀度的大小为λ的约5％或更小。

公开(公告)号：US20130207514A1

公开(公告)日：2013-08-15

申请号：US13798206

申请日：2013-03-13

Applicant: MURATA MANUFACTURING CO., LTD.

Inventor： Kenji SAKAGUCHI ,  Shin SAIJO ,  Hisashi YAMAZAKI

IPC: H01L41/047

CPC classification number: H01L41/047 ,  H01L41/0477 ,  H01L41/0478 ,  H03H9/0222 ,  H03H9/02818 ,  H03H9/14541

Abstract: An elastic wave device includes a piezoelectric substrate and an interdigital transducer electrode. The piezoelectric substrate includes a principal surface with a groove tapered in lateral cross section. The interdigital transducer electrode is arranged on the principal surface such that at least one portion thereof is located in the groove. The interdigital transducer electrode is a laminate including a first conductive layer, a second conductive layer, and a diffusion-preventing layer located between the first conductive layer and the second conductive layer and made of an oxide or nitride of Ti or Cr.

Abstract translation: 弹性波装置包括压电基片和叉指式换能器电极。 压电基板包括具有在横截面中渐缩的凹槽的主表面。 叉指式换能器电极布置在主表面上，使得其至少一部分位于凹槽中。 叉指式换能器电极是包括位于第一导电层和第二导电层之间的第一导电层，第二导电层和防扩散层的层压体，由Ti或Cr的氧化物或氮化物构成。