公开(公告)号：US06563162B2

公开(公告)日：2003-05-13

申请号：US10102312

申请日：2002-03-19

申请人： Myoung-Hee Han ,  Young-Hoon Park ,  Ju-Wan Kim ,  Ju-Bum Lee

发明人： Myoung-Hee Han ,  Young-Hoon Park ,  Ju-Wan Kim ,  Ju-Bum Lee

IPC分类号： H01L1304

CPC分类号： H01L27/10855 ,  H01L21/76897 ,  H01L23/5222 ,  H01L27/10885 ,  H01L28/90 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor memory device for reducing parasitic bit line capacitance and a method of fabricating the same are provided. The semiconductor memory device includes a conductive pad formed on a semiconductor substrate and a first interlayer insulating layer having a first contact hole that exposes the conductive pad. The first interlayer insulating layer is formed on the conductive pad and the semiconductor substrate. Bit line stacks are formed on the first interlayer insulating layer. Bit line spacers are formed from a combination of materials having different dielectric constants on the sidewalls of the bit line stack to reduce the parasitic bit line capacitance. Preferably, the bit line spacers are stack layers including silicon nitride, silicon oxide, and silicon nitride. A second interlayer insulating layer having a second contact hole is formed on the bit line stack. A conductive plug fills the first and second contact holes. A storage electrode of a capacitor is formed on the conductive plug to be connected to the conductive pad.

公开(公告)号：US06982223B2

公开(公告)日：2006-01-03

申请号：US10413944

申请日：2003-04-15

申请人： Ju-Wan Kim ,  Shin-Hye Kim ,  Ju-Bum Lee ,  Hyong-Soo Kim

发明人： Ju-Wan Kim ,  Shin-Hye Kim ,  Ju-Bum Lee ,  Hyong-Soo Kim

IPC分类号： H01L21/4763 ,  H01L21/31

CPC分类号： H01L21/02129 ,  H01L21/02271 ,  H01L21/02315 ,  H01L21/02337 ,  H01L21/31625 ,  H01L21/76826 ,  H01L21/76829 ,  H01L21/76837

摘要： A method of manufacturing a semiconductor device by which a generation of a void is prevented after depositing an interlayer dielectric material. First, a plurality of conductive patterns are formed on a substrate and then, a capping insulation layer is formed on the conductive patterns. The capping insulation layer is treated with plasma, and an interlayer dielectric material is deposited on the plasma treated capping insulation layer. The dependency of the interlayer dielectric on the type of material and form of an underlying layer is reduced to improve a gap-filling characteristic, especially for a gap having a high aspect ratio. An improved gap-filling characteristic is accomplished and the formation of all or substantially all of the voids from forming in a gap is prevented even though an interlayer dielectric is deposited under a conventional deposition conditions.

摘要翻译： 一种制造半导体器件的方法，其中在沉积层间电介质材料之后防止产生空隙。 首先，在基板上形成多个导电图案，然后在导电图案上形成封盖绝缘层。 用等离子体处理封盖绝缘层，并且在等离子体处理的封盖绝缘层上沉积层间电介质材料。 层间电介质对材料类型和下层的形式的依赖性被降低以改善间隙填充特性，特别是对于具有高纵横比的间隙。 实现了改进的间隙填充特性，并且即使在常规沉积条件下沉积层间电介质，也可防止在间隙中形成全部或基本上所有空隙的形成。

公开(公告)号：US20110153655A1

公开(公告)日：2011-06-23

申请号：US12973203

申请日：2010-12-20

申请人： Min-Soo KIM ,  Moon-Soo Lee ,  In-Hak Joo ,  In-Sung Jang ,  Chung-Ho Lee ,  Ju-Wan Kim ,  Kyung-Ok Kim ,  Jong-Hyun Park

发明人： Min-Soo KIM ,  Moon-Soo Lee ,  In-Hak Joo ,  In-Sung Jang ,  Chung-Ho Lee ,  Ju-Wan Kim ,  Kyung-Ok Kim ,  Jong-Hyun Park

IPC分类号： G06F17/30

CPC分类号： H04L67/12 ,  H04W40/24 ,  H04W84/18

摘要： Disclosed herein are a server-sensor network cooperative spatial query processing method and a server using the method. The server-sensor network cooperative spatial query processing method includes the server detecting supplementary information for selecting sensor nodes to be excluded from among a plurality of sensor nodes by performing a preliminary spatial query, before starting a spatial query with the plurality of sensor nodes, and the server requesting the spatial query to the sensor nodes, selected based on the supplementary information, when starting the spatial query with the plurality of sensor nodes.

摘要翻译： 这里公开了服务器 - 传感器网络协作空间查询处理方法和使用该方法的服务器。 服务器 - 传感器网络协作空间查询处理方法包括：服务器检测补充信息，用于在开始使用多个传感器节点进行空间查询之前，通过执行初步空间查询，从多个传感器节点中选择要排除的传感器节点; 当使用所述多个传感器节点开始所述空间查询时，所述服务器请求对所述传感器节点进行空间查询，所述传感器节点基于所述补充信息来选择。

公开(公告)号：US20100014419A1

公开(公告)日：2010-01-21

申请号：US12517749

申请日：2007-08-06

申请人： Myung-jin Lee ,  Jongik Kim ,  Daesub Yoon ,  Ju-Wan Kim

发明人： Myung-jin Lee ,  Jongik Kim ,  Daesub Yoon ,  Ju-Wan Kim

IPC分类号： G06F11/00

CPC分类号： H04W80/06 ,  H04W68/00 ,  H04W76/10

摘要： Provided are an apparatus and method for improving transmission control protocol (TCP) performance using path recovery notification over a wireless network. The apparatus includes: a path recovery manager which detects a mobile host recovered from a temporary disconnection state and then outputs a detection signal to notify the detection result; a path recovery notification manager which receives the detection signal and generates an ACK (acknowledgement) packet to inform a transmitting end that the mobile host is recovered; and a first packet transceiver which transmits/receives the generated ACK packet and a data packet. Accordingly, a temporary disconnection state of a wireless network is explicitly informed to a transmitting end so as to transmit only lost packets without performing unnecessary congestion control, thereby improving TCP performance.

摘要翻译： 提供了一种用于通过无线网络使用路径恢复通知来改进传输控制协议（TCP）性能的装置和方法。 该装置包括：路径恢复管理器，其检测从临时断开状态恢复的移动主机，然后输出检测信号以通知检测结果; 路径恢复通知管理器，其接收检测信号并生成ACK（确认）包以通知发送端移动主机被恢复; 以及发送/接收所生成的ACK分组和数据分组的第一分组收发机。 因此，无线网络的临时断开状态被明确地通知给发送端，以便仅发送丢失的分组而不执行不必要的拥塞控制，从而提高TCP性能。

公开(公告)号：US20080182383A1

公开(公告)日：2008-07-31

申请号：US12007640

申请日：2008-01-14

申请人： Seung-Heon Lee ,  Kyu-Tae Na ,  Ju-Wan Kim ,  Taek-Jung Kim

发明人： Seung-Heon Lee ,  Kyu-Tae Na ,  Ju-Wan Kim ,  Taek-Jung Kim

IPC分类号： H01L21/3065 ,  H01L21/762

CPC分类号： H01L21/31612 ,  H01L21/02164 ,  H01L21/02271 ,  H01L21/02337

摘要： A method of removing a portion of an oxide layer includes forming first byproducts by reacting a reaction gas with the oxide layer, the reaction gas including fluorine and nitrogen, reacting the reaction gas with the first byproducts to form second byproducts, and removing the second byproducts.

摘要翻译： 除去一部分氧化物层的方法包括通过使反应气体与氧化物层反应形成第一副产物，反应气体包括氟和氮，使反应气体与第一副产物反应形成第二副产物，并除去第二副产物 。

公开(公告)号：US08090529B2

公开(公告)日：2012-01-03

申请号：US12096761

申请日：2005-12-30

申请人： Jung-Hee Jo ,  Kyoung-Wook Min ,  Ju-Wan Kim ,  Jong-Hyun Park

发明人： Jung-Hee Jo ,  Kyoung-Wook Min ,  Ju-Wan Kim ,  Jong-Hyun Park

IPC分类号： G01C21/00

CPC分类号： G01S19/09 ,  G01S5/0294

摘要： In existing moving object tracking, there is a great communication load between a terminal and a platform, because the terminal should report its location to the platform every second or every minute and the platform should frequently process the location form the terminal. It is possible to reduce the great communication load on the server, by calculating an error between the current GPS location and the estimated location at a specific time on the basis of the estimated arrival time of the moving object. It allows that the terminal report its location to the server only when the error between current GPS location and the estimated location is greater than a predetermined threshold value.

摘要翻译： 在现有的移动物体跟踪中，终端和平台之间存在着很大的通信负载，因为终端应该每隔一分钟或每分钟将其位置报告给平台，并且平台应该频繁地处理终端的位置。 可以通过基于运动物体的预计到达时间计算当前GPS位置与特定时间的估计位置之间的误差来减少服务器上的良好的通信负荷。 只有当当前GPS位置与估计位置之间的误差大于预定阈值时，才允许该终端向服务器报告其位置。

公开(公告)号：US07745305B2

公开(公告)日：2010-06-29

申请号：US12007640

申请日：2008-01-14

申请人： Seung-Heon Lee ,  Kyu-Tae Na ,  Ju-Wan Kim ,  Taek-Jung Kim

发明人： Seung-Heon Lee ,  Kyu-Tae Na ,  Ju-Wan Kim ,  Taek-Jung Kim

IPC分类号： H01L21/76

CPC分类号： H01L21/31612 ,  H01L21/02164 ,  H01L21/02271 ,  H01L21/02337

摘要： A method of removing a portion of an oxide layer includes forming first byproducts by reacting a reaction gas with the oxide layer, the reaction gas including fluorine and nitrogen, reacting the reaction gas with the first byproducts to form second byproducts, and removing the second byproducts.

摘要翻译： 除去一部分氧化物层的方法包括通过使反应气体与氧化物层反应形成第一副产物，反应气体包括氟和氮，使反应气体与第一副产物反应形成第二副产物，并除去第二副产物 。

公开(公告)号：US08237240B2

公开(公告)日：2012-08-07

申请号：US13204829

申请日：2011-08-08

申请人： Ju-Wan Kim ,  Kyu-Tae Na ,  Min Kim ,  Seung-Bae Park ,  Il-Woo Kim ,  Dae-Young Kwak

发明人： Ju-Wan Kim ,  Kyu-Tae Na ,  Min Kim ,  Seung-Bae Park ,  Il-Woo Kim ,  Dae-Young Kwak

IPC分类号： H01L29/788 ,  H01L21/762

CPC分类号： H01L21/76229

摘要： An isolation layer structure includes first to fourth oxide layer patterns. The first and third oxide layer patterns are sequentially formed in a first trench defined by a first recessed top surface of a substrate and sidewalls of gate structures on the substrate in a first region. The first trench has a first width, and the first and third oxide layer patterns have no void therein. The second and fourth oxide layer patterns are sequentially formed in a second trench defined by a second recessed top surface of the substrate and sidewalls of gate structures on the substrate in a second region. The second trench has a second width larger than the first width, and the fourth oxide layer pattern has a void therein.

摘要翻译： 隔离层结构包括第一至第四氧化物层图案。 第一和第三氧化物层图案顺序地形成在第一沟槽中，第一沟槽由衬底的第一凹入顶表面和第一区域中衬底上的栅极结构的侧壁限定。 第一沟槽具有第一宽度，并且第一和第三氧化物层图案中没有空隙。 第二和第四氧化物层图案顺序地形成在第二沟槽中，第二沟槽由衬底的第二凹陷顶表面和第二区域中衬底上的栅结构的侧壁限定。 第二沟槽具有比第一宽度大的第二宽度，并且第四氧化物层图案在其中具有空隙。

公开(公告)号：US08085656B2

公开(公告)日：2011-12-27

申请号：US12517749

申请日：2007-08-06

申请人： Myung-Jin Lee ,  Jongik Kim ,  Daesub Yoon ,  Ju-Wan Kim

发明人： Myung-Jin Lee ,  Jongik Kim ,  Daesub Yoon ,  Ju-Wan Kim

IPC分类号： H04L12/26

CPC分类号： H04W80/06 ,  H04W68/00 ,  H04W76/10

摘要： Provided are an apparatus and method for improving transmission control protocol (TCP) performance using path recovery notification over a wireless network. The apparatus includes: a path recovery manager which detects a mobile host recovered from a temporary disconnection state and then outputs a detection signal to notify the detection result; a path recovery notification manager which receives the detection signal and generates an ACK (acknowledgement) packet to inform a transmitting end that the mobile host is recovered; and a first packet transceiver which transmits/receives the generated ACK packet and a data packet. Accordingly, a temporary disconnection state of a wireless network is explicitly informed to a transmitting end so as to transmit only lost packets without performing unnecessary congestion control, thereby improving TCP performance.

摘要翻译： 提供了一种用于通过无线网络使用路径恢复通知来改进传输控制协议（TCP）性能的装置和方法。 该装置包括：路径恢复管理器，其检测从临时断开状态恢复的移动主机，然后输出检测信号以通知检测结果; 路径恢复通知管理器，其接收检测信号并生成ACK（确认）包以通知发送端移动主机被恢复; 以及发送/接收所生成的ACK分组和数据分组的第一分组收发机。 因此，无线网络的临时断开状态被明确地通知给发送端，以便仅发送丢失的分组而不执行不必要的拥塞控制，从而提高TCP性能。

公开(公告)号：US06328043B1

公开(公告)日：2001-12-11

申请号：US09315340

申请日：1999-05-20

申请人： Young-Roe Kim ,  Hyun-Young Kim ,  Hyun-kuk Ko ,  Kyung-Burn Koo ,  Ju-Wan Kim ,  Hyong-Soo Kim ,  Dong-chan Park ,  Dong-Geun Na

发明人： Young-Roe Kim ,  Hyun-Young Kim ,  Hyun-kuk Ko ,  Kyung-Burn Koo ,  Ju-Wan Kim ,  Hyong-Soo Kim ,  Dong-chan Park ,  Dong-Geun Na

IPC分类号： B08B500

CPC分类号： C23C16/4408 ,  C23C16/42 ,  C23C16/4405 ,  Y10S438/905

摘要： A method and an apparatus for removing particulate contaminant are provided in order to ensure high purity during a tungsten suicide deposition process. The method for removing particulate contaminant in tungsten silicide deposition process using SiH4 as silicon source gas and NF3 as cleaning gas, includes purging a carrier gas line for an SiH4 silicon source gas to remove the contaminant in the chamber and carrier gas line when the carrier gas is supplied with the chamber, and the NF3 cleaning gas is supplied to the chamber to form plasma. After a plasma cleaning, the gas line flowing reaction gas responding to the SiH4 is purged to remove the contaminant in the chamber and the reaction gas line. As a result, any particulate contaminant is removed or remains at a minimum level that has no effect on the tungsten silicide deposition process.

摘要翻译： 提供了一种用于除去微粒污染物的方法和装置，以确保在硅化钨沉积工艺期间的高纯度。 使用SiH4作为硅源气体和NF 3作为清洁气体的去除硅化钨沉积工艺中的微粒污染物的方法包括：在载气中除去用于SiH 4硅源气体的载气管线以除去腔室和载气管线中的污染物 供给室，并且将NF 3清洁气体供应到室以形成等离子体。 在等离子体清洗之后，吹扫响应于SiH 4的气体管线流动的反应气体以除去腔室和反应气体管线中的污染物。 结果，任何颗粒污染物被去除或保持在对硅化钨沉积过程没有影响的最低水平。