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44 条记录 (耗时 0.027 秒)

    Temperature control method of epitaxial growth apparatus
    1.
    发明授权
    Temperature control method of epitaxial growth apparatus 有权
    外延生长装置的温度控制方法

    公开(公告)号：US07833348B2

    公开(公告)日：2010-11-16

    申请号：US11533889

    申请日：2006-09-21

    申请人： Naoyuki Wada ,  Hiroyuki Kishi

    发明人： Naoyuki Wada ,  Hiroyuki Kishi

    IPC分类号： C30B25/00 ,  C30B28/12 ,  G01K15/00 ,  C23C16/00

    CPC分类号： C30B25/10 ,  C30B25/16

    摘要： An object of the invention is to calibrate an upper pyrometer for indirectly measuring a substrate temperature at the time of epitaxial growth in a comparatively short time and with accuracy to thereby improve the quality of an epitaxial substrate.After calibrating an upper pyrometer by a thermocouple mounted to a temperature calibrating susceptor, a measured value of a lower pyrometer is adjusted to a calibrated value of the upper pyrometer. Then, a correlation line between substrate temperature indirectly measured by the upper pyrometer at the time of epitaxial growth onto a sample substrate and haze of a sample substrate measured immediately after epitaxial growth is set to indirectly measure a substrate temperature by the upper pyrometer at the time of epitaxial growth onto a mass-production substrate. Moreover, substrate temperature at the time of epitaxial growth onto the mass-production substrate is estimated by applying the haze of the mass-production substrate measured immediately after epitaxial growth to the correlation line and then a measured temperature of the upper pyrometer is adjusted to the estimated temperature.

    摘要翻译： 本发明的一个目的是校准一个上部高温计，用于在相当短的时间内，并且准确地间接测量外延生长时的衬底温度，从而提高外延衬底的质量。 通过安装在温度校准基座上的热电偶校准上高温计后，将较低温度计的测量值调整为上高温计的校准值。 然后，将在外延生长到样品基板上的上高温计间接测量的衬底温度与外延生长后立即测量的样品衬底的雾度之间的相关线设定为通过上部高温计间接测量衬底温度 的外延生长到批量生产基板上。 此外，通过将在外延生长后立即测量的大规模生产基板的雾度应用于相关线，然后将上部高温计的测量温度调节至相关系数，估计在批量生产基板上的外延生长时的基板温度 估计温度。

    Temperature Control Method of Epitaxial Growth Apparatus
    2.
    发明申请
    Temperature Control Method of Epitaxial Growth Apparatus 有权
    外延生长装置温度控制方法

    公开(公告)号：US20070062439A1

    公开(公告)日：2007-03-22

    申请号：US11533889

    申请日：2006-09-21

    申请人： Naoyuki Wada ,  Hiroyuki Kishi

    发明人： Naoyuki Wada ,  Hiroyuki Kishi

    IPC分类号： C30B23/00 ,  C30B25/00 ,  C30B28/12 ,  C30B28/14

    CPC分类号： C30B25/10 ,  C30B25/16

    摘要： An object of the invention is to calibrate an upper pyrometer for indirectly measuring a substrate temperature at the time of epitaxial growth in a comparatively short time and with accuracy to thereby improve the quality of an epitaxial substrate. After calibrating an upper pyrometer by a thermocouple mounted to a temperature calibrating susceptor, a measured value of a lower pyrometer is adjusted to a calibrated value of the upper pyrometer. Then, a correlation line between substrate temperature indirectly measured by the upper pyrometer at the time of epitaxial growth onto a sample substrate and haze of a sample substrate measured immediately after epitaxial growth is set to indirectly measure a substrate temperature by the upper pyrometer at the time of epitaxial growth onto a mass-production substrate. Moreover, substrate temperature at the time of epitaxial growth onto the mass-production substrate is estimated by applying the haze of the mass-production substrate measured immediately after epitaxial growth to the correlation line and then a measured temperature of the upper pyrometer is adjusted to the estimated temperature.

    摘要翻译： 本发明的一个目的是校准一个上部高温计，用于在相当短的时间内，并且准确地间接地测量外延生长时的衬底温度，从而提高外延衬底的质量。 通过安装在温度校准基座上的热电偶校准上高温计后，将较低温度计的测量值调整为上高温计的校准值。 然后，将在外延生长到样品基板上的由上部高温计间接测量的衬底温度与外延生长后立即测量的样品衬底的雾度之间的相关线设定为通过上部高温计间接测量衬底温度 的外延生长到批量生产基板上。 此外，通过将在外延生长后立即测量的大规模生产基板的雾度应用于相关线，然后将上部高温计的测量温度调节至相关系数，估计在批量生产基板上的外延生长时的基板温度 估计温度。

    Imprinting jig and imprinting apparatus
    7.
    发明授权
    Imprinting jig and imprinting apparatus 失效
    压印夹具和压印装置

    公开(公告)号：US07670131B2

    公开(公告)日：2010-03-02

    申请号：US12046791

    申请日：2008-03-12

    申请人： Hiroyuki Kishi ,  Hideaki Yamanaka

    发明人： Hiroyuki Kishi ,  Hideaki Yamanaka

    IPC分类号： B28B13/00

    CPC分类号： B29C59/022 ,  B29C37/0003 ,  B29C2059/023 ,  B29L2017/005 ,  G11B7/263

    摘要： The invention provides an imprinting jig for transferring a pattern onto a thermoplastic sheet. The imprinting jig is provided with: a first die having a surface with a pattern; a die holder for supporting the first die; an elastic member placed between the first die and the die holder; and a second die opposing to the first die. The thermoplastic sheet is placed on the surface with the pattern of the first die. The imprinting jig optionally includes an adhesion reducing means between the elastic member and the first die or between the elastic member and the die holder.

    摘要翻译： 本发明提供了一种用于将图案转印到热塑性片材上的压印夹具。 压印夹具具有：具有图案的表面的第一模具; 用于支撑第一模具的模座; 放置在第一模具和模座之间的弹性构件; 以及与第一管芯相对的第二管芯。 将热塑性片材放置在具有第一模具的图案的表面上。 压印夹具可选地包括在弹性构件和第一模具之间或弹性构件和模座之间的粘合减小装置。

    Merchandise contract brokerage system
    8.
    发明授权
    Merchandise contract brokerage system 失效
    商品合同经纪系统

    公开(公告)号：US07120594B2

    公开(公告)日：2006-10-10

    申请号：US09815058

    申请日：2001-03-23

    申请人： Hiroyuki Kishi

    发明人： Hiroyuki Kishi

    IPC分类号： G06Q30/00

    CPC分类号： G06Q30/06 ,  G06Q10/087 ,  G06Q30/0601

    摘要： The present invention provides a merchandise contract brokerage system to which a plurality of merchandise vendor information processing systems, a plurality of retailer information processing systems, and a plurality of consumer information processing systems are connected via a network. This merchandise contract brokerage system includes a merchandise contract sub system that performs a brokerage operation in transmission and reception of merchandise information and contract information between the plurality of merchandise vendor information processing systems and the plurality of retailer information processing systems, and a retailer sub system that performs a brokerage operation in transmission and reception of merchandise information and contract information between the plurality of retailer information processing systems and the plurality of consumer information processing systems.

    摘要翻译： 本发明提供一种商品合约经纪系统，多个商品供应商信息处理系统，多个零售商信息处理系统和多个消费者信息处理系统经由网络连接到该商品合约经纪系统。 该商品合同经纪系统包括商品合同子系统，其在多个商品供应商信息处理系统和多个零售商信息处理系统之间进行商品信息的发送和接收以及合同信息的经纪操作，以及零售商子系统， 在多个零售商信息处理系统和多个消费者信息处理系统之间进行商品信息的发送和接收以及合同信息的经纪操作。