公开(公告)号：US6020410A

公开(公告)日：2000-02-01

申请号：US955802

申请日：1997-10-22

申请人： Nigel P. Hacker ,  Todd Krajewski ,  Scott Lefferts ,  Gary Davis

发明人： Nigel P. Hacker ,  Todd Krajewski ,  Scott Lefferts ,  Gary Davis

IPC分类号： C08K5/5415 ,  C08J3/09 ,  C08L83/05 ,  C09D183/04 ,  C09D183/05 ,  C08K5/54

CPC分类号： C08J3/098 ,  C08J3/091 ,  C08J2383/04

摘要： Storage solutions of silsesquioxane and siloxane polymers are obtained by means of a silicon containing solvent composition. The solution has at least one polymer having a formula of [(HSiO.sub.1.5).sub.x O.sub.y ].sub.n, (HSiO.sub.1.5).sub.n, [(HSiO.sub.1.5).sub.x O.sub.y (RSiO.sub.1.5).sub.z ].sub.n, [(HSiO.sub.1.5).sub.x (RSiO.sub.1.5).sub.y ].sub.n or [(HSiO.sub.1.5).sub.x O.sub.y (RSiO.sub.1.5).sub.z ].sub.n wherein x=about 6 to about 20, y=1 to about 3, z=about 6 to about 20, n=1 to about 4,000, and each R is independently H, C.sub.1 to C.sub.8 alkyl or C.sub.6 to C.sub.12 aryl. The solvent has the formula of (CH.sub.3).sub.3 Si--O--[Si(CH.sub.3).sub.2 ].sub.a --Si(CH.sub.3).sub.3, (CH.sub.3 CH.sub.2)Si--O--[Si(CH.sub.3 CH.sub.2).sub.2 ].sub.a --SiCH.sub.3 CH.sub.2).sub.3, R.sub.3 Si--O--[SiR'.sub.2 ].sub.a --SiR.sub.3, [O--Si(CH.sub.3).sub.2 ].sub.b, [O--Si(CH.sub.3 CH.sub.2).sub.2 ].sub.b or [O--SiR'.sub.2 ].sub.n wherein a=0-5, b=3-5, and each R' is independently H or C.sub.1 to C.sub.8 alkyl.

摘要翻译： 通过含硅溶剂组合物获得倍半硅氧烷和硅氧烷聚合物的储存溶液。 该溶液具有至少一种具有式[（HSiO 1.5）x O y] n，（HSiO 1.5）n，[（HSiO 1.5）x O y（RSiO 1.5）]]，[（HSiO 1.5） x（RSiO1.5）y] n或[（HSiO1.5）xOy（RSiO1.5）z] n其中x =约6至约20，y = 1至约3，z =约6至约20，n = 1至约4,000，并且每个R独立地为H，C 1至C 8烷基或C 6至C 12芳基。 溶剂具有式（CH3）3Si-O- [Si（CH3）2] a-Si（CH3）3，（CH3CH2）Si-O- [Si（CH3CH2）2] a-SiCH3CH2）3，R3Si- O- [SiR'2] a-SiR3，[O-Si（CH3）2] b，[O-Si（CH3CH2）2] b或[O-SiR'2] n，其中a = 0-5，b = 3-5，每个R'独立地为H或C 1至C 8烷基。

公开(公告)号：US5973095A

公开(公告)日：1999-10-26

申请号：US55516

申请日：1998-04-06

申请人： Nigel P. Hacker ,  Todd Krajewski ,  Scott Lefferts

发明人： Nigel P. Hacker ,  Todd Krajewski ,  Scott Lefferts

IPC分类号： C08G77/08 ,  C08G77/12 ,  C09D183/05

CPC分类号： C08G77/12

摘要： Novel processes for preparing hydridosiloxane and organohydridosiloxane resins are disclosed. The processes of the invention broadly provide for the steps of contacting a silane monomer with a solid state catalyst in the presence of a reaction mixture that includes a nonpolar, e.g., hydrocarbon, solvent, and a polar solvent, e.g., alcohol and water. The process is conducted under conditions effective to catalytically convert said silane monomer into hydridosiloxanes and organohydridosiloxanes. Recovery of the products is advantageously aided by the ease of separating the solid state catalyst from the reaction mixture. Hydridosiloxanes and organohydridosiloxanes resins produced by the processes of the invention are also provided.

摘要翻译： 公开了制备氢硅氧烷和有机氢硅氧烷树脂的新方法。 本发明的方法广泛地提供了在包括非极性例如烃，溶剂和极性溶剂如醇和水的反应混合物存在下使硅烷单体与固态催化剂接触的步骤。 该方法在有效地将所述硅烷单体催化转化成氢硅氧烷和有机羟基硅氧烷的条件下进行。 通过将固体催化剂与反应混合物分离的容易性有利于辅助产物的回收。 还提供了通过本发明的方法制备的羟基硅氧烷和有机氢硅氧烷树脂。

公开(公告)号：US06512071B1

公开(公告)日：2003-01-28

申请号：US09611528

申请日：2000-06-30

申请人： Nigel P. Hacker ,  Scott Lefferts ,  Lisa Figge

发明人： Nigel P. Hacker ,  Scott Lefferts ,  Lisa Figge

IPC分类号： C08G7708

CPC分类号： H01L21/02126 ,  C08G77/12 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/3122 ,  H01L23/5329 ,  H01L2924/0002 ,  H01L2924/12044 ,  H01L2924/00

摘要： An organohydridosiloxane polymer having a cage conformation, at least approximately 40 Mole percent carbon containing substituents and a dielectric constant of less than about 2.7 is presented. Each silicon atom of the cage polymer is bonded to at least three oxygen atoms and to either a hydrogen atom or an organic substituent. By providing such a caged structure with essentially no hydroxyl or alkoxy substituents, either on the polymer backbone or at terminal silicon atoms, essentially no chain lengthening polymerization can occur in solution. Such organohydridosiloxane resins having a molecular weight in the range from about 400 to about 200,000 atomic mass units were formed using a dual phase solvent system and either a solid phase or phase transfer catalyst to assist the condensation of hydridotrihalosilane with at least one organotrihalosilane.

公开(公告)号：US06218497B1

公开(公告)日：2001-04-17

申请号：US09044831

申请日：1998-03-20

申请人： Nigel P. Hacker ,  Scott Lefferts ,  Lisa Figge

发明人： Nigel P. Hacker ,  Scott Lefferts ,  Lisa Figge

IPC分类号： C08G7712

CPC分类号： C08G77/12 ,  C08G77/04

摘要： An organohydridosiloxane polymer having a cage conformation, between approximately 0.1 to 40 mole percent carbon-containing substituent, and a dielectric constant of less than about 3.0 is disclosed. Each silicon atom of the cage polymer is bonded to at least three oxygen atoms and to either a hydrogen atom or an organic substituent. By providing such a caged structure having essentially no hydroxyl or alkoxy substituents, either on the polymer backbone or at terminal silicon atoms, essentially no chain lengthening polymerization can occur in solution. Such organohydridosiloxane resins having a molecular weight in the range from about 400 to about 200,000 atomic mass units were formed using a dual phase solvent system and either a solid phase or a phase transfer catalyst to assist the condensation of hydridotrihalosilane with at least one organotrihalosilane.

摘要翻译： 公开了具有笼构象的有机氢硅氧烷聚合物，约0.1-40摩尔％的含碳取代基，介电常数小于约3.0。 笼状聚合物的每个硅原子与至少三个氧原子和氢原子或有机取代基结合。 通过提供这样一种基本上没有羟基或烷氧基取代基的笼式结构，无论是在聚合物主链上还是在末端硅原子上，基本上不会在溶液中发生链延长聚合。 使用双相溶剂系统和固相或相转移催化剂形成分子量在约400至约200,000原子质量单位范围内的这种有机氢硅氧烷树脂，以有助于氢三卤代硅烷与至少一种有机三卤代硅烷的缩合。

公开(公告)号：US06743856B1

公开(公告)日：2004-06-01

申请号：US09505314

申请日：2000-02-16

申请人： Nigel P. Hacker ,  Lisa K. Figge ,  Scott Lefferts

发明人： Nigel P. Hacker ,  Lisa K. Figge ,  Scott Lefferts

IPC分类号： C08L8304

CPC分类号： H01L21/02126 ,  C08G77/04 ,  C08G77/12 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/3122 ,  H01L23/5329 ,  H01L2924/0002 ,  H01L2924/00

摘要： Novel processes for preparing hydridosiloxane and organohydridosiloxane resins are disclosed. The processes of the invention broadly provide for the steps of contacting a silane monomer with a phase transfer catalyst in the presence of a reaction mixture that includes a nonpolar, e.g., hydrocarbon, solvent, and a polar solvent, e.g., alcohol and water. The process is conducted under conditions effective to catalytically convert said silane monomer into hydridosiloxane and organohydridosiloxane resins. Recovery of the products is advantageously aided by the ease of separating the phase transfer catalyst from the dual phase reaction mixture by separating the immiscible polar solvent carrying the catalyst from the nonpolar solvent, that carries the product. Hydridosiloxane and organohydridosiloxane resins produced by the processes of the invention are also provided.

摘要翻译： 公开了制备氢硅氧烷和有机氢硅氧烷树脂的新方法。 本发明的方法广泛地提供了在包含非极性例如烃，溶剂和极性溶剂如醇和水的反应混合物存在下使硅烷单体与相转移催化剂接触的步骤。 该方法在有效地将所述硅烷单体催化转化成氢硅氧烷和有机氢硅氧烷树脂的条件下进行。 有利的是通过将携带催化剂的不混溶极性溶剂与携带该产物的非极性溶剂分离出来，可以容易地将相转移催化剂与双相反应混合物分离。 还提供了通过本发明的方法制备的氢硅氧烷和有机氢硅氧烷树脂。

公开(公告)号：US06359099B1

公开(公告)日：2002-03-19

申请号：US09610567

申请日：2000-07-03

申请人： Nigel P. Hacker ,  Scott Lefferts ,  Lisa Figge

发明人： Nigel P. Hacker ,  Scott Lefferts ,  Lisa Figge

IPC分类号： C08G7712

CPC分类号： C08G77/12 ,  C08G77/04

摘要： An organohydridosiloxane polymer having a cage conformation, between approximately 0.1 to 40 mole percent carbon-containing substituent, and a dielectric constant of less than about 3.0 is disclosed. Each silicon atom of the cage polymer is bonded to at least three oxygen atoms and to either a hydrogen atom or an organic substituent. By providing such a caged structure having essentially no hydroxyl or alkoxy substituents, either on the polymer backbone or at terminal silicon atoms, essentially no chain lengthening polymerization can occur in solution. Such organohydridosiloxane resins having a molecular weight in the range from about 400 to about 200,000 atomic mass units were formed using a dual phase solvent system and either a solid phase or a phase transfer catalyst to assist the condensation of hydridotrihalosilane with at least one organotrihalosilane.

摘要翻译： 公开了具有笼构象的有机氢硅氧烷聚合物，约0.1-40摩尔％的含碳取代基，介电常数小于约3.0。 笼状聚合物的每个硅原子与至少三个氧原子和氢原子或有机取代基结合。 通过提供这样一种基本上没有羟基或烷氧基取代基的笼式结构，无论是在聚合物主链上还是在末端硅原子上，基本上不会在溶液中发生链延长聚合。 使用双相溶剂系统和固相或相转移催化剂形成分子量在约400至约200,000原子质量单位范围内的这种有机氢硅氧烷树脂，以有助于氢三卤代硅烷与至少一种有机三卤代硅烷的缩合。

公开(公告)号：US6043330A

公开(公告)日：2000-03-28

申请号：US55244

申请日：1998-04-06

申请人： Nigel P. Hacker ,  Lisa K. Figge ,  Scott Lefferts

发明人： Nigel P. Hacker ,  Lisa K. Figge ,  Scott Lefferts

IPC分类号： C08G77/04 ,  C08G77/08 ,  C08G77/12 ,  C09D183/05 ,  H01L21/312 ,  H01L21/768 ,  H01L23/532 ,  C08G77/06

CPC分类号： C08G77/04 ,  C08G77/12 ,  H01L21/02126 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/3122 ,  H01L23/5329 ,  H01L2924/0002

摘要： Novel processes for preparing hydridosiloxane and organohydridosiloxane resins are disclosed. The processes of the invention broadly provide for the steps of contacting a silane monomer with a phase transfer catalyst in the presence of a reaction mixture that includes a nonpolar, e.g., hydrocarbon, solvent, and a polar solvent, e.g., alcohol and water. The process is conducted under conditions effective to catalytically convert said silane monomer into hydridosiloxane and organohydridosiloxane resins. Recovery of the products is advantageously aided by the ease of separating the phase transfer catalyst from the dual phase reaction mixture by separating the immiscible polar solvent carrying the catalyst from the nonpolar solvent that carries the product. Hydridosiloxane and organohydridosiloxane resins produced by the processes of the invention are also provided.

摘要翻译： 公开了制备氢硅氧烷和有机氢硅氧烷树脂的新方法。 本发明的方法广泛地提供了在包含非极性例如烃，溶剂和极性溶剂如醇和水的反应混合物存在下使硅烷单体与相转移催化剂接触的步骤。 该方法在有效地将所述硅烷单体催化转化成氢硅氧烷和有机氢硅氧烷树脂的条件下进行。 通过将携带催化剂的不混溶的极性溶剂与携带产物的非极性溶剂分离，可有利地辅助相分离催化剂与双相反应混合物的分离。 还提供了通过本发明的方法制备的氢硅氧烷和有机氢硅氧烷树脂。

公开(公告)号：US6143855A

公开(公告)日：2000-11-07

申请号：US44798

申请日：1998-03-20

申请人： Nigel P. Hacker ,  Scott Lefferts ,  Lisa Figge

发明人： Nigel P. Hacker ,  Scott Lefferts ,  Lisa Figge

IPC分类号： C08G77/08 ,  C08G77/12 ,  C09D183/05 ,  H01L21/312 ,  H01L21/768 ,  H01L23/532

CPC分类号： H01L21/02126 ,  C08G77/12 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/3122 ,  H01L23/5329 ,  H01L2924/0002 ,  H01L2924/12044

摘要： An organohydridosiloxane polymer having a cage conformation, at least approximately 40 Mole percent carbon containing substituents and a dielectric constant of less than about 2.7 is presented. Each silicon atom of the cage polymer is bonded to at least three oxygen atoms and to either a hydrogen atom or an organic substituent. By providing such a caged structure with essentially no hydroxyl or alkoxy substituents, either on the polymer backbone or at terminal silicon atoms, essentially no chain lengthening polymerization can occur in solution. Such organohydridosiloxane resins having a molecular weight in the range from about 400 to about 200,000 atomic mass units were formed using a dual phase solvent system and either a solid phase or phase transfer catalyst to assist the condensation of hydridotrihalosilane with at least one organotrihalosilane.

公开(公告)号：US06956097B2

公开(公告)日：2005-10-18

申请号：US10076846

申请日：2002-02-14

申请人： Joseph Kennedy ,  Teresa Baldwin ,  Nigel P. Hacker ,  Richard Spear

发明人： Joseph Kennedy ,  Teresa Baldwin ,  Nigel P. Hacker ,  Richard Spear

IPC分类号： G03F7/004 ,  C03C17/00 ,  C03C17/30 ,  C07F7/18 ,  C08K5/00 ,  C09D7/12 ,  C09D183/04 ,  C09D183/06 ,  C09D183/08 ,  G03C1/492 ,  G03F7/075 ,  G03F7/09 ,  G03F7/11 ,  H01L21/027 ,  C08G77/12

CPC分类号： G03F7/091 ,  C03C17/008 ,  C03C17/30 ,  C08K5/0008 ,  C09D183/04 ,  C09D183/06 ,  C09D183/08 ,  G03F7/0752 ,  H01L21/0276 ,  Y10T428/31663 ,  C08L83/04 ,  C08L2666/28

摘要： Anti-reflective coating materials for deep ultraviolet photolithography include one or more organic light-absorbing compounds incorporated into spin-on-glass materials. Suitable absorbing compounds are strongly absorbing over wavelength ranges around wavelengths such as 365 nm, 248 nm, and 193 nm that may be used in photolithography. A method of making absorbing spin-on-glass materials includes combining one or more organic absorbing compounds with alkoxysilane or halosilane reactants during synthesis of the spin-on-glass materials.

公开(公告)号：US06177199B1

公开(公告)日：2001-01-23

申请号：US09227035

申请日：1999-01-07

申请人： Nigel P. Hacker ,  Scott P. Lefferts ,  Lisa K. Figge

发明人： Nigel P. Hacker ,  Scott P. Lefferts ,  Lisa K. Figge

IPC分类号： B32B904

CPC分类号： C08G77/04 ,  C08G77/12 ,  G03F7/0751 ,  H01L21/02126 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/3121 ,  H01L21/3122 ,  H01L21/76807 ,  H01L21/76829 ,  H01L21/76835 ,  Y10T428/265 ,  Y10T428/31663

摘要： A method of making a dielectric film on a substrate from a composition containing an organohydridosiloxane resin is presented. The organohydridosiloxane resins have a cage conformation and up to 40 mole percent of an organic substituent. The process of making a dielectric film includes forming a solution of a solvent and the organohydridosiloxane resin, dispensing the solution on a substrate, spinning the substrate, baking the substrate to remove the solvent, and curing the substrate to form the dielectric film. The dielectric films of the present invention exhibit dielectric constants of approximately 3 or lower.

摘要翻译： 提出了一种从含有机硅氧烷树脂的组合物在基片上制作电介质膜的方法。 有机氢硅氧烷树脂具有笼形构象和至多40摩尔％的有机取代基。 制造电介质膜的方法包括形成溶剂和有机氢硅氧烷树脂的溶液，将溶液分配在基材上，纺丝基板，烘烤基板以除去溶剂，并固化基板以形成电介质膜。 本发明的电介质膜的介电常数为3以下。