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公开(公告)号：US4159276A
公开(公告)日：1979-06-26
申请号：US937837
申请日：1978-08-29
申请人： Nitin V. Desai , Richard J. Himics
发明人： Nitin V. Desai , Richard J. Himics
IPC分类号： C07F7/20
CPC分类号： C07F7/20
摘要： A method of purifying methyl alkyl siloxane lubricants of the formula ##STR1## wherein R is an alkyl group of 4-20 carbon atoms and x is an integer which comprises multiply extracting with acetone.
摘要翻译： 一种净化式“IMAGE”的甲基烷基硅氧烷润滑剂的方法，其中R是4-20个碳原子的烷基，x是包含用丙酮多次提取的整数。
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公开(公告)号：US06724609B2
公开(公告)日：2004-04-20
申请号：US10038931
申请日：2002-01-04
申请人： Hoi Cheong Sun , Nitin V. Desai , William R. Roach , David Norman Ludington , Timothy Allen Pletcher , David Keller , Frank B. Lang , Peter D. Southgate , Joseph T. McGinn
发明人： Hoi Cheong Sun , Nitin V. Desai , William R. Roach , David Norman Ludington , Timothy Allen Pletcher , David Keller , Frank B. Lang , Peter D. Southgate , Joseph T. McGinn
IPC分类号： H02H2300
CPC分类号： H01L21/6833 , H02N13/00
摘要： Provided is an electrostatic sensing chuck for attracting particles to a portion of a particle contact surface near a deposition electrode, the electrostatic sensing chuck comprising a pixel comprising: a deposition electrode (DE) for selectively establishing an attraction field (Ea) at the particle contact surface; a shield electrode (SE) oppositely biased with respect to the deposition electrode; a charge sensing circuit to measure charge accumulated on each of the deposition electrode and the shield electrode, wherein the charge sensing circuit subtracts a second charge it senses at the shield electrode from a first charge it senses at the deposition electrode, thereby determining accumulated charge at the deposition electrode balanced by accumulated charge at the shield electrode.
摘要翻译： 提供一种静电感测卡盘，用于将颗粒吸引到沉积电极附近的一部分颗粒接触表面，该静电感测卡盘包括一个像素，该像素包括：沉积电极（DE），用于选择性地在颗粒接触处建立吸引场（Ea） 表面; 相对于沉积电极相对偏置的屏蔽电极（SE）; 电荷感测电路，用于测量在每个沉积电极和屏蔽电极上累积的电荷，其中电荷感测电路在屏蔽电极处从其在沉积电极处感测到的第一电荷中减去其感测的第二电荷，由此确定累积电荷 沉积电极由屏蔽电极处的累积电荷平衡。
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公开(公告)号：US4396702A
公开(公告)日：1983-08-02
申请号：US320015
申请日：1981-11-10
申请人： Nitin V. Desai , Eugene S. Poliniak
发明人： Nitin V. Desai , Eugene S. Poliniak
CPC分类号： G03F7/0758 , C08G75/22
摘要： This invention relates to novel poly(silane sulfone) copolymers having repeating units represented by the formula ##STR1## wherein R is alkyl and n is an integer. Positive resist recording media prepared from the subject copolymers demonstrate excellent sensitivity and resolution and are resistant to oxygen plasma etching.
摘要翻译： 本发明涉及具有由下式表示的重复单元的新型聚（硅烷砜）共聚物，其中R是烷基，n是整数。 从主题共聚物制备的正性抗蚀剂记录介质表现出优异的灵敏度和分辨率，并且耐氧等离子体蚀刻。
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4.发明授权Method of transferring a surface relief pattern from a wet poly(olefin sulfone) layer to a metal layer 失效将透湿垫（OLEFIN SULFONE）层转移到金属层的表面消除图案的方法
公开(公告)号：US4126712A
公开(公告)日：1978-11-21
申请号：US710134
申请日：1976-07-30
申请人： Eugene S. Poliniak , Nitin V. Desai
发明人： Eugene S. Poliniak , Nitin V. Desai
CPC分类号： G03F7/039 , G03F7/26 , Y10S428/914
摘要： This invention pertains to a method for forming a surface relief pattern in a metal layer which comprises forming a wet poly(olefin sulfone) layer on the metal layer, forming a surface relief pattern in the wet poly(olefin sulfone) layer, and sputter etching the surface relief pattern from the wet poly(olefin sulfone) layer into the metal layer.
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公开(公告)号：US06370005B1
公开(公告)日：2002-04-09
申请号：US09417736
申请日：1999-10-14
申请人： Hoi Cheong Sun , Nitin V. Desai , William R. Roach , David Norman Ludington , Timothy Allen Pletcher , David Keller , Frank B. Lang , Peter D. Southgate , Joseph T. McGinn
发明人： Hoi Cheong Sun , Nitin V. Desai , William R. Roach , David Norman Ludington , Timothy Allen Pletcher , David Keller , Frank B. Lang , Peter D. Southgate , Joseph T. McGinn
IPC分类号： H02N1300
CPC分类号： H01L21/6833 , H02N13/00
摘要： Provided is an electrostatic sensing chuck for attracting particles to a portion of a particle contact surface near a deposition electrode, the electrostatic sensing chuck comprising a pixel comprising: a deposition electrode (DE) for selectively establishing an attraction field (Ea) at the particle contact surface; a shield electrode (SE) oppositely biased with respect to the deposition electrode; a charge sensing circuit to measure charge accumulated on each of the deposition electrode and the shield electrode, wherein the charge sensing circuit subtracts a second charge it senses at the shield electrode from a first charge it senses at the deposition electrode, thereby determining accumulated charge at the deposition electrode balanced by accumulated charge at the shield electrode.
摘要翻译： 提供一种静电感测卡盘，用于将颗粒吸引到沉积电极附近的一部分颗粒接触表面，该静电感测卡盘包括一个像素，该像素包括：沉积电极（DE），用于选择性地在颗粒接触处建立吸引场（Ea） 表面; 相对于沉积电极相对偏置的屏蔽电极（SE）; 电荷感测电路，用于测量在每个沉积电极和屏蔽电极上累积的电荷，其中电荷感测电路在屏蔽电极处从其在沉积电极处感测到的第一电荷中减去其感测的第二电荷，由此确定累积电荷 沉积电极由屏蔽电极处的累积电荷平衡。
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公开(公告)号：US4695490A
公开(公告)日：1987-09-22
申请号：US787679
申请日：1985-10-15
IPC分类号： C08G59/50 , C09J163/02 , G02F1/1341 , B32B17/10 , C09K19/00
CPC分类号： C09J163/00 , C08G59/502 , G02F1/1341 , Y10T428/1073 , Y10T428/24777 , Y10T428/28
摘要： A sealant composition to seal the fill port in a liquid crystal display is disclosed. The subject composition is comprised of a diglycidylether of bisphenol A epoxy precursor, a curing agent therefor and, optionally, a minor amount of a thixotropic agent.
摘要翻译： 公开了一种用于密封液晶显示器中的填充口的密封剂组合物。 主题组合物由双酚A环氧前体的二缩水甘油醚，其固化剂和任选的少量触变剂组成。
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公开(公告)号：US4369307A
公开(公告)日：1983-01-18
申请号：US206944
申请日：1980-11-14
申请人： Nitin V. Desai , Robert F. Poll
发明人： Nitin V. Desai , Robert F. Poll
CPC分类号： B01D11/0219
摘要： A method for separating out carbon particles from a composition comprising a plastic and carbon particles of submicron dimensions comprising the steps of adding the composition to an organic solvent for the plastic which does not dissolve the carbon particles at a concentration sufficiently dilute to allow the carbon particles to be free from the plastic and filtering the resulting mixture in a calcium carbonate column which traps essentially all of the carbon particles.
摘要翻译： 一种用于从包含亚微米尺寸的塑料和碳颗粒的组合物中分离出碳颗粒的方法，包括以下步骤：将组合物加入到不溶于碳颗粒的塑料的有机溶剂中，浓度足够稀，以允许碳颗粒 不含塑料，并将所得混合物过滤到基本上捕集所有碳颗粒的碳酸钙柱中。
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8.发明授权
公开(公告)号：US4153741A
公开(公告)日：1979-05-08
申请号：US710133
申请日：1976-07-30
申请人： Eugene S. Poliniak , Nitin V. Desai
发明人： Eugene S. Poliniak , Nitin V. Desai
CPC分类号： G03F7/039
摘要： This invention pertains to an electron beam resist method for forming a surface relief pattern in a poly(olefin sulfone) layer wherein the polymer layer is useful as a sputter etch mask for transferring the surface relief pattern into a metal layer. The surface relief pattern is formed using poly(3-methyl-1-cyclopentene sulfone) as the poly(olefin sulfone) layer and using a mixture of 2-methylcyclohexanone and 2-methylcyclohexanol or a mixture of benzene and 2-methylcyclohexanol as the developer for the poly(3-methyl-1-cyclopentene sulfone) layer.
摘要翻译： 本发明涉及用于在聚（烯烃砜）层中形成表面浮雕图案的电子束抗蚀剂方法，其中聚合物层可用作用于将表面浮雕图案转印到金属层中的溅射蚀刻掩模。 使用聚（3-甲基-1-环戊烯砜）作为聚（烯烃砜）层并使用2-甲基环己酮和2-甲基环己醇的混合物或苯和2-甲基环己醇的混合物作为显影剂形成表面浮雕图案 对于聚（3-甲基-1-环戊烯砜）层。
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公开(公告)号：US4397938A
公开(公告)日：1983-08-09
申请号：US330492
申请日：1981-12-14
申请人： Nitin V. Desai , Emil J. Gavalchin
发明人： Nitin V. Desai , Emil J. Gavalchin
CPC分类号： G03F7/039
摘要： In accordance with this invention, there is provided a positive resist medium for microlithography which is comprised of a film of a copolymer of sulfur dioxide and certain vinyl esters. A method of manufacturing microelectronic circuits and recording information utilizing the resist medium of this invention is also provided.
摘要翻译： 根据本发明，提供了一种用于微光刻的正性抗蚀剂介质，其由二氧化硫和某些乙烯基酯的共聚物的膜组成。 还提供了利用本发明的抗蚀剂介质制造微电子电路和记录信息的方法。
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公开(公告)号：US4388410A
公开(公告)日：1983-06-14
申请号：US223856
申请日：1981-01-09
CPC分类号： G01N33/442 , G01N5/04 , Y10S436/908 , Y10T436/196666
摘要： A method for thermogravimetrically analyzing a plastic molding composition comprising carbon black and a vinyl chloride homopolymer or copolymer molding resin to determine the carbon black content wherein the method comprises the steps of compounding the molding composition so that the carbon black is uniformly dispersed therein, heating the molding composition in an inert atmosphere to a temperature sufficient to reproducibly thermally decompose the vinyl chloride homopolymer or copolymer, maintaining the molding composition at the decomposition temperature in an inert atmosphere for a first given time which is long enough so that there is no further significant weight loss, weighing the molding composition to determine the weight loss during the first given time and comparing the weight loss for the first given time with that for samples of known composition analyzed under the same conditions to determined the carbon black content of the molding composition.
摘要翻译： 一种用于热重分析包含炭黑和氯乙烯均聚物或共聚物模塑树脂的塑料模制组合物以确定炭黑含量的方法，其中所述方法包括将所述模塑组合物混合以使所述炭黑均匀分散在其中的步骤，加热 将模塑组合物在惰性气氛中至足以可再热地热分解氯乙烯均聚物或共聚物的温度，将模塑组合物在惰性气氛中保持在分解温度下达到足够长的第一给定时间，使得不再有显着的重量 损失，称量模制组合物以确定在第一给定时间内的重量损失，并将第一给定时间的重量损失与在相同条件下分析的已知组合物的重量损失进行比较以确定模制组合物的炭黑含量。
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