摘要:
A semiconductor device in which input terminals for external interrupts can be set as desired. A plurality of external input terminals can be specified as interrupt terminals which output an input signal to an external interrupt circuit via an interrupt terminal selector. A selection control circuit specifies whether a plurality of external input terminals are used as interrupt terminals. According to the selection control circuit, the interrupt terminal selector outputs to the external interrupt circuit an input signal entered from an external input terminal which is specified as an interrupt terminal out of the plurality of external input terminals.
摘要:
A semiconductor device in which input terminals for external interrupts can be set as desired. A plurality of external input terminals can be specified as interrupt terminals which output an input signal to an external interrupt circuit via an interrupt terminal selector. A selection control circuit specifies whether a plurality of external input terminals are used as interrupt terminals. According to the selection control circuit, the interrupt terminal selector outputs to the external interrupt circuit an input signal entered from an external input terminal which is specified as an interrupt terminal out of the plurality of external input terminals.
摘要:
In a plasma processing apparatus in which a wafer is processed while supplying radio frequency power to electrodes disposed in a sample stage in a processing chamber within a reactor via a matching box, by matching a specific value of power at transition points of data values of at least two kinds among characteristic data including light emission intensity of the plasma, magnitude of its time variation, a matching position of the matching box, and a change of a value of a voltage of the radio frequency power supplied to the electrodes detected by varying the power to a plurality of values during the processing with a value detected by using characteristic data which is detected during the processing executed on a wafer of the same kind in a different reactor, the differences of the states inside the processing chamber or plasma among a plurality of semiconductor processing apparatuses or reactors are reduced.
摘要:
In a plasma processing apparatus in which a wafer is processed while supplying radio frequency power to electrodes disposed in a sample stage in a processing chamber within a reactor via a matching box, by matching a specific value of power at transition points of data values of at least two kinds among characteristic data including light emission intensity of the plasma, magnitude of its time variation, a matching position of the matching box, and a change of a value of a voltage of the radio frequency power supplied to the electrodes detected by varying the power to a plurality of values during the processing with a value detected by using characteristic data which is detected during the processing executed on a wafer of the same kind in a different reactor, the differences of the states inside the processing chamber or plasma among a plurality of semiconductor processing apparatuses or reactors are reduced.
摘要:
A vacuum treating apparatus having a vacuum treating chamber for treating a to-be-treated substrate in vacuum, includes a plurality of substrate cassettes which are installed in the open air and hold substrates that are to be conveyed into the vacuum treating chamber, a device for conveying the substrates between the substrate cassettes and the vacuum treating chamber, and a device which selects either that the to-be-treated substrate after treated in the vacuum treating chamber be held in the substrate cassette from which the to-be-treated substrate was taken out or that the to-be-treated substrate after treated in the vacuum treating chamber be held in another substrate cassette which is different from the substrate cassette.
摘要:
A seat sensor is arranged for each of a plurality of seats. A pulse-signal supplying unit supplies a pulse signal with a different timing to the seat sensor. An operator identifying unit detects, when a first operator sit on any one of the seats operates an operating unit, the pulse signal supplied to the seat sensor by the pulse-signal supplying unit through the first operator and the operating unit, and identifies the first operator based on a timing of a detected pulse signal. An operation control unit performs a control depending on an operation performed on the operating unit by a detected first operator.
摘要:
A vacuum processing apparatus and method in which the apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing samples, and a waiting cassette support for supporting a waiting cassette that differs from the cassettes supported on the cassette support and capable of having a number of samples. An atmospheric carriage enables carrying a sample among a given cassette of the plurality of cassettes or the waiting cassette. A controller effects control for carrying unprocessed and processed samples among the given cassette, the waiting cassette and the vacuum processing chamber, so that a mixture of both processed and unprocessed samples does not exist in the given cassette or the waiting cassette.
摘要:
An earthquake-proof bed having a superior endurance property is constructed of approximately box-shaped metallic panels and contains necessities in the event of an earthquake, such as tools for escaping and food in tool boxes installed under the bed. This earthquake-proof bed includes box-shaped metallic panels. Each panel is shaped with a plurality of frames and a pair of metal plates fixed on both sides of the frames. A plurality of tool boxes is installed on the bottom metallic panel. The plurality of tool boxes is formed by dividing plates. A plurality of lids covers the tool boxes, and an opening is shaped on any one of the metal panels. Bedding is provided on the lids.
摘要:
A wire harness is produced by attaching terminals to one of the respective ends of a plurality of wires and gathering the other ends and attaching a single terminal thereto. The plurality of insulated wires are intermittently fed by respective predetermined lengths along predetermined feed paths, and then cut to respective predetermined lengths to provide remaining wires and cut wire sections. The insulation on the forward ends of the remaining wires and on the rear ends of the cut wire sections, next to the cut just made, are stripped. Terminals are crimped to insulation-stripped ends of the remaining wires. The cut wire sections are transferred so that their insulation-stripped ends are gathered in one place and then the insulation-stripped ends of the cut wire sections are trued-up and a single terminal is crimped thereto to form a single terminal for the plurality of cut wire sections.
摘要:
An insulated DC power supply includes a voltage transformer, a switching device and a primary-side regulating circuit. The voltage transformer includes primary and secondary windings and an auxiliary winding. The switching device causes current to flow intermittently through the primary winding. The primary-side regulating circuit receives a voltage proportional to a current flowing through the primary winding of the transformer, and a voltage proportional to a voltage induced in the auxiliary winding of the transformer to generate and output a drive pulse for turning on or off the switching device. The primary-side regulating circuit includes an ON/OFF signal generator circuit and first and second timer circuits. The switching device is turned off upon expiration of the first timer circuit, and the ON/OFF signal generator circuit does not generate a signal for turn-on of the switching device when the second timer circuit expires.