Method of forming a thin film by plasma chemical vapor deposition
    1.
    发明授权
    Method of forming a thin film by plasma chemical vapor deposition 失效
    通过等离子体化学气相沉积法形成薄膜的方法

    公开(公告)号:US6060131A

    公开(公告)日:2000-05-09

    申请号:US19769

    申请日:1998-02-06

    摘要: A substrate to be coated with a thin film is placed inside a vacuum chamber, an ECR plasma is generated and introduced into the vacuum chamber by means of a specified magnetic field generated inside the vacuum chamber and a reaction gas, as well as an inert gas, is introduced into the vacuum chamber while a negative DC voltage superposed with a high-frequency pulse with frequency 25-250 kHz is applied to the substrate by a voltage applying device such that the voltage of the substrate reaches a positive value instantaneously. The frequency of the superposed pulse is selected by using an ammeter to determine an optimum frequency for minimizing the load current of the voltage-applying circuit.

    摘要翻译: 将要涂覆薄膜的基板放置在真空室内,产生ECR等离子体并通过在真空室内产生的规定磁场和反应气体以及惰性气体将其引入真空室 被引入真空室中,同时通过电压施加装置将叠加有频率为25-250kHz的高频脉冲的负DC电压施加到衬底上,使得衬底的电压瞬时达到正值。 通过使用电流表来选择叠加脉冲的频率,以确定用于最小化施加电压的负载电流的最佳频率。

    Apparatus for forming a thin film by plasma chemical vapor deposition
    2.
    发明授权
    Apparatus for forming a thin film by plasma chemical vapor deposition 有权
    通过等离子体化学气相沉积法形成薄膜的装置

    公开(公告)号:US06223686B1

    公开(公告)日:2001-05-01

    申请号:US09474849

    申请日:1999-12-30

    IPC分类号: C23C1600

    摘要: A substrate to be coated with a thin film is placed inside a vacuum chamber, an ECR plasma is generated and introduced into the vacuum chamber by means of a specified magnetic field generated inside the vacuum chamber and a reaction gas, as well as an inert gas, is introduced into the vacuum chamber while a negative DC voltage superposed with a high-frequency pulse with frequency 25-250 kHz is applied to the substrate by a voltage applying device such that the voltage of the substrate reaches a positive value instantaneously. The frequency of the superposed pulse is selected by using an ammeter to determine an optimum frequency for minimizing the load current of the voltage-applying circuit.

    摘要翻译: 将要涂覆薄膜的基板放置在真空室内,产生ECR等离子体并通过在真空室内产生的规定磁场和反应气体以及惰性气体将其引入真空室 被引入真空室中,同时通过电压施加装置将叠加有频率为25-250kHz的高频脉冲的负DC电压施加到衬底上,使得衬底的电压瞬时达到正值。 通过使用电流表来选择叠加脉冲的频率,以确定用于最小化施加电压的负载电流的最佳频率。

    Thin film forming apparatus
    3.
    发明授权
    Thin film forming apparatus 失效
    薄膜成型装置

    公开(公告)号:US6089185A

    公开(公告)日:2000-07-18

    申请号:US210477

    申请日:1998-12-14

    摘要: A thin film forming apparatus is formed of a vacuum chamber, a base plate holder for holding a base plate near a central part of the vacuum chamber, and ECR plasma generating devices respectively connected to both side portions of the vacuum chamber. A magnetic field generating device is situated adjacent to the vacuum chamber for generating a predetermined magnetic field in the vacuum chamber, and a gas introducing system is connected to the vacuum chamber for introducing a reaction gas into the vacuum chamber. Since the base plate holder has a shape corresponding to an external shape of the base plate, a distance between the base plate and the base plate holder is uniform. The films with uniform thicknesses can be formed on both surfaces of the base plate.

    摘要翻译: 薄膜形成装置由真空室,用于在靠近真空室的中心部分保持基板的基板保持器和分别连接到真空室的两个侧部的ECR等离子体产生装置形成。 磁场产生装置位于真空室附近,用于在真空室中产生预定的磁场,气体导入系统连接到真空室,用于将反应气体引入真空室。 由于基板保持器具有与基板的外形相对应的形状,所以基板和基板保持架之间的距离是均匀的。 可以在基板的两个表面上形成具有均匀厚度的膜。

    SURFACE WAVE PLASMA CVD APPARATUS AND LAYER FORMATION METHOD
    5.
    发明申请
    SURFACE WAVE PLASMA CVD APPARATUS AND LAYER FORMATION METHOD 审中-公开
    表面波等离子体CVD装置和层形成方法

    公开(公告)号:US20120148763A1

    公开(公告)日:2012-06-14

    申请号:US13392408

    申请日:2010-10-04

    申请人: Masayasu Suzuki

    发明人: Masayasu Suzuki

    IPC分类号: C23C16/50 C23C16/52

    摘要: A surface wave plasma CVD apparatus, includes: a waveguide (3) that is connected to a microwave source (2), and in which a plurality of slot antennas (S) are formed thereof; a dielectric plate (4) for conducting microwaves emitted from the plurality of slot antennas (S) into a plasma processing chamber (1) so that a surface wave plasma is produced; an insulating shield member (lb) that is arranged so as to surround a layer formation processing region (R) in which the surface wave plasma is produced; and a gas ejection portion (52) that ejects process material gas into the layer formation processing region (R).

    摘要翻译: 表面波等离子体CVD装置包括:与微波源(2)连接并形成有多个缝隙天线(S)的波导管(3)。 用于将从所述多个缝隙天线(S)发射的微波导入等离子体处理室(1)中的电介质板(4),从而产生表面波等离子体; 布置成围绕其中产生表面波等离子体的层形成处理区域(R)的绝缘屏蔽构件(1b); 以及将处理材料气体喷射到层形成处理区域(R)中的气体喷射部(52)。

    Sheet stacking apparatus
    6.
    发明授权
    Sheet stacking apparatus 有权
    纸张堆垛装置

    公开(公告)号:US08083225B2

    公开(公告)日:2011-12-27

    申请号:US12869989

    申请日:2010-08-27

    IPC分类号: B65H43/00

    摘要: A banknote stacking apparatus includes a banknote stacking plate 1 on which banknotes are to be stacked, a first banknote press member 11 fixed to a support shaft 10 so as to be swingably together with the support shaft 10, a second banknote press member 15 which is formed of a synthetic resin sheet having flexibility, whose upstream end portion is fixed to the banknote stacking apparatus and whose downstream end portion is fixed to the first banknote press member 11 and a solenoid 27 for driving the first banknote press member 11 and the banknote stacking apparatus is constituted so that when a banknote is fed into the banknote stacking apparatus and the first banknote press member 11 is driven by the solenoid 27, the first banknote press member 11 is swung and presses a portion of a banknote close to the front end portion thereof and the second banknote press member 15 is swung together with the first banknote press member 11 and deformed so as to form a convex portion 15c projecting toward the banknote, whereby a portion of the banknote close to the rear end portion thereof is pressed by the convex portion 15c of the second banknote press member 15. According to the thus constituted banknote stacking apparatus, a banknote can be stacked on the banknote stacking plate 1 in the desired manner using a single drive means.

    摘要翻译: 纸币堆垛装置包括纸币堆叠纸币1的纸币堆叠板1,与支撑轴10一起可摆动地固定在支撑轴10上的第一纸币按压部件11,第二纸币按压部件15, 由具有柔性的合成树脂片形成,其上游端部固定在纸币堆叠装置上,其下游端部固定在第一纸币按压部件11上,螺线管27用于驱动第一纸币按压部件11和纸币堆叠 设备被构造成使得当纸币被馈送到纸币堆垛装置中并且第一纸币按压部件11被螺线管27驱动时,第一纸币按压部件11被摆动并按压靠近前端部分的纸币的一部分 并且第二纸币按压部件15与第一纸币按压部件11一起摆动并变形,以形成凸出部分15c 朝向纸币,由此靠近其后端部的纸币的一部分被第二纸币按压部件15的凸部15c按压。根据这样构成的纸币堆垛装置,可以将纸币堆叠在纸币堆叠 板1以期望的方式使用单个驱动装置。

    Surface wave excitation plasma processing system
    7.
    发明授权
    Surface wave excitation plasma processing system 有权
    表面波激发等离子体处理系统

    公开(公告)号:US08018162B2

    公开(公告)日:2011-09-13

    申请号:US11910202

    申请日:2006-04-26

    IPC分类号: H05B31/26

    CPC分类号: H01J37/32192 H05H1/46

    摘要: To sustain uniform generation of plasma constantly over a large area. In the surface wave excitation plasma processing device, a plasma source includes: a microwave generator, a microwave waveguide and a dielectric block; and a plasma source also includes: a microwave generator, a microwave waveguide and a dielectric block. The lid of a chamber is fixed onto the microwave waveguides in parallel, and the dielectric blocks disposed in the chamber. A reflecting plate is disposed between the dielectric blocks so that electromagnetic waves propagating through the dielectric blocks are prevented from advancing into the counterpart dielectric blocks as reflected waves. Consequently, the plasma sources are controlled independently. Furthermore, a side reflector is disposed at outer circumference of each of the dielectric blocks so that a standing waves of the electromagnetic waves propagating through the dielectric blocks is formed thus forming a large area standing wave mode of surface waves uniformly.

    摘要翻译: 为了在大面积上不断地维持等离子体的等离子体生成。 在表面波激发等离子体处理装置中,等离子体源包括:微波发生器,微波波导和介质块; 并且等离子体源还包括:微波发生器,微波波导和介质块。 腔室的盖子平行地固定在微波波导上,并且介质块设置在腔室中。 反射板设置在介质块之间,从而防止通过介质块传播的电磁波作为反射波而前进到对方介质块。 因此,等离子体源被独立地控制。 此外,侧反射器设置在每个介质块的外周,从而形成传播通过介质块的电磁波的驻波,从而形成均匀的表面波的大面积驻波模式。

    Apparatus for converting images of vehicle surroundings
    8.
    发明授权
    Apparatus for converting images of vehicle surroundings 有权
    用于转换车辆环境图像的装置

    公开(公告)号:US07868913B2

    公开(公告)日:2011-01-11

    申请号:US10959219

    申请日:2004-10-07

    IPC分类号: H04N7/18

    摘要: An aspect of the present invention provides an apparatus for converting images of vehicle surroundings that includes, at least one camera configured to start, upon receiving a synchronizing signal, photographing the surroundings of a vehicle and outputting image data representative of the photographs, an output memory configured to store image data to be displayed on a display installed in the vehicle, a pattern memory configured to store destination addresses of the output memory, and an image converter configured to generate the synchronizing signal, obtain the image data from the camera, and transfer part or the whole of the image data to the output memory according to the destination addresses stored in the pattern memory.

    摘要翻译: 本发明的一个方面提供了一种用于转换车辆周围环境的装置,其包括:至少一个摄像机,被配置为在接收到同步信号时拍摄车辆的周围并输出表示照片的图像数据;输出存储器 被配置为存储要显示在安装在车辆上的显示器上的图像数据,被配置为存储输出存储器的目的地地址的图案存储器,以及被配置为生成同步信号的图像转换器,从相机获取图像数据, 部分或全部图像数据根据存储在图案存储器中的目的地地址输出到输出存储器。

    SURFACE WAVE EXCITATION PLASMA PROCESSING SYSTEM
    9.
    发明申请
    SURFACE WAVE EXCITATION PLASMA PROCESSING SYSTEM 有权
    表面波激发等离子体处理系统

    公开(公告)号:US20090232715A1

    公开(公告)日:2009-09-17

    申请号:US11910202

    申请日:2006-04-26

    IPC分类号: H05H1/46

    CPC分类号: H01J37/32192 H05H1/46

    摘要: To sustain uniform generation of plasma constantly over a large area. In the surface wave excitation plasma processing device, a plasma source includes: a microwave generator, a microwave waveguide and a dielectric block; and a plasma source also includes: a microwave generator, a microwave waveguide and a dielectric block. The lid of a chamber is fixed onto the microwave waveguides in parallel, and the dielectric blocks disposed in the chamber. A reflecting plate is disposed between the dielectric blocks so that electromagnetic waves propagating through the dielectric blocks are prevented from advancing into the counterpart dielectric blocks as reflected waves. Consequently, the plasma sources are controlled independently. Furthermore, a side reflector is disposed at outer circumference of each of the dielectric blocks so that a standing waves of the electromagnetic waves propagating through the dielectric blocks is formed thus forming a large area standing wave mode of surface waves uniformly.

    摘要翻译: 为了在大面积上不断地维持等离子体的等离子体生成。 在表面波激发等离子体处理装置中,等离子体源包括:微波发生器,微波波导和介质块; 并且等离子体源还包括:微波发生器,微波波导和介质块。 腔室的盖子平行地固定在微波波导上,并且介质块设置在腔室中。 反射板设置在介质块之间,从而防止通过介质块传播的电磁波作为反射波而前进到对方介质块。 因此,等离子体源被独立地控制。 此外,侧反射器设置在每个介质块的外周,从而形成传播通过介质块的电磁波的驻波,从而形成均匀的表面波的大面积驻波模式。

    Information providing device, information providing system, and information providing program product
    10.
    发明授权
    Information providing device, information providing system, and information providing program product 失效
    信息提供装置,信息提供系统和信息提供程序产品

    公开(公告)号:US07302321B2

    公开(公告)日:2007-11-27

    申请号:US10808478

    申请日:2004-03-25

    IPC分类号: B62D13/00

    CPC分类号: G08G1/162 G08G1/0962

    摘要: An information providing device installed in a leader vehicle that leads a follower vehicle, for providing the follower vehicle with guidance prepared by the leader vehicle, the information providing device that includes a state detector configured to detect a state change in the leader vehicle to output a detecting signal and a guidance generator configured to receive the detecting signal from the state detector, the guidance generator configured to prepare, in response to the detecting signal, guidance to guide the follower vehicle, the guidance including a photographed image of a view ahead of the leader vehicle.

    摘要翻译: 一种信息提供装置,其安装在引导随动车辆的引导车辆中,用于向后跟车辆提供由前导车辆准备的引导,所述信息提供装置包括状态检测器,所述状态检测器被配置为检测所述前导车辆中的状态变化以输出 检测信号和引导发生器,被配置为从所述状态检测器接收检测信号,所述引导发生器被配置为响应于所述检测信号准备引导以引导所述随动车辆,所述引导包括在所述检测信号之前的视野的拍摄图像 领导车。