公开(公告)号：US20130235274A1

公开(公告)日：2013-09-12

申请号：US13882851

申请日：2011-10-07

申请人： Osamu Nasu ,  Yoshiki Ono ,  Toshiaki Kubo ,  Naoyuki Fujiyama ,  Tomoatsu Horibe

发明人： Osamu Nasu ,  Yoshiki Ono ,  Toshiaki Kubo ,  Naoyuki Fujiyama ,  Tomoatsu Horibe

IPC分类号： H04N5/14

CPC分类号： H04N5/145 ,  H04N7/014

摘要： A motion vector detection device includes a motion estimator which detects block motion vectors (MV0) and a motion vector densifier (130). The motion vector densifier (130) further comprises a first motion vector generator (1341), a second motion vector generator (1342-134N), and a motion vector corrector (1371-137N). From each block, the first motion vector generator (1341) generates sub-blocks on a first layer, and generates a motion vector (MV1) for each sub-block on the first layer. In each layer from a second layer through an N-th layer, the second motion vector generator (1342-134N) generates a motion vector (MV7, where k=2 to N) for each sub-block in the layer. The motion vector corrector (1371-137N) corrects the motion vectors of the sub-blocks in layers subject to correction among the first through N-th layers.

摘要翻译： 运动矢量检测装置包括检测块运动矢量（MV0）和运动矢量增密器（130）的运动估计器。 运动矢量增强器（130）还包括第一运动矢量发生器（1341），第二运动矢量发生器（1342-134N）和运动矢量校正器（1371-137N）。 从每个块，第一运动矢量生成器（1341）在第一层上生成子块，并为第一层上的每个子块生成运动矢量（MV1）。 在从第二层到第N层的每个层中，第二运动矢量生成器（1342-134N）为层中的每个子块生成运动矢量（MV7，其中k = 2到N）。 运动矢量校正器（1371-137N）在第一至第N层之间校正经过校正的层中的子块的运动矢量。

公开(公告)号：US08817869B2

公开(公告)日：2014-08-26

申请号：US13226542

申请日：2011-09-07

申请人： Toshiaki Kubo ,  Yoshiki Ono ,  Naoyuki Fujiyama ,  Tomoatsu Horibe ,  Osamu Nasu

发明人： Toshiaki Kubo ,  Yoshiki Ono ,  Naoyuki Fujiyama ,  Tomoatsu Horibe ,  Osamu Nasu

IPC分类号： H04N7/26 ,  H04N7/46 ,  G06K9/00

CPC分类号： H04N7/467 ,  H04N19/543 ,  H04N19/587 ,  H04N19/86

摘要： To interpolate a frame between the current frame and a first delayed frame preceding the current frame, an image processing device generates test interpolation data for the first delayed frame from data in point-symmetric positions in the current frame and in a second delayed frame preceding the first delayed frame. Motion vectors pointing from the first delayed frame to the current frame are found by evaluating different test interpolation data against the actual data of the first delayed frame. These motion vectors are converted to pairs of motion vectors pointing from the first delayed frame and the current frame to the interpolated frame, and these pairs of motion vectors are used to detect occlusion and generate accurate data for the interpolated frame from the data of the first delayed frame and the current frame, excluding occluded data.

摘要翻译： 为了内插当前帧与当前帧之前的第一延迟帧，图像处理设备从当前帧中的点对称位置的数据和在当前帧之前的第二延迟帧中生成用于第一延迟帧的测试插值数据 第一延迟帧。 通过针对第一延迟帧的实际数据评估不同的测试插值数据，找到从第一延迟帧指向当前帧的运动矢量。 这些运动矢量被转换为从第一延迟帧和当前帧指向内插帧的运动矢量对，并且这些运动矢量对被用于检测遮挡并且从第一个帧的数据生成内插帧的准确数据 延迟帧和当前帧，不包括闭塞数据。

公开(公告)号：US08339519B2

公开(公告)日：2012-12-25

申请号：US13236821

申请日：2011-09-20

申请人： Toshiaki Kubo ,  Yoshiki Ono ,  Naoyuki Fujiyama ,  Tomoatsu Horibe ,  Osamu Nasu

发明人： Toshiaki Kubo ,  Yoshiki Ono ,  Naoyuki Fujiyama ,  Tomoatsu Horibe ,  Osamu Nasu

IPC分类号： H04N7/01

CPC分类号： H04N7/014

摘要： An image processing apparatus, in which an interpolation frame is inserted between a current frame and a first delayed frame preceding the current frame by one frame, includes a motion vector detector, a motion vector converter, and an interpolation frame generator; wherein the motion vector detector includes a test interpolator outputting test interpolation data, an interpolation data evaluator evaluating a correlation of each of the test interpolation data with reference to the first-delayed-frame block data, thereby outputting evaluation data indicating results of the evaluating, and a motion vector determiner outputting a motion vector of an item of the evaluation data having highest correlation in the plurality of items of the evaluation data; and the first to third test interpolation data are obtained as the test interpolation data from a plurality of items of the second-delayed-frame block data and a plurality of items of the current-frame block data.

摘要翻译： 一种图像处理装置，其中在当前帧和当前帧之前的第一延迟帧之间插入插值帧一帧，包括运动矢量检测器，运动矢量转换器和插值帧发生器; 其中所述运动矢量检测器包括输出测试插值数据的测试内插器，插值数据评估器，其针对所述第一延迟帧块数据来评估每个所述测试插值数据的相关性，从而输出指示所述评估结果的评估数据， 以及运动矢量确定器，输出在所述评估数据的所述多个项目中具有最高相关性的评估数据的项目的运动矢量; 并且从第二延迟帧块数据的多个项目和当前帧块数据的多个项目中获得第一至第三测试插值数据作为测试插值数据。

公开(公告)号：US20120099018A1

公开(公告)日：2012-04-26

申请号：US13236821

申请日：2011-09-20

申请人： Toshiaki Kubo ,  Yoshiki Ono ,  Naoyuki Fujiyama ,  Tomoatsu Horibe ,  Osamu Nasu

发明人： Toshiaki Kubo ,  Yoshiki Ono ,  Naoyuki Fujiyama ,  Tomoatsu Horibe ,  Osamu Nasu

IPC分类号： H04N7/01

CPC分类号： H04N7/014

摘要： An image processing apparatus, in which an interpolation frame is inserted between a current frame and a first delayed frame preceding the current frame by one frame, includes a motion vector detector, a motion vector converter, and an interpolation frame generator; wherein the motion vector detector includes a test interpolator outputting test interpolation data, an interpolation data evaluator evaluating a correlation of each of the test interpolation data with reference to the first-delayed-frame block data, thereby outputting evaluation data indicating results of the evaluating, and a motion vector determiner outputting a motion vector of an item of the evaluation data having highest correlation in the plurality of items of the evaluation data; and the first to third test interpolation data are obtained as the test interpolation data from a plurality of items of the second-delayed-frame block data and a plurality of items of the current-frame block data.

摘要翻译： 一种图像处理装置，其中在当前帧和当前帧之前的第一延迟帧之间插入插值帧一帧，包括运动矢量检测器，运动矢量转换器和插值帧发生器; 其中所述运动矢量检测器包括输出测试插值数据的测试内插器，插值数据评估器，其针对所述第一延迟帧块数据来评估每个所述测试插值数据的相关性，从而输出指示所述评估结果的评估数据， 以及运动矢量确定器，输出在所述评估数据的所述多个项目中具有最高相关性的评估数据的项目的运动矢量; 并且从第二延迟帧块数据的多个项目和当前帧块数据的多个项目中获得第一至第三测试插值数据作为测试插值数据。

公开(公告)号：US20110298973A1

公开(公告)日：2011-12-08

申请号：US13151524

申请日：2011-06-02

申请人： Toshiaki KUBO ,  Satoshi Yamanaka ,  Koji Minami ,  Yoshiki Ono ,  Osamu Nasu

发明人： Toshiaki KUBO ,  Satoshi Yamanaka ,  Koji Minami ,  Yoshiki Ono ,  Osamu Nasu

IPC分类号： H04N7/01

CPC分类号： H04N5/145 ,  G06T3/4007 ,  G09G3/2007 ,  G09G5/363 ,  G09G5/393 ,  G09G2320/106 ,  H04N7/0132 ,  H04N7/014

摘要： To interpolate a frame between the current frame and a first delayed frame preceding the current frame, an image processing device generates test interpolation data for the first delayed frame from data in point-symmetric positions in the current frame and in a second delayed frame preceding the first delayed frame. Motion vectors pointing from the first delayed frame to the current frame are found by evaluating different test interpolation data against the actual data of the first delayed frame. These motion vectors are converted to pairs of motion vectors pointing from the first delayed frame and the current frame to the interpolated frame, and these pairs of motion vectors are used to generate accurate data for the interpolated frame from the data of the first delayed frame and the current frame.

摘要翻译： 为了内插当前帧与当前帧之前的第一延迟帧，图像处理设备从当前帧中的点对称位置的数据和在当前帧之前的第二延迟帧中生成用于第一延迟帧的测试插值数据 第一延迟帧。 通过针对第一延迟帧的实际数据评估不同的测试插值数据，找到从第一延迟帧指向当前帧的运动矢量。 这些运动矢量被转换成从第一延迟帧和当前帧指向内插帧的运动矢量对，并且这些运动矢量对用于从第一延迟帧的数据生成内插帧的精确数据， 当前框架。

公开(公告)号：US20120298863A1

公开(公告)日：2012-11-29

申请号：US13568922

申请日：2012-08-07

申请人： Minoru Yamazaki ,  Akira Ikegami ,  Hideyuki Kazumi ,  Osamu Nasu

发明人： Minoru Yamazaki ,  Akira Ikegami ,  Hideyuki Kazumi ,  Osamu Nasu

IPC分类号： G01N23/225

CPC分类号： G01N23/2251 ,  G01R29/24 ,  H01J37/28 ,  H01J37/292 ,  H01J2237/221 ,  H01J2237/244 ,  H01J2237/24564 ,  H01J2237/24592 ,  H01J2237/2594

摘要： An object of the present invention is to provide a method and apparatus for measuring a potential on a surface of a sample using a charged particle beam while restraining a change in the potential on the sample induced by the charged particle beam application, or detecting a compensation value for a change in a condition for the apparatus caused by the sample being electrically charged. In order to achieve the above object, the present invention provides a method and apparatus for applying a voltage to a sample so that a charged particle beam does not reach the sample (hereinafter, this may be referred to as “mirror state”) in a state in which the charged particle beam is applied toward the sample, and detecting information relating to a potential on the sample using signals obtained by that voltage application.

摘要翻译： 本发明的目的是提供一种方法和装置，用于使用带电粒子束测量样品表面上的电位，同时抑制由带电粒子束施加引起的样品上的电位变化，或检测补偿 用于由样品带电引起的装置的状况改变的值。 为了实现上述目的，本发明提供了一种向样品施加电压使得带电粒子束未到达样品的方法和装置（以下称为镜像状态），其状态为 将带电粒子束施加到样品，并使用通过该电压施加获得的信号来检测与样品上的电位有关的信息。

公开(公告)号：US20110057101A1

公开(公告)日：2011-03-10

申请号：US12944434

申请日：2010-11-11

申请人： Osamu KOMURO ,  Osamu Nasu

发明人： Osamu KOMURO ,  Osamu Nasu

IPC分类号： G01N23/227

CPC分类号： H01J37/268 ,  H01J2237/047 ,  H01J2237/2008 ,  H01J2237/2803

摘要： A charged particle beam system wherein the output of the secondary electron detector is detected while the retarding voltage is varied between the values for which the secondary electrons do not reach the sample and the values for which the secondary electrons reach the sample, and the surface potential of the sample is determined on the basis of the relationship between the retarding voltage and the detected output of the secondary electron detector.

摘要翻译： 一种带电粒子束系统，其中在二次电子未到达样品的值和二次电子到达样品的值之间改变延迟电压并检测二次电子检测器的输出，并且表面电位 基于延迟电压与二次电子检测器的检测输出之间的关系来确定样品。

公开(公告)号：US07714288B2

公开(公告)日：2010-05-11

申请号：US12149218

申请日：2008-04-29

申请人： Tasuku Yano ,  Zhaohui Cheng ,  Takashi Furukawa ,  Osamu Nasu

发明人： Tasuku Yano ,  Zhaohui Cheng ,  Takashi Furukawa ,  Osamu Nasu

IPC分类号： G21K7/00 ,  G21G5/00 ,  G01N23/00 ,  H01J3/14

CPC分类号： G01N23/225 ,  H01J37/026 ,  H01J37/248 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/004 ,  H01J2237/28

摘要： Electrification affected on a surface of a sample which is caused by irradiation of a primary charged particle beam is prevented when plural frames are integrated to obtain an image of a predetermined area of the sample in a charged particle beam apparatus. The predetermined area of the sample is scanned with a primary electron beam from an electron gun, and plural frames are generated and integrated while detecting generated secondary electrons with a detector to obtain the image of the predetermined area. If it is determined by a detection signal of the detector that an electrification amount at the predetermined area becomes a specified value when generating plural frames, an electricity removal voltage is applied to a boosting electrode to remove or reduce the electrification, prior to generation of the next frame. Accordingly, the signal-to-noise ratio of the image obtained by integrating plural frames can be improved.

摘要翻译： 当多个帧被一体化以防止在带电粒子束装置中的样品的预定区域的图像时，防止了由一次带电粒子束的照射引起的样品表面影响的电气化。 用来自电子枪的一次电子束扫描样品的预定区域，并且用检测器检测产生的二次电子并产生并整合多个帧以获得预定区域的图像。 如果通过检测器的检测信号确定当产生多个帧时，预定区域的通电量变为规定值，则在生成多个帧之前将电去除电压施加到升压电极以去除或减少通电， 下一帧。 因此，可以提高通过对多个帧进行积分而获得的图像的信噪比。

公开(公告)号：US20090214122A1

公开(公告)日：2009-08-27

申请号：US12434786

申请日：2009-05-04

申请人： Mitsuji IKEDA ,  Tatsuya Maeda ,  Osamu Nasu ,  Fumihiro Sasajima

发明人： Mitsuji IKEDA ,  Tatsuya Maeda ,  Osamu Nasu ,  Fumihiro Sasajima

IPC分类号： G06K9/62

CPC分类号： G06T7/001 ,  G01N21/95607 ,  G06T2207/30148

摘要： Information indicating the reason for a failure of template matching is provided. Difference information between a first image, which is referred to as a template, and a third image that is selected by the operator from a second image and that is larger than the template is displayed.

摘要翻译： 提供指示模板匹配失败的原因的信息。 显示被称为模板的第一图像与操作者从第二图像选择并且大于模板的第三图像之间的差异信息。

公开(公告)号：US5466929A

公开(公告)日：1995-11-14

申请号：US20802

申请日：1993-02-22

申请人： Katsuhiko Sakai ,  Osamu Nasu ,  Yoichi Ose

发明人： Katsuhiko Sakai ,  Osamu Nasu ,  Yoichi Ose

IPC分类号： H01J37/02 ,  H01J37/30 ,  H05H3/00

CPC分类号： H01J37/026 ,  H01J2237/0041 ,  H01J2237/0044 ,  H01J2237/3175

摘要： When a charged beam is irradiated on a sample, charge up of electric charge of the same polarity as that of the charged beam is built up on the sample surface. In order to neutralize the charge up electric charge, an apparatus for suppressing electrification of sample in charged beam irradiation apparatus is provided in which electric charge of opposite polarity to that of the charged beam is generated near the sample surface to neutralize the charged beam or charge up electric charge on the sample surface. The electric charge for neutralization is generated by admitting elecrtic charge from a plasma generation unit to the vicinity of the sample surface, ionizing gas generated from the sample surface by causing the charged beam to collide the gas or by irradiating electrons from an electron source on the sample surface. Especially when there is a possibility that impurities other than the electric charge for neutralization affect the sample adversely, an impurity generation source is blind folded with a cover so as not to be seen through from the sample and charged beam so that the impurities may be prevented from impinging upon the sample surface or intersecting the charged beam path.

摘要翻译： 当将带电束照射在样品上时，在样品表面上积累与带电束相同极性的电荷的充电。 为了中和充电电荷，提供了一种用于抑制带电束照射装置中的样品带电的装置，其中在样品表面附近产生与带电束的极性相反极性的电荷以中和充电的光束或电荷 样品表面上的电荷。 用于中和的电荷是通过将等离子体发生单元的电荷进入到样品表面附近而产生的，通过使带电的束撞击气体或通过在电子源上照射电子而从样品表面产生的电离电离 样品表面。 特别是当除了中和电荷以外的杂质有可能不利地影响样品时，杂质产生源被遮盖物盲目地折叠，从而不能从样品和带电束中透过，从而可以防止杂质 撞击在样品表面上或与带电光束相交。