摘要:
Several mid UV photo acid generators (PAGs), a chemically amplified photo resist (CAMP), and method for improving nested to isolated line bias are provided. Similarly, photo speed may also be improved. Unlike conventional mid UV PAGs, the present invention's PAG compounds, resist composition, and method do not require a mid UV sensitizer. Specifically, PAGs are provided that bear a chromophore capable of receiving mid UV radiation, particularly I-line, and that are suitable for use in a chemically amplified photo resist having a photo speed of 500 mJ/cm.sup.2 or less, but preferrably 200 mJ/cm.sup.2 or less. For example, the PAGs can be a sulfonium or iodonium salt, such as anthryl, butyl, methyl sulfonium triflate and bis(4-t-butylphenyl)iodonium 9,10-dimethoxyanthracene sulfonate. The chromophore forming a part of the PAGs can be selected from polyaromatic hydrocarbons, for example, chrysenes, pyrenes, fluoranthenes, anthrones, benzophenones, thioxanthones, anthracenes, and phenanthrenes, but preferably anthracenes.
摘要翻译:提供了几个中等紫外光酸产生剂(PAG),化学放大光抗蚀剂(CAMP)和改进嵌套到隔离线偏压的方法。 类似地,也可以提高照相速度。 与传统的中等紫外线PAG不同,本发明的PAG化合物,抗蚀剂组合物和方法不需要中等紫外线敏化剂。 具体地说,提供了能够承受中等紫外线辐射,特别是I线的发色团的PAG,并且适合用于光速为500mJ / cm 2以下但优选为200mJ / cm 2的化学放大型光致抗蚀剂的PAG, cm2以下。 例如,PAG可以是锍或碘鎓盐,例如蒽基,丁基,甲基锍三氟甲磺酸酯和双(4-叔丁基苯基)碘9,10-二甲氧基蒽磺酸盐。 形成PAG的一部分的发色团可以选自多芳族烃,例如氯仿,芘,荧蒽,蒽,二苯甲酮,噻吨酮,蒽和菲,但优选为蒽。
摘要:
Dialkyl gold(III) .beta.-diketonates are synthesized in a two-step, one-pot process using a gold trihalide, an alkyl lithium compound and a .beta.-diketone.
摘要:
The present invention relates to thioxanthone sensitizers for radiation sensitive polyimide compositions for use in manufacturing integrated circuits such as chips, thin film packaging and printed circuit boards.
摘要:
Polymeric diazonium salts are coupled to coupling agents without complications of precipitation by injecting a diazonium salt solution into a substantial volume excess of the coupling agent solution immediately adjacent to the impellor of a centrifugal pump or the like.
摘要:
Pendant amide polymers, especially polymers containing N-vinylacetamide, N-alkyl-N-vinylacetamide, or N-vinyl-formamide units, are hydrolyzed to pendant amine polymers, especially vinylamine polymers by contact with strong aqueous base at elevated temperature.
摘要:
An improvement in the diazotization of polymeric amines is disclosed that minimizes crosslinking problems. Solutions of nitrite ion and polymeric amine are concurrently continuously fed at controlled rates to a turbulently agitated limited volume mixing zone.
摘要:
Poly(vinylamine salts of mineral acids are produced by reacting acetaldehyde and acetamide at a mole ratio of 1:2-4 with acid catalyst, cracking the ethylidene-bisacetamide which results into vinylacetamide, polymerizing the vinylacetamide with a free radical polymerization catalyst, and hydrolyzing the poly(vinylacetamide) to the desired amine salts by contacting the polyvinylacetamide with an aqueous solution of the corresponding mineral acid. This product may be converted to the free amine, which in turn may function as a precursor in the manufacture of certain polymeric dyes and colorants.
摘要:
Edible materials including foods, beverages and oral pharmaceuticals are sweetened by the addition of a sweetening amount in the range of from about 0.002% to 1% by weight (basis edible material) of flavanone represented by the structural formula ##STR1## wherein R is a lower alkyl of from one to three carbon atoms inclusive, n is an integer of from one to three inclusive and M is hydrogen or a physiologically acceptable metal cation.
摘要:
A group of water-soluble polymeric yellow colors and their preparation is disclosed. These colors comprise a plurality of units of a chromophore of the formula ##STR1## wherein M.sup.+ is a pharmaceutically acceptable monovalent cation attached directly to amine units present in a nonchromophoric polymer backbone. In a preferred embodiment of the invention the backbone is a homopolymer or copolymer of vinylamine. These colorants find special utility as nonabsorbable colorants for edibles, especially foods and beverages, where their yellow hue is an excellent color match for existing monomeric azo food colors such as tartrazine, and as components of acid-insoluble pigment lakes which are themselves suitable for use in edibles.
摘要:
A group of water-soluble polymeric yellow colors and their preparation is disclosed. These colors comprise a plurality of units of a chromophore of the formula ##STR1## wherein M.sup.+ is a pharmaceutically acceptable monovalent cation, attached directly to amine units present in a nonchromophoric polymer backbone. In a preferred embodiment of the invention the backbone is a homopolymer or copolymer of vinylamine. These colorants find special utility as nonabsorbable colorants for edibles, especially foods and beverages, where their yellow hue is an excellent color match for existing monomeric azo food colors such as tartrazine, and as components of acid-insoluble pigment lakes which are themselves suitable for use in edibles.