ANCHORING CONDUCTIVE MATERIAL IN SEMICONDUCTOR DEVICES
    1.
    发明申请
    ANCHORING CONDUCTIVE MATERIAL IN SEMICONDUCTOR DEVICES 审中-公开
    半导体器件中的导电材料

    公开(公告)号:US20170005160A1

    公开(公告)日:2017-01-05

    申请号:US14973479

    申请日:2015-12-17

    CPC classification number: H01L28/60 H01L23/5223 H01L23/53228 H01L28/75

    Abstract: Copper (Cu) grain boundaries can move during a thermal cycle resulting in the Cu grain position being offset. Such Cu pumping can disturb the surface of a bottom metal, and can physically break a dielectric of a metal-insulator-metal (MIM) capacitor. By capping the bottom metal with an anchoring cap, Cu pumping is reduced or eliminated.

    Abstract translation: 铜(Cu)晶界可以在热循环期间移动,导致Cu晶粒位置偏移。 这种Cu泵浦可能会干扰底部金属的表面,并且可以物理地破坏金属 - 绝缘体 - 金属(MIM)电容器的电介质。 通过用锚固帽盖住底部金属,减少或消除Cu泵送。

Patent Agency Ranking