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公开(公告)号:US20170005160A1
公开(公告)日:2017-01-05
申请号:US14973479
申请日:2015-12-17
Applicant: QUALCOMM Incorporated
Inventor: Shiqun GU , Yue LI , Ratibor RADOJCIC
IPC: H01L49/02 , H01L23/532 , H01L23/522
CPC classification number: H01L28/60 , H01L23/5223 , H01L23/53228 , H01L28/75
Abstract: Copper (Cu) grain boundaries can move during a thermal cycle resulting in the Cu grain position being offset. Such Cu pumping can disturb the surface of a bottom metal, and can physically break a dielectric of a metal-insulator-metal (MIM) capacitor. By capping the bottom metal with an anchoring cap, Cu pumping is reduced or eliminated.
Abstract translation: 铜(Cu)晶界可以在热循环期间移动,导致Cu晶粒位置偏移。 这种Cu泵浦可能会干扰底部金属的表面,并且可以物理地破坏金属 - 绝缘体 - 金属(MIM)电容器的电介质。 通过用锚固帽盖住底部金属,减少或消除Cu泵送。
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2.
公开(公告)号:US20160133614A1
公开(公告)日:2016-05-12
申请号:US14536363
申请日:2014-11-07
Applicant: QUALCOMM Incorporated
Inventor: Shiqun GU , Ratibor RADOJCIC , Mustafa BADAROGLU , Chunlei SHI , Yuancheng Christopher PAN
IPC: H01L25/16 , H01L23/522 , H01L23/498 , H01L21/683 , H01L21/56 , H01L21/768 , H01L21/48 , H01L25/065 , H01L25/00
CPC classification number: H01L25/16 , H01L21/568 , H01L21/6835 , H01L23/295 , H01L23/3128 , H01L23/49816 , H01L23/49822 , H01L23/49827 , H01L23/5389 , H01L24/19 , H01L24/20 , H01L25/0655 , H01L25/0657 , H01L25/105 , H01L25/50 , H01L2221/68359 , H01L2224/04105 , H01L2224/12105 , H01L2224/16227 , H01L2224/24195 , H01L2224/32225 , H01L2224/81005 , H01L2225/06517 , H01L2225/06548 , H01L2225/06572 , H01L2225/1023 , H01L2225/1035 , H01L2225/1041 , H01L2225/1058 , H01L2924/14 , H01L2924/1432 , H01L2924/1434 , H01L2924/15192 , H01L2924/15311 , H01L2924/181 , H01L2924/19042 , H01L2924/19105 , H01L2924/00012
Abstract: The present disclosure provides semiconductor packages and methods for fabricating semiconductor packages. The semiconductor package may comprise a semiconductor device mounted to a first substrate, a voltage regulator mounted to the first substrate and coupled to the semiconductor device, and an inductive element located on a perimeter of the semiconductor device and coupled to the voltage regulator, wherein the inductive element is formed by a plurality of interconnected conductive elements extending vertically from the first substrate.
Abstract translation: 本公开提供了用于制造半导体封装的半导体封装和方法。 半导体封装可以包括安装到第一衬底的半导体器件,安装到第一衬底并耦合到半导体器件的电压调节器,以及位于半导体器件的周边并耦合到电压调节器的电感元件,其中, 电感元件由从第一基板垂直延伸的多个互连导电元件形成。
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