公开(公告)号：US06698287B2

公开(公告)日：2004-03-02

申请号：US10285886

申请日：2002-11-01

申请人： Randall L. Kubena ,  Richard Joyce ,  Robert Thomas M'Closkey ,  A. Dorian Challoner

发明人： Randall L. Kubena ,  Richard Joyce ,  Robert Thomas M'Closkey ,  A. Dorian Challoner

IPC分类号： G01C1900

CPC分类号： G01C19/5719 ,  G01P2015/084

摘要： The present invention discloses methods of manufacturing mechanical resonator microgyroscopes using focused ion beam machining and the mechanical resonator gyroscopes produced therefrom. An exemplary method of tuning a mechanical resonator gyroscope, includes the steps of mounting a mechanical resonator gyroscope in a vacuum chamber with a controllable focused ion beam where the gyroscope includes exciting and sensing elements for measuring a resonant frequency of the gyroscope. The exciting and sensing elements are activated to measure the resonant frequency of the mechanical resonator gyroscope and the resonant frequency of the gyroscope is adjusted to a desired resonant frequency value by controlling the focused ion beam to remove material of the gyroscope.

摘要翻译： 本发明公开了使用聚焦离子束加工和由其制造的机械谐振器陀螺仪制造机械谐振器微型光学器件的方法。 调谐机械谐振器陀螺仪的示例性方法包括以下步骤：将机械谐振器陀螺仪安装在具有可控聚焦离子束的真空室中，其中陀螺仪包括用于测量陀螺仪的谐振频率的激励和感测元件。 激励和感测元件被激活以测量机械谐振器陀螺仪的谐振频率，并且通过控制聚焦离子束以去除陀螺仪的材料，将陀螺仪的谐振频率调整到期望的谐振频率值。

公开(公告)号：US07493814B2

公开(公告)日：2009-02-24

申请号：US11615872

申请日：2006-12-22

申请人： David Whelan ,  A. Dorian Challoner

发明人： David Whelan ,  A. Dorian Challoner

IPC分类号： G01P9/04

CPC分类号： G01C19/5684

摘要： Operation of a planar resonator gyroscope with in-plane parasitic modes of vibration to obtain improved performance is disclosed. A planar resonator gyroscope, such as a disc resonator gyroscope, may be operated with embedded electrodes. The embedded electrodes may be disposed adjacent to the planar resonator and proximate to one or more anti-nodes of a parasitic vibration mode. A sensed amplitude of the parasitic mode is applied in differential signals used to operate the gyroscope. A feedback controller for damping the parasitic mode applies a drive voltage generated from the proportional voltage to one or more drive electrodes adjacent to the planar resonator disposed proximate to one or more anti-nodes of the parasitic vibration mode of the planar resonator. Parasitic in-plane modes may be thus damped in operating the gyroscope with active damping applied through an analog operational amplifier or digital feedback.

摘要翻译： 公开了具有面内寄生振动模式的平面谐振器陀螺仪的操作以获得改进的性能。 可以使用嵌入式电极来操作诸如盘式谐振器陀螺仪的平面谐振器陀螺仪。 嵌入式电极可以布置成与平面谐振器相邻并且靠近寄生振动模式的一个或多个反节点。 在用于操作陀螺仪的差分信号中应用感测到的寄生模式的幅度。 用于阻尼寄生模式的反馈控制器将从比例电压产生的驱动电压施加到靠近平面谐振器的寄生振动模式的一个或多个反节点设置的平面谐振器附近的一个或多个驱动电极。 在通过模拟运算放大器或数字反馈施加的主动阻尼的陀螺仪的操作中，寄生面内模式可能被阻尼。

公开(公告)号：US07437253B2

公开(公告)日：2008-10-14

申请号：US11192759

申请日：2005-07-29

申请人： Kirill V. Shcheglov ,  Ken J. Hayworth ,  A. Dorian Challoner ,  Chris S. Peay

发明人： Kirill V. Shcheglov ,  Ken J. Hayworth ,  A. Dorian Challoner ,  Chris S. Peay

IPC分类号： G01R23/00

CPC分类号： G01C19/5684 ,  Y10T29/49009 ,  Y10T74/1229

摘要： Parametrically disciplined operation of a symmetric nearly degenerate mode vibratory gyroscope is disclosed. A parametrically-disciplined inertial wave gyroscope having a natural oscillation frequency in the neighborhood of a sub-harmonic of an external stable clock reference is produced by driving an electrostatic bias electrode at approximately twice this sub-harmonic frequency to achieve disciplined frequency and phase operation of the resonator. A nearly symmetric parametrically-disciplined inertial wave gyroscope that can oscillate in any transverse direction and has more than one bias electrostatic electrode that can be independently driven at twice its oscillation frequency at an amplitude and phase that disciplines its damping to zero in any vibration direction. In addition, operation of a parametrically-disciplined inertial wave gyroscope is taught in which the precession rate of the driven vibration pattern is digitally disciplined to a prescribed non-zero reference value.

摘要翻译： 公开了一种对称的近退模式振动陀螺仪的参数规范的操作。 通过以大约两倍的次谐波频率驱动静电偏置电极来产生具有外部稳定时钟基准的亚谐波附近的固有振荡频率的参数规律的惯性陀螺仪，以实现规则频率和相位操作 谐振器。 一个近似对称的参数规范的惯性波陀螺仪，其可以在任何横向方向上振荡并且具有多于一个的偏置静电电极，该偏置静电电极可以在其振荡和相位独立地以两倍的振荡频率驱动，其在任何振动方向上将其阻尼归零。 另外，教导参数规律的惯性波陀螺仪的操作，其中驱动振动模式的进动速率被数字地规定为规定的非零参考值。

公开(公告)号：US07100444B2

公开(公告)日：2006-09-05

申请号：US10405178

申请日：2003-04-02

申请人： A. Dorian Challoner

发明人： A. Dorian Challoner

IPC分类号： G01P9/04

CPC分类号： G01C19/5719 ,  G01P2015/084 ,  Y10T29/49007 ,  Y10T74/12

摘要： The present invention discloses a resonator gyroscope comprising a resonator including two bodies, each with a center of mass and transverse inertia symmetry about an axis that are substantially coincident and each supported by one or more elastic elements and wherein the bodies together forming two differential rocking modes of vibration transverse to the axis with substantially equal frequencies and wherein the two bodies transfer substantially no net momentum to the baseplate when the resonator is excited. The gyroscope further includes a baseplate affixed to the resonator by the one or more elastic elements.

摘要翻译： 本发明公开了一种谐振器陀螺仪，其包括谐振器，该谐振器包括两个主体，每个主体具有围绕基本上重合的轴的质心和横向惯性对称性，并且各自由一个或多个弹性元件支撑，并且其中主体一起形成两个差分摇摆模式 振动横向于具有基本相等频率的轴，并且其中当谐振器被激励时，两个主体基本上不传递净动量到基板。 陀螺仪还包括通过一个或多个弹性元件固定到谐振器的基板。

公开(公告)号：US07017410B2

公开(公告)日：2006-03-28

申请号：US10370953

申请日：2003-02-20

申请人： A. Dorian Challoner ,  Kirill V. Shcheglov

发明人： A. Dorian Challoner ,  Kirill V. Shcheglov

IPC分类号： G01C19/00

CPC分类号： G01C19/5656 ,  G01C19/5719 ,  G01P2015/084 ,  Y10T29/49007

摘要： The present invention discloses a resonator gyroscope comprising a vibrationally isolated resonator including a proof mass, a counterbalancing plate having an extensive planar region, and one or more flexures interconnecting the proof mass and counterbalancing plate. A baseplate is affixed to the resonator by the one or more flexures and sense and drive electrodes are affixed to the baseplate proximate to the extensive planar region of the counterbalancing plate for exciting the resonator and sensing movement of the gyroscope. The isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited.

公开(公告)号：US5816538A

公开(公告)日：1998-10-06

申请号：US322859

申请日：1994-10-13

申请人： A. Dorian Challoner ,  Harold A. Rosen

发明人： A. Dorian Challoner ,  Harold A. Rosen

IPC分类号： B64G1/24 ,  B64G1/28 ,  B64G1/38 ,  G05D1/08 ,  G05D2/08

CPC分类号： G05D1/0883 ,  B64G1/24 ,  B64G1/28 ,  B64G1/281 ,  B64G1/288 ,  B64G1/38 ,  B64G2001/245

摘要： The invention provides a method for controlling the precession of a spinning spacecraft (20) which allows the spacecraft body to respond to an input torque without the nutation normally attendant when an input torque is applied about one transverse axis to accelerate a spinning spacecraft about that one axis. Dynamic decoupling eliminates nutation through the impression of additional derived feedback torques (44,46) to the input torque control of a spinning spacecraft to oppose or cancel the intrinsic cross-coupling terms (34,36) of the spinning spacecraft's gyrodynamics that give rise to the nutation. Thus, a single spacecraft design can provide the benefits of a spinning bus such as a simplified thruster control system for orbit control, improved temperature environment for many payload elements, spin-averaging of body-fixed disturbances and gyro drift errors, and propellant management as well as the major benefit of a body-stabilized or non-rotation spacecraft design which is freedom from nutation and hence improved performance.

摘要翻译： 本发明提供了一种用于控制旋转航天器（20）的进动的方法，其允许航天器主体响应输入扭矩而不需要在一个横轴上施加输入扭矩时通常伴随的章动，从而加速关于该旋转航空器的旋转航天器 轴。 动态去耦消除了通过额外的派生反馈转矩（44,46）到旋转航天器的输入转矩控制的印象，以反对或消除旋转航天器的陀螺动力学的内在交叉耦合术语（34,36），从而产生 章动 因此，单个航天器设计可以提供旋转总线的优点，例如用于轨道控制的简化的推进器控制系统，用于许多有效载荷元件的改善的温度环境，身体固定的扰动的旋转平均和陀螺仪漂移误差，以及推进剂管理 以及身体稳定或非旋转航天器设计的主要优点，其免于章动，从而改善性能。

公开(公告)号：US4825646A

公开(公告)日：1989-05-02

申请号：US41564

申请日：1987-04-23

申请人： A. Dorian Challoner ,  Robert L. Poeschel

发明人： A. Dorian Challoner ,  Robert L. Poeschel

IPC分类号： B64G1/24 ,  B64G1/26 ,  B64G1/28 ,  B64G1/40 ,  F03H1/00 ,  H05H1/16

CPC分类号： F03H1/0037 ,  B64G1/281 ,  B64G1/405 ,  B64G1/242 ,  B64G1/26

摘要： An axial electrostatic ion thruster for use on a dual-spin stabilized spacecraft is disclosed. The thruster is mounted on the spun portion of the spacecraft and continuously fired for an integral number of spin periods to provide north-south velocity and attitude control. To achieve zero attitude precession with a statically imbalanced despun platform, or an intentional attitude precession generally, the ion thrust is spin-synchronously varied between two non-zero levels to achieve a prescribed Fourier component amplitude and phase at the spin frequency. Modulation of the thrust is achieved with constant ion beam current by complementary modulation of the beam voltage, V.sub.B, and accel voltage, V.sub.A by varying the ion extraction system grid voltages. This varies the thrust while maintaining a constant total accelerating voltage V.sub.TOT =V.sub.B +.vertline.V.sub.A .vertline..

摘要翻译： 公开了一种用于双自旋稳定的航天器的轴向静电离子推进器。 推进器安装在航天器的旋转部分，并连续射击一整个旋转周期，以提供南北速度和姿态控制。 为了通过静态不平衡的解码平台实现零姿态进动，或通常有意的姿态进动，离子推力在两个非零水平之间自旋同步地变化，以实现在自旋频率下的规定的傅立叶分量幅度和相位。 通过改变离子提取系统电网电压，通过对束电压，VB和加速电压VA的互补调制，通过恒定的离子束电流来实现推力的调制。 这可以改变推力，同时保持恒定的总加速电压VTOT = VB + | VA|。

公开(公告)号：US20100300201A1

公开(公告)日：2010-12-02

申请号：US12473084

申请日：2009-05-27

申请人： Howard H. Ge ,  A. Dorian Challoner

发明人： Howard H. Ge ,  A. Dorian Challoner

IPC分类号： G01C19/56 ,  B44C1/22

CPC分类号： G01C19/5712 ,  B81B7/0048 ,  B81B7/0096 ,  B81B2201/0242 ,  G01C25/00 ,  Y10T29/49007 ,  Y10T29/4902 ,  Y10T29/49083 ,  Y10T29/49105

摘要： A micromachined thermal and mechanical isolator for MEMS die that may include two layers, a first layer with an active temperature regulator comprising a built-in heater and temperature sensor and a second layer having mechanical isolation beams supporting the die. The isolator may be inserted between a MEMS die of a disc resonator gyroscope (DRG) chip and the leadless chip carrier (LCC) package to isolate the die from stress and temperature gradients. Thermal and mechanical stress to the DRG can be significantly reduced in addition to mitigating temperature sensitivity of the DRG chip. The small form can drastically reduce cost and power consumption of the MEMS inertial sensor and enable new applications such as smart munitions, compact and integrated space navigation solutions, with significant potential cost savings over the existing inertial systems.

摘要翻译： 一种用于MEMS管芯的微加工热和机械隔离器，其可以包括两层，具有主动温度调节器的第一层，其包括内置加热器和温度传感器，以及具有支撑所述管芯的机械隔离梁的第二层。 隔离器可以插入在盘式谐振器陀螺仪（DRG）芯片的MEMS管芯和无引线芯片载体（LCC）封装之间，以将管芯与应力和温度梯度隔离。 除了降低DRG芯片的温度敏感性之外，DRG的热和机械应力可以显着降低。 这种小型化可以大大降低MEMS惯性传感器的成本和功耗，并实现了诸如智能弹药，紧凑型和集成的空间导航解决方案等新应用，相比现有的惯性系统具有显着的潜在成本。

公开(公告)号：US20080295622A1

公开(公告)日：2008-12-04

申请号：US11757395

申请日：2007-06-04

申请人： A. Dorian Challoner

发明人： A. Dorian Challoner

IPC分类号： G01C19/28

CPC分类号： G01C19/5684 ,  Y10T74/1275

摘要： Packaging techniques for planar resonator gyroscopes, such as disc resonator gyroscopes (DRGs) are disclosed. A gyroscope die may be attached to its package substrate on a central disc area that is inboard of its embedded electrodes. This configuration eliminates contact of the die with the package substrate beneath the embedded electrodes allowing the internal electrode support structure to expand or contract freely without stress as its temperature changes. The central attachment can also be used diminish the package temperature gradients on the periphery of the die, if the thermal conductivity of the central disc attachment material is higher than the package substrate. Temperature gradients across the resonator also lead to thermoelastic damping asymmetry and rate drift. In addition, the electrical connections to the die may be formed by vertical vias within the central disc attachment area or by thin wirebonds to peripheral I/O pads on the gyro chip.

摘要翻译： 公开了平面谐振器陀螺仪的包装技术，例如盘式谐振器陀螺仪（DRG）。 陀螺仪芯片可以在其封装衬底上附着在其嵌入电极内侧的中心盘区域上。 这种配置消除了裸片与嵌入电极下面的封装衬底的接触，允许内部电极支撑结构随着其温度变化而自由地膨胀或收缩而不受应力。 如果中心盘附件材料的导热率高于封装衬底，也可以使用中心附件来减小管芯周围的封装温度梯度。 谐振器的温度梯度也导致热弹性阻尼不对称和速率漂移。 此外，与芯片的电连接可以由中心盘附接区域内的垂直通孔形成，也可以通过与陀螺仪芯片上的周边I / O焊盘的薄引线键合而形成。

公开(公告)号：US07396478B2

公开(公告)日：2008-07-08

申请号：US11850458

申请日：2007-09-05

申请人： Ken J. Hayworth ,  Karl Y. Yee ,  Kirill V. Shcheglov ,  Youngsam Bae ,  Dean V. Wiberg ,  A. Dorian Challoner ,  Chris S. Peay

发明人： Ken J. Hayworth ,  Karl Y. Yee ,  Kirill V. Shcheglov ,  Youngsam Bae ,  Dean V. Wiberg ,  A. Dorian Challoner ,  Chris S. Peay

IPC分类号： B44C1/22 ,  H01L21/00

CPC分类号： G01C19/5719 ,  B81B7/007

摘要： A Multiple Internal Seal Ring (MISR) Micro-Electro-Mechanical System (MEMS) vacuum packaging method that hermetically seals MEMS devices using MISR. The method bonds a capping plate having metal seal rings to a base plate having metal seal rings by wafer bonding the capping plate wafer to the base plate wafer. Bulk electrodes may be used to provide conductive paths between the seal rings on the base plate and the capping plate. All seals are made using only metal-to-metal seal rings deposited on the polished surfaces of the base plate and capping plate wafers. However, multiple electrical feed-through metal traces are provided by fabricating via holes through the capping plate for electrical connection from the outside of the package through the via-holes to the inside of the package. Each metal seal ring serves the dual purposes of hermetic sealing and providing the electrical feed-through metal trace.

摘要翻译： 使用MISR密封MEMS器件的多内密封环（MISR）微机电系统（MEMS）真空包装方法。 该方法通过将封盖板晶片与基板晶片结合，将具有金属密封环的封盖板与具有金属密封环的基板结合。 散装电极可用于在基板和封盖板上的密封环之间提供导电路径。 所有密封件仅使用沉积在基板和封盖板晶片的抛光表面上的金属对金属密封环制成。 然而，通过制造通过盖板的通孔来提供多个电馈通金属迹线，用于从封装的外部通过通孔到封装的内部进行电连接。 每个金属密封环都用于气密密封的双重目的，并提供电气馈通金属痕迹。