公开(公告)号：US20090026361A1

公开(公告)日：2009-01-29

申请号：US12220321

申请日：2008-07-23

Applicant: Richard Syms ,  Alan Finlay

Inventor： Richard Syms ,  Alan Finlay

IPC: B01D59/44

CPC classification number: H01J3/14 ,  H01J49/0018 ,  H01J49/065

Abstract: Microengineered stacked ring electrode assemblies capable of acting as either RF or DC ion guides in an ion optical system, and method of fabricating same are described. The electrodes are fabricated using planar processing as sets of grooved, proud features formed in a layer of material lying on an insulating substrate. Two such structures are then stacked together to form a set of diaphragm electrodes with closed pupils. Arrangements for fabrication by patterning, etching and bonding are described, together with methods for tapering the electrode pupils or otherwise varying the ion path.

Abstract translation: 描述了能够在离子光学系统中用作RF或DC离子导向器的微工程堆叠环形电极组件及其制造方法。 这些电极使用平面加工制造成为在位于绝缘衬底上的材料层中形成的一组带槽的引人注目的特征。 然后将两个这样的结构堆叠在一起以形成具有闭合瞳孔的一组隔膜电极。 描述通过图案化，蚀刻和接合进行制造的布置以及用于使电极瞳孔逐渐变细或以其它方式改变离子路径的方法。

公开(公告)号：US07960693B2

公开(公告)日：2011-06-14

申请号：US12220321

申请日：2008-07-23

Applicant: Richard Syms ,  Alan Finlay

Inventor： Richard Syms ,  Alan Finlay

IPC: H01J49/42

CPC classification number: H01J3/14 ,  H01J49/0018 ,  H01J49/065

Abstract: Microengineered stacked ring electrode assemblies capable of acting as either RF or DC ion guides in an ion optical system, and method of fabricating same are described. The electrodes are fabricated using planar processing as sets of grooved, proud features formed in a layer of material lying on an insulating substrate. Two such structures are then stacked together to form a set of diaphragm electrodes with closed pupils. Arrangements for fabrication by patterning, etching and bonding are described, together with methods for tapering the electrode pupils or otherwise varying the ion path.

Abstract translation: 描述了能够在离子光学系统中用作RF或DC离子导向器的微工程堆叠环形电极组件及其制造方法。 这些电极使用平面加工制造成为在位于绝缘衬底上的材料层中形成的一组带槽的引人注目的特征。 然后将两个这样的结构堆叠在一起以形成具有闭合瞳孔的一组隔膜电极。 描述通过图案化，蚀刻和接合进行制造的布置以及用于使电极瞳孔逐渐变细或以其它方式改变离子路径的方法。

公开(公告)号：US20110000986A1

公开(公告)日：2011-01-06

申请号：US12823318

申请日：2010-06-25

Applicant: Richard Syms

Inventor： Richard Syms

IPC: F23D11/32

CPC classification number: H01J49/0018 ,  H01J49/167

Abstract: This invention provides a method of combining an array-type nanospray ionisation source comprising a set of externally wetted proud features and a contact electrode with a pneumatic nebuliser acting to enhance the flux of sprayed ions. Methods of fabricating a substrate combining a set of proud features with analyte delivery and gas flow channels in silicon-based materials are described.

Abstract translation: 本发明提供了一种组合阵列型纳米喷雾电离源的方法，其包括一组外部润湿的骄傲特征和接触电极与用于增强喷射离子通量的气动雾化器。 描述了在硅基材料中组合一组骄傲特征与分析物传送和气体流动通道的方法。

公开(公告)号：US20100276588A1

公开(公告)日：2010-11-04

申请号：US12001796

申请日：2007-12-12

Applicant: Richard Syms

Inventor： Richard Syms

IPC: H01J27/00 ,  H01J49/26

CPC classification number: G01N27/62 ,  H01J49/0018 ,  H01J49/165

Abstract: This invention provides a method of aligning a capillary needle, a set of electrodes, and an input to a mass spectrometer. The electrode system is formed as an assembly of two separate chips and forms an ionisation device. Each chip is formed on an insulating plastic substrate. The first chip carries mechanical alignment features for the capillary electrospray needle together with a set of partial electrodes. The second chip carries a set of partial electrodes. The complete electrode system is formed when the chips are assembled in a stacked configuration.

Abstract translation: 本发明提供了一种将毛细针，一组电极和一个输入对准到质谱仪的方法。 电极系统形成为两个分开的芯片的组件并形成电离装置。 每个芯片形成在绝缘塑料基板上。 第一芯片与一组部分电极一起携带用于毛细管电喷针的机械对准特征。 第二芯片承载一组部分电极。 当芯片以堆叠构造组装时，形成完整的电极系统。

公开(公告)号：US07294954B2

公开(公告)日：2007-11-13

申请号：US11032546

申请日：2005-01-10

Applicant: Richard Syms

Inventor： Richard Syms

IPC: H01J40/00

CPC classification number: H01J43/246 ,  H01J9/125 ,  H01J43/22

Abstract: This invention provides for a simple method of fabricating miniature electron multipliers, in an in-plane configuration suitable for use with miniature analytic instruments such as mass filters. The materials involved are predominantly silicon and compatible oxides, allowing the possibility of integration with a mass filter formed in a similar materials system. The materials are selected simultaneously to withstand high voltages and to enhance secondary electron emission. Fabrication is based on standard planar processing methods. These methods also allow the construction of an integrated set of bias resistors in a multi-electrode device, so that the device may be operated from a single high-voltage source.

Abstract translation: 本发明提供了一种简单的制造微型电子倍增器的方法，该平面配置适用于微型分析仪器如质量过滤器。 所涉及的材料主要是硅和相容的氧化物，允许与在类似材料体系中形成的质量过滤器集成的可能性。 同时选择材料以承受高电压并增强二次电子发射。 制造是基于标准的平面加工方法。 这些方法还允许在多电极器件中构建一组集成的偏置电阻器，使得器件可以从单个高压源操作。

公开(公告)号：US07208729B2

公开(公告)日：2007-04-24

申请号：US10522638

申请日：2003-07-29

Applicant: Richard Syms

Inventor： Richard Syms

IPC: H01J49/00

CPC classification number: H01J49/4215 ,  H01J49/0018

Abstract: A method of constructing a micro-engineered mass spectrometer from bonded silicon-on-insulator (BSOI) wafers is described with reference to a quadrupole spectrometer. The quadrupole geometry is achieved using two BSOI wafers (200), which are bonded together to form a monolithic block (410). Deep etched features and springs formed in the outer silicon layers are used to locate cylindrical metallic electrode rods (300). The precision of the assembly is determined by a combination of lithography and deep etching, and by the mechanical definition of the bonded silicon layers. Deep etched features formed in the inner silicon layers are used to define ion entrance and ion collection optics. Other features such as fluidic channels may be incorporated.

Abstract translation: 参考四极谱仪描述从粘合的绝缘体上硅（BSOI）晶片构建微型工程质谱仪的方法。 使用两个BSOI晶片（200）实现四极几何形状，其结合在一起以形成整体块（410）。 形成在外硅层中的深蚀刻特征和弹簧用于定位圆柱形金属电极棒（300）。 组件的精度通过光刻和深蚀刻的组合以及粘合硅层的机械定义来确定。 内部硅层中形成的深蚀刻特征用于限定离子入射和离子收集光学。 可并入其它特征如流体通道。

公开(公告)号：US08618502B2

公开(公告)日：2013-12-31

申请号：US12290777

申请日：2008-11-03

Applicant: Richard Syms ,  Andrew Holmes ,  Shane Martin O'Prey

Inventor： Richard Syms ,  Andrew Holmes ,  Shane Martin O'Prey

IPC: G21K5/10

CPC classification number: H01J49/4205 ,  B81B7/0048 ,  H01J49/0018 ,  H01J49/063 ,  H01J49/068

Abstract: This invention provides a method of mounting cylindrical electrodes in the geometry of a miniature electrostatic quadrupole, which can act as a quadrupole mass filter or a quadrupole ion guide, or be used in a linear quadrupole ion trap. The electrodes are mounted in pairs on microfabricated supports, which are formed from conducting parts on an insulating substrate. The supports include a suspended flexure system to relieve strains caused by mismatch between the thermal expansion coefficients of the electrodes and the substrate. A complete quadrupole is constructed from two such supports, which are spaced apart by further conducting spacers.

公开(公告)号：US08227765B2

公开(公告)日：2012-07-24

申请号：US12823318

申请日：2010-06-25

Applicant: Richard Syms

Inventor： Richard Syms

IPC: F23D11/00 ,  F23D11/32 ,  H01J49/04

CPC classification number: H01J49/0018 ,  H01J49/167

Abstract: This invention provides a method of combining an array-type nanospray ionization source comprising a set of externally wetted proud features and a contact electrode with a pneumatic nebuliser acting to enhance the flux of sprayed ions. Methods of fabricating a substrate combining a set of proud features with analyte delivery and gas flow channels in silicon-based materials are described.

Abstract translation: 本发明提供了一种组合阵列型纳米喷雾电离源的方法，其包括一组外部润湿的骄傲特征和接触电极与用于增强喷雾离子通量的气动雾化器。 描述了在硅基材料中组合一组骄傲特征与分析物传送和气体流动通道的方法。

公开(公告)号：US07786434B2

公开(公告)日：2010-08-31

申请号：US11810052

申请日：2007-06-04

Applicant: Richard Syms ,  Richard William Moseley

Inventor： Richard Syms ,  Richard William Moseley

IPC: H01J49/04

CPC classification number: H01J49/067 ,  H01J49/0018 ,  Y10T408/03

Abstract: The invention provides a planar component for interfacing an atmospheric pressure ionizer to a vacuum system. The component combines electrostatic optics and skimmers with an internal chamber that can be filled with a gas at a prescribed pressure and is fabricated by lithography, etching and bonding of silicon.

Abstract translation: 本发明提供了一种用于将大气压力离子发生器与真空系统连接的平面部件。 该组件将静电光学元件和撇渣器与内部腔室相结合，内部腔室可以以规定的压力填充气体，并通过光刻，蚀刻和粘结硅制造。

公开(公告)号：US20080185518A1

公开(公告)日：2008-08-07

申请号：US12012000

申请日：2008-01-29

Applicant: Richard Syms

Inventor： Richard Syms

IPC: H01J49/26 ,  H01J49/42

CPC classification number: H01J49/0018 ,  H01J49/067 ,  H01J49/4215

Abstract: A method of aligning sets of cylindrical electrodes in the geometry of a miniature quadrupole electrostatic lens, which can act as a mass filter in a quadrupole mass spectrometer is provided. The electrodes are mounted in pairs on microfabricated supports, which are formed from conducting parts on an insulating substrate. Complete segmentation of the conducting parts provides low capacitative coupling between co-planar cylindrical electrodes, and allows incorporation of a Brubaker prefilter to improve sensitivity at a given mass resolution. A complete quadrupole is constructed from two such supports, which are spaced apart by further conducting spacers. The spacers are continued around the electrodes to provide a conducting screen.

Abstract translation: 提供了可以在四极质谱仪中作为质量过滤器的微型四极静电透镜的几何形状中对齐圆柱形电极组的方法。 电极成对地安装在由绝缘基板上的导电部件形成的微细支撑件上。 导电部件的完全分割提供了共面圆柱形电极之间的低电容耦合，并且允许并入Brubaker预滤器以在给定的质量分辨率下提高灵敏度。 完整的四极杆由两个这样的支撑件构成，其通过另外的导电间隔件间隔开。 间隔件围绕电极继续以提供导电屏。