PROCESS AND REACTOR FOR REMOVING ORGANIC COMPOUNDS FROM GAS FLOWS
    2.
    发明申请
    PROCESS AND REACTOR FOR REMOVING ORGANIC COMPOUNDS FROM GAS FLOWS 有权
    从气体流中除去有机化合物的过程和反应物

    公开(公告)号:US20120039781A1

    公开(公告)日:2012-02-16

    申请号:US13203291

    申请日:2010-02-25

    IPC分类号: B01D53/44

    摘要: The present invention is directed to a process and a reactor for removing organic compounds from gas flows, in which process the said gas flow is passed through a first compartment of a multi-compartment reactor, which reactor comprises at least one first compartment and at least one second compartment, which first and second compartments are in heat exchanging relationship with each other through a joint, gas-tight wall, and in which first compartment the gas flow is heated by heat exchange with the said second compartment, passing the heated gas flow to the second compartment, further heating the gas flow entering the second compartment either by adding additional combustible gas or electric heating, and passing the heated gas through the second compartment over a catalytic oxidation catalyst to combust the organic compounds, whereby both the first and the second compartment are filled with porous sintered metal material, which is in heat exchanging relationship to the said joint wall, whereby the metal material in the second compartment is provided with the said oxidation catalyst.

    摘要翻译: 本发明涉及一种用于从气流中除去有机化合物的方法和反应器,其中所述气流通过多室反应器的第一隔室,该反应器包括至少一个第一室和至少 一个第二隔室,其中第一和第二隔室通过接头,气密壁彼此热交换,并且其中第一隔室通过与所述第二隔室的热交换来加热气流,使加热的气流 通过添加额外的可燃气体或电加热,进一步加热进入第二隔室的气流,并将加热的气体通过第二隔室通过催化氧化催化剂以燃烧有机化合物,由此第一和第二隔室 第二隔室装有与所述关节瓦片热交换关系的多孔烧结金属材料 1,由此第二隔室中的金属材料设置有所述氧化催化剂。

    PROCESS FOR PRODUCING HYDROGEN FROM METHANOL
    4.
    发明申请
    PROCESS FOR PRODUCING HYDROGEN FROM METHANOL 有权
    从甲醇生产氢的方法

    公开(公告)号:US20120020874A1

    公开(公告)日:2012-01-26

    申请号:US13203285

    申请日:2010-02-25

    IPC分类号: C01B3/32

    摘要: The invention is directed to a process for producing hydrogen from methanol, comprising providing at least one flow of methanol and (1) catalytically converting part of the methanol or a fuel gas with air oxygen to carbon dioxide and water, while generating heat and (2) catalytically converting the methanol or the remaining part of the methanol at elevated temperature to hydrogen and carbon monoxide, followed by conversion of the carbon monoxide with water to hydrogen and carbon dioxide, wherein the heat generated in step (1) is sufficient to produce the elevated temperature required in step (2), wherein both steps (1) and (2) are carried out in a bed of sintered metal particles, the bed of sintered metal in step (2) having a surface that is catalytically active for the conversion of methanol to hydrogen, and wherein the beds of sintered metal particles are in heat exchanging relationship.

    摘要翻译: 本发明涉及从甲醇生产氢气的方法,包括提供至少一个甲醇流和(1)在产生热量的同时,将部分甲醇或燃料气体与空气氧气一起催化转化为二氧化碳和水,和(2 )将升高的甲醇或其余部分的甲醇催化转化成氢气和一氧化碳,然后将一氧化碳与水一起转化为氢气和二氧化碳,其中在步骤(1)中产生的热足以产生 步骤(2)中所需的高温,其中步骤(1)和(2)在烧结金属颗粒床中进行,步骤(2)中的烧结金属床具有对于转化具有催化活性的表面 的甲醇转化成氢,并且其中烧结金属颗粒的床处于热交换关系。

    Process for producing hydrogen from methanol
    6.
    发明授权
    Process for producing hydrogen from methanol 有权
    从甲醇生产氢气的方法

    公开(公告)号:US08617511B2

    公开(公告)日:2013-12-31

    申请号:US13203285

    申请日:2010-02-25

    IPC分类号: C01B3/02 C01B3/16

    摘要: The invention is directed to a process for producing hydrogen from methanol, comprising providing at least one flow of methanol and (1) catalytically converting part of the methanol or a fuel gas with air oxygen to carbon dioxide and water, while generating heat and (2) catalytically converting the methanol or the remaining part of the methanol at elevated temperature to hydrogen and carbon monoxide, followed by conversion of the carbon monoxide with water to hydrogen and carbon dioxide, wherein the heat generated in step (1) is sufficient to produce the elevated temperature required in step (2), wherein both steps (1) and (2) are carried out in a bed of sintered metal particles, the bed of sintered metal in step (2) having a surface that is catalytically active for the conversion of methanol to hydrogen, and wherein the beds of sintered metal particles are in heat exchanging relationship.

    摘要翻译: 本发明涉及从甲醇生产氢气的方法,包括提供至少一个甲醇流和(1)在产生热量的同时,将部分甲醇或燃料气体与空气氧气一起催化转化为二氧化碳和水,和(2 )将升高的甲醇或其余部分的甲醇催化转化成氢气和一氧化碳,然后将一氧化碳与水一起转化为氢气和二氧化碳,其中在步骤(1)中产生的热足以产生 步骤(2)中所需的高温,其中步骤(1)和(2)在烧结金属颗粒床中进行,步骤(2)中的烧结金属床具有对于转化具有催化活性的表面 的甲醇转化成氢,并且其中烧结金属颗粒的床处于热交换关系。

    Apparatus for performing at least one process on a substrate
    7.
    发明授权
    Apparatus for performing at least one process on a substrate 失效
    用于在衬底上执行至少一个工艺的装置

    公开(公告)号:US07198678B2

    公开(公告)日:2007-04-03

    申请号:US10332381

    申请日:2001-06-26

    IPC分类号: C23C16/00 C23F1/00

    CPC分类号: C23C14/566 F16K51/02 H01F7/04

    摘要: Apparatus for performing at least one processing operation on a substrate, the apparatus being provided with at least one process chamber and a vacuum lock for the purposes of placing the substrate from the surroundings into a process chamber without the reduced pressure in the respective process chamber being lost, the vacuum lock comprising a vacuum chamber which is bounded by a number of walls and to which a vacuum pump is connected, while in one of the walls at least one supply opening is provided, and for the purpose of the or each process chamber in one of the walls a process chamber opening belonging to a respective process chamber is provided, the at least one supply opening being externally closable with an outer cover and being closable from the vacuum chamber with an inner cover. Further disclosed is an assembly of such an apparatus with a transport device for supplying substrates to a supply opening of the vacuum lock and removing same.

    摘要翻译: 用于在基板上执行至少一个处理操作的设备,该设备设置有至少一个处理室和真空锁,用于将基板从周围环境放置到处理室中,而在相应处理室内没有减压 真空锁包括真空室,该真空室由若干壁限定,并且真空泵连接到该真空室,而在一个壁中设置有至少一个供应开口,并且为了处理室或每个处理室 在其中一个墙壁上,设有属于相应处理室的处理室开口,所述至少一个供应开口可外部与外盖封闭,并可与具有内盖的真空室封闭。 进一步公开了一种具有输送装置的装置的组件,用于将基板供应到真空锁的供应开口并将其移除。

    Process and reactor for removing organic compounds from gas flows
    8.
    发明授权
    Process and reactor for removing organic compounds from gas flows 有权
    用于从气体流中除去有机化合物的工艺和反应器

    公开(公告)号:US09101880B2

    公开(公告)日:2015-08-11

    申请号:US13203291

    申请日:2010-02-25

    IPC分类号: B01D53/56 B01D53/88

    摘要: The present invention is directed to a process and a reactor for removing organic compounds from gas flows, in which process the said gas flow is passed through a first compartment of a multi-compartment reactor, which reactor comprises at least one first compartment and at least one second compartment, which first and second compartments are in heat exchanging relationship with each other through a joint, gas-tight wall, and in which first compartment the gas flow is heated by heat exchange with the said second compartment, passing the heated gas flow to the second compartment, further heating the gas flow entering the second compartment either by adding additional combustible gas or electric heating, and passing the heated gas through the second compartment over a catalytic oxidation catalyst to combust the organic compounds, whereby both the first and the second compartment are filled with porous sintered metal material, which is in heat exchanging relationship to the said joint wall, whereby the metal material in the second compartment is provided with the said oxidation catalyst.

    摘要翻译: 本发明涉及一种用于从气流中除去有机化合物的方法和反应器,其中所述气流通过多室反应器的第一隔室,该反应器包括至少一个第一室和至少 一个第二隔室,其中第一和第二隔室通过接头,气密壁彼此热交换,并且其中第一隔室通过与所述第二隔室的热交换来加热气流,使加热的气流 通过添加另外的可燃气体或电加热,进一步加热进入第二隔室的气流,并将加热的气体通过第二隔室通过催化氧化催化剂以燃烧有机化合物,由此第一和第二隔室 第二隔室装有与所述关节瓦片热交换关系的多孔烧结金属材料 1,由此第二隔室中的金属材料设置有所述氧化催化剂。

    Method and apparatus for treating a substrate
    9.
    发明授权
    Method and apparatus for treating a substrate 失效
    用于处理基材的方法和设备

    公开(公告)号:US07645495B2

    公开(公告)日:2010-01-12

    申请号:US10538652

    申请日:2003-12-12

    IPC分类号: C23C16/00 H05H1/24 B01J19/08

    摘要: A method for treating a surface of at least one substrate, wherein the at least one substrate is placed in a process chamber, wherein the pressure in the process chamber is relatively low, wherein a plasma is generated by at least one plasma source, wherein, during the treatment, at least one plasma source (3) and/or at least one optionally provided treatment fluid supply source is moved relative to the substrate surface. The invention further provides an apparatus for treating a surface of at least one substrate, wherein the apparatus is provided with a process chamber and at least one plasma source, wherein the at least one plasma source (3) and/or at least one optionally provided treatment fluid supply source is movably arranged.

    摘要翻译: 一种用于处理至少一个衬底的表面的方法,其中所述至少一个衬底被放置在处理室中,其中处理室中的压力相对较低,其中通过至少一个等离子体源产生等离子体,其中, 在处理期间,相对于衬底表面移动至少一个等离子体源(3)和/或至少一个任选提供的处理流体供应源。 本发明还提供了一种用于处理至少一个基底的表面的装置,其中所述装置设置有处理室和至少一个等离子体源,其中所述至少一个等离子体源(3)和/或至少一个等离子体源 处理液供应源可移动地布置。

    In-line process for making thin film electronic devices
    10.
    发明授权
    In-line process for making thin film electronic devices 有权
    制造薄膜电子设备的在线工艺

    公开(公告)号:US07354845B2

    公开(公告)日:2008-04-08

    申请号:US10923792

    申请日:2004-08-24

    IPC分类号: H01L21/30

    摘要: An embodiment of the present invention relates to an in-line process for making a thin film electronic device on a substrate. The process includes depositing a structurable layer onto a substrate and depositing photoresist material onto the structurable layer in a first pattern. The process also includes developing the photoresist material, etching the structurable layer in areas uncovered by the photoresist material and removing the remaining photoresist material. The process may be performed without intermediate exposure of the substrate to ambient air.

    摘要翻译: 本发明的一个实施例涉及一种在衬底上制造薄膜电子器件的在线工艺。 该方法包括将可结构化层沉积到衬底上并以第一图案将光致抗蚀剂材料沉积到可结构化层上。 该方法还包括显影光致抗蚀剂材料,在未被光致抗蚀剂材料覆盖的区域中蚀刻可结构化层并除去剩余的光致抗蚀剂材料。 该过程可以在不将基材中间暴露于环境空气的情况下进行。