公开(公告)号：US20050258514A1

公开(公告)日：2005-11-24

申请号：US11124424

申请日：2005-05-06

申请人： Rosemary Smith ,  Scott Collins ,  Brian Frederick ,  Lawrence LeGore

发明人： Rosemary Smith ,  Scott Collins ,  Brian Frederick ,  Lawrence LeGore

IPC分类号： H01J9/14 ,  H01J49/06 ,  H01L21/46 ,  H01L23/34

CPC分类号： H01J9/14 ,  H01J49/0018 ,  H01J49/061 ,  H01L2924/0002 ,  Y10S438/977 ,  H01L2924/00

摘要： A grid structure and method for manufacturing the same. The grid is used for gating a stream of charged particles in certain types of particle measurement instruments, such as ion mobility spectrometers and the like. The methods include various microfabrication techniques for etching and/or depositing grid structure materials on a silicon substrate.

摘要翻译： 一种网格结构及其制造方法。 栅格用于在某些类型的粒子测量仪器（例如离子迁移光谱仪等）中选通带电粒子流。 这些方法包括用于在硅衬底上蚀刻和/或沉积栅格结构材料的各种微细加工技术。

公开(公告)号：US20070272875A1

公开(公告)日：2007-11-29

申请号：US11714691

申请日：2007-03-06

申请人： Brian Frederick ,  Lawrence LeGore ,  Rosemary Smith ,  Scott Collins ,  Robert Jackson

发明人： Brian Frederick ,  Lawrence LeGore ,  Rosemary Smith ,  Scott Collins ,  Robert Jackson

IPC分类号： H01J49/06 ,  H01R43/00

CPC分类号： H01J49/061 ,  Y10S438/927 ,  Y10S438/977 ,  Y10T29/49046 ,  Y10T29/49117

摘要： The present invention relates generally to grids for gating a stream of charged particles and methods for manufacturing the same. In one embodiment, the present invention relates to a Bradbury-Nielson gate having transmission line grid elements. In one embodiment is a feed structure for a gating grid where a drive source is coupled to a feeding transmission line with the same geometry as the chopper and continues with the same geometry to a termination transmission line. Also included is a method for fabricating a gate for charged particles which includes micromachining at least two gate elements from at least one wafer, wherein each gate element includes at least one grid element; metalizing the grid elements; and assembling the gate elements such that the grid elements of the gate elements are interleaved, thereby forming a Bradbury Nielson gate.

摘要翻译： 本发明一般涉及用于选通带电粒子流的栅格及其制造方法。 在一个实施例中，本发明涉及具有传输线网格元件的Bradbury-Nielson门。 在一个实施例中是用于门控格栅的馈送结构，其中驱动源耦合到与斩波器具有相同几何形状的馈电传输线，并且以相同的几何形状连续地连接到终端传输线。 还包括一种用于制造带电粒子的栅极的方法，其包括从至少一个晶片微加工至少两个栅极元件，其中每个栅极元件包括至少一个栅格元件; 金属化网格元素; 以及组装门元件，使得门元件的栅格元件交错，从而形成Bradbury Nielson门。

公开(公告)号：US20050102829A1

公开(公告)日：2005-05-19

申请号：US10922368

申请日：2004-08-20

申请人： Nicholas LeCursi ,  Lawrence LeGore ,  Robert Jackson ,  C. Crothers ,  Peter Kleban ,  Brian Frederick

发明人： Nicholas LeCursi ,  Lawrence LeGore ,  Robert Jackson ,  C. Crothers ,  Peter Kleban ,  Brian Frederick

IPC分类号： H01J49/44 ,  G01N23/05 ,  G21K1/087 ,  H01J49/02 ,  H01J49/04 ,  H01J49/06 ,  H01J49/40 ,  H01L23/48 ,  H01L29/40 ,  H05K3/10

CPC分类号： G21K1/087 ,  G01N23/05 ,  H01J49/0018 ,  H01J49/0031 ,  H01J49/061 ,  H01J49/446 ,  H01L2924/0002 ,  Y10T29/4902 ,  Y10T29/49082 ,  Y10T29/49117 ,  Y10T29/49155 ,  Y10T29/49156 ,  H01L2924/00

摘要： A technique for providing a grid for a gate such as utilized in gating a stream of ions or other particles in a spectrometer instrument. The grid of wires may, for example, be a so-called Bradbury-Nielson Gate that consists of a set of two electrically isolated sets of equally spaced wires that lie substantially in the same plane and alternate in potential. The method utilized to provide is to first fabricate a frame of an insulating substrate having a hole and depositing metal film patterns such that conductive portions are formed on either side of the hole. Conductive portions on either side form a series of terminating pads on the portion of the substrate closest to the hole and a bus bar. Grid wires are then formed by stretching a section of wire with desired constant tension across the hole and bonding the ends of the wire to a respective one of the pads on one side and bus bar on the other side. The method provides a rapid, inexpensive way to fabricate such modulating devices.

摘要翻译： 提供用于门的栅格的技术，例如用于在光谱仪器中门控离子或其他颗粒物流。 电线的网格可以是例如所谓的Bradbury-Nielson门，其由两组基本上位于同一平面中且交替潜在的等间隔的导线的两组电隔离组合组成。 用于提供的方法是首先制造具有孔的绝缘基板的框架并沉积金属膜图案，使得导电部分形成在孔的任一侧上。 任一侧上的导电部分形成在最靠近该孔的基板部分上的一系列端接焊盘和汇流条。 然后通过将所需的恒定张力的一段导线拉伸穿过该孔并且将导线的端部粘合到另一侧的一侧上的焊盘和另一侧的母线上而形成网格线。 该方法提供了制造这种调制装置的快速，便宜的方式。

公开(公告)号：US20060178844A1

公开(公告)日：2006-08-10

申请号：US11386503

申请日：2006-03-22

申请人： Lawrence LeGore ,  Robert Jackson ,  Zhong Yang ,  Linda DeNoyer ,  Peter Kleban ,  Brian Frederick

发明人： Lawrence LeGore ,  Robert Jackson ,  Zhong Yang ,  Linda DeNoyer ,  Peter Kleban ,  Brian Frederick

IPC分类号： G06F19/00

CPC分类号： G21K1/087 ,  G01N23/05 ,  H01J49/0018 ,  H01J49/0031 ,  H01J49/061 ,  H01J49/446 ,  H01L2924/0002 ,  Y10T29/4902 ,  Y10T29/49082 ,  Y10T29/49117 ,  Y10T29/49155 ,  Y10T29/49156 ,  H01L2924/00

摘要： A spectroscopy instrument that uses spectra produced from random binary sequence modulated data. Statistical estimation techniques are used to achieve resolution enhancement, while properly accounting for the Poisson noise distribution and other artifacts introduced by a modulator or “chopper” or other system components. Indeed, a resolution similar to that of modem spectrometers can be achieved with a dramatic performance advantage over conventional, serial detection analyzers. Both static and dynamic behaviors are theoretically or measured experimentally accounted for in the model as determined. In one embodiment, the finite penetration of the field beyond the plane of the chopper leads to non-ideal chopper response, which is characterized in terms of an “energy corruption” effect and a lead or lag in the time at which the beam responds to the chopper potential.

公开(公告)号：US20050086026A1

公开(公告)日：2005-04-21

申请号：US10924282

申请日：2004-08-23

申请人： Lawrence LeGore ,  Robert Jackson ,  Zhong Yang ,  Linda DeNoyer ,  Peter Kleban ,  Brian Frederick

发明人： Lawrence LeGore ,  Robert Jackson ,  Zhong Yang ,  Linda DeNoyer ,  Peter Kleban ,  Brian Frederick

IPC分类号： H01J49/44 ,  G01N23/05 ,  G21K1/087 ,  H01J49/02 ,  H01J49/04 ,  H01J49/06 ,  H01J49/40 ,  G06F15/00 ,  G06F17/18

CPC分类号： G21K1/087 ,  G01N23/05 ,  H01J49/0018 ,  H01J49/0031 ,  H01J49/061 ,  H01J49/446 ,  H01L2924/0002 ,  Y10T29/4902 ,  Y10T29/49082 ,  Y10T29/49117 ,  Y10T29/49155 ,  Y10T29/49156 ,  H01L2924/00

摘要： A spectroscopy instrument that uses spectra produced from random binary sequence modulated data. Statistical estimation techniques are used to achieve resolution enhancement, while properly accounting for the Poisson noise distribution and other artifacts introduced by a modulator or “chopper” or other system components. Indeed, a resolution similar to that of modern spectrometers can be achieved with a dramatic performance advantage over conventional, serial detection analyzers. Both static and dynamic behaviors are theoretically or measured experimentally accounted for in the model as determined. In one embodiment, the finite penetration of the field beyond the plane of the chopper leads to non-ideal chopper response, which is characterized in terms of an “energy corruption” effect and a lead or lag in the time at which the beam responds to the chopper potential.

摘要翻译： 使用从随机二进制序列调制数据产生的光谱的光谱仪器。 统计估计技术用于实现分辨率增强，同时适当地考虑由调制器或“斩波器”或其他系统组件引入的泊松噪声分布和其他伪像。 实际上，与传统的串行检测分析仪相比，可以实现与现代光谱仪类似的分辨率，具有显着的性能优势。 静态和动态行为在理论上或实验中都经过实验确定。 在一个实施例中，场强超过斩波器平面的有限穿透导致非理想的斩波器响应，其特征在于“能量损耗”效应和波束响应时间的引导或滞后 砍刀潜力。