公开(公告)号：US20130161757A1

公开(公告)日：2013-06-27

申请号：US13582034

申请日：2012-04-16

申请人： Ru Huang ,  Fei Tan ,  Xia An ,  Qianqian Huang ,  Dong Yang ,  Xing Zhang

发明人： Ru Huang ,  Fei Tan ,  Xia An ,  Qianqian Huang ,  Dong Yang ,  Xing Zhang

IPC分类号： H01L27/092 ,  H01L21/8238

CPC分类号： H01L21/02203 ,  H01L21/02216 ,  H01L21/3063 ,  H01L21/823878 ,  H01L27/0921

摘要： The present invention discloses a CMOS device of reducing charge sharing effect and a fabrication method thereof. The present invention has an additional isolation for trapping carriers disposed right below an isolation region. the material of the additional isolation region is porous silicon. Since porous silicon is a functional material of spongy structure by electrochemistry anodic oxidizing monocrystalline silicon wafer, there are a large number of microvoids and dangling bonds on the surface layer of the porous silicon. These defects may form defect states in a center of forbidden band of the porous silicon, the defect states may trap carriers so as to cause an increased resistance. And with an increase of density of corrosion current, porosity increases, and defects in the porous silicon increase. The present invention can reduce the charge sharing effect due to heavy ions by using a feature that the defect states in the porous silicon trap carriers, the formation of a shallow trench isolation (STI) region and a isolation region underneath only needs one time photolithography, and the process is simple, so that radioresistance performance of an integrated circuit may be greatly increased.

摘要翻译： 本发明公开了一种降低电荷共享效应的CMOS器件及其制造方法。 本发明对于设置在隔离区域正下方的捕获载体具有额外的隔离。 附加隔离区的材料是多孔硅。 由于多孔硅是通过电化学阳极氧化单晶硅晶片的海绵结构的功能材料，因此在多孔硅的表面层上存在大量微孔和悬挂键。 这些缺陷可能在多孔硅的禁带的中心形成缺陷状态，缺陷状态可能会捕获载体以引起增加的电阻。 随着腐蚀电流密度的增加，孔隙率增加，多孔硅中的缺陷增加。 本发明可以通过使用多孔硅捕集载体中的缺陷状态，浅沟槽隔离（STI）区域的形成和下面的隔离区域仅需要一次光刻来降低由于重离子引起的电荷共享效应， 并且该工艺简单，从而可以大大提高集成电路的射电阻性能。

公开(公告)号：US20130119445A1

公开(公告)日：2013-05-16

申请号：US13509170

申请日：2011-11-30

申请人： Ru Huang ,  Fei Tan ,  Xia An ,  Qianqian Huang ,  Dong Yang ,  Xing Zhang

发明人： Ru Huang ,  Fei Tan ,  Xia An ,  Qianqian Huang ,  Dong Yang ,  Xing Zhang

IPC分类号： H01L29/78 ,  H01L21/336

CPC分类号： H01L29/6653 ,  H01L29/1083 ,  H01L29/6659 ,  H01L29/7833

摘要： A CMOS device for reducing a radiation-induced charge collection and a method for fabricating the same. In the CMOS device, a heavily doped charge collection-suppressed region is disposed directly under the source region and the drain region. The region has a doping type opposite that of the source region and the drain region, and has a doping concentration not less than that of the source region and the drain region. The charge collection-suppressed region has a lateral part slightly less than or equal to that of the source region and the drain region, and has a lateral range toward to the channel not exceed the edges of the source region and the drain region. The CMOS device may greatly reduce a range of the funnel that appears under the action of a single particle, so that charges collected instantaneously under a force of an electric field may be reduced.

摘要翻译： 用于减少辐射诱导的电荷收集的CMOS器件及其制造方法。 在CMOS器件中，重掺杂电荷收集抑制区域直接设置在源极区域和漏极区域的正下方。 该区域具有与源极区域和漏极区域相反的掺杂类型，并且具有不小于源极区域和漏极区域的掺杂浓度。 电荷收集抑制区域具有稍小于或等于源极区域和漏极区域的横向部分，并且具有朝向沟道的横向范围不超过源极区域和漏极区域的边缘。 CMOS器件可以大大减少在单个粒子的作用下出现的漏斗的范围，使得可以在电场的力作用下立即收集的电荷减少。

公开(公告)号：US20130103351A1

公开(公告)日：2013-04-25

申请号：US13504433

申请日：2011-11-30

申请人： Ru Huang ,  Dong Yang ,  Xia An ,  Xing Zhang

发明人： Ru Huang ,  Dong Yang ,  Xia An ,  Xing Zhang

IPC分类号： G01R31/26 ,  G06F19/00

CPC分类号： G01R31/287

摘要： Disclosed herein is a method for predicting a reliable lifetime of a SOI MOSFET device. The method comprises: measuring a relationship of a gate resistance of the SOI MOSFET device varying as a function of a temperature at different wafer temperatures; performing a lifetime accelerating test on the SOI MOSFET device at different wafer temperatures, so as to obtain a degenerating relationship of a parameter representing the lifetime of the device as a function of stress time, and obtain a lifetime in the presence of self-heating when the parameter degenerates to 10%; performing a self-heating correction on the measured lifetime of the device by using the measured self-heating temperature and an Arrhenius model, so as to obtain a lifetime without self-heating influence; performing a self-heating correction on a variation of the drain current caused by self-heating; performing a self-heating correction on an impact ionization rate caused by hot carriers; and predicting the lifetime of the SOI MOSFET device under a bias. The embodiment of the invention prevents the self-heating effect from affecting the SOI MOSFET device in a practical logic circuit or in an AC analog circuit, which leads to a more precise prediction result.

摘要翻译： 这里公开了一种用于预测SOI MOSFET器件的可靠寿命的方法。 该方法包括：测量SOI MOSFET器件的栅极电阻与不同晶片温度下温度变化的关系; 在不同晶片温度下对SOI MOSFET器件进行寿命加速测试，以获得表示器件寿命作为应力时间的函数的退化关系，并在存在自热的情况下获得寿命 参数退化为10％; 通过使用测量的自热温度和Arrhenius模型对器件的测量寿命进行自加热校正，以获得没有自热影响的寿命; 对由自加热引起的漏极电流的变化进行自热校正; 对热载体产生的冲击电离率进行自热校正; 并且在偏压下预测SOI MOSFET器件的寿命。 本发明的实施例防止了自发热效应影响实际逻辑电路或AC模拟电路中的SOI MOSFET器件，这导致更精确的预测结果。

公开(公告)号：US08877594B2

公开(公告)日：2014-11-04

申请号：US13509170

申请日：2011-11-30

申请人： Ru Huang ,  Fei Tan ,  Xia An ,  Qianqian Huang ,  Dong Yang ,  Xing Zhang

发明人： Ru Huang ,  Fei Tan ,  Xia An ,  Qianqian Huang ,  Dong Yang ,  Xing Zhang

IPC分类号： H01L21/00 ,  H01L29/10 ,  H01L29/66 ,  H01L29/78

CPC分类号： H01L29/6653 ,  H01L29/1083 ,  H01L29/6659 ,  H01L29/7833

摘要： A CMOS device for reducing a radiation-induced charge collection and a method for fabricating the same. In the CMOS device, a heavily doped charge collection-suppressed region is disposed directly under the source region and the drain region. The region has a doping type opposite that of the source region and the drain region, and has a doping concentration not less than that of the source region and the drain region. The charge collection-suppressed region has a lateral part slightly less than or equal to that of the source region and the drain region, and has a lateral range toward to the channel not exceed the edges of the source region and the drain region. The CMOS device may greatly reduce a range of the funnel that appears under the action of a single particle, so that charges collected instantaneously under a force of an electric field may be reduced.

摘要翻译： 用于减少辐射诱导的电荷收集的CMOS器件及其制造方法。 在CMOS器件中，重掺杂电荷收集抑制区域直接设置在源极区域和漏极区域的正下方。 该区域具有与源极区域和漏极区域相反的掺杂类型，并且具有不小于源极区域和漏极区域的掺杂浓度。 电荷收集抑制区域具有稍小于或等于源极区域和漏极区域的横向部分，并且具有朝向沟道的横向范围不超过源极区域和漏极区域的边缘。 CMOS器件可以大大减少在单个粒子的作用下出现的漏斗的范围，使得可以在电场的力作用下立即收集的电荷减少。

公开(公告)号：US08652929B2

公开(公告)日：2014-02-18

申请号：US13582034

申请日：2012-04-16

申请人： Ru Huang ,  Fei Tan ,  Xia An ,  Qianqian Huang ,  Dong Yang ,  Xing Zhang

发明人： Ru Huang ,  Fei Tan ,  Xia An ,  Qianqian Huang ,  Dong Yang ,  Xing Zhang

IPC分类号： H01L21/00 ,  H01L21/02 ,  H01L21/3063 ,  H01L21/84

CPC分类号： H01L21/02203 ,  H01L21/02216 ,  H01L21/3063 ,  H01L21/823878 ,  H01L27/0921

摘要： The present invention discloses a CMOS device of reducing charge sharing effect and a fabrication method thereof. The present invention has an additional isolation for trapping carriers disposed right below an isolation region. the material of the additional isolation region is porous silicon. Since porous silicon is a functional material of spongy structure by electrochemistry anodic oxidizing monocrystalline silicon wafer, there are a large number of microvoids and dangling bonds on the surface layer of the porous silicon. These defects may form defect states in a center of forbidden band of the porous silicon, the defect states may trap carriers so as to cause an increased resistance. And with an increase of density of corrosion current, porosity increases, and defects in the porous silicon increase. The present invention can reduce the charge sharing effect due to heavy ions by using a feature that the defect states in the porous silicon trap carriers, the formation of a shallow trench isolation (STI) region and a isolation region underneath only needs one time photolithography, and the process is simple, so that radioresistance performance of an integrated circuit may be greatly increased.

摘要翻译： 本发明公开了一种降低电荷共享效应的CMOS器件及其制造方法。 本发明对于设置在隔离区域正下方的捕获载体具有额外的隔离。 附加隔离区的材料是多孔硅。 由于多孔硅是通过电化学阳极氧化单晶硅晶片的海绵结构的功能材料，因此在多孔硅的表面层上存在大量微孔和悬挂键。 这些缺陷可能在多孔硅的禁带的中心形成缺陷状态，缺陷状态可能会捕获载体以引起增加的电阻。 随着腐蚀电流密度的增加，孔隙率增加，多孔硅中的缺陷增加。 本发明可以通过使用多孔硅捕集载体中的缺陷状态，浅沟槽隔离（STI）区域的形成和下面的隔离区域仅需要一次光刻来降低由于重离子引起的电荷共享效应， 并且该工艺简单，从而可以大大提高集成电路的射电阻性能。

公开(公告)号：US20130013245A1

公开(公告)日：2013-01-10

申请号：US13499275

申请日：2011-10-28

申请人： Ru Huang ,  Dong Yang ,  Fei Tan ,  Xia An ,  Xing Zhang

发明人： Ru Huang ,  Dong Yang ,  Fei Tan ,  Xia An ,  Xing Zhang

IPC分类号： G01R31/26 ,  G06F19/00

CPC分类号： G01R31/2621 ,  H01L22/14

摘要： The present invention discloses a method for obtaining a distribution of charges along a channel of a MOS transistor, which is used for obtaining distributions of interface states charges and charges of a gate dielectric layer in the MOS transistor. The method includes: adding a MOS transistor into a test circuit; measuring two charge pumping current curves when a source terminal is open-circuited or when a drain terminal is open-circuited before and after a stress is applied by using a charge pumping current test method, where one of the two charge pumping current curves is an original curve and the other one is an post-stress curve; finding a point B corresponding to a point A on the original curve on the post-stress curve, and estimating amount of locally-generated interface states charges and charges of the gate dielectric layer by a variation of the charge pumping current and a variation in a voltage at a local point. As compared with a conventional method for obtaining a distribution, the method of the present invention can obtain a distribution of charges along a direction form the drain or source terminal to the channel more easily and rapidly, with an aid of a computer. A mass of complicated and repeated tests are reduced. Also, the method can provide an effective base for improving device reliability.

摘要翻译： 本发明公开了一种用于获得沿着MOS晶体管的沟道的电荷分布的方法，用于获得MOS晶体管中的界面态电荷和栅介质层的电荷的分布。 该方法包括：将MOS晶体管添加到测试电路中; 当源极端子开路时，或者在通过使用电荷泵浦电流测试方法施加应力之前和之后漏极端子开路时，测量两个电荷泵浦电流曲线，其中两个电荷泵浦电流曲线之一为 原曲线，另一个是后应力曲线; 找到对应于后应力曲线上的原始曲线上的点A的点B，并且通过电荷泵浦电流的变化和局部产生的界面的变化来估计局部产生的界面状态的电介质层的电荷和电荷 电压在本地点。 与用于获得分布的常规方法相比，本发明的方法可以借助于计算机，更容易和快速地获得沿着从漏极或源极端子到达通道的方向的电荷分布。 大量复杂和重复的测试减少了。 此外，该方法可以提供用于提高装置可靠性的有效基础。

公开(公告)号：US09086448B2

公开(公告)日：2015-07-21

申请号：US13504433

申请日：2011-11-30

申请人： Ru Huang ,  Dong Yang ,  Xia An ,  Xing Zhang

发明人： Ru Huang ,  Dong Yang ,  Xia An ,  Xing Zhang

IPC分类号： G01R31/26 ,  G06F19/00 ,  G01R31/28

CPC分类号： G01R31/287

摘要： A method for predicting a reliable lifetime of a SOI MOSFET device including: measuring a relationship of a gate resistance of the device varying as a function of a temperature at different wafer temperatures; performing a lifetime accelerating test on the device at different wafer temperatures, so as to obtain a degenerating relationship of a parameter representing the lifetime of the device as a function of stress time, and obtain a lifetime in the presence of self-heating when the parameter degenerates to 10%; performing a self-heating correction on the measured lifetime of the device by using the measured self-heating temperature and an Arrhenius model, so as to obtain a lifetime without self-heating influence; performing a self-heating correction on a variation of the drain current caused by self-heating; performing a self-heating correction on an impact ionization rate caused by hot carriers; and predicting the lifetime of the device under a bias.

摘要翻译： 一种用于预测SOI MOSFET器件的可靠寿命的方法，包括：测量在不同晶片温度下作为温度变化的器件的栅极电阻的关系; 在不同的晶片温度下在器件上进行寿命加速测试，以获得表示器件寿命的参数作为应力时间的函数的退化关系，并且当参数为自加热时，在自加热的情况下获得寿命 退化为10％; 通过使用测量的自热温度和Arrhenius模型对器件的测量寿命进行自加热校正，以获得没有自热影响的寿命; 对由自加热引起的漏极电流的变化进行自热校正; 对热载体产生的冲击电离率进行自热校正; 并预测设备的使用寿命。

公开(公告)号：US08673722B2

公开(公告)日：2014-03-18

申请号：US13255443

申请日：2011-03-23

申请人： Ru Huang ,  Quanxin Yun ,  Xia An ,  Yujie Al ,  Xing Zhang

发明人： Ru Huang ,  Quanxin Yun ,  Xia An ,  Yujie Al ,  Xing Zhang

IPC分类号： H01L21/336

CPC分类号： H01L29/0653 ,  H01L29/1083 ,  H01L29/66545 ,  H01L29/66636 ,  H01L29/7833 ,  H01L29/7834 ,  H01L29/7848 ,  H01L29/7849

摘要： The present invention discloses a strained channel field effect transistor and a method for fabricating the same. The field effect transistor comprises a substrate, a source/drain, a gate dielectric layer, and a gate, characterized in that, an “L” shaped composite isolation layer, which envelops a part of a side face of the source/drain adjacent to a channel and the bottom of the source/drain, is arranged between the source/drain and the substrate; the composite isolation layer is divided into two layers, that is, an “L” shaped insulation thin layer contacting directly with the substrate and an “L” shaped high stress layer contacting directly with the source and the drain. The field effect transistor of such a structure improves the mobility of charge carriers by introducing stress into the channel by means of the high stress layer, while fundamentally improving the device structure of the field effect transistor and improving the short channel effect suppressing ability of the device.

摘要翻译： 本发明公开了一种应变通道场效应晶体管及其制造方法。 场效应晶体管包括衬底，源极/漏极，栅极电介质层和栅极，其特征在于，“L”形复合隔离层，其包围与源极/漏极相邻的侧面的一部分 沟道和源极/漏极的底部布置在源极/漏极和衬底之间; 复合隔离层分为两层，即与基板直接接触的“L”形绝缘薄层和与源极和漏极直接接触的“L”形高应力层。 这种结构的场效应晶体管通过高应力层向沟道中引入应力而提高了载流子的迁移率，同时从根本上改善了场效应晶体管的器件结构，提高了器件的短沟道效应抑制能力 。

公开(公告)号：US20130069126A1

公开(公告)日：2013-03-21

申请号：US13519857

申请日：2012-02-21

申请人： Ru Huang ,  Zhiqiang Li ,  Xia An ,  Yue Guo ,  Xing Zhang

发明人： Ru Huang ,  Zhiqiang Li ,  Xia An ,  Yue Guo ,  Xing Zhang

IPC分类号： H01L29/78 ,  H01L21/283

CPC分类号： H01L29/41783 ,  H01L29/0895 ,  H01L29/517 ,  H01L29/66643 ,  H01L29/78

摘要： An embodiment of the invention provides a germanium-based NMOS device and a method for fabricating the same, which relates to fabrication process technology of an ultra-large-scale-integrated (ULSI) circuit. The germanium-based NMOS device has two dielectric layer interposed between a metal source/drain and a substrate. The bottom dielectric layer includes a dielectric material having a high pinning coefficient S such as hafnium oxide, silicon nitride, hafnium silicon oxide or the like, and the top dielectric layer includes a dielectric material having a low conduction band offset ΔEC such as titanium oxide, gallium oxide, strontium titanium oxide or the like. According to the method, Fermi level pinning effect can be alleviated, electron barrier height can be lowered, and thus performance of the germanium-based Schottky NMOS device can be improved. Compared with a conventional single dielectric layer such as aluminum oxide (Al2O3), Schottky barrier height can be lowered while low source/drain resistances can be maintained, and thus performance of the device can be significantly improved.

摘要翻译： 本发明的实施例提供了一种基于锗的NMOS器件及其制造方法，涉及超大规模集成（ULSI）电路的制造工艺技术。 锗基NMOS器件具有介于金属源极/漏极和衬底之间的两个介电层。 底部电介质层包括具有高钉扎系数S的介电材料，例如氧化铪，氮化硅，氧化铪等，并且顶部电介质层包括具有低导带偏移＆Dgr; EC的介电材料，例如钛 氧化物，氧化镓，氧化钛锶等。 根据该方法，可以减轻费米能级钉扎效应，降低电子势垒高度，从而提高锗基肖特基NMOS器件的性能。 与常规的单一电介质层如氧化铝（Al2O3）相比，可以降低肖特基势垒高度，同时保持低的源极/漏极电阻，从而显着提高器件的性能。

公开(公告)号：US20130043515A1

公开(公告)日：2013-02-21

申请号：US13255443

申请日：2011-03-23

申请人： Ru Huang ,  Quanxin Yun ,  Xia An ,  Yujie Ai ,  Xing Zhang

发明人： Ru Huang ,  Quanxin Yun ,  Xia An ,  Yujie Ai ,  Xing Zhang

IPC分类号： H01L29/78 ,  H01L21/336

CPC分类号： H01L29/0653 ,  H01L29/1083 ,  H01L29/66545 ,  H01L29/66636 ,  H01L29/7833 ,  H01L29/7834 ,  H01L29/7848 ,  H01L29/7849

摘要： The present invention discloses a strained channel field effect transistor and a method for fabricating the same. The field effect transistor comprises a substrate, a source/drain, a gate dielectric layer, and a gate, characterized in that, an “L” shaped composite isolation layer, which envelops a part of a side face of the source/drain adjacent to a channel and the bottom of the source/drain, is arranged between the source/drain and the substrate; the composite isolation layer is divided into two layers, that is, an “L” shaped insulation thin layer contacting directly with the substrate and an “L” shaped high stress layer contacting directly with the source and the drain. The field effect transistor of such a structure improves the mobility of charge carriers by introducing stress into the channel by means of the high stress layer, while fundamentally improving the device structure of the field effect transistor and improving the short channel effect suppressing ability of the device.

摘要翻译： 本发明公开了一种应变通道场效应晶体管及其制造方法。 场效应晶体管包括衬底，源极/漏极，栅极介电层和栅极，其特征在于，L形复合隔离层，其包围与沟道相邻的源极/漏极的侧面的一部分 并且源/漏极的底部布置在源极/漏极和衬底之间; 复合隔离层分为两层，即与基板直接接触的L形绝缘薄层和与源极和漏极直接接触的L形高应力层。 这种结构的场效应晶体管通过高应力层向沟道中引入应力而提高了载流子的迁移率，同时从根本上改善了场效应晶体管的器件结构，提高了器件的短沟道效应抑制能力 。