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公开(公告)号：US20120097641A1
公开(公告)日：2012-04-26
申请号：US13127497
申请日：2009-11-04
申请人： Rudolf Beckmann , Michael Geisler , Arndt Zeuner , Marks Fiedler , Gunter Grabosch , Andreas Pflug , Uwe Czarnetzki , Ralf-Peter Brinkmann , Michael Siemers
发明人： Rudolf Beckmann , Michael Geisler , Arndt Zeuner , Marks Fiedler , Gunter Grabosch , Andreas Pflug , Uwe Czarnetzki , Ralf-Peter Brinkmann , Michael Siemers
CPC分类号： H01J37/32165 , H01J37/32091
摘要： Method and device for the plasma treatment of a substrate in a plasma device, wherein—the substrate (110) is arranged between an electrode (112) and a counter-electrode (108) having a distance d between a surface area of the substrate to be treated and the electrode, —a capacitively coupled plasma discharge is excited, forming a DC self-bias between the electrode (112) and the counter-electrode (108), —in an area of the plasma discharge between the surface area to be treated and the electrode having a quasineutral plasma bulk (114), a quantity of at least one activatable gas species, to which a surface area of the substrate to be treated is subjected, is present —it is provided that a plasma discharge is excited, —wherein the distance d has a value comparable to s=se+sg, where se denotes a thickness of a plasma boundary layer (119) in front of the electrode, and sg denotes a thickness of a plasma boundary layer (118) in front of the substrate surface to be treated or —wherein the quasineutral plasma bulk (114) between the surface area to be treated and the electrode has a linear extension dp, where dp
摘要翻译： 用于等离子体装置中的基板的等离子体处理的方法和装置，其中 - 所述基板（110）布置在电极（112）和相对电极（108）之间，所述电极与对电极（108）之间的距离为d， 并且电极 - 电容耦合等离子体放电被激发，在电极（112）和对电极（108）之间形成DC自偏压，在等离子体放电的面积为 存在电极，其具有准中等离子体体积（114），一定量的待处理衬底的表面积经受的至少一种可活化气体种类，其条件是等离子体放电被激发， - 其中距离d具有与s = se + sg相当的值，其中se表示电极前面的等离子体边界层（119）的厚度，sg表示前面的等离子体边界层（118）的厚度 的待处理基材表面或其中 在待处理表面积和电极之间的准中性等离子体体积（114）中具有线性延伸dp，其中dp <1dd，dp
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公开(公告)号：US20120180810A1
公开(公告)日：2012-07-19
申请号：US13386711
申请日：2010-05-28
申请人： Rudolf Beckmann , Michael Geisler , Harald Rost
发明人： Rudolf Beckmann , Michael Geisler , Harald Rost
CPC分类号： C23C16/4405 , B08B7/0071 , H01J37/32862
摘要： A method for cleaning at least one component arranged in the inner region of a plasma process chamber using a cleaning gas including fluorine gas, where the process chamber has at least one electrode and counter-electrode for generating a plasma for plasma treatment, where the inner region is exposed to gaseous fluorine compounds with a partial pressure of greater than 5 mbar, where the process chamber has at least one electrode and counter-electrode for generating a plasma, and the fluorine gas is thermally activated by means of a temperature-regulating means, where the component to be cleaned has a temperature of
摘要翻译： 一种使用包括氟气的清洁气体来清洁布置在等离子体处理室的内部区域中的至少一个部件的方法，其中处理室具有用于产生等离子体处理的等离子体的至少一个电极和对电极，其中内部 区域暴露于分压大于5毫巴的气态氟化合物，其中处理室具有至少一个用于产生等离子体的电极和对电极，并且氟气通过温度调节装置 ，其中待清洁的组分具有<350℃的温度。
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公开(公告)号：USPP13832P2
公开(公告)日：2003-05-20
申请号：US10122735
申请日：2002-04-14
申请人： Rudolf Beckmann
发明人： Rudolf Beckmann
IPC分类号： A01H500
摘要： A new and distinct cultivar of Poinsettia plant named ‘Giant Red’, characterized by its inflorescences with red-colored flower bracts; dark green-colored leaves; uniform and rounded plant habit; early flowering habit; and excellent post-production longevity.
摘要翻译： 一品红新品种，名为“大红”，其花序呈红色花苞，深绿色的叶子，均匀圆润的植物习性，早熟习性以及出色的后期寿命。
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公开(公告)号：USPP14952P2
公开(公告)日：2004-06-29
申请号：US10637064
申请日：2003-08-07
申请人： Rudolf Beckmann
发明人： Rudolf Beckmann
IPC分类号： A01H500
摘要： A new and distinct cultivar of Begonia plant named ‘Maren Top’, characterized by its compact, upright and rounded plant habit; double flowers that are pink in color and held above and beyond the foliage; and excellent postproduction longevity.
摘要翻译： 一种新的和独特的秋海棠植物名为“Maren Top”，其特点是其紧凑，直立和圆润的植物习性; 双色粉红色，持续在树叶上方; 和优良的后期制作寿命。
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公开(公告)号：USPP14951P2
公开(公告)日：2004-06-29
申请号：US10637060
申请日：2003-08-07
申请人： Rudolf Beckmann
发明人： Rudolf Beckmann
IPC分类号： A01H500
摘要： A new and distinct cultivar of Begonia plant named ‘Celina’, characterized by its compact, upright and rounded plant habit, double flowers that are light orange in color and held above and beyond the foliage; and excellent postproduction longevity.
摘要翻译： 一种新颖而独特的秋海棠植物名为“Celina”的植物，其特征是其紧凑，直立和圆润的植物习性，是双色花，颜色浅橙色，并保持在叶子之上和之上; 和优良的后期制作寿命。
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公开(公告)号：US06841942B2
公开(公告)日：2005-01-11
申请号：US10663434
申请日：2003-09-16
申请人： Rudolf Beckmann , Markus Fuhr , Walter Zultzke , Werner Weinrich
发明人： Rudolf Beckmann , Markus Fuhr , Walter Zultzke , Werner Weinrich
CPC分类号： H01J37/321 , H01J37/32009
摘要： The invention relates to a plasma source whose plasma is ignited by an electric voltage. To be able to carry out the ignition at relatively low voltages, a plate (5) provided with holes (13, 14) is provided beneath a plasma volume (17), which is disposed above a wall (21) of a plasma chamber (3). Through this plate (5) an ignition volume (16) is formed beneath the plasma volume (17) with a higher pressure than in the plasma volume (17), in which the plasma ignites first. The ignition is subsequently propagated through the holes of the plate (5) into the plasma volume (17).
摘要翻译： 本发明涉及一种其等离子体被电压点燃的等离子体源。 为了能够在相对低的电压下进行点火，在设置在等离子体室（21）的上方的等离子体体积（17）的下方设置有设有孔（13,14）的板（5） 3）。 通过该板（5），在等离子体体积（17）下形成的点火体积（16）的压力高于等离子体体积（17），其中等离子体首先点燃。 点火随后通过板（5）的孔传播到等离子体体积（17）中。
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公开(公告)号：USPP14967P2
公开(公告)日：2004-06-29
申请号：US10637059
申请日：2003-08-07
申请人： Rudolf Beckmann
发明人： Rudolf Beckmann
IPC分类号： A01H500
摘要： A new and distinct cultivar of Begonia plant named ‘Kaya’, characterized by its compact, upright and rounded plant habit; double flowers that are pink in color and held above and beyond the foliage; and excellent postproduction longevity.
摘要翻译： 一种新的和独特的秋海棠植物名为“Kaya”，其特点是紧凑，直立和圆润的植物习性; 双色粉红色，持续在树叶上方; 和优良的后期制作寿命。
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公开(公告)号：USPP14954P2
公开(公告)日：2004-06-29
申请号：US10637066
申请日：2003-08-07
申请人： Rudolf Beckmann
发明人： Rudolf Beckmann
IPC分类号： A01H500
摘要： A new and distinct cultivar of Begonia plant named ‘Janina’, characterized by its compact, upright and rounded plant habit; double flowers that are light orange in color and held above and beyond the foliage; and excellent postproduction longevity.
摘要翻译： 一种新颖而独特的秋海棠植物名为'Janina'，其特点是其紧凑，直立和圆润的植物习性; 双色的浅橙色，并保持在树叶之上和之上; 和优良的后期制作寿命。
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9.发明申请公开(公告)号：US20060099341A1
公开(公告)日：2006-05-11
申请号：US10552677
申请日：2004-04-08
申请人： Rudolf Beckmann
发明人： Rudolf Beckmann
IPC分类号： C23C16/00
CPC分类号： H01J37/32357 , H05H1/54
摘要： The invention relates to a high-frequency plasma beam source with a plasma chamber for a plasma, electrical means for applying an electrical voltage to the high-frequency plasma beam source to ignite and maintain the plasma, extraction means for extracting a plasma beam (I) from the plasma chamber as well as an exit opening, which is separated from the vacuum chamber by an extraction grid. The plasma beam (I) exits with a substantially divergent radiation characteristic from the high-frequency plasma beam source. The invention furthermore relates to a method for the irradiation of a surface with a plasma beam (I) of a high-frequency plasma beam source, the plasma beam (I) being divergent.
摘要翻译： 本发明涉及一种具有等离子体等离子体室的高频等离子体束源，用于向高频等离子体束源施加电压以点燃和维持等离子体的电气装置，用于提取等离子体束的提取装置（I ）以及出口开口，其通过提取格栅与真空室分离。 等离子体束（I）从高频等离子体束源以大体上发散的辐射特性离开。 本发明还涉及用等离子体束（I）照射高频等离子体束源的等离子体束（I）发散的方法。
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公开(公告)号：USPP14953P2
公开(公告)日：2004-06-29
申请号：US10637065
申请日：2003-08-07
申请人： Rudolf Beckmann
发明人： Rudolf Beckmann
IPC分类号： A01H500
摘要： A new and distinct cultivar of Begonia plant named ‘Caroline’, characterized by its compact, upright and rounded plant habit; double flowers that are light red purple in color and held above and beyond the foliage; and excellent postproduction longevity.
摘要翻译： 一种名叫“Caroline”的秋海棠植物新品种，其特征是其紧凑，直立和圆润的植物习性; 双色淡淡的红色紫色，并保持在树叶之上和之外; 和优良的后期制作寿命。
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