Methods and apparatus for glitch recovery in stationary-beam ion implantation process using fast ion beam control
    1.
    发明申请
    Methods and apparatus for glitch recovery in stationary-beam ion implantation process using fast ion beam control 有权
    使用快速离子束控制的固定射束离子注入过程中毛刺恢复的方法和装置

    公开(公告)号:US20060219954A1

    公开(公告)日:2006-10-05

    申请号:US11241894

    申请日:2005-09-30

    IPC分类号: H01J37/08 G21K5/10

    摘要: An ion implanter includes a source of a stationary, planar ion beam, a set of beamline components that steer the ion beam along a normal beam path as determined by first operating parameter values, an end station that mechanically scans the wafer across the normal beam path, and control circuitry that responds to a glitch in the ion beam during implantation pass to (1) immediately alter an operating parameter of at least one of the beamline components to a second value to direct the ion beam away from the normal beam path and thereby cease implantation at an implantation transition location on the wafer, (2) subsequently move the wafer to an implantation-resuming position in which the implantation transition location on the wafer lies directly on the normal path of the ion beam, and (3) return the operating parameter to its first value to direct the ion beam along the normal beam path and resume ion implantation at the implantation transition location on the wafer. The operating parameter may be an output voltage of an extraction power supply, or other voltages and/or currents of beamline components that affect the path of the ion beam.

    摘要翻译: 离子注入机包括静止的平面离子束的源,一组束线分量,其通过由第一操作参数值确定的沿正常光束路径引导离子束;终端,其通过正常光束路径机械扫描晶片 以及在注入期间响应于离子束中的毛刺的控制电路通过(1)立即将至少一个束线分量的操作参数改变为第二值,以将离子束引导离开正常光束路径,从而 在晶片上的植入转变位置处停止植入,(2)随后将晶片移动到植入恢复位置,其中晶片上的注入转变位置直接位于离子束的正常路径上,并且(3) 操作参数到其第一值以引导离子束沿着正常光束路径并在晶片上的注入转变位置处恢复离子注入。 操作参数可以是提取电源的输出电压,或影响离子束路径的束线组件的其他电压和/或电流。

    Apparatus and methods for filament crimping and manufacturing
    2.
    发明授权
    Apparatus and methods for filament crimping and manufacturing 有权
    灯丝压接和制造的装置和方法

    公开(公告)号:US08939180B2

    公开(公告)日:2015-01-27

    申请号:US13372199

    申请日:2012-02-13

    摘要: Apparatus and methods for filament crimping. In one embodiment, the apparatus comprises a body and a filament crimp element. The filament crimp element comprises a first set of cavities disposed at a spacing which creates a first set of features and a second set of cavities disposed at a spacing which creates a second set of features. The first and second set cavities are substantially opposite one another. The first set of features are adapted to be placed at least partially within the second set of cavities and the second set of features are adapted to be placed at least partially within the first set of cavities. Methods and apparatus for the manufacture of the device are also disclosed. In addition, methods for automated placement and manufacture of assemblies using the crimp elements are also disclosed.

    摘要翻译: 灯丝卷曲的装置和方法。 在一个实施例中,该装置包括主体和长丝卷曲元件。 灯丝压接元件包括以间隔设置的第一组空腔,其间隔形成第一组特征,第二组空腔以间隔设置,产生第二组特征。 第一和第二组腔基本上彼此相对。 第一组特征适于至少部分地放置在第二组空腔内,并且第二组特征适于至少部分地放置在第一组空腔内。 还公开了用于制造该装置的方法和装置。 此外,还公开了使用压接元件的组件的自动放置和制造的方法。

    Providing sponsorship information alongside traffic messages
    3.
    发明申请
    Providing sponsorship information alongside traffic messages 有权
    提供赞助信息以及交通信息

    公开(公告)号:US20110181439A1

    公开(公告)日:2011-07-28

    申请号:US13080711

    申请日:2011-04-06

    申请人: Mark Saunders

    发明人: Mark Saunders

    IPC分类号: G08G1/09

    摘要: A method and system for providing sponsorship information to a user of a traffic message receiver is disclosed. Sponsorship messages are sent to the traffic message receiver and include data to be stored in the memory of the receiver. The transmission of the sponsorship messages is performed as a background routine to the regular transmission of traffic messages. The sponsorship data stored in the traffic message receiver is provided to the user of the traffic message receiver based on a triggering event, such as the end-user entering a point of interest string into the user interface of his navigation system or receipt of a message that includes an activated trigger flag.

    摘要翻译: 公开了一种向业务消息接收机的用户提供赞助信息的方法和系统。 赞助消息被发送到业务消息接收机,并且包括要存储在接收机的存储器中的数据。 赞助信息的发送是作为业务消息的常规传输的背景例程来执行的。 存储在交通消息接收机中的赞助数据基于诸如最终用户输入到他的导航系统的用户界面中的兴趣点串或者接收消息的触发事件来提供给交通消息接收者的用户 包括激活的触发标志。

    PROVIDING SPONSORSHIP INFORMATION ALONGSIDE TRAFFIC MESSAGES
    4.
    发明申请
    PROVIDING SPONSORSHIP INFORMATION ALONGSIDE TRAFFIC MESSAGES 有权
    提供支持信息的交通信息

    公开(公告)号:US20100292997A1

    公开(公告)日:2010-11-18

    申请号:US12842450

    申请日:2010-07-23

    申请人: Mark Saunders

    发明人: Mark Saunders

    IPC分类号: G06Q30/00 G08G1/09

    摘要: A method and system for providing sponsorship information to a user of a traffic message receiver is disclosed. Sponsorship messages are sent to the traffic message receiver and include data to be stored in the memory of the receiver. The transmission of the sponsorship messages is performed as a background routine to the regular transmission of traffic messages. The sponsorship data stored in the traffic message receiver is provided to the user of the traffic message receiver based on a triggering event, such as the end-user entering a point of interest string into the user interface of his navigation system or receipt of a message that includes an activated trigger flag.

    摘要翻译: 公开了一种向业务消息接收机的用户提供赞助信息的方法和系统。 赞助消息被发送到业务消息接收机,并且包括要存储在接收机的存储器中的数据。 赞助信息的发送是作为业务消息的常规传输的背景例程来执行的。 存储在交通消息接收机中的赞助数据基于诸如最终用户输入到他的导航系统的用户界面中的兴趣点串或者接收消息的触发事件提供给交通消息接收者的用户 包括激活的触发标志。

    Substrate alignment system
    5.
    发明授权

    公开(公告)号:US09033647B2

    公开(公告)日:2015-05-19

    申请号:US12499565

    申请日:2009-07-08

    摘要: A system for aligning an end effector with a substrate in a substrate transport apparatus. The system comprises a first sensor connected to the end effector and a controller for moving the substrate transport apparatus. The sensor has a sensing path pointed in an outward direction. The sensing path does not intersect the substrate when the substrate is located on the end effector. The controller for moving the substrate transport apparatus moves the substrate transport apparatus, based at least partially upon input from the sensor, to position the end effector at a predetermined position relative to the substrate to pick up the substrate onto the end effector.

    APPARATUS AND METHODS FOR FILAMENT CRIMPING AND MANUFACTURING
    6.
    发明申请
    APPARATUS AND METHODS FOR FILAMENT CRIMPING AND MANUFACTURING 有权
    装置和制造方法

    公开(公告)号:US20120261025A1

    公开(公告)日:2012-10-18

    申请号:US13372199

    申请日:2012-02-13

    IPC分类号: B21F1/00

    摘要: Apparatus and methods for filament crimping. In one embodiment, the apparatus comprises a body and a filament crimp element. The filament crimp element comprises a first set of cavities disposed at a spacing which creates a first set of features and a second set of cavities disposed at a spacing which creates a second set of features. The first and second set cavities are substantially opposite one another. The first set of features are adapted to be placed at least partially within the second set of cavities and the second set of features are adapted to be placed at least partially within the first set of cavities. Methods and apparatus for the manufacture of the device are also disclosed. In addition, methods for automated placement and manufacture of assemblies using the crimp elements are also disclosed.

    摘要翻译: 灯丝卷曲的装置和方法。 在一个实施例中,该装置包括主体和长丝卷曲元件。 灯丝压接元件包括以间隔设置的第一组空腔,其间隔形成第一组特征,第二组空腔以间隔设置,产生第二组特征。 第一和第二组腔基本上彼此相对。 第一组特征适于至少部分地放置在第二组空腔内,并且第二组特征适于至少部分地放置在第一组空腔内。 还公开了用于制造该装置的方法和装置。 此外,还公开了使用压接元件的组件的自动放置和制造的方法。

    Debugger for a hardware-implemented operating system
    7.
    发明授权
    Debugger for a hardware-implemented operating system 有权
    用于硬件实现的操作系统的调试器

    公开(公告)号:US07823131B2

    公开(公告)日:2010-10-26

    申请号:US09895364

    申请日:2001-06-29

    IPC分类号: G06F9/44 G06F11/00

    CPC分类号: G06F11/3656

    摘要: In one embodiment, a debugger for a hardware-implemented operating system that supports one or more processors includes a host debug and a user interface. The host debug is operable to connect to a kernel processing unit of the hardware-implemented operating system via a test interface such as a Joint Test Access Group (JTAG) interface, to request information concerning internal objects of the kernel processing unit during the operation of the processors, and to receive the requested information without disturbing the operation of the processors. The user interface is then used to present the requested information to the user. In one embodiment, the debugger further includes a target resident debug server that is scheduled by the kernel processing unit to execute debugging commands issued by the host debug (e.g., a command to collect information resident in the processor's data space, a command to set a breakpoint, a command to respond to a breakpoint, etc.). The target resident debug server executes the debugging commands without unreasonable interference with the operation of the processors.

    摘要翻译: 在一个实施例中,用于支持一个或多个处理器的硬件实现的操作系统的调试器包括主机调试和用户接口。 主机调试可操作以经由诸如联合测试访问组(JTAG)接口的测试接口连接到硬件实现的操作系统的内核处理单元,以在操作期间请求关于内核处理单元的内部对象的信息 处理器,并且在不干扰处理器的操作的情况下接收所请求的信息。 用户界面然后用于向用户呈现所请求的信息。 在一个实施例中,调试器还包括由内核处理单元调度以执行由主机调试发出的调试命令的目标驻留调试服务器(例如,用于收集驻留在处理器的数据空间中的信息的命令, 断点,响应断点的命令等)。 目标驻留调试服务器执行调试命令,而不会对处理器的操作造成不合理的干扰。

    SUBSTRATE ALIGNMENT SYSTEM
    8.
    发明申请
    SUBSTRATE ALIGNMENT SYSTEM 有权
    基板对准系统

    公开(公告)号:US20100119349A1

    公开(公告)日:2010-05-13

    申请号:US12499565

    申请日:2009-07-08

    IPC分类号: H01L21/677

    摘要: A system for aligning an end effector with a substrate in a substrate transport apparatus. The system comprises a first sensor connected to the end effector and a controller for moving the substrate transport apparatus. The sensor has a sensing path pointed in an outward direction. The sensing path does not intersect the substrate when the substrate is located on the end effector. The controller for moving the substrate transport apparatus moves the substrate transport apparatus, based at least partially upon input from the sensor, to position the end effector at a predetermined position relative to the substrate to pick up the substrate onto the end effector.

    摘要翻译: 一种用于在底物输送装置中使端部执行器与衬底对准的系统。 该系统包括连接到末端执行器的第一传感器和用于移动基板输送装置的控制器。 传感器具有朝向外方向指示的感测路径。 当衬底位于末端执行器上时,感测路径不与衬底相交。 用于移动基板输送装置的控制器至少部分地基于传感器的输入来移动基板输送装置,以将末端执行器定位在相对于基板的预定位置,以将基板拾取到末端执行器上。

    Apparatus and methods for filament crimping and manufacturing
    9.
    发明申请
    Apparatus and methods for filament crimping and manufacturing 失效
    灯丝压接和制造的装置和方法

    公开(公告)号:US20070294873A1

    公开(公告)日:2007-12-27

    申请号:US11473567

    申请日:2006-06-22

    IPC分类号: H01R4/01

    摘要: Apparatus and methods for filament crimping. In one embodiment, the apparatus comprises a body and a filament crimp element. The filament crimp element comprises a first set of cavities disposed at a spacing which creates a first set of features and a second set of cavities disposed at a spacing which creates a second set of features. The first and second set cavities are substantially opposite one another. The first set of features are adapted to be placed at least partially within the second set of cavities and the second set of features are adapted to be placed at least partially within the first set of cavities. Methods and apparatus for the manufacture of the device are also disclosed. In addition, methods for automated placement and manufacture of assemblies using the crimp elements are also disclosed.

    摘要翻译: 灯丝卷曲的装置和方法。 在一个实施例中,该装置包括主体和长丝卷曲元件。 灯丝压接元件包括以间隔设置的第一组空腔,其间隔形成第一组特征,第二组空腔以间隔设置,产生第二组特征。 第一和第二组腔基本上彼此相对。 第一组特征适于至少部分地放置在第二组空腔内,并且第二组特征适于至少部分地放置在第一组空腔内。 还公开了用于制造该装置的方法和装置。 此外,还公开了使用压接元件的组件的自动放置和制造的方法。

    Cathodic sputtering system
    10.
    发明授权
    Cathodic sputtering system 失效
    阴极溅射系统

    公开(公告)号:US5538609A

    公开(公告)日:1996-07-23

    申请号:US448837

    申请日:1995-05-24

    IPC分类号: C23C14/34 C23C14/35 H01J37/34

    摘要: An evacuable chamber serving as a cathode contains a rotatable magnet system and is connected to a high frequency power supply for sputtering a target. The chamber is electrically isolated from an evacuable housing containing the substrate to be coated, the chamber being covered by a cup-like shield fixed to the housing to define an interior space. A pipe for evacuating the chamber includes first and second sections separated by a gap and connected by an electrically insulating collar in which parallel metal grids are installed in the gap and respectively connected to the power source and to ground in order to prevent the formation of secondary plasma.

    摘要翻译: 用作阴极的可抽空室包含可旋转磁体系统,并连接到用于溅射靶的高频电源。 所述腔室与包含待涂覆的基底的可抽空壳体电隔离,所述腔室被固定到壳体的杯状屏蔽物覆盖以限定内部空间。 用于排空室的管道包括由间隙隔开并由电绝缘套环连接的第一部分,其中平行的金属栅格安装在间隙中并分别连接到电源并接地以防止形成次级 等离子体。