公开(公告)号：US20130126573A1

公开(公告)日：2013-05-23

申请号：US13640140

申请日：2011-07-12

申请人： S. Abbas Hosseini ,  Peter R. Herman

发明人： S. Abbas Hosseini ,  Peter R. Herman

IPC分类号： B23K26/00 ,  H01L21/263 ,  B26F3/00

CPC分类号： B23K26/0057 ,  B23K26/0006 ,  B23K26/0604 ,  B23K26/0619 ,  B23K26/0622 ,  B23K26/0624 ,  B23K26/083 ,  B23K26/53 ,  B23K2103/42 ,  B23K2103/50 ,  B23K2103/52 ,  B23K2103/54 ,  B23K2103/56 ,  B26F3/00 ,  C03B33/0222 ,  C03C23/0025 ,  H01L21/2633 ,  H01L21/78 ,  Y10T225/12

摘要： A method is provided for the internal processing of a transparent substrate in preparation for a cleaving step. The substrate is irradiated with a focused laser beam that is comprised of pulses having an energy and pulse duration selected to produce a filament within the substrate. The substrate is translated relative to the laser beam to irradiate the substrate and produce an additional filament at one or more additional locations. The resulting filaments form an array defining an internally scribed path for cleaving said substrate. Laser beam parameters may be varied to adjust the filament length and position, and to optionally introduce V-channels or grooves, rendering bevels to the laser-cleaved edges. Preferably, the laser pulses are delivered in a burst train for lowering the energy threshold for filament formation, increasing the filament length, thermally annealing of the filament modification zone to minimize collateral damage, improving process reproducibility, and increasing the processing speed compared with the use of low repetition rate lasers.

摘要翻译： 提供了一种在制备切割步骤中对透明基板进行内部处理的方法。 用聚焦激光束照射衬底，该激光束由具有选择的能量和脉冲持续时间的脉冲组成，以在衬底内产生细丝。 衬底相对于激光束平移以照射衬底并在一个或多个附加位置产生另外的细丝。 所得到的长丝形成限定用于切割所述基底的内部刻划路径的阵列。 可以改变激光束参数以调节灯丝长度和位置，并且可选地引入V沟道或凹槽，从而使激光切割边缘产生斜面。 优选地，激光脉冲在突发串中传送，以降低灯丝形成的能量阈值，增加灯丝长度，灯丝改性区域的热退火以最小化附带损伤，提高工艺再现性，并且与使用相比提高了处理速度 的低重复率激光器。

公开(公告)号：US09296066B2

公开(公告)日：2016-03-29

申请号：US13640140

申请日：2011-07-12

申请人： S. Abbas Hosseini ,  Peter R. Herman

发明人： S. Abbas Hosseini ,  Peter R. Herman

IPC分类号： B23K26/00 ,  B23K26/06 ,  B26F3/00 ,  H01L21/263 ,  C03B33/02

CPC分类号： B23K26/0057 ,  B23K26/0006 ,  B23K26/0604 ,  B23K26/0619 ,  B23K26/0622 ,  B23K26/0624 ,  B23K26/083 ,  B23K26/53 ,  B23K2103/42 ,  B23K2103/50 ,  B23K2103/52 ,  B23K2103/54 ,  B23K2103/56 ,  B26F3/00 ,  C03B33/0222 ,  C03C23/0025 ,  H01L21/2633 ,  H01L21/78 ,  Y10T225/12

摘要： A method is provided for the internal processing of a transparent substrate in preparation for a cleaving step. The substrate is irradiated with a focused laser beam that includes pulses having an energy and pulse duration selected to produce a filament within the substrate. The substrate is translated relative to the laser beam to irradiate the substrate and produce an additional filament at one or more additional locations. The resulting filaments form an array defining an internally scribed path for cleaving the substrate. Laser beam parameters may be varied to adjust the filament length and position, and to optionally introduce V-channels or grooves. The laser pulses may be delivered in a burst train for lowering the energy threshold for filament formation, increasing filament length, thermally annealing of the filament modification zone to minimize collateral damage, and increasing the processing speed compared with the use of low repetition rate lasers.

摘要翻译： 提供了一种在制备切割步骤中对透明基板进行内部处理的方法。 用聚焦激光束照射衬底，其包括具有选择的能量和脉冲持续时间的脉冲以在衬底内产生细丝。 衬底相对于激光束平移以照射衬底并在一个或多个附加位置产生另外的细丝。 所得到的长丝形成限定用于切割基底的内部刻划路径的阵列。 可以改变激光束参数以调节灯丝长度和位置，并且可选地引入V沟道或槽。 激光脉冲可以在脉冲串中传送，以降低灯丝形成的能量阈值，增加灯丝长度，灯丝改性区域的热退火以最小化附带损伤，以及与使用低重复率激光器相比增加处理速度。

公开(公告)号：US20120039567A1

公开(公告)日：2012-02-16

申请号：US12531566

申请日：2008-03-14

申请人： Peter R. Herman ,  Haibin Zhang ,  Shane Michael Eaton

发明人： Peter R. Herman ,  Haibin Zhang ,  Shane Michael Eaton

IPC分类号： G02B6/34 ,  C03C25/68

CPC分类号： G02B6/34 ,  G02B5/1857 ,  G02B6/02147 ,  G02B6/124 ,  G02B6/13 ,  G02B2006/12164 ,  G02B2006/12171

摘要： The present invention provides a direct laser writing fabrication method and system for devices having periodic refractive index modulation structures, for example, Bragg gratings. By focusing a modulated pulsed laser beam into a transparent material substrate, a path of laser modified volumes can be formed with modified refractive index compared with the unprocessed material. Modulation of exposure conditions provides periodic or modified periodic waveguide structures such that the waveguide structures exhibit grating responses and can be used for a variety of optical applications, for example, as spectral filters, Bragg reflectors, grating couplers, grating sensors, or other devices. The method enables direct one-step fabrication and integration of periodic or modified periodic refractive-index modulation devices together with other optical waveguiding devices to enable low-cost, multifunctional one-dimensional, two-dimensional or three-dimensional optical circuit fabrication of simple and complex optical systems.

摘要翻译： 本发明提供了一种用于具有周期性折射率调制结构的器件的直接激光写入制造方法和系统，例如布拉格光栅。 通过将调制的脉冲激光束聚焦到透明材料基板中，与未处理的材料相比，可以形成具有改进的折射率的激光修改体积的路径。 暴露条件的调制提供周期性或修改的周期性波导结构，使得波导结构呈现光栅响应，并且可以用于各种光学应用，例如作为光谱滤波器，布拉格反射器，光栅耦合器，光栅传感器或其它器件。 该方法能够将周期性或修改的周期性折射率调制器件与其他光波导器件直接一步制造和集成，以实现简单和简单的低成本，多功能一维，二维或三维光电路制造 复杂的光学系统。

公开(公告)号：US20090304331A1

公开(公告)日：2009-12-10

申请号：US12301496

申请日：2007-05-18

申请人： Peter R. Herman ,  Haibin Zhang

发明人： Peter R. Herman ,  Haibin Zhang

IPC分类号： G02B6/34 ,  B29D11/00

CPC分类号： G02B6/02128 ,  G02B6/13 ,  G02B2006/12171

摘要： The invention relates to devices having periodic refractive index modulation structures and fabrication methods for the devices using a laser means. By focusing a pulsed laser beam into a transparent material substrate, a path of laser modified volumes can be formed with modified refractive index compared with the unprocessed material. By selecting appropriate laser parameters and relative scan speed, the laser modified path defines an optical waveguide. Separation distance of the individual modified volumes define a periodic modification pattern along the waveguide path, so that the waveguide structures also exhibit grating responses, for example, as spectral filters, Bragg reflectors, grating couplers, grating sensors, or other devices. This method of direct laser fabrication enables one-step fabrication and integration of periodic or aperiodic refractive-index modulation devices together with optical waveguiding properties to enable low-cost, multifunctional I D, 2D or 3D optical circuit fabrication for simple and complex applications.

摘要翻译： 本发明涉及具有周期性折射率调制结构的装置和使用激光装置的装置的制造方法。 通过将脉冲激光束聚焦到透明材料基板中，与未处理的材料相比，可以形成具有改进的折射率的激光修改体积的路径。 通过选择适当的激光参数和相对扫描速度，激光修改路径限定了光波导。 各个修改体积的分离距离定义沿着波导路径的周期性修改图案，使得波导结构也表现出光栅响应，例如作为光谱滤波器，布拉格反射器，光栅耦合器，光栅传感器或其它器件。 这种直接激光制造方法使得能够对周期性或非周期性折射率调制器件进行一步制造和集成以及光波导特性，以实现简单和复杂应用的低成本，多功能I D，2D或3D光电路制造。

公开(公告)号：US06552301B2

公开(公告)日：2003-04-22

申请号：US09768785

申请日：2001-01-25

申请人： Peter R. Herman ,  Robin Marjoribanks ,  Anton Oettl

发明人： Peter R. Herman ,  Robin Marjoribanks ,  Anton Oettl

IPC分类号： B23K2600

CPC分类号： C03B29/02 ,  A61B2017/00172 ,  A61F9/00802 ,  A61F9/00817 ,  A61F2009/00842 ,  A61F2009/00872 ,  B23K26/0624 ,  B23K26/361 ,  B23K26/364 ,  B23K26/389 ,  B23K26/40 ,  B23K26/60 ,  B23K2103/10 ,  B23K2103/172 ,  B23K2103/32 ,  B23K2103/50 ,  B23K2103/52 ,  C03B33/082 ,  C03C23/0025

摘要： A method of laser processing or laser modification of materials. The combination of ultrafast laser pulses and high-repetition rate (>100 kHz) bursts (or continuous operation) defines a new and unexpected regime for material processing. The high repetition rate controls thermal and/or other relaxation processes evolving between each ultrafast laser pulse that ‘prepares’ the sample surface or bulk to alter the interaction with subsequent ultrafast laser pulses and thereby improve or optimize the process, or enable a new process, that are not available at lower repetition rate. The addition of this laser-controlled thermal component, and/or the general control of relaxation processes, overcomes several current limitations of ultrafast laser processing at lower repetition rates (

摘要翻译： 激光加工或激光修饰材料的方法。 超快激光脉冲和高重复率（> 100 kHz）脉冲串（或连续运行）的组合定义了一种新的和意想不到的材料处理方案。 高重复率控制在每个超快激光脉冲之间发展的热和/或其他松弛过程，“激光”样品表面或体积以改变与随后的超快激光脉冲的相互作用，从而改善或优化该过程，或者实现新工艺， 这种激光控制热分量的添加和/或松弛过程的一般控制克服了在较低重复率（<100kHz）下的超快速激光处理的几个当前限制，提供了以下方式： 进一步利用超快速激光器的许多属性进行一般材料处理和材料修改应用。

公开(公告)号：US09904018B2

公开(公告)日：2018-02-27

申请号：US12531566

申请日：2008-03-14

申请人： Peter R. Herman ,  Haibin Zhang ,  Shane Michael Eaton

发明人： Peter R. Herman ,  Haibin Zhang ,  Shane Michael Eaton

IPC分类号： G02B6/34 ,  G02B6/13 ,  G02B6/124 ,  G02B6/12 ,  G02B5/18 ,  G02B6/02

CPC分类号： G02B6/34 ,  G02B5/1857 ,  G02B6/02147 ,  G02B6/124 ,  G02B6/13 ,  G02B2006/12164 ,  G02B2006/12171

摘要： The present invention provides a direct laser writing fabrication method and system for devices having periodic refractive index modulation structures, for example, Bragg gratings. By focusing a modulated pulsed laser beam into a transparent material substrate, a path of laser modified volumes can be formed with modified refractive index compared with the unprocessed material. Modulation of exposure conditions provides periodic or modified periodic waveguide structures such that the waveguide structures exhibit grating responses and can be used for a variety of optical applications, for example, as spectral filters, Bragg reflectors, grating couplers, grating sensors, or other devices. The method enables direct one-step fabrication and integration of periodic or modified periodic refractive-index modulation devices together with other optical waveguiding devices to enable low-cost, multifunctional one-dimensional, two-dimensional or three-dimensional optical circuit fabrication of simple and complex optical systems.

公开(公告)号：US08270788B2

公开(公告)日：2012-09-18

申请号：US12301496

申请日：2007-05-18

申请人： Peter R. Herman ,  Haibin Zhang

发明人： Peter R. Herman ,  Haibin Zhang

IPC分类号： G02B6/34 ,  B29D11/00 ,  C03B37/018 ,  H01L21/00

CPC分类号： G02B6/02128 ,  G02B6/13 ,  G02B2006/12171

摘要： The invention relates to devices having periodic refractive index modulation structures and fabrication methods for the devices using a laser means. By focusing a pulsed laser beam into a transparent material substrate, a path of laser modified volumes can be formed with modified refractive index compared with the unprocessed material. By selecting appropriate laser parameters and relative scan speed, the laser modified path defines an optical waveguide. Separation distance of the individual modified volumes define a periodic modification pattern along the waveguide path, so that the waveguide structures also exhibit grating responses, for example, as spectral filters, Bragg reflectors, grating couplers, grating sensors, or other devices. This method of direct laser fabrication enables one-step fabrication and integration of periodic or aperiodic refractive-index modulation devices together with optical waveguiding properties to enable low-cost, multifunctional 1D, 2D or 3D optical circuit fabrication for simple and complex applications.

摘要翻译： 本发明涉及具有周期性折射率调制结构的装置和使用激光装置的装置的制造方法。 通过将脉冲激光束聚焦到透明材料基板中，与未处理的材料相比，可以形成具有改进的折射率的激光修改体积的路径。 通过选择适当的激光参数和相对扫描速度，激光修改路径限定了光波导。 各个修改体积的分离距离定义沿着波导路径的周期性修改图案，使得波导结构也表现出光栅响应，例如作为光谱滤波器，布拉格反射器，光栅耦合器，光栅传感器或其它器件。 这种直接激光制造方法使得能够将周期性或非周期性折射率调制装置与光波导特性一步制造和集成，以实现用于简单和复杂应用的低成本，多功能1D，2D或3D光电路制造。

公开(公告)号：US20110182306A1

公开(公告)日：2011-07-28

申请号：US12918472

申请日：2008-02-19

申请人： Abbas S. Hosseini ,  Peter R. Herman ,  Thorald Horst Bergmann

发明人： Abbas S. Hosseini ,  Peter R. Herman ,  Thorald Horst Bergmann

IPC分类号： H01S3/10 ,  G02F1/03

CPC分类号： H01S3/235 ,  B23K26/0624 ,  G02F1/03 ,  G02F2201/17 ,  H01S3/0057 ,  H01S3/0085 ,  H01S3/1103 ,  H01S3/2325

摘要： This invention relates to a method for generating bursts of laser pulses and to an apparatus for generating bursts of laser pulses and to a Pockels cell driving circuit. A method for generating bursts of laser pulses comprising generating first repetition rate laser pulses, and generating first repetition rate laser bursts from the repetition laser pulses, the laser bursts each containing a sequence of second repetition rate laser pulses, wherein the second repetition rate is higher than the first repetition rate.

摘要翻译： 本发明涉及一种用于产生脉冲串的激光脉冲的方法和用于产生脉冲串的激光脉冲和普克尔单元驱动电路的装置。 一种用于产生激光脉冲串的方法，包括产生第一重复频率激光脉冲，以及从所述重复激光脉冲产生第一重复频率激光脉冲串，所述激光脉冲串包含第二重复频率激光脉冲序列，其中所述第二重复频率较高 比第一次重复率。