公开(公告)号：US20210219408A1

公开(公告)日：2021-07-15

申请号：US16927050

申请日：2020-07-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dohyung KIM ,  Seongchul HONG ,  Kyungsik KANG ,  Insung KIM ,  Motoshi SAKAI ,  Seulgi LEE ,  Jungchul LEE

IPC: H05G2/00 ,  H01S3/23 ,  G02B19/00 ,  H01S3/00 ,  G02B26/08

Abstract: A laser beam delivery apparatus of an extreme ultra violet light source may include a high power seed module configured to generate a laser beam, a power amplifier configured to amplify the laser beam generated by the high power seed module, a beam transfer module configured to collect and move the laser beam amplified by the power amplifier, a final focusing assembly optical platform configured to adjust focus of the laser beam collected and moved by the beam transfer module, and a focusing unit configured to focus the laser beam with the focus adjusted by the final focusing assembly optical platform to a target droplet. The power amplifier may include a position adjuster configured to adjust a position of the laser beam. The position adjuster may include a refraction plate having a flat surface. The power amplifier may include a pointing adjuster, which may include a mirror.

公开(公告)号：US20230068376A1

公开(公告)日：2023-03-02

申请号：US17740529

申请日：2022-05-10

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ingi KIM ,  Minhwan SEO ,  Sangwoo BAE ,  Akinori OKUBO ,  Jungchul LEE ,  Eunhee JEANG

IPC: G01J4/02

Abstract: Provided is a polarization measuring device including a stage on which a measurement target is provided, a light source assembly configured to emit incident light, a first polarimeter configured to polarize the incident light, a second polarimeter configured to polarize reflected light reflected from the measurement target that is irradiated by the incident light, a filter assembly configured to remove noise from the reflected light, and a detector configured to receive the reflected light and measure an intensity of the reflected light and a phase of the reflected light.

公开(公告)号：US20220208610A1

公开(公告)日：2022-06-30

申请号：US17699570

申请日：2022-03-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Junho YOON ,  Jungchul LEE ,  Byungmoon BAE ,  Junggeun SHIN ,  Hyunsu SIM

IPC: H01L21/78 ,  H01L21/268 ,  H01L21/683 ,  H01L21/304

Abstract: According to an embodiment of inventive concepts, a substrate dicing method may include forming reformed patterns in a substrate using a laser beam, grinding a bottom surface of the substrate to thin the substrate, and expanding the substrate to divide the substrate into a plurality of semiconductor chips. The forming of the reformed patterns may include forming a first reformed pattern in the substrate and providing an edge focused beam to a region crossing the first reformed pattern to form a second reformed pattern in contact with the first reformed pattern.

公开(公告)号：US20210159121A1

公开(公告)日：2021-05-27

申请号：US16909136

申请日：2020-06-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Junho YOON ,  Jungchul LEE ,  Byungmoon BAE ,  Junggeun SHIN ,  Hyunsu SIM

IPC: H01L21/78 ,  H01L21/268 ,  H01L21/304 ,  H01L21/683

Abstract: According to an embodiment of inventive concepts, a substrate dicing method may include forming reformed patterns in a substrate using a laser beam, grinding a bottom surface of the substrate to thin the substrate, and expanding the substrate to divide the substrate into a plurality of semiconductor chips. The forming of the reformed patterns may include forming a first reformed pattern in the substrate and providing an edge focused beam to a region crossing the first reformed pattern to form a second reformed pattern in contact with the first reformed pattern.

公开(公告)号：US20230187235A1

公开(公告)日：2023-06-15

申请号：US18073980

申请日：2022-12-02

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Akinori OKUBO ,  Youngchul KWON ,  Sungho JANG ,  Jungchul LEE ,  Deoksuk JANG

IPC: H01L21/67 ,  G02B27/09 ,  G02B27/00 ,  B23K26/53

CPC classification number: H01L21/67092 ,  G02B27/0927 ,  G02B27/0081 ,  B23K26/53 ,  G02B19/0047

Abstract: A stealth dicing laser device including: a pulse laser generator configured to generate laser light; a condenser lens formed in an optical path of the laser light; a pupil filter configured to transform a phase of the laser light before the laser light passes through the condenser lens; and a controller configured to provide a phase control signal to the pupil filter, wherein the pupil filter transforms the phase of the laser light based on the phase control signal, wherein the phase control signal is a signal transforming a phase expression of the laser light based on a parameter.

公开(公告)号：US20230094985A1

公开(公告)日：2023-03-30

申请号：US17836199

申请日：2022-06-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jiyoung CHU ,  Hyungjin KIM ,  Minhwan SEO ,  Wondon JOO ,  Sungmin AHN ,  Jiyoung KIM ,  Ono KAZUYA ,  Jungchul LEE

IPC: H01L21/68 ,  G01B11/27 ,  H01L23/544 ,  G06T7/00

Abstract: An optical apparatus includes a folding mirror configured to direct first and second illumination lights on first and second alignment marks respectively and reflect first and second reflected lights reflected from the first and second alignment marks in different horizontal directions respectively, first and second lenses arranged respectively in optical paths of the first and second reflected lights reflected from the first and second reflective surfaces of the folding mirror, first and second reflection portions configured to reflect the first and second reflected lights passing through the first and second lenses respectively, and a beam splitter prism configured to divide an illumination light incident through a first surface into the first and second illumination lights and direct to the first and second reflection portions, and transmit the first and second reflected lights reflected by the first and second reflection portions through a second surface.