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1.
公开(公告)号:US11518909B2
公开(公告)日:2022-12-06
申请号:US16645343
申请日:2018-02-13
发明人: Kunbae Noh , Taeksoo Kwak , Junyoung Jang , Yoonyoung Koo , Yonggoog Kim , Jingyo Kim , Jin-Hee Bae , Jun Sakong , Jinwoo Seo , Sooyeon Sim , Huichan Yun , Jiho Lee , Kwen-Woo Han , Byeong Gyu Hwang
IPC分类号: C09D183/16 , H01L21/02 , H01L21/306
摘要: Provided is a composition for forming a silica layer, the composition containing a silicon-containing polymer and a solvent, wherein a silica layer formed of the composition for forming the silica layer satisfies Relation 1. The definition of Relation 1 is as described in the specification. The definition of Relation 1 is the same as described in the specification.
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公开(公告)号:US10017646B2
公开(公告)日:2018-07-10
申请号:US15656341
申请日:2017-07-21
发明人: Sooyeon Sim , Jin-Hee Bae , TaekSoo Kwak , Yonggoog Kim , Jingyo Kim , Kunbae Noh , Huichan Yun , Jiho Lee , Byeong Gyu Hwang
CPC分类号: C09D1/00 , C01B33/12 , C09D7/20 , C09D7/63 , H01L21/02164 , H01L21/02222 , H01L21/02282 , H01L21/02318
摘要: A composition for forming silica layer includes a silicon-containing polymer and a solvent, wherein a weight average molecular weight of the silicon-containing polymer ranges from about 2,000 to about 100,000 and a branching ratio (a) of the silicon-containing polymer calculated by Equation 1 ranges from about 0.25 to about 0.50. η=k·Ma [Equation 1] In Equation 1, η is an intrinsic viscosity of a silicon-containing polymer, M is an absolute molecular weight of a silicon-containing polymer, a is a branching ratio, and k is an intrinsic constant.
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3.
公开(公告)号:US20170250206A1
公开(公告)日:2017-08-31
申请号:US15263192
申请日:2016-09-12
发明人: Kwen-Woo Han , Taeksoo Kwak , Kunbae Noh , Jinwoo Seo , Sooyeon Sim , Huichan Yun , Jiho Lee , Junyoung Jang , Byeong Gyu Hwang
CPC分类号: H01L27/1262 , B05D1/005 , B05D3/0254 , C09D183/16 , C23C18/122 , C23C18/1283 , G02F1/133345 , G02F1/133365 , G02F1/136277 , G02F2202/022 , G02F2202/025 , H01L21/02164 , H01L21/02216 , H01L21/02222 , H01L21/02282 , H01L21/02337 , H01L27/1248
摘要: A composition for forming a silica layer, a method for manufacturing a silica layer, a silica layer manufactured by the method, and an electronic device including the silica layer. The composition for forming a silica layer includes a silicon-containing polymer and a solvent compound represented by Chemical Formula 1:
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