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公开(公告)号：US20180272257A1
公开(公告)日：2018-09-27
申请号：US15905990
申请日：2018-02-27
Applicant: SCREEN Holdings Co., Ltd.
Inventor： Masahito KASHIYAMA , Toshiya KUWAHARA
IPC: B01D29/96 , B01D35/30 , B01D35/02 , H01L21/67 , H01L21/687
CPC classification number: B01D29/96 , B01D35/02 , B01D35/30 , B01D35/306 , B01D2201/303 , B01D2201/4007 , B01D2201/4023 , B01D2201/4046 , B01D2201/4076 , H01L21/67023 , H01L21/68764
Abstract: Disclosed is a filter coupling device having joint members, a base plate, a filter holder, a rotation shaft, and a leg. The filter holder allows support of a first filter and a second filter. The rotation shaft is connected with the filter holder. The filter holder takes a first attitude and a second attitude by rotating around the rotation shaft. The filter holder includes a first filter holder configured to support the first filter in the first attitude, and a second filter holder configured to support the second filter in the second attitude.
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公开(公告)号：US20190064853A1
公开(公告)日：2019-02-28
申请号：US16048442
申请日：2018-07-30
Applicant: SCREEN Holdings Co., Ltd.
Inventor： Toru MOMMA , Hiroyuki OGURA , Masahito KASHIYAMA , Satoshi YAMAMOTO , Hiroyuki TAKEUCHI , Shoji KIRITA , Junki NISHIMURA , Shogo YOSHIDA
Abstract: A pumping apparatus includes a pump chamber, a piston, a motor, and a controller. The controller determines an imaginary terminal point by referring to a dispense command, theoretical information, and a current position of the piston. The controller corrects the imaginary terminal point to a target position by referring to a correction graph. The controller outputs a drive command to the motor for moving the piston from a start position to the target position.
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公开(公告)号：US20180061676A1
公开(公告)日：2018-03-01
申请号：US15679631
申请日：2017-08-17
Applicant: SCREEN Holdings Co., Ltd.
Inventor： Masahito KASHIYAMA
IPC: H01L21/67
Abstract: A drive mechanism deforms two diaphragms to perform alternate increase and decrease in volume of a supply chamber. At this time, the two diaphragms are provided for the single supply chamber. This leads to possibility of suction and feed out of a desired amount of liquid even with limited deformation of the diaphragms. In addition, the two diaphragms achieve suppression in deformation thereof upon suction and feed out of a desired amount of liquid. This allows selection of the diaphragms each with a short stroke, yielding suppressed stagnation and quality degradation of the liquid.
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公开(公告)号：US20170128962A1
公开(公告)日：2017-05-11
申请号：US15344933
申请日：2016-11-07
Applicant: SCREEN Holdings Co., Ltd.
Inventor： Masahito KASHIYAMA , Yasuo TAKAHASHI , Kota KABUNE , Shoji KIRITA , Toru MOMMA
CPC classification number: B05B3/02 , B05B12/02 , B05B15/555 , H01L21/6715
Abstract: A first feed section supplies a solvent from a first discharge opening formed in a side surface of a nozzle receiving portion. A cylindrical drain flow path is attached to a bottom surface of the nozzle receiving portion. The drain flow path drains at least a coating solution dispensed from a nozzle placed in the nozzle receiving portion. The drain flow path has a second feed section for adjusting a drain flow rate of the solvent flowing from the nozzle receiving portion and passing through the drain flow path. With the second feed section adjusting the drain flow rate when the solvent flows through the drain flow path, although an inside diameter of the drain flow path is set larger than a diameter of a nozzle dispenser opening, the solvent can be collected stably in the nozzle receiving portion, whereby the solvent can easily be sucked into a nozzle tip.
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5.发明申请公开(公告)号：US20180046083A1
公开(公告)日：2018-02-15
申请号：US15556517
申请日：2016-02-12
Applicant: SCREEN Holdings Co., Ltd.
Inventor： Masahito KASHIYAMA
IPC: G03F7/30
CPC classification number: G03F7/30 , G03F7/162 , G03F7/3021 , H01L21/027
Abstract: Provided downstream of an on-off valve are a needle and a diaphragm that cooperates with the needle. The needle is driven by a motor. A controller causes the motor to move the diaphragm cooperating with the needle for increasing a volume of a flow path downstream of the on-off valve. Accordingly, this allows suck back, leading to prevention of drips of the processing liquid. In addition, the controller causes the motor to move the needle for regulating the flow rate of the processing liquid when the on-off valve is opened. This facilitates flow regulation of the processing liquid by the motor which is current1y made by the operator's sense. Moreover, since prevention of the drips of the processing liquid as well as the flow regulation of the processing liquid are performable with the same motor, a needless configuration is omittable to achieve space saving.
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Patent Agency Ranking
公开(公告)号：US20160271655A1
公开(公告)日：2016-09-22
申请号：US15070588
申请日：2016-03-15
Applicant: SCREEN Holdings Co., Ltd.
Inventor： Masahito KASHIYAMA , Koji NISHIYAMA , Kota KABUNE
IPC: B08B3/04
CPC classification number: H01L21/67051 , B08B3/02 , B08B2203/0264 , H01L21/6715
Abstract: Disclosed is a substrate treating apparatus including a substrate holder, a rotating drive unit, a treatment liquid supplying unit, an exterior cup, and an interior cup. The interior cup is movable between a collection position where the interior cup collects the treatment liquid and a retracting position where the exterior cup collects the treatment liquid, and includes an interior cup main body with an annular contour, a liquid outlet in the interior cup main body for draining the treatment liquid in the interior cup main body, and an exhaust port in the interior cup main body for exhausting gas in the interior cup main body. The exterior cup includes an exterior cup main body with an annular contour, a liquid outlet in the exterior cup main body for draining the treatment liquid in the exterior cup main body, and an exhaust port in the exterior cup main body for exhausting gas in the exterior cup main body.
Abstract translation: 公开了一种基板处理装置，其包括基板保持件，旋转驱动单元，处理液供给单元，外部杯和内部杯。 内杯可在内杯收集处理液的收集位置和外杯收集处理液的收缩位置之间移动，并且包括具有环形轮廓的内杯主体，内杯主体中的液体出口 用于排出内杯主体中的处理液的主体，以及用于排出内杯主体中的气体的内杯主体中的排气口。 外杯包括具有环形轮廓的外杯主体，外杯主体中的液体出口，用于排出外杯主体中的处理液，以及外杯主体中的排气口， 外杯主体。
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公开(公告)号：US20200264512A1
公开(公告)日：2020-08-20
申请号：US16780943
申请日：2020-02-04
Applicant: SCREEN HOLDINGS CO., LTD.
Inventor： Masahito KASHIYAMA
IPC: G03F7/16
Abstract: A development liquid is discharged from a development liquid nozzle having one discharge port extending continuously in one direction to the substrate. The development liquid nozzle is fixed such that the development liquid is supplied to a reference straight line on an upper surface of the substrate, and is fixed such that a liquid receiving region that receives the development liquid on the upper surface of the substrate extends in a direction inclined with respect to the reference straight line, the reference straight line passing through a rotational center of the substrate. The development liquid nozzle is moved in a direction of the reference straight line. The liquid receiving region has one end and another end. The other end is located farther away from the rotational center of the substrate than the one end, and is located farther downstream in the rotation direction of the substrate than the one end.
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公开(公告)号：US20190063415A1
公开(公告)日：2019-02-28
申请号：US16045884
申请日：2018-07-26
Applicant: SCREEN Holdings Co., Ltd.
Inventor： Junki NISHIMURA , Hiroyuki OGURA , Masahito KASHIYAMA , Toru MOMMA , Shoji KIRITA , Hidetoshi SAGAWA , Shogo YOSHIDA
Abstract: A chamber has at least three openings, or a first opening, a second opening, and a third opening formed therein that are in communication with a reservoir. The second opening is higher in level than the first opening. The third opening is used for discharging a liquid within the reservoir by introducing gas through at least one of the first opening and the second opening into the reservoir. Since the third opening is the lowest in level among the three openings, the liquid stored in the reservoir is able to be drained easily.
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公开(公告)号：US20170232460A1
公开(公告)日：2017-08-17
申请号：US15429610
申请日：2017-02-10
Applicant: SCREEN Holdings Co., Ltd.
Inventor： Masahito KASHIYAMA
CPC classification number: B05B15/40 , B05B9/0413 , F04B17/03 , F04B53/06 , F04B53/20 , H01L21/67017 , H01L21/67051 , H01L21/6715
Abstract: Provided is a pump apparatus, having an upstream pump, a filter, and a downstream pump being inserted into a processing liquid flow path in this order. The downstream pump has an inlet higher in level than an outlet of the upstream pump and higher in level than an outlet of the filter. That is, the downstream pump is disposed higher in level than the upstream pump and the filter. Accordingly, this allows a processing liquid to flow upward. Even when air bubbles are generated in the processing liquid, buoyancy causes the air bubbles to move upward in the processing liquid flow path and collect the air bubbles on a downstream side. Consequently, the air bubbles are readily vented from the processing liquid flow path.
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公开(公告)号：US20170120173A1
公开(公告)日：2017-05-04
申请号：US15334647
申请日：2016-10-26
Applicant: SCREEN Holdings Co., Ltd.
Inventor： Masahito KASHIYAMA , Akihiko MORITA
IPC: B01D35/30
CPC classification number: B01D35/306 , B01D35/30 , B01D2201/303 , B01D2201/4007 , B01D2201/4023
Abstract: A filter coupling device couples to a filter. The filter coupling device includes a plurality of joint members for connection to a plurality of connection openings of the filter. The filter coupling device also includes an arrangement switcher for switching an arrangement of the joint members between a first arrangement and a second arrangement.
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