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公开(公告)号：US09843868B2
公开(公告)日：2017-12-12
申请号：US15017514
申请日：2016-02-05
Applicant: Omron Corporation , STMICROELECTRONICS S.R.L.
Inventor： Takashi Kasai , Shobu Sato , Yuki Uchida , Igino Padovani , Filippo David , Sebastiano Conti
CPC classification number: H04R19/04 , B81B3/0021 , H04R1/023 , H04R1/086 , H04R3/00 , H04R3/005 , H04R19/005 , H04R19/016 , H04R31/00 , H04R2201/003 , H04R2499/11
Abstract: Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.
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公开(公告)号：US09380380B2
公开(公告)日：2016-06-28
申请号：US13936110
申请日：2013-07-05
Applicant: Omron Corporation , STMICROELECTRONICS S.R.L.
Inventor： Takashi Kasai , Shobu Sato , Yuki Uchida , Igino Padovani , Filippo David , Sebastiano Conti , Martino Zerbini , Luca Molinari
CPC classification number: H04R3/00 , H01L2224/48137 , H01L2924/16152 , H04R1/086 , H04R19/005 , H04R19/016 , H04R31/00
Abstract: The present disclosure is directed to an acoustic transducer configured to detect a sound wave according to changes in capacitances between a vibrating electrode and a fixed electrode. At least one of the vibrating electrode and the fixed electrode being divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting electrical signals. The disclosure includes a digital interface circuit coupled to the divided electrodes. The circuit includes a recombination stage, which supplies a mixed signal by combining the first digital processed signal and the second digital processed signal with a respective weight that is a function of a first level value of the first processed signal. An output stage is included, which supplies, selectively and alternatively, a first processed signal, a second processed signal, or a mixed signal.
Abstract translation: 本公开涉及一种被配置为根据振动电极和固定电极之间的电容的变化来检测声波的声学换能器。 振动电极和固定电极中的至少一个分为多个分割电极，多个分割电极输出电信号。 本公开包括耦合到分割电极的数字接口电路。 电路包括复合级，其通过将第一数字处理信号和第二数字处理信号组合为具有作为第一处理信号的第一电平值的函数的相应权重来提供混合信号。 包括输出级，其选择性地或替代地提供第一处理信号，第二处理信号或混合信号。
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公开(公告)号：US09654071B2
公开(公告)日：2017-05-16
申请号：US15087630
申请日：2016-03-31
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Filippo David , Igino Padovani
IPC: H03F99/00 , H03F3/45 , H03F3/187 , H04R19/01 , G05F3/30 , H03F3/185 , H04R3/00 , H04R19/04 , H03F1/32
CPC classification number: H03F3/45179 , G05F3/30 , H03F1/3211 , H03F3/185 , H03F3/187 , H03F3/45 , H03F3/45183 , H03F3/45192 , H03F3/45475 , H03F3/45632 , H03F2200/03 , H03F2200/18 , H03F2200/213 , H03F2200/372 , H03F2200/447 , H03F2200/555 , H03F2203/45136 , H03F2203/45244 , H03F2203/45392 , H03F2203/45456 , H03F2203/45628 , H03F2203/45631 , H04R3/007 , H04R19/01 , H04R19/04 , H04R2201/003
Abstract: Described herein is a preamplifier circuit for a capacitive acoustic transducer provided with a MEMS detection structure that generates a capacitive variation as a function of an acoustic signal to be detected, starting from a capacitance at rest; the preamplifier circuit is provided with an amplification stage that generates a differential output signal correlated to the capacitive variation. In particular, the amplification stage is an input stage of the preamplifier circuit and has a fully differential amplifier having a first differential input (INP) directly connected to the MEMS detection structure and a second differential input (INN) connected to a reference capacitive element, which has a value of capacitance equal to the capacitance at rest of the MEMS detection structure and fixed with respect to the acoustic signal to be detected; the fully differential amplifier amplifies the capacitive variation and generates the differential output signal.
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公开(公告)号：US10405107B2
公开(公告)日：2019-09-03
申请号：US15814256
申请日：2017-11-15
Applicant: STMICROELECTRONICS S.R.L. , OMRON CORPORATION
Inventor： Takashi Kasai , Shobu Sato , Yuki Uchida , Igino Padovani , Filippo David , Sebastiano Conti
Abstract: Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.
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公开(公告)号：US10257617B2
公开(公告)日：2019-04-09
申请号：US15814256
申请日：2017-11-15
Applicant: STMICROELECTRONICS S.R.L. , OMRON CORPORATION
Inventor： Takashi Kasai , Shobu Sato , Yuki Uchida , Igino Padovani , Filippo David , Sebastiano Conti
Abstract: Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.
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Patent Agency Ranking
公开(公告)号：US09350305B2
公开(公告)日：2016-05-24
申请号：US14049126
申请日：2013-10-08
Applicant: STMicroelectronics S.r.l.
Inventor： Filippo David , Igino Padovani
CPC classification number: H03F3/45179 , G05F3/30 , H03F1/3211 , H03F3/185 , H03F3/187 , H03F3/45 , H03F3/45183 , H03F3/45192 , H03F3/45475 , H03F3/45632 , H03F2200/03 , H03F2200/18 , H03F2200/213 , H03F2200/372 , H03F2200/447 , H03F2200/555 , H03F2203/45136 , H03F2203/45244 , H03F2203/45392 , H03F2203/45456 , H03F2203/45628 , H03F2203/45631 , H04R3/007 , H04R19/01 , H04R19/04 , H04R2201/003
Abstract: Described herein is a preamplifier circuit for a capacitive acoustic transducer provided with a MEMS detection structure that generates a capacitive variation as a function of an acoustic signal to be detected, starting from a capacitance at rest; the preamplifier circuit is provided with an amplification stage that generates a differential output signal correlated to the capacitive variation. In particular, the amplification stage is an input stage of the preamplifier circuit and has a fully differential amplifier having a first differential input (INP) directly connected to the MEMS detection structure and a second differential input (INN) connected to a reference capacitive element, which has a value of capacitance equal to the capacitance at rest of the MEMS detection structure and fixed with respect to the acoustic signal to be detected; the fully differential amplifier amplifies the capacitive variation and generates the differential output signal.
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公开(公告)号：US10484798B2
公开(公告)日：2019-11-19
申请号：US15904209
申请日：2018-02-23
Applicant: Omron Corporation , STMicroelectronics S.r.l.
Inventor： Takashi Kasai , Shobu Sato , Yuki Uchida , Sebastiano Conti , Igino Padovani , Filippo David
Abstract: Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane, provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane, provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.
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8.发明申请PREAMPLIFIER CIRCUIT FOR A MICROELECTROMECHANICAL CAPACITIVE ACOUSTIC TRANSDUCER 审中-公开微电子电容式电声传感器的前置放大器电路公开(公告)号：US20160218688A1
公开(公告)日：2016-07-28
申请号：US15087630
申请日：2016-03-31
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Filippo David , Igino Padovani
CPC classification number: H03F3/45179 , G05F3/30 , H03F1/3211 , H03F3/185 , H03F3/187 , H03F3/45 , H03F3/45183 , H03F3/45192 , H03F3/45475 , H03F3/45632 , H03F2200/03 , H03F2200/18 , H03F2200/213 , H03F2200/372 , H03F2200/447 , H03F2200/555 , H03F2203/45136 , H03F2203/45244 , H03F2203/45392 , H03F2203/45456 , H03F2203/45628 , H03F2203/45631 , H04R3/007 , H04R19/01 , H04R19/04 , H04R2201/003
Abstract: Described herein is a preamplifier circuit for a capacitive acoustic transducer provided with a MEMS detection structure that generates a capacitive variation as a function of an acoustic signal to be detected, starting from a capacitance at rest; the preamplifier circuit is provided with an amplification stage that generates a differential output signal correlated to the capacitive variation. In particular, the amplification stage is an input stage of the preamplifier circuit and has a fully differential amplifier having a first differential input (INP) directly connected to the MEMS detection structure and a second differential input (INN) connected to a reference capacitive element, which has a value of capacitance equal to the capacitance at rest of the MEMS detection structure and fixed with respect to the acoustic signal to be detected; the fully differential amplifier amplifies the capacitive variation and generates the differential output signal.
Abstract translation: 这里描述的是一种用于电容式声学换能器的前置放大器电路，该电容式声学换能器具有从静止电容开始的MEMS检测结构，其产生作为要检测的声学信号的函数的电容变化; 前置放大器电路具有产生与电容变化相关的差分输出信号的放大级。 特别地，放大级是前置放大器电路的输入级，并且具有完全差分放大器，其具有直接连接到MEMS检测结构的第一差分输入（INP）和连接到参考电容元件的第二差分输入（INN） 其具有等于MEMS检测结构的静止电容并且相对于要检测的声信号固定的电容值; 全差分放大器放大电容变化并产生差分输出信号。
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公开(公告)号：US20180295454A1
公开(公告)日：2018-10-11
申请号：US15904209
申请日：2018-02-23
Applicant: Omron Corporation , STMicroelectronics S.r.l.
Inventor： Takashi Kasai , Shobu Sato , Yuki Uchida , Sebastiano Conti , Igino Padovani , Filippo David
Abstract: Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane, provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane, provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.
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公开(公告)号：US09363608B2
公开(公告)日：2016-06-07
申请号：US13936104
申请日：2013-07-05
Applicant: Omron Corporation , STMicroelectronics S.r.l.
Inventor： Takashi Kasai , Shobu Sato , Yuki Uchida , Igino Padovani , Filippo David , Sebastiano Conti
CPC classification number: H04R19/04 , B81B3/0021 , H04R1/023 , H04R1/086 , H04R3/00 , H04R3/005 , H04R19/005 , H04R19/016 , H04R31/00 , H04R2201/003 , H04R2499/11
Abstract: Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.
Abstract translation: 提供一种声换能器，包括：半导体基板; 设置在所述半导体基板上方的包括振动电极的振动膜; 以及设置在所述半导体衬底上方的固定膜，包括固定电极，所述声换能器根据所述振动电极和所述固定电极之间的电容的变化来检测声波，将所述声波转换为电信号，并输出所述电信号。 振动电极和固定电极中的至少一个分为多个分割电极，多个分割电极输出电信号。
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