公开(公告)号：US5481363A

公开(公告)日：1996-01-02

申请号：US242066

申请日：1994-05-13

申请人： Masakazu Matsugu ,  Kenji Saitoh ,  Jun Hattori ,  Sakae Houryu

发明人： Masakazu Matsugu ,  Kenji Saitoh ,  Jun Hattori ,  Sakae Houryu

IPC分类号： G03F9/00 ,  G01B11/00

CPC分类号： G03F9/7076

摘要： A method of detecting a relative positional deviation of a first object having a first grating mark with an optical power and a second object having a second grating mark with an optical power, is disclosed, wherein a projected radiation beam is diffracted by the first and second grating marks in sequence and, on the basis of a position of convergence on a light receiving surface of plural diffraction beams produced by the diffraction through the first and second grating marks and including a signal beam having been diffracted at a predetermined order by each of the first and second grating marks, the relative positional deviation is determined, a detection zone is defined on the light receiving surface, the signal beam is converged upon the detection zone, and a predetermined diffraction beam of the plural diffraction beams which, for a relative positional deviation of the first and second objects, shows displacement different from that of the signal beam is substantially prevented from being converged upon the detection zone.

摘要翻译： 公开了一种检测具有光功率的第一光栅标记的第一物体和具有光功率的第二光栅标记的第二物体的相对位置偏差的方法，其中投射的辐射束被第一和第二衍射 基于通过第一和第二光栅标记的衍射产生的多个衍射光束的光接收表面上的会聚位置，并且包括以预定顺序衍射的信号光束 第一和第二光栅标记，确定相对位置偏差，在光接收表面上限定检测区域，信号光束会聚在检测区域上，并且将多个衍射光束的预定衍射光束相对于相对位置 显示第一和第二物体的偏差显示出与信号光束不同的位移 om会聚在检测区域。

公开(公告)号：US5455679A

公开(公告)日：1995-10-03

申请号：US384221

申请日：1995-02-06

申请人： Sakae Houryu ,  Kenji Saitoh

发明人： Sakae Houryu ,  Kenji Saitoh

IPC分类号： G03F9/00 ,  G01B11/27 ,  G01N21/86

CPC分类号： G03F9/70

摘要： A position detecting system includes a light source for producing a light beam for irradiating a reference mark formed on an object which is relatively displaceable relative to the light beam, a detector for detecting a light quantity distribution of the light from the reference mark, and a circuit for comparing a first light quantity distribution at a first position with a second light quantity distribution at a second position spaced from the first position by a predetermined distance, and for determining a reference position of the object on the basis of the comparison.

摘要翻译： 位置检测系统包括：光源，用于产生用于照射形成在物体上的参考标记的光束，所述参考标记相对于所述光束相对移位;检测器，用于检测来自所述参考标记的光的光量分布;以及 电路，用于将第一位置处的第一光量分布与在与第一位置隔开预定距离的第二位置处的第二光量分布进行比较，并且用于基于比较来确定对象的参考位置。

公开(公告)号：US07957636B2

公开(公告)日：2011-06-07

申请号：US12612601

申请日：2009-11-04

申请人： Kenji Saitoh ,  Hiroshi Yoshikawa

发明人： Kenji Saitoh ,  Hiroshi Yoshikawa

IPC分类号： G03B15/03

CPC分类号： G01N21/8806 ,  G01N2021/8812 ,  G01N2021/8819 ,  G01N2021/8848 ,  G02B6/0018 ,  G02B6/002 ,  G02B6/0046 ,  G03B15/03

摘要： An illumination apparatus which illuminates a surface of an object having a three-dimensional shape includes a light source, a guide configured to guide light from the light source to a surface of the object, and a diffuser which has a diffusion-reflection surface that faces a light exit surface of the guide via the object, wherein the diffuser is arranged at such a position that the light which is emitted from the guide and is not directly incident on the object is incident on the diffusion-reflection surface while a part of the light reflected and diffused by the diffusion-reflection surface is incident on a surface of the object.

摘要翻译： 照明具有三维形状的物体的表面的照明装置包括光源，被配置为将来自光源的光引导到物体的表面的引导件和扩散器，漫射器具有面向 通过所述物体的所述引导件的光出射表面，其中所述扩散器被布置在使得从所述引导件发射并且不直接入射到所述物体上的光入射到所述扩散反射表面上的同时， 被扩散反射表面反射和扩散的光入射到物体的表面上。

公开(公告)号：US07901098B2

公开(公告)日：2011-03-08

申请号：US11761967

申请日：2007-06-12

申请人： Kenji Saitoh ,  Yoshiharu Tenmyo

发明人： Kenji Saitoh ,  Yoshiharu Tenmyo

IPC分类号： G03B15/02

CPC分类号： G03B15/05 ,  G02B19/0028 ,  G02B19/0047 ,  G03B2215/0528 ,  G03B2215/0532

摘要： An illuminating apparatus includes a light source including a cylindrical light-emitting tube, a first optical system, a second optical system, and a third optical system. The first optical system has an incident surface on which light emitted from the light source to the object side are incident and an emergent surface from which the light passing through the incident surface are emitted. The second optical system has a reflecting surface from which light emitted from the light source to a first side are reflected. The third optical system has a reflecting surface from which light emitted from the light source to a second side opposite to the first side are reflected. The first to third optical systems each illuminate the entire illumination area of the object with light emitted from the light source and incident on the optical systems.

摘要翻译： 照明装置包括：光源，包括圆柱形发光管，第一光学系统，第二光学系统和第三光学系统。 第一光学系统具有从光源发射到物体侧的光入射的入射表面，并且发射穿过入射表面的光的出射表面。 第二光学系统具有从光源发射到第一侧的光被反射的反射面。 第三光学系统具有从光源发射到与第一侧相对的第二侧的光的反射表面。 第一至第三光学系统各自使用从光源发射并入射到光学系统上的光来照亮物体的整个照明区域。

公开(公告)号：US20110037984A1

公开(公告)日：2011-02-17

申请号：US12812008

申请日：2009-01-28

申请人： Hiroshi Yoshikawa ,  Yusuke Mitarai ,  Masafumi Takimoto ,  Kazuyuki Ota ,  Kenji Saitoh ,  Masakazu Matsugu

发明人： Hiroshi Yoshikawa ,  Yusuke Mitarai ,  Masafumi Takimoto ,  Kazuyuki Ota ,  Kenji Saitoh ,  Masakazu Matsugu

IPC分类号： G01N21/55

CPC分类号： G01N21/57 ,  G01N21/4738 ,  G01N2021/4735

摘要： An information processing apparatus includes an obtaining unit configured to obtain first information regarding a distribution of reflected light from a target to be measured and second information regarding geometrical-optics components of the reflected light, a calculating unit configured to calculate third information on the basis of the first information and the second information, the third information indicating an approximation of the distribution of reflected light, and an output unit configured to output information regarding wave-optics components of the reflected light on the basis of the third information.

摘要翻译： 一种信息处理设备，包括：获取单元，被配置为获得关于来自待测目标的反射光的分布的第一信息和关于反射光的几何光学分量的第二信息;计算单元，被配置为基于 所述第一信息和所述第二信息，所述第三信息指示反射光的分布的近似值;以及输出单元，被配置为基于所述第三信息输出关于所述反射光的波长成分的信息。

公开(公告)号：US20100111515A1

公开(公告)日：2010-05-06

申请号：US12612601

申请日：2009-11-04

申请人： Kenji Saitoh ,  Hiroshi Yoshikawa

发明人： Kenji Saitoh ,  Hiroshi Yoshikawa

IPC分类号： G03B15/03 ,  F21V11/00

CPC分类号： G01N21/8806 ,  G01N2021/8812 ,  G01N2021/8819 ,  G01N2021/8848 ,  G02B6/0018 ,  G02B6/002 ,  G02B6/0046 ,  G03B15/03

摘要： An illumination apparatus which illuminates a surface of an object having a three-dimensional shape includes a light source, a guide configured to guide light from the light source to a surface of the object, and a diffuser which has a diffusion-reflection surface that faces a light exit surface of the guide via the object, wherein the diffuser is arranged at such a position that the light which is emitted from the guide and is not directly incident on the object is incident on the diffusion-reflection surface while a part of the light reflected and diffused by the diffusion-reflection surface is incident on a surface of the object.

摘要翻译： 照明具有三维形状的物体的表面的照明装置包括光源，被配置为将来自光源的光引导到物体的表面的引导件和扩散器，漫射器具有面向 通过所述物体的所述引导件的光出射表面，其中所述扩散器被布置在使得从所述引导件发射并且不直接入射到所述物体上的光入射到所述扩散反射表面上的同时， 被扩散反射表面反射和扩散的光入射到物体的表面上。

公开(公告)号：US07402378B2

公开(公告)日：2008-07-22

申请号：US11255559

申请日：2005-10-21

申请人： Kenji Saitoh ,  Miyoko Kawashima

发明人： Kenji Saitoh ,  Miyoko Kawashima

IPC分类号： G03C5/00

CPC分类号： G03F1/30 ,  G03F7/70091 ,  G03F7/701 ,  G03F7/70283 ,  G03F7/70433

摘要： There is provided an exposure method that includes the steps of forming a phase shift mask having a desired pattern and a cyclic dummy pattern overlaid onto the desired pattern, a part of the desired pattern to be resolved by effects of the dummy pattern being thicker than the dummy pattern's line width, illuminating the phase shift mask by using illumination light having a peak near or on an optical axis in an intensity distribution to transfer the desired pattern onto the exposure plane by projecting light having passed through the phase shift mask onto the exposure plane.

摘要翻译： 提供了一种曝光方法，其包括以下步骤：形成具有期望图案的相移掩模和覆盖在期望图案上的循环虚拟图案，通过虚拟图案的效果而被分解的期望图案的一部分比 通过在强度分布中使用具有在光轴附近或在光轴上的峰值的照明光来照射相移掩模，以通过将穿过相移掩模的光投射到曝光平面上将期望的图案转印到曝光平面上 。

公开(公告)号：US07075455B2

公开(公告)日：2006-07-11

申请号：US10601748

申请日：2003-06-23

申请人： Naoki Nishimura ,  Kenji Saitoh ,  Masaaki Imaizumi ,  Masaaki Shibata

发明人： Naoki Nishimura ,  Kenji Saitoh ,  Masaaki Imaizumi ,  Masaaki Shibata

IPC分类号： G08C17/00 ,  G08C19/12 ,  G08B21/00 ,  H04B5/00 ,  H04Q7/20

CPC分类号： H04W88/02 ,  H04W84/18

摘要： A wireless communication apparatus and method is provided which makes discrete functional elements perform a cooperative work without various limitations caused by a wired configuration. The wireless communication apparatus has a plurality of fine functional elements 3 each having a communication unit for data transmission and reception by using radio waves or light and one or more unit other than the communication unit, and a base station 4 for controlling and collectively managing the fine functional elements through communications with the fine functional elements, wherein one or more units other than the communication unit are activated through communications of one of the fine functional elements 3 received control information from the base station 4 with another of the fine functional elements 3 via the communication units, to thereby make the discrete functional elements 3 perform a cooperative work.

摘要翻译： 提供了一种无线通信装置和方法，其使离散功能元件执行协作工作而没有由有线配置引起的各种限制。 无线通信装置具有多个精细功能元件3，每个精细功能元件3具有用于通过使用无线电波或光的数据发送和接收的通信单元以及除通信单元之外的一个或多个单元，以及基站4，用于控制和集中管理 通过与精细功能元件的通信，通过与精细功能元件的通信来实现精细的功能元件，其中除了通信单元之外的一个或多个单元通过来自基站4的接收的控制信息与另一个精细功能元件3的精细功能元件3之一的通信通过 通信单元，从而使离散功能元件3进行协作工作。

公开(公告)号：US06842255B2

公开(公告)日：2005-01-11

申请号：US10116924

申请日：2002-04-05

申请人： Yumiko Ohsaki ,  Akiyoshi Suzuki ,  Kenji Saitoh

发明人： Yumiko Ohsaki ,  Akiyoshi Suzuki ,  Kenji Saitoh

IPC分类号： G01B11/24 ,  G01B9/02

CPC分类号： G01B11/2441 ,  G01B9/02039

摘要： There is provided an interferometer for measuring a surface shape of an optical element using interference, including a reference wave-front deformation system for deforming a wave front of reference light.

摘要翻译： 提供了一种用于使用干涉测量光学元件的表面形状的干涉仪，包括用于使参考光的波前变形的参考波前变形系统。

公开(公告)号：US06829091B2

公开(公告)日：2004-12-07

申请号：US09362698

申请日：1999-07-29

申请人： Takashi Kato ,  Kenji Saitoh ,  Hiroshi Maehara ,  Makoto Ogusu ,  Keiko Chiba

发明人： Takashi Kato ,  Kenji Saitoh ,  Hiroshi Maehara ,  Makoto Ogusu ,  Keiko Chiba

IPC分类号： G02B518

CPC分类号： G02B5/1814 ,  G02B5/1838 ,  G02B5/1857 ,  G02B5/1895 ,  G02B7/00 ,  G02B27/4222 ,  G03F7/70316 ,  G03F7/70825

摘要： An optical system for forming an image of an object. The optical system includes an optical element, which is deformed by the weight thereof, and at least one optical member for preventing a change in optical performance of the optical system due to deformation of the optical element, when the optical element is provided in the optical system.

摘要翻译： 一种用于形成物体的图像的光学系统。 该光学系统包括光学元件，该光学元件由于其重量而变形，并且至少一个光学构件用于防止当光学元件设置在光学元件中时由于光学元件的变形而导致的光学系统的光学性能的变化 系统。