公开(公告)号：US07901098B2

公开(公告)日：2011-03-08

申请号：US11761967

申请日：2007-06-12

申请人： Kenji Saitoh ,  Yoshiharu Tenmyo

发明人： Kenji Saitoh ,  Yoshiharu Tenmyo

IPC分类号： G03B15/02

CPC分类号： G03B15/05 ,  G02B19/0028 ,  G02B19/0047 ,  G03B2215/0528 ,  G03B2215/0532

摘要： An illuminating apparatus includes a light source including a cylindrical light-emitting tube, a first optical system, a second optical system, and a third optical system. The first optical system has an incident surface on which light emitted from the light source to the object side are incident and an emergent surface from which the light passing through the incident surface are emitted. The second optical system has a reflecting surface from which light emitted from the light source to a first side are reflected. The third optical system has a reflecting surface from which light emitted from the light source to a second side opposite to the first side are reflected. The first to third optical systems each illuminate the entire illumination area of the object with light emitted from the light source and incident on the optical systems.

摘要翻译： 照明装置包括：光源，包括圆柱形发光管，第一光学系统，第二光学系统和第三光学系统。 第一光学系统具有从光源发射到物体侧的光入射的入射表面，并且发射穿过入射表面的光的出射表面。 第二光学系统具有从光源发射到第一侧的光被反射的反射面。 第三光学系统具有从光源发射到与第一侧相对的第二侧的光的反射表面。 第一至第三光学系统各自使用从光源发射并入射到光学系统上的光来照亮物体的整个照明区域。

公开(公告)号：US20070292088A1

公开(公告)日：2007-12-20

申请号：US11761967

申请日：2007-06-12

申请人： Kenji Saitoh ,  Yoshiharu Tenmyo

发明人： Kenji Saitoh ,  Yoshiharu Tenmyo

IPC分类号： G02B6/04

CPC分类号： G03B15/05 ,  G02B19/0028 ,  G02B19/0047 ,  G03B2215/0528 ,  G03B2215/0532

摘要： An illuminating apparatus includes a light source including a cylindrical light-emitting tube, a first optical system, a second optical system, and a third optical system. The first optical system has an incident surface on which light emitted from the light source to the object side are incident and an emergent surface from which the light passing through the incident surface are emitted. The second optical system has a reflecting surface from which light emitted from the light source to a first side are reflected. The third optical system has a reflecting surface from which light emitted from the light source to a second side opposite to the first side are reflected. The first to third optical systems each illuminate the entire illumination area of the object with light emitted from the light source and incident on the optical systems.

摘要翻译： 照明装置包括：光源，包括圆柱形发光管，第一光学系统，第二光学系统和第三光学系统。 第一光学系统具有从光源发射到物体侧的光入射的入射表面，并且发射穿过入射表面的光的出射表面。 第二光学系统具有从光源发射到第一侧的光被反射的反射面。 第三光学系统具有从光源发射到与第一侧相对的第二侧的光的反射表面。 第一至第三光学系统各自使用从光源发射并入射到光学系统上的光来照亮物体的整个照明区域。

公开(公告)号：US07957636B2

公开(公告)日：2011-06-07

申请号：US12612601

申请日：2009-11-04

申请人： Kenji Saitoh ,  Hiroshi Yoshikawa

发明人： Kenji Saitoh ,  Hiroshi Yoshikawa

IPC分类号： G03B15/03

CPC分类号： G01N21/8806 ,  G01N2021/8812 ,  G01N2021/8819 ,  G01N2021/8848 ,  G02B6/0018 ,  G02B6/002 ,  G02B6/0046 ,  G03B15/03

摘要： An illumination apparatus which illuminates a surface of an object having a three-dimensional shape includes a light source, a guide configured to guide light from the light source to a surface of the object, and a diffuser which has a diffusion-reflection surface that faces a light exit surface of the guide via the object, wherein the diffuser is arranged at such a position that the light which is emitted from the guide and is not directly incident on the object is incident on the diffusion-reflection surface while a part of the light reflected and diffused by the diffusion-reflection surface is incident on a surface of the object.

摘要翻译： 照明具有三维形状的物体的表面的照明装置包括光源，被配置为将来自光源的光引导到物体的表面的引导件和扩散器，漫射器具有面向 通过所述物体的所述引导件的光出射表面，其中所述扩散器被布置在使得从所述引导件发射并且不直接入射到所述物体上的光入射到所述扩散反射表面上的同时， 被扩散反射表面反射和扩散的光入射到物体的表面上。

公开(公告)号：US20110037984A1

公开(公告)日：2011-02-17

申请号：US12812008

申请日：2009-01-28

申请人： Hiroshi Yoshikawa ,  Yusuke Mitarai ,  Masafumi Takimoto ,  Kazuyuki Ota ,  Kenji Saitoh ,  Masakazu Matsugu

发明人： Hiroshi Yoshikawa ,  Yusuke Mitarai ,  Masafumi Takimoto ,  Kazuyuki Ota ,  Kenji Saitoh ,  Masakazu Matsugu

IPC分类号： G01N21/55

CPC分类号： G01N21/57 ,  G01N21/4738 ,  G01N2021/4735

摘要： An information processing apparatus includes an obtaining unit configured to obtain first information regarding a distribution of reflected light from a target to be measured and second information regarding geometrical-optics components of the reflected light, a calculating unit configured to calculate third information on the basis of the first information and the second information, the third information indicating an approximation of the distribution of reflected light, and an output unit configured to output information regarding wave-optics components of the reflected light on the basis of the third information.

摘要翻译： 一种信息处理设备，包括：获取单元，被配置为获得关于来自待测目标的反射光的分布的第一信息和关于反射光的几何光学分量的第二信息;计算单元，被配置为基于 所述第一信息和所述第二信息，所述第三信息指示反射光的分布的近似值;以及输出单元，被配置为基于所述第三信息输出关于所述反射光的波长成分的信息。

公开(公告)号：US20100111515A1

公开(公告)日：2010-05-06

申请号：US12612601

申请日：2009-11-04

申请人： Kenji Saitoh ,  Hiroshi Yoshikawa

发明人： Kenji Saitoh ,  Hiroshi Yoshikawa

IPC分类号： G03B15/03 ,  F21V11/00

CPC分类号： G01N21/8806 ,  G01N2021/8812 ,  G01N2021/8819 ,  G01N2021/8848 ,  G02B6/0018 ,  G02B6/002 ,  G02B6/0046 ,  G03B15/03

摘要： An illumination apparatus which illuminates a surface of an object having a three-dimensional shape includes a light source, a guide configured to guide light from the light source to a surface of the object, and a diffuser which has a diffusion-reflection surface that faces a light exit surface of the guide via the object, wherein the diffuser is arranged at such a position that the light which is emitted from the guide and is not directly incident on the object is incident on the diffusion-reflection surface while a part of the light reflected and diffused by the diffusion-reflection surface is incident on a surface of the object.

摘要翻译： 照明具有三维形状的物体的表面的照明装置包括光源，被配置为将来自光源的光引导到物体的表面的引导件和扩散器，漫射器具有面向 通过所述物体的所述引导件的光出射表面，其中所述扩散器被布置在使得从所述引导件发射并且不直接入射到所述物体上的光入射到所述扩散反射表面上的同时， 被扩散反射表面反射和扩散的光入射到物体的表面上。

公开(公告)号：US07402378B2

公开(公告)日：2008-07-22

申请号：US11255559

申请日：2005-10-21

申请人： Kenji Saitoh ,  Miyoko Kawashima

发明人： Kenji Saitoh ,  Miyoko Kawashima

IPC分类号： G03C5/00

CPC分类号： G03F1/30 ,  G03F7/70091 ,  G03F7/701 ,  G03F7/70283 ,  G03F7/70433

摘要： There is provided an exposure method that includes the steps of forming a phase shift mask having a desired pattern and a cyclic dummy pattern overlaid onto the desired pattern, a part of the desired pattern to be resolved by effects of the dummy pattern being thicker than the dummy pattern's line width, illuminating the phase shift mask by using illumination light having a peak near or on an optical axis in an intensity distribution to transfer the desired pattern onto the exposure plane by projecting light having passed through the phase shift mask onto the exposure plane.

摘要翻译： 提供了一种曝光方法，其包括以下步骤：形成具有期望图案的相移掩模和覆盖在期望图案上的循环虚拟图案，通过虚拟图案的效果而被分解的期望图案的一部分比 通过在强度分布中使用具有在光轴附近或在光轴上的峰值的照明光来照射相移掩模，以通过将穿过相移掩模的光投射到曝光平面上将期望的图案转印到曝光平面上 。

公开(公告)号：US07075455B2

公开(公告)日：2006-07-11

申请号：US10601748

申请日：2003-06-23

申请人： Naoki Nishimura ,  Kenji Saitoh ,  Masaaki Imaizumi ,  Masaaki Shibata

发明人： Naoki Nishimura ,  Kenji Saitoh ,  Masaaki Imaizumi ,  Masaaki Shibata

IPC分类号： G08C17/00 ,  G08C19/12 ,  G08B21/00 ,  H04B5/00 ,  H04Q7/20

CPC分类号： H04W88/02 ,  H04W84/18

摘要： A wireless communication apparatus and method is provided which makes discrete functional elements perform a cooperative work without various limitations caused by a wired configuration. The wireless communication apparatus has a plurality of fine functional elements 3 each having a communication unit for data transmission and reception by using radio waves or light and one or more unit other than the communication unit, and a base station 4 for controlling and collectively managing the fine functional elements through communications with the fine functional elements, wherein one or more units other than the communication unit are activated through communications of one of the fine functional elements 3 received control information from the base station 4 with another of the fine functional elements 3 via the communication units, to thereby make the discrete functional elements 3 perform a cooperative work.

摘要翻译： 提供了一种无线通信装置和方法，其使离散功能元件执行协作工作而没有由有线配置引起的各种限制。 无线通信装置具有多个精细功能元件3，每个精细功能元件3具有用于通过使用无线电波或光的数据发送和接收的通信单元以及除通信单元之外的一个或多个单元，以及基站4，用于控制和集中管理 通过与精细功能元件的通信，通过与精细功能元件的通信来实现精细的功能元件，其中除了通信单元之外的一个或多个单元通过来自基站4的接收的控制信息与另一个精细功能元件3的精细功能元件3之一的通信通过 通信单元，从而使离散功能元件3进行协作工作。

公开(公告)号：US06842255B2

公开(公告)日：2005-01-11

申请号：US10116924

申请日：2002-04-05

申请人： Yumiko Ohsaki ,  Akiyoshi Suzuki ,  Kenji Saitoh

发明人： Yumiko Ohsaki ,  Akiyoshi Suzuki ,  Kenji Saitoh

IPC分类号： G01B11/24 ,  G01B9/02

CPC分类号： G01B11/2441 ,  G01B9/02039

摘要： There is provided an interferometer for measuring a surface shape of an optical element using interference, including a reference wave-front deformation system for deforming a wave front of reference light.

摘要翻译： 提供了一种用于使用干涉测量光学元件的表面形状的干涉仪，包括用于使参考光的波前变形的参考波前变形系统。

公开(公告)号：US06829091B2

公开(公告)日：2004-12-07

申请号：US09362698

申请日：1999-07-29

申请人： Takashi Kato ,  Kenji Saitoh ,  Hiroshi Maehara ,  Makoto Ogusu ,  Keiko Chiba

发明人： Takashi Kato ,  Kenji Saitoh ,  Hiroshi Maehara ,  Makoto Ogusu ,  Keiko Chiba

IPC分类号： G02B518

CPC分类号： G02B5/1814 ,  G02B5/1838 ,  G02B5/1857 ,  G02B5/1895 ,  G02B7/00 ,  G02B27/4222 ,  G03F7/70316 ,  G03F7/70825

摘要： An optical system for forming an image of an object. The optical system includes an optical element, which is deformed by the weight thereof, and at least one optical member for preventing a change in optical performance of the optical system due to deformation of the optical element, when the optical element is provided in the optical system.

摘要翻译： 一种用于形成物体的图像的光学系统。 该光学系统包括光学元件，该光学元件由于其重量而变形，并且至少一个光学构件用于防止当光学元件设置在光学元件中时由于光学元件的变形而导致的光学系统的光学性能的变化 系统。

公开(公告)号：US6060739A

公开(公告)日：2000-05-09

申请号：US935538

申请日：1997-09-23

申请人： Kenji Saitoh

发明人： Kenji Saitoh

IPC分类号： H01L21/8247 ,  H01L27/115 ,  H01L29/423 ,  H01L29/788 ,  H01L29/792 ,  H01L29/76

CPC分类号： H01L27/11521 ,  H01L29/42324 ,  H01L27/115

摘要： A semiconductor well region has a groove into which a block-shaped floating gate is formed. The block-shaped floating gate has a bottom surface facing a bottom surface of the semiconductor well region served as a first channel region, a first side surface facing one of side surfaces of the semiconductor well region served as a second channel region, a second side surface facing the other of side surfaces of the semiconductor well region served as a third channel region, thereby a channel width is trebled.

摘要翻译： 半导体阱区域具有形成有块状的浮动栅极的沟槽。 块状浮动栅极具有面对作为第一沟道区域的半导体阱区域的底面的底面，面对作为第二沟道区域的半导体阱区域的一个侧面的第一侧面，第二侧面 面对作为第三沟道区域的半导体阱区域的另一侧面的面，因此沟道宽度为三倍。