公开(公告)号：US12004413B1

公开(公告)日：2024-06-04

申请号：US18479202

申请日：2023-10-02

Applicant: Samsung Display Co., Ltd.

Inventor： Jeongkuk Kim ,  Heemin Park ,  Duckjung Lee ,  Sungsoon Im

IPC: H10K71/16 ,  C23C14/04

CPC classification number: H10K71/166 ,  C23C14/042

Abstract: A method of manufacturing a display device includes arranging a display substrate in a chamber, arranging a mask assembly in the chamber, and supplying a deposition material to the mask assembly by a deposition source. The arranging of the mask assembly includes disposing a stopping layer including a stopping layer opening on a first mask layer, disposing an inorganic layer on the stopping layer, forming a first mask opening in the first mask layer, and forming an inorganic opening of the inorganic layer by etching the inorganic layer corresponding to the stopping layer opening.

公开(公告)号：US10079271B2

公开(公告)日：2018-09-18

申请号：US15181814

申请日：2016-06-14

Applicant: Samsung Display Co., Ltd.

Inventor： Jaesik Kim ,  Taemin Kang ,  Jeongkuk Kim ,  Youngsuk Cho

IPC: H01L51/00 ,  H01L27/32 ,  H01L51/56 ,  C23C14/04 ,  C23C14/08

CPC classification number: H01L27/3244 ,  C23C14/042 ,  C23C14/08 ,  H01L51/56 ,  H01L2227/323

Abstract: Provided are a mask assembly, an apparatus for manufacturing a display apparatus, and method of manufacturing a display apparatus. The mask assembly includes a mask frame and a mask sheet arranged on the mask frame. The mask sheet includes a pattern portion configured to allow a deposition material to pass through an opening of the pattern portion. The pattern portion is recessed from a surface of the mask sheet. In addition, an outermost edge of the pattern portion is uneven.

公开(公告)号：US09876170B2

公开(公告)日：2018-01-23

申请号：US15689421

申请日：2017-08-29

Applicant: Samsung Display Co., Ltd.

Inventor： Youngsuk Cho ,  Taemin Kang ,  Jaesik Kim ,  Jeongkuk Kim

IPC: H01L51/56 ,  H01L51/00 ,  C23C14/04 ,  H01L27/32 ,  C23C16/04 ,  H01L51/50

CPC classification number: H01L51/0011 ,  C23C14/042 ,  C23C16/042 ,  H01L27/3216 ,  H01L27/3246 ,  H01L51/001 ,  H01L51/5012 ,  H01L51/56 ,  H01L2227/323

Abstract: Provided is a mask assembly, an apparatus, and a method of manufacturing a display apparatus using such mask assembly and apparatus. The mask assembly deposits a deposition material on a first pixel among a plurality of pixels disposed on a device substrate and including the first pixel and a second pixel includes a mask substrate, a molding layer stacked on the mask substrate and including a hole corresponding to a position of the second pixel, a blocking plate detachably mounted in the hole and configured to block the second pixel from the deposition material by covering the second pixel when the blocking plate is detached from the hole.

公开(公告)号：US20170179389A1

公开(公告)日：2017-06-22

申请号：US15183375

申请日：2016-06-15

Applicant: Samsung Display Co., Ltd.

Inventor： Youngsuk CHO ,  Taemin Kang ,  Jaesik Kim ,  Jeongkuk Kim

IPC: H01L51/00 ,  H01L27/32 ,  C23C16/04 ,  H01L51/56

CPC classification number: H01L51/0011 ,  C23C14/042 ,  C23C16/042 ,  H01L27/3216 ,  H01L27/3246 ,  H01L51/001 ,  H01L51/5012 ,  H01L51/56 ,  H01L2227/323

Abstract: Provided is a mask assembly, an apparatus, and a method of manufacturing a display apparatus using such mask assembly and apparatus. The mask assembly deposits a deposition material on a first pixel among a plurality of pixels disposed on a device substrate and including the first pixel and a second pixel includes a mask substrate, a molding layer stacked on the mask substrate and including a hole corresponding to a position of the second pixel, a blocking plate detachably mounted in the hole and configured to block the second pixel from the deposition material by covering the second pixel when the blocking plate is detached from the hole.

公开(公告)号：US20250115987A1

公开(公告)日：2025-04-10

申请号：US18760814

申请日：2024-07-01

Applicant: Samsung Display Co., Ltd.

Inventor： Jeongkuk Kim ,  Kyongtae Yu ,  Sungwon Cho ,  Junho Jo

IPC: C23C14/04 ,  C23C14/12 ,  H10K71/16

Abstract: A mask assembly includes: a mask frame having an opening region; and a first mask sheet covering the mask frame. The first mask sheet includes: a first layer including a plurality of first ribs extending in a first direction and a plurality of second ribs extending in a second direction crossing the first direction and having a plurality of first openings defined by the first ribs and the second ribs; a second layer on a first surface of the first layer and extending around the first openings; and a third layer on a second surface of the first layer and having a plurality of pattern holes overlapping the first openings.

公开(公告)号：US20250027191A1

公开(公告)日：2025-01-23

申请号：US18440424

申请日：2024-02-13

Applicant: Samsung Display Co., Ltd.

Inventor： Jeongkuk Kim ,  Youngjin Song ,  Jinwoo Lee ,  Sugwoo Jung ,  Sungwon Cho ,  Junho Jo

IPC: C23C14/04 ,  H10K71/16

Abstract: An apparatus for manufacturing a display apparatus includes a mask assembly, wherein the mask assembly includes a first mask layer including a silicon material, a first portion, and a second portion on the first portion, wherein a first portion opening is disposed in the first portion and a plurality of second portion openings are disposed in the second portion above the first portion opening, and a second mask layer disposed on the first mask layer. The second mask layer includes an inorganic material, wherein the inorganic material has a plurality of second mask openings above the plurality of second portion openings, and wherein, in a cross-sectional view, a width of each of the plurality of second portion openings increases with distance from the second mask layer.

公开(公告)号：US20240318294A1

公开(公告)日：2024-09-26

申请号：US18410643

申请日：2024-01-11

Applicant: Samsung Display Co., LTD.

Inventor： Jeongkuk Kim ,  Duckjung Lee ,  Wonje Cho

IPC: C23C14/04 ,  H10K71/16

CPC classification number: C23C14/042 ,  H10K71/166

Abstract: An apparatus for manufacturing a display apparatus includes a mask assembly. The mask assembly includes a first mask layer, a second mask layer disposed on the first mask layer and including a plurality of deposition holes through which the deposition material is passed, and an adhesive member in contact with the first mask layer.

公开(公告)号：US20220093863A1

公开(公告)日：2022-03-24

申请号：US17326194

申请日：2021-05-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Kyu Hwan HWANG ,  Jeongkuk Kim ,  Hwi Kim ,  Kanghyun Nam ,  Sangha Park ,  Areum Lee ,  Da-Hee Jeong ,  Eunbee Jo ,  Seungmin Jin ,  Jaemin Hong

IPC: H01L51/00 ,  H01L27/32 ,  H01L51/56 ,  C23C14/04 ,  C23C14/24

Abstract: A deposition mask for manufacturing a display panel includes a metallic base having a thickness of about 50 micrometers to about 200 micrometers and a plurality of openings defined therein, wherein at least some of the openings include a first opening having a first width and a second opening having a second width smaller than the first width respectively defined along a thickness direction of the metallic base, and wherein the metallic base includes a first part in which the first opening is defined, and a second part in which the second opening is defined, the second part having a width that increases in a direction downward from a top surface of the metallic base along the thickness direction of the metallic base.

公开(公告)号：US20210013284A1

公开(公告)日：2021-01-14

申请号：US16808302

申请日：2020-03-03

Applicant: Samsung Display Co., Ltd.

Inventor： Youngmin Moon ,  Jeongkuk Kim ,  Kyuhwan Hwang

IPC: H01L27/32

Abstract: A display panel includes a substrate including a display area and a transmission area arranged in the display area which is surrounded by a first side extending in a first direction, a second side extending in a second direction crossing the first direction, a third side facing the first side, and a fourth side facing the second side, pixels arranged in the display area, a first black line extending from the transmission area to the first side in a third direction different from the second direction and arranged with dummy pixels which do not emit light, and a second black line extending from the transmission area to the second side in a fourth direction different from the first direction and arranged with the dummy pixels which do not emit light, wherein the transmission area is arranged closer to the first and second sides than the third and fourth sides.

公开(公告)号：US10790447B2

公开(公告)日：2020-09-29

申请号：US15865141

申请日：2018-01-08

Applicant: Samsung Display Co., Ltd.

Inventor： Youngmin Moon ,  Sungsoon Im ,  Jeongkuk Kim ,  Minho Moon ,  Kyuhwan Hwang

IPC: H01L51/00 ,  H01L27/32 ,  H01L51/56 ,  C25D1/20 ,  C25D1/10 ,  C23C16/04 ,  C23C4/04 ,  B23K26/50 ,  G03F7/20 ,  C23C14/04 ,  G03F7/16 ,  G03F7/26 ,  C25D1/08 ,  C23C14/12 ,  G03F7/12

Abstract: A mask for thin film deposition of a display apparatus having both end portions coupleable to a frame in a state of tension in a lengthwise direction thereof, the mask including: a first portion having a first thickness and a plurality of pattern holes through which a deposition material may pass; a second portion comprising a welding portion having a second thickness configured to be coupled to a frame; and a third portion connecting the first portion and the third portion, wherein the first thickness is less than the second thickness, and the third portion includes an inclined surface connecting the first portion and the second portion.