Apparatus and method of measuring uniformity based on pupil image and method of manufacturing mask by using the method

    公开(公告)号:US12260539B2

    公开(公告)日:2025-03-25

    申请号:US18093030

    申请日:2023-01-04

    Abstract: An apparatus and method of measuring pattern uniformity, and a method of manufacturing a mask by using the measurement method are provided. The measurement apparatus includes a light source configured to generate and output light, a stage configured to support a measurement target, an optical system configured to transfer the light, output from the light source, to the measurement target supported on the stage, and a first detector configured to detect light reflected and diffracted by the measurement target, or diffracted by passing through the measurement target, wherein the first detector is configured to detect a pupil image of a pupil plane and to measure pattern uniformity of an array area of the measurement target on the basis of intensity of at least one of zero-order light and 1st-order light of the pupil image.

    Storage device and operating method thereof

    公开(公告)号:US12253953B2

    公开(公告)日:2025-03-18

    申请号:US18373680

    申请日:2023-09-27

    Inventor: Minho Kim

    Abstract: A storage device is provided. The storage device includes: a first non-volatile memory including a plurality of cell strings storing a plurality of logical address values and a plurality of physical address values; a second non-volatile memory including a plurality of memory cells corresponding to the plurality of physical address values; and a storage controller configured to read a first physical address value from the first non-volatile memory based on a first logical address value, and control a read operation on the second non-volatile memory based on the first physical address value. A first cell string among the plurality of cell strings includes: a plurality of first memory cells storing the first logical address value and respectively connected to word lines in a first group; and at least one second memory cell storing the first physical address value and connected to at least one word line in a second group.

    MEMORY SYSTEMS AND METHODS FOR OPERATING MEMORY SYSTEMS

    公开(公告)号:US20250077433A1

    公开(公告)日:2025-03-06

    申请号:US18604783

    申请日:2024-03-14

    Abstract: Memory systems and methods for operating the same. A memory system comprises a first memory, a second memory having an operating speed different from that of the first memory, a storage unit configured to store an instruction, a prefetcher configured to update prefetcher data in response to occurrence of cache hits and a processor configured to execute the instruction stored in the storage unit. When the instruction is executed, the processor is configured to generate prefetcher friendly data by filtering the prefetcher data, set a prefetcher friendly bit in a first pointer area corresponding to the first memory and a second pointer area corresponding to the second memory based on the prefetcher friendly data, and determine whether data of the first pointer area and the second pointer area are migrated, in consideration of a reference bit and the prefetcher friendly bit of the first and second pointer areas.

    Nonvolatile memory device and storage device

    公开(公告)号:US12165734B2

    公开(公告)日:2024-12-10

    申请号:US17895642

    申请日:2022-08-25

    Abstract: A nonvolatile memory device includes a memory cell region and a peripheral circuit region disposed below the memory cell region. The peripheral circuits include a page buffer, a row decoder, and other peripheral circuits, wherein the page buffer is included in a page buffer block disposed on a lower surface of the first semiconductor substrate to be distinguished from other circuits included in the peripheral circuit region in a first direction perpendicular to an upper surface of the first semiconductor substrate, is connected to the memory cell region through a connection portion penetrating through the first semiconductor substrate, and includes a plurality of vertical transistors each defined by a source region, a channel region, and a drain region stacked in sequence in the first direction.

    NON-VOLATILE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20230118956A1

    公开(公告)日:2023-04-20

    申请号:US18047270

    申请日:2022-10-17

    Abstract: A non-volatile memory device includes a substrate, a stack structure that includes a first gate layer that extends in a horizontal direction and a second gate layer that extends in the horizontal direction and is disposed apart from the first gate layer in a vertical direction, a plurality of first channel structures that penetrate in the vertical direction through a first channel region of the stack structure, a plurality of second channel structures that penetrate in the vertical direction through a second channel region of the stack structure, a first anti-fuse structure and a second anti-fuse structure that each penetrate in the vertical direction through an anti-fuse region of the stack structure, a first anti-fuse transistor that is electrically connected to the first gate layer through the first anti-fuse structure, and a second anti-fuse transistor that is electrically connected to the second gate layer through the second anti-fuse structure.

    Electronic device and method for same controlling external device

    公开(公告)号:US11455140B2

    公开(公告)日:2022-09-27

    申请号:US17261956

    申请日:2019-05-15

    Abstract: Provided are an electronic device and a method of controlling an external device by the electronic device. According to various embodiments of the present disclosure, a method of controlling an external device by an electronic device includes displaying, on a screen, a first user interface (UI) corresponding to first UI data received from an external server, transmitting, to the external device, second UI data corresponding to the first UI, receiving, from the external device, coordinates selected by a user using the external device, obtaining additional information related to the first UI when the coordinates correspond to a position of the first UI displayed on the screen, and transmitting, to the external device, the additional information and an execution command of an application using the additional information.

    Reticle in an apparatus for extreme ultraviolet exposure

    公开(公告)号:US11409193B2

    公开(公告)日:2022-08-09

    申请号:US17028049

    申请日:2020-09-22

    Abstract: A reticle for an apparatus for EUV exposure and a method of manufacturing a reticle, the reticle including a substrate including an edge region and a main region; a multi-layer structure on the main region and the edge region, a sidewall of the multi-layer structure overlying the edge region; a capping layer covering an upper surface and the sidewall of the multi-layer structure and at least a portion of the edge region of the substrate; and an absorber layer on the capping layer, the absorber layer covering an entire upper surface of the capping layer on the edge region of the substrate, wherein a stacked structure of the capping layer and the absorber layer is on an upper surface of the edge region of the substrate, and a sidewall of the stacked structure of the capping layer and the absorber layer is perpendicular to an upper surface of the substrate.

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