Method of forming an epitaxial layer on a substrate, and apparatus and system for performing the same
    3.
    发明授权
    Method of forming an epitaxial layer on a substrate, and apparatus and system for performing the same 有权
    在基板上形成外延层的方法,以及用于执行该外延层的装置和系统

    公开(公告)号:US09269578B2

    公开(公告)日:2016-02-23

    申请号:US14152191

    申请日:2014-01-10

    Abstract: In a method of forming an epitaxial layer, an etching gas may be decomposed to form decomposed etching gases. A source gas may be decomposed to form decomposed source gases. The decomposed source gases may be applied to a substrate to form the epitaxial layer on the substrate. A portion of the epitaxial layer on a specific region of the substrate may be etched using the decomposed etching gases. Before the etching gas is introduced into the reaction chamber, the etching gas may be previously decomposed. The decomposed etching gases may then be introduced into the reaction chamber to etch the epitaxial layer on the substrate. As a result, the epitaxial layer on the substrate may have a uniform distribution.

    Abstract translation: 在形成外延层的方法中,蚀刻气体可能被分解以形成分解的蚀刻气体。 源气体可能被分解形成分解的源气体。 分解的源气体可以施加到衬底上以在衬底上形成外延层。 可以使用分解的蚀刻气体蚀刻在衬底的特定区域上的外延层的一部分。 在蚀刻气体被引入反应室之前,蚀刻气体可以预先分解。 然后将分解的蚀刻气体引入反应室以蚀刻衬底上的外延层。 结果,衬底上的外延层可以具有均匀的分布。

    Method of forming an epitaxial layer on a substrate, and apparatus and system for performing the same
    4.
    发明授权
    Method of forming an epitaxial layer on a substrate, and apparatus and system for performing the same 有权
    在基板上形成外延层的方法,以及用于执行该外延层的装置和系统

    公开(公告)号:US09589795B2

    公开(公告)日:2017-03-07

    申请号:US14994120

    申请日:2016-01-12

    Abstract: In a method of forming an epitaxial layer, an etching gas may be decomposed to form decomposed etching gases. A source gas may be decomposed to form decomposed source gases. The decomposed source gases may be applied to a substrate to form the epitaxial layer on the substrate. A portion of the epitaxial layer on a specific region of the substrate may be etched using the decomposed etching gases. Before the etching gas is introduced into the reaction chamber, the etching gas may be previously decomposed. The decomposed etching gases may then be introduced into the reaction chamber to etch the epitaxial layer on the substrate. As a result, the epitaxial layer on the substrate may have a uniform distribution.

    Abstract translation: 在形成外延层的方法中,蚀刻气体可能被分解以形成分解的蚀刻气体。 源气体可能被分解形成分解的源气体。 分解的源气体可以施加到衬底上以在衬底上形成外延层。 可以使用分解的蚀刻气体蚀刻在衬底的特定区域上的外延层的一部分。 在蚀刻气体被引入反应室之前,蚀刻气体可以预先分解。 然后将分解的蚀刻气体引入反应室以蚀刻衬底上的外延层。 结果,衬底上的外延层可以具有均匀的分布。

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