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    CHUCK ASSEMBLY AND HIGH DENSITY PLASMA EQUIPMENT HAVING THE SAME
    1.
    发明申请
    CHUCK ASSEMBLY AND HIGH DENSITY PLASMA EQUIPMENT HAVING THE SAME 审中-公开
    柴油机组和高密度等离子体设备

    公开(公告)号：US20080190367A1

    公开(公告)日：2008-08-14

    申请号：US12022477

    申请日：2008-01-30

    申请人： Sang-Geun Lee ,  Min-Ho Choi ,  Sung-Uk Park ,  Jin-Sung Kim ,  Jong-Suk Park ,  Dae-Hyun Kim

    发明人： Sang-Geun Lee ,  Min-Ho Choi ,  Sung-Uk Park ,  Jin-Sung Kim ,  Jong-Suk Park ,  Dae-Hyun Kim

    IPC分类号： B05C13/00

    CPC分类号： H01L21/68735 ,  H01L21/68742

    摘要： A chuck assembly for high density plasma equipment includes: a chuck having an upper surface and a plurality of pin holes formed in an outer peripheral portion, wherein the chuck upper surface is configured to receive a semiconductor substrate thereon; a substrate guide disposed on an outer surface of the chuck, wherein the substrate guide is configured to prevent a semiconductor substrate positioned on the upper surface of the chuck from being separated from the chuck; a fixing plate disposed at a lower portion of the chuck; a plurality of lift pins secured to the fixing plate and extending in an upward direction from the fixing plate so that each lift pin is inserted into a respective one of the pin holes, wherein each lift pin has an upper surface that extends to a position adjacent to the upper surface of the chuck; and a chuck lifter penetrating the fixing plate and engaged with a lower portion of the chuck, wherein the chuck lifter is configured to move the chuck upward and downward.

    摘要翻译： 一种用于高密度等离子体设备的卡盘组件，包括：卡盘，其具有形成在外周部分中的上表面和多个销孔，其中卡盘上表面构造成在其上容纳半导体基板; 设置在所述卡盘的外表面上的基板引导件，其中，所述基板引导件构造成防止位于所述卡盘的上表面上的半导体基板与所述卡盘分离; 设置在所述卡盘的下部的固定板; 多个提升销固定在固定板上并从固定板沿向上的方向延伸，使得每个提升销插入相应的一个销孔中，其中每个提升销的上表面延伸到相邻的位置 到卡盘的上表面; 以及卡盘升降器，其穿过所述固定板并与所述卡盘的下部卡合，其中所述卡盘升降器构造成使所述卡盘向上和向下移动。

    Batch-type deposition apparatus having gland portion
    2.
    发明申请
    Batch-type deposition apparatus having gland portion 审中-公开
    具有压盖部分的分批式沉积设备

    公开(公告)号：US20050183664A1

    公开(公告)日：2005-08-25

    申请号：US11025005

    申请日：2004-12-28

    申请人： Kyoung-Hwan Hwang ,  Jin-Sung Kim ,  Chang-Hyuk Ok ,  Jai-Young Woo ,  Min-Ho Choi

    发明人： Kyoung-Hwan Hwang ,  Jin-Sung Kim ,  Chang-Hyuk Ok ,  Jai-Young Woo ,  Min-Ho Choi

    IPC分类号： H01L21/205 ,  C23C16/00 ,  C23C16/40 ,  C23C16/44 ,  C23C16/455 ,  C23C16/458

    CPC分类号： C23C16/4584 ,  C23C16/405 ,  C23C16/4402 ,  C23C16/45525 ,  C23C16/45546 ,  C23C16/45582

    摘要： Batch-type deposition apparatus having a gland portion are provided. The apparatus include a reaction furnace, a gas nozzle located in the reaction furnace, a gas supply conduit located outside the reaction furnace and a gland portion for connecting the gas nozzle to the gas supply conduit. The gland portion includes a gas nozzle end extended from the gas nozzle toward an outside region of the reaction furnace and a gas supply conduit end extended from the gas supply conduit. The gas nozzle end is connected to the gas supply conduit end through a buffer member. The buffer member has an inclined inner wall for connecting an inner wall of the gas nozzle end to that of the gas supply conduit end.

    摘要翻译： 提供具有压盖部分的分批式沉积设备。 该装置包括反应炉，位于反应炉中的气体喷嘴，位于反应炉外部的气体供应管道和用于将气体喷嘴连接到气体供应管道的压盖部分。 压盖部分包括从气体喷嘴朝向反应炉的外部区域延伸的气体喷嘴端和从气体供应管道延伸的气体供应管道端部。 气体喷嘴端部通过缓冲部件与气体供给导管端部连接。 缓冲构件具有用于将气体喷嘴端的内壁与气体供给导管端的内壁连接的倾斜内壁。

    Method of forming electrochromic layer pattern, method of manufacturing electrochromic device using the same, and electrochromic device including electrochromic layer pattern
    3.
    发明申请
    Method of forming electrochromic layer pattern, method of manufacturing electrochromic device using the same, and electrochromic device including electrochromic layer pattern 审中-公开
    电致变色层图案的形成方法，使用其的电致变色装置的制造方法以及电致变色层图案的电致变色装置

    公开(公告)号：US20090323156A1

    公开(公告)日：2009-12-31

    申请号：US12310734

    申请日：2007-09-04

    申请人： Hyun-Woo Shin ,  Ki-Seok Jang ,  Jin-Young Park ,  Min-Ho Choi ,  Tae-Su Kim ,  Su-Hee Lee ,  Jae-Hong Kim ,  Boo-Kyung Kim

    发明人： Hyun-Woo Shin ,  Ki-Seok Jang ,  Jin-Young Park ,  Min-Ho Choi ,  Tae-Su Kim ,  Su-Hee Lee ,  Jae-Hong Kim ,  Boo-Kyung Kim

    IPC分类号： G02F1/15 ,  G03F7/20

    CPC分类号： G02F1/153

    摘要： A method for forming an electrochromic layer pattern includes forming a transparent electrode layer and a photoresist layer on a transparent substrate, forming a photoresist pattern by laser interference lithography, and depositing an electrochromic layer pattern on the transparent electrode through openings defined by the photoresist pattern by depositing an electrochromic layer on a front surface of the substrate and then lifting up the photoresist pattern. An insulation layer may be further formed between the transparent layer and the photoresist layer. Here, the electrochromic layer may be formed after an insulation layer pattern is formed using the photoresist pattern as an etching mask. In this case, the electrochromic layer pattern is formed in openings defined by the insulation layer pattern. As a result, a contact surface area between the electrochromic layer pattern and the ion conductive layer is increased to ensure a rapid response speed.

    摘要翻译： 形成电致变色层图案的方法包括在透明基板上形成透明电极层和光致抗蚀剂层，通过激光干涉光刻形成光致抗蚀剂图案，并通过由光致抗蚀剂图案限定的开口在透明电极上沉积电致变色层图案 在基板的前表面上沉积电致变色层，然后提起光致抗蚀剂图案。 可以在透明层和光致抗蚀剂层之间进一步形成绝缘层。 这里，可以在使用光致抗蚀剂图案作为蚀刻掩模形成绝缘层图案之后形成电致变色层。 在这种情况下，电致变色层图案形成在由绝缘层图案限定的开口中。 结果，增加了电致变色层图案和离子传导层之间的接触表面积，以确保快速的响应速度。

    Keyboard and Method of Selecting Colors of Keys of the Keyboard
    4.
    发明申请
    Keyboard and Method of Selecting Colors of Keys of the Keyboard 审中-公开
    选择键盘键的颜色的键盘和方法

    公开(公告)号：US20090128492A1

    公开(公告)日：2009-05-21

    申请号：US11884971

    申请日：2006-02-03

    申请人： Tae-Kyung Yoo ,  Min-Ho Choi

    发明人： Tae-Kyung Yoo ,  Min-Ho Choi

    IPC分类号： G06F3/02

    CPC分类号： G06F3/0238 ,  G06F3/0202 ,  G06F3/0219

    摘要： The present invention discloses a keyboard comprising light emitting devices, each respectively disposed below a key to lighten the top surface of the key; and a micro controller unit transmitting signals generated by each key to the computer, having switches for controlling the light emitting devices, and controlling switches according to signals transmitted from the computer, and a method of selecting the colors of the keys of the same.

    摘要翻译： 本发明公开了一种包括发光器件的键盘，每个发光器件分别设置在键的下方以减轻键的顶面; 以及微控制器单元，其将由每个键生成的信号发送到计算机，具有用于控制发光器件的开关，以及根据从计算机发送的信号来控制开关，以及选择其键的颜色的方法。

    Connector-type optical transceiver using SOI optical waveguide
    7.
    发明授权
    Connector-type optical transceiver using SOI optical waveguide 失效
    使用SOI光波导的连接器型光收发器

    公开(公告)号：US06628854B1

    公开(公告)日：2003-09-30

    申请号：US10031710

    申请日：2002-01-23

    申请人： Han-Jun Koh ,  Min-Ho Choi ,  Do-Youl Kim

    发明人： Han-Jun Koh ,  Min-Ho Choi ,  Do-Youl Kim

    IPC分类号： G02B630

    CPC分类号： G02B6/423 ,  G02B6/136 ,  G02B6/3882 ,  G02B6/4238 ,  G02B6/4245 ,  G02B6/4246 ,  G02B6/4251 ,  G02B6/4261 ,  G02B6/4286 ,  G02B6/4292 ,  G02B2006/12061 ,  H04B10/40

    摘要： A connector-type optical transceiver includes optical devices, a silicon-on-insulator (SOI) optical waveguide and a silicon bench whose upper surface is provided with a U-shaped recesses for receiving the optical devices and the SOI optical waveguide, while being aligned to form optical paths. The SOI optical waveguide includes a silicon substrate, a single crystalline silicon layer whose upper surface is provided with waveguide portions, and a silica thin layer interposed between the silicon substrate and the single crystalline silicon layer to prevent light passing through the waveguide portions from being diffused. The silicon bench has v-shaped grooves extending longitudinally along the silicon bench and receives guide pins adapted to guide an external connecting terminal to be connected to the silicon bench.

    摘要翻译： 连接器型光收发器包括光学器件，绝缘体上硅（SOI）光波导和硅台，其上表面设置有U形凹槽，用于接收光学器件和SOI光波导，同时对准 以形成光路。 SOI光波导包括硅衬底，其上表面设置有波导部分的单晶硅层和插入在硅衬底和单晶硅层之间的二氧化硅薄层，以防止穿过波导部分的光被扩散 。 硅工作台具有沿着硅台面纵向延伸的V形槽，并接收适于引导要连接到硅台架的外部连接端子的引导销。