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    Laser generator
    3.
    发明授权
    Laser generator 有权
    激光发生器

    公开(公告)号：US07315561B2

    公开(公告)日：2008-01-01

    申请号：US10553084

    申请日：2004-11-16

    申请人： Nobuyuki Haji ,  Satoshi Eguchi ,  Atsuki Yamamoto ,  Nobuo Shinno

    发明人： Nobuyuki Haji ,  Satoshi Eguchi ,  Atsuki Yamamoto ,  Nobuo Shinno

    IPC分类号： H01S3/22

    CPC分类号： B23K26/12 ,  B23K26/128 ,  B23K26/14 ,  B23K26/1476 ,  B23K26/16

    摘要： Flow laminators are attached to gas introducing parts installed in a laser generator preventing impurities from attaching to surfaces of a translucent mirror and a condensing lens. The flow laminators prevent airflow from producing a turbulent flow and air on the surface of the mirror and the lens are cleaned up, therewith reducing attachment of impurities further.

    摘要翻译： 流动层压机连接到安装在激光发生器中的气体引入部件，防止杂质附着到半透明反射镜和聚光透镜的表面。 流动层压机防止气流产生湍流，反射镜表面上的空气被清理，从而减少了杂质的附着。

    Gas laser oscillator
    4.
    发明授权
    Gas laser oscillator 失效
    气体激光振荡器

    公开(公告)号：US06337869B1

    公开(公告)日：2002-01-08

    申请号：US09123357

    申请日：1998-07-28

    申请人： Takayuki Yamashita ,  Hiroyuki Hayashikawa ,  Satoshi Eguchi

    发明人： Takayuki Yamashita ,  Hiroyuki Hayashikawa ,  Satoshi Eguchi

    IPC分类号： H01S310

    CPC分类号： H01S3/005 ,  B23K26/0622 ,  B23K26/705 ,  H01S3/03 ,  H01S3/104 ,  H01S3/1305 ,  H01S3/1312 ,  H01S3/134

    摘要： The gas laser oscillator of the invention comprises a discharge tube, a pair of electrodes disposed at both ends thereof, a direct-current high voltage power source for applying a direct-current high voltage in pulse form to the pair of electrodes, an output control device for controlling the direct-current high voltage power source, a fully reflective mirror provided at one end of the outside of the pair of electrodes, a partially reflective mirror disposed at the other end of the outside of the pair of electrodes, and an absorber disposed outside of the partially reflective mirror. In thus constituted gas laser oscillator, the output control device controls to apply a same direct-current voltage as during processing between the pair of electrodes also on standby while the absorber is closed. The gas laser oscillator of the invention further comprises a beam splitter outside of the absorber, a switch to be actuated while the beam splitter is installed at a specified position, a focusing lens disposed on the optical axis of the laser beam reflected and separated by the beam splitter, a shielding plate disposed so as to open or close the passage of laser beam, a switch to be actuated while the shielding plate is open, a detector for detecting the laser beam, an amplifier for amplifying the output of the detector, and a medium passage disposed in contact with the detector for realizing heat exchange between the temperature-controlled medium and the detector, whereby it is controlled to issue the laser beam only while the beam splitter is installed at a specified position. The output of the laser beam is controlled so that the detector input may not exceed the maximum allowable input of the detector while the shielding plate is open. Moreover, the beam splitter, focusing lens, and detector are arranged so that the optical axis may be horizontal to the laser beam passing therethrough.

    摘要翻译： 本发明的气体激光振荡器包括放电管，设置在其两端的一对电极，用于将脉冲形式的直流高电压施加到该对电极的直流高压电源，输出控制 用于控制直流高压电源的装置，设置在一对电极的外部一端的全反射镜，设置在该对电极的外侧的另一端的部分反射镜，以及吸收体 设置在部分反射镜的外部。 在这样构成的气体激光振荡器中，输出控制装置控制在吸收器闭合时在待机的同时在一对电极之间施加与处理期间相同的直流电压。本发明的气体激光振荡器还包括分束器外部 所述开关在所述分束器安装在指定位置时被致动，所述聚焦透镜设置在由所述分束器反射和分离的所述激光束的光轴上;屏蔽板，被设置为打开或关闭 激光束的通过，屏蔽板打开时要被致动的开关，用于检测激光束的检测器，用于放大检测器的输出的放大器以及与检测器接触设置的用于实现热交换的介质通道 在温度控制介质和检测器之间，由此仅当分束器被安装在指定的位置时被控制才发出激光束 离子。 控制激光束的输出，使得当屏蔽板打开时，检测器输入不得超过检测器的最大允许输入。 此外，分束器，聚焦透镜和检测器被布置成使得光轴可以与穿过其中的激光束水平。

    Gas laser oscillator
    6.
    发明授权
    Gas laser oscillator 失效
    气体激光振荡器

    公开(公告)号：US06249535B1

    公开(公告)日：2001-06-19

    申请号：US09120886

    申请日：1998-07-23

    申请人： Hiroyuki Hayashikawa ,  Satoshi Eguchi ,  Takayuki Yamashita

    发明人： Hiroyuki Hayashikawa ,  Satoshi Eguchi ,  Takayuki Yamashita

    IPC分类号： H01S3034

    CPC分类号： H01S3/073 ,  H01S3/041 ,  H01S3/097

    摘要： A gas laser oscillator having at least three discharge tubes disposed along the optical axis, and a spacer having an opening centered on the optical axis. The spacer is disposed between a partially reflective mirror and the closest discharge tube. Further, the discharge tubes are disposed in series along the optical axis, and satisfy the following three formulas simultaneously: r1/r2>1.0  Formula 1 L2/(L1+L2)

    摘要翻译： 一种气体激光振荡器，具有沿着光轴布置的至少三个放电管，以及具有以光轴为中心的开口的间隔物。 间隔件设置在部分反射镜和最近的放电管之间。 此外，放电管沿着光轴串联布置，并且同时满足以下三个公式：其中设置在光轴方向两端的一对放电管的长度之和为这些放电的内径 管为r1，其他放电管的光轴方向的长度之和为L2，这些放电管的内径为r2，间隔物的开口内径为r3。

    Method for manufacturing semiconductor device
    7.
    发明授权
    Method for manufacturing semiconductor device 有权
    制造半导体器件的方法

    公开(公告)号：US08563393B2

    公开(公告)日：2013-10-22

    申请号：US13115167

    申请日：2011-05-25

    申请人： Satoshi Eguchi ,  Hitoshi Seshimo ,  Naoko Shimizu

    发明人： Satoshi Eguchi ,  Hitoshi Seshimo ,  Naoko Shimizu

    IPC分类号： H01L23/544

    CPC分类号： H01L29/7811 ,  H01L22/12 ,  H01L22/20 ,  H01L23/544 ,  H01L29/0634 ,  H01L29/0696 ,  H01L29/1095 ,  H01L29/41766 ,  H01L29/66727 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A method for manufacturing a semiconductor device which prevents damage to alignment marks used for alignment between a superjunction structure and process layers at subsequent steps. In the related art, recesses are made in a semiconductor substrate before the formation of the superjunction structure and used as alignment marks and in order to prevent damage to the alignment marks, the alignment marks are covered by an insulating film such as a silicon oxide film during the subsequent process of forming the superjunction structure, but the inventors have found that damage may penetrate the cover film, reach the semiconductor substrate and destroy the marks. In the method according to the invention, alignment marks for alignment between the superjunction structure and process layers at subsequent steps are formed after the formation of the superjunction structure.

    摘要翻译： 一种用于制造半导体器件的方法，其防止在后续步骤中用于超结构结构和处理层之间的对准的对准标记的损坏。 在相关技术中，在形成超结构结构之前，在半导体衬底中形成凹槽并用作对准标记，并且为了防止对准标记的损坏，对准标记被绝缘膜例如氧化硅膜覆盖 在形成超结构结构的后续过程中，但是本发明人发现损伤可能渗透到覆盖膜，到达半导体衬底并破坏标记。 在根据本发明的方法中，在形成超结构结构之后形成用于在后续步骤的超结构结构和处理层之间的对准的对准标记。

    LASER OSCILLATOR AND LASER MACHINING APPARATUS
    8.
    发明申请
    LASER OSCILLATOR AND LASER MACHINING APPARATUS 有权
    激光振荡器和激光加工设备

    公开(公告)号：US20120006798A1

    公开(公告)日：2012-01-12

    申请号：US13203778

    申请日：2010-03-08

    申请人： Satoshi Eguchi ,  Hidefumi Omatsu ,  Hiroyuki Hayashikawa

    发明人： Satoshi Eguchi ,  Hidefumi Omatsu ,  Hiroyuki Hayashikawa

    IPC分类号： B23K26/00 ,  H01S3/223

    CPC分类号： H01S3/036 ,  H01S3/0014 ,  H01S3/041 ,  H01S3/104

    摘要： A laser oscillator includes a blower for blowing laser gas to discharge tubes; a gas circulation path for connecting discharge tubes and a blower; a gear chamber pressure detector for detecting the pressure of the gear chamber disposed in the blower; and an alarm part for issuing an alarm when the pressure detected in the gear chamber pressure detector is higher than a predetermined pressure. The predetermined pressure is set based on the average value of the pressure on the laser gas inlet side and the pressure on the laser gas outlet side of the blower. This configuration can prevent the entry of the oil mist generated from the blower into the gas circulation path and an increase in the gas consumption, while maintaining stable laser output for an extended period of time without increasing the running cost.

    摘要翻译： 激光振荡器包括用于将激光气体吹送到放电管的鼓风机; 用于连接放电管和鼓风机的气体循环路径; 用于检测设置在鼓风机中的齿轮室的压力的齿轮室压力检测器; 以及当在齿轮室压力检测器中检测到的压力高于预定压力时发出报警的报警部件。 基于激光气体入口侧的压力的平均值和鼓风机的激光气体出口侧的压力来设定预定压力。 这种结构可以防止从鼓风机产生的油雾进入气体循环路径并增加气体消耗，同时在不增加运行成本的同时保持稳定的激光输出。

    POSITION CONTROLLING DEVICE
    9.
    发明申请
    POSITION CONTROLLING DEVICE 有权
    位置控制装置

    公开(公告)号：US20090112376A1

    公开(公告)日：2009-04-30

    申请号：US12247771

    申请日：2008-10-08

    申请人： Satoshi Eguchi

    发明人： Satoshi Eguchi

    IPC分类号： G05D1/02

    CPC分类号： G05B19/404 ,  G05B2219/49176

    摘要： A structure is provided in which a thrust feed forward structure for operating a structure to be driven without vibration and a control structure which simultaneously compensates for positional deviation caused by the thrust feed forward structure and positional deviation caused by a base displacement are included in a position controlling device (3). Alternatively, a structure is provided in which an acceleration and deceleration process for realizing response of the position of the structure to be driven and base displacement without vibration and a control structure which determines a feed forward amount with respect to a position instruction value after the acceleration and deceleration process are provided to the position controlling device.

    摘要翻译： 提供一种结构，其中用于操作无振动的结构的推进前馈结构和同时补偿由推力前馈结构引起的位置偏差和由基座位移引起的位置偏差的控制结构包括在位置 控制装置（3）。 或者，提供一种结构，其中实现用于实现待驱动结构的位置的响应的加速和减速过程以及没有振动的基座位移以及相对于加速之后的位置指令值确定前馈量的控制结构 并且向位置控制装置提供减速处理。

    AXIS-OF-ROTATION POSITION CONTROL DEVICE
    10.
    发明申请
    AXIS-OF-ROTATION POSITION CONTROL DEVICE 有权
    旋转位置控制装置

    公开(公告)号：US20080169778A1

    公开(公告)日：2008-07-17

    申请号：US11969090

    申请日：2008-01-03

    申请人： Satoshi Eguchi

    发明人： Satoshi Eguchi

    IPC分类号： G05B13/04

    CPC分类号： G05B13/042

    摘要： When performing numerical control of a rotary table, the moment of inertia and the center of gravity of a control target change because of a placed object fixed onto the rotary table. A rotary table to which a placed object has been fixed serves as a target plant, the actual motion of this is compared with motion calculated by an identification model of the target plant, and a torque command value is corrected. The identification model comprises a term pertaining to angular acceleration and a term pertaining to angle of rotation, and by including the term pertaining to angle of rotation, correction of a torque command corresponding to a change in the center of gravity can be performed.

    摘要翻译： 当进行旋转工作台的数字控制时，控制目标的惯性矩和重心因固定在旋转工作台上的放置物体而改变。 固定有放置对象的旋转台用作目标工厂，将其的实际运动与由目标工厂的识别模型计算的运动进行比较，并且校正转矩指令值。 识别模型包括与角加速度有关的术语和与旋转角度有关的术语，并且通过包括关于旋转角度的术语，可以执行与重心的改变相对应的扭矩命令的校正。