公开(公告)号：US07019845B1

公开(公告)日：2006-03-28

申请号：US10960351

申请日：2004-10-06

申请人： Sean P. Leary ,  Guray Tas ,  Christopher J. Morath ,  Michael Kotelyanskii ,  Tong Zheng ,  Guenadiy Lazarov ,  Andre D. Miller ,  George A. Antonelli ,  Jamie I. Ludke

发明人： Sean P. Leary ,  Guray Tas ,  Christopher J. Morath ,  Michael Kotelyanskii ,  Tong Zheng ,  Guenadiy Lazarov ,  Andre D. Miller ,  George A. Antonelli ,  Jamie I. Ludke

IPC分类号： G01B9/02 ,  G01B11/28

CPC分类号： G01N21/211 ,  G01N21/8422

摘要： An optical metrology system is provided with a data analysis method to determine the elastic moduli of optically transparent dielectric films such as silicon dioxide, other carbon doped oxides over metal or semiconductor substrates. An index of refraction is measured by an ellipsometer and a wavelength of a laser beam is measured using a laser spectrometer. The angle of refraction is determined by directing a light pulse focused onto a wafer surface, measuring a first set of x1, y1, and z1 coordinates, moving the wafer in the z direction, directing the light pulse onto the wafer surface and measuring a second set of x2, y2 and z2 coordinates, using the coordinates to calculate an angle of incidence, calculating an angle of refraction from the calculated angle of incidence, obtaining a sound velocity v, from the calculated angle of refraction and using the determined sound velocity v, to calculate a bulk modulus. Hardware calibration and adjustments for the optical metrology system are also provided in order to minimize the variation of the results from tool to tool down to about 0.5% or below.

摘要翻译： 光学测量系统具有数据分析方法，以确定光学透明介电膜的弹性模量，例如二氧化硅，金属或半导体衬底上的其他碳掺杂氧化物。 使用椭偏仪测量折射率，使用激光光谱仪测量激光束的波长。 通过将聚焦在晶片表面上的光脉冲引导，测量第一组x 1，y 1和z 1，确定折射角， SUB>坐标，沿z方向移动晶片，将光脉冲引导到晶片表面上并测量第二组x 2，y 2和z 2， 2坐标，使用坐标来计算入射角，从计算的入射角计算折射角，从计算的折射角获得声速v，并使用确定的声速v，到 计算体积模量。 还提供了光学测量系统的硬件校准和调整，以便将结果从工具到工具的降低最小化到约0.5％或更低。

公开(公告)号：US20060072120A1

公开(公告)日：2006-04-06

申请号：US10960351

申请日：2004-10-06

申请人： Sean Leary ,  Guray Tas ,  Christopher Morath ,  Michael Kotelyanskii ,  Tong Zheng ,  Guenadiy Lazarov ,  Andre Miller ,  George Antonelli ,  Jamie Ludke

发明人： Sean Leary ,  Guray Tas ,  Christopher Morath ,  Michael Kotelyanskii ,  Tong Zheng ,  Guenadiy Lazarov ,  Andre Miller ,  George Antonelli ,  Jamie Ludke

IPC分类号： G01B11/02

CPC分类号： G01N21/211 ,  G01N21/8422

摘要： An optical metrology system is provided with a data analysis method to determine the elastic moduli of optically transparent dielectric films such as silicon dioxide, other carbon doped oxides over metal or semiconductor substrates. An index of refraction is measured by an ellipsometer and a wavelength of a laser beam is measured using a laser spectrometer. The angle of refraction is determined by directing a light pulse focused onto a wafer surface, measuring a first set of x1, y1, and z1 coordinates, moving the wafer in the z direction, directing the light pulse onto the wafer surface and measuring a second set of x2, y2 and z2 coordinates, using the coordinates to calculate an angle of incidence, calculating an angle of refraction from the calculated angle of incidence, obtaining a sound velocity v, from the calculated angle of refraction and using the determined sound velocity v, to calculate a bulk modulus. Hardware calibration and adjustments for the optical metrology system are also provided in order to minimize the variation of the results from tool to tool down to about 0.5% or below.

摘要翻译： 光学测量系统具有数据分析方法，以确定光学透明介电膜的弹性模量，例如二氧化硅，金属或半导体衬底上的其他碳掺杂氧化物。 使用椭偏仪测量折射率，使用激光光谱仪测量激光束的波长。 通过将聚焦在晶片表面上的光脉冲引导，测量第一组x 1，y 1和z 1，确定折射角， SUB>坐标，沿z方向移动晶片，将光脉冲引导到晶片表面上并测量第二组x 2，y 2和z 2， 2坐标，使用坐标来计算入射角，从计算的入射角计算折射角，从计算的折射角获得声速v，并使用确定的声速v，到 计算体积模量。 还提供了光学测量系统的硬件校准和调整，以便将结果从工具到工具的降低最小化到约0.5％或更低。

公开(公告)号：US20100012855A1

公开(公告)日：2010-01-21

申请号：US11921354

申请日：2006-06-02

申请人： Guenadiy Lazarov ,  Laura Zheng ,  Aleksandr Pinskiy

发明人： Guenadiy Lazarov ,  Laura Zheng ,  Aleksandr Pinskiy

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  H01L21/67288

摘要： A semiconductor wafer measuring device including a wafer mover adapted to move a semiconductor wafer; a measurement head adapted to scan a surface of the semiconductor wafer as the semiconductor wafer is moved by the wafer mover; and a controller. The controller is adapted to control movement of the wafer mover to provide a first scanning segment of a first portion of the surface of the semiconductor wafer without rotating the semiconductor wafer during the first scanning segment, a second scanning segment of a second different portion of the surface of the semiconductor wafer without rotating the semiconductor wafer during the second scanning segment; and rotating the semiconductor wafer between the first and second scanning segments.

摘要翻译： 一种半导体晶片测量装置，包括适于移动半导体晶片的晶片移动器; 测量头，其适于在晶片移动器移动半导体晶片时扫描半导体晶片的表面; 和控制器。 控制器适于控制晶片移动器的运动，以在半导体晶片的表面的第一部分提供第一扫描段，而不在第一扫描段期间旋转半导体晶片，第二扫描段的第二不同部分 在第二扫描段期间不使半导体晶片旋转的半导体晶片的表面; 以及在第一和第二扫描段之间旋转半导体晶片。

公开(公告)号：US06721476B2

公开(公告)日：2004-04-13

申请号：US10006520

申请日：2001-12-03

申请人： Aravind Padmanabhan ,  Anvar Zakhidov ,  Teresa Marta ,  Guenadiy Lazarov ,  Dane Larson

发明人： Aravind Padmanabhan ,  Anvar Zakhidov ,  Teresa Marta ,  Guenadiy Lazarov ,  Dane Larson

IPC分类号： G02B6293

CPC分类号： G02B6/13 ,  B82Y20/00 ,  G02B6/1225

摘要： The invention provides photonic crystal optical demultiplexer devices produced from a three-dimensionally-periodic, porous, dielectric, photonic crystalline structure, which has surfaces or interfaces that are inverse replicas of the surfaces of a monodispersed sphere array. Such a photonic crystal optical demultiplexer comprises a three-dimensionally-periodic, porous, dielectric, photonic crystalline structure, which structure has surfaces or interfaces that are inverse replicas of the surfaces of a monodispersed sphere array, wherein necks exists between neighboring spheres in said sphere array and the average sphere diameter does not exceed about 1000 nm. A first optical waveguide is positioned to direct a broad wavelength band of incident light onto the crystalline structure. A second optical waveguide positioned to receive a narrow wavelength band of reflected light from the crystalline structure.

摘要翻译： 本发明提供由三维周期性，多孔的电介质的光子晶体结构产生的光子晶体光解复用器，其具有与单分散球阵列的表面相反的副本的表面或界面。 这种光子晶体光解复用器包括三维周期性，多孔的电介质的光子晶体结构，该结构具有表面或界面，其是单分散球体阵列的表面的反向复制，其中颈部存在于所述球体中的相邻球体之间 阵列，平均球体直径不超过约1000nm。 第一光波导被定位成将入射光的宽波长带引导到晶体结构上。 定位成接收来自晶体结构的反射光的窄波长带的第二光波导。

公开(公告)号：US06991847B2

公开(公告)日：2006-01-31

申请号：US10068273

申请日：2002-02-07

申请人： Aravind Padmanabhan ,  Ray H. Baughman ,  Anvar A. Zakhidov ,  Guenadiy Lazarov

发明人： Aravind Padmanabhan ,  Ray H. Baughman ,  Anvar A. Zakhidov ,  Guenadiy Lazarov

IPC分类号： B32B3/26 ,  C23F4/04

CPC分类号： B82Y20/00 ,  C30B5/00 ,  C30B29/60 ,  G02B6/1225 ,  Y10T428/249953 ,  Y10T428/249974 ,  Y10T428/249979 ,  Y10T428/249981 ,  Y10T428/24999 ,  Y10T428/8305

摘要： The invention relates to processes for the synthesis of 2-D and 3-D periodic porous silicon structures and composites with improved properties having the advantages of porous silicon and photonic bandgap materials. Photonic crystals comprise a two dimensionally periodic or three dimensionally periodic microporous structural matrix of interconnecting, crystallographically oriented, monodispersed members having voids between adjacent members, and said members additionally having randomly nanoporous surface porosity. The silicon nanofoam material shows enhanced and spectrally controlled/tunable photoluminescence and electroluminesce and finds use as transparent electrodes, high-lumonosity light emitting diodes (LEDs), wavelength division multiplexors, high-active-area catalyst supports, photonic bandgap lasers, silicon-based UV detectors, displays, gas sensors, and the like.