Exposure device for immersion lithography and method for monitoring parameters of an exposure device for immersion lithography
    1.
    发明授权
    Exposure device for immersion lithography and method for monitoring parameters of an exposure device for immersion lithography 失效
    浸渍光刻用曝光装置及浸渍光刻曝光装置的参数监控方法

    公开(公告)号:US07426012B2

    公开(公告)日:2008-09-16

    申请号:US11252211

    申请日:2005-10-18

    IPC分类号: G03B27/42 G03B27/52

    摘要: A method for monitoring parameters of an exposure device for immersion lithography and an exposure device for immersion lithography are provided. In the course of the immersion lithography, the immersion liquid is fed to an analysis device as early as during the exposure. Alterations of the immersion liquid are detected during the exposure process on the basis of a comparison with desired values. The triggering of a warning signal indicates the deviations of the parameters of alterations of the immersion liquid from the associated desired values.

    摘要翻译: 提供了一种用于监测浸没式光刻的曝光装置的参数的方法和用于浸没式光刻的曝光装置。 在浸渍光刻过程中,浸入液体在曝光过程中一直被提供给分析装置。 基于与期望值的比较,在曝光过程中检测浸没液体的变化。 触发警告信号表示浸没液体的变化参数与相关联的期望值的偏差。

    Exposure device for immersion lithography and method for monitoring parameters of an exposure device for immersion lithography
    2.
    发明申请
    Exposure device for immersion lithography and method for monitoring parameters of an exposure device for immersion lithography 失效
    浸渍光刻用曝光装置及浸渍光刻曝光装置的参数监控方法

    公开(公告)号:US20060082748A1

    公开(公告)日:2006-04-20

    申请号:US11252211

    申请日:2005-10-18

    IPC分类号: G03B27/42

    摘要: A method for monitoring parameters of an exposure device for immersion lithography and an exposure device for immersion lithography are provided. In the course of the immersion lithography, the immersion liquid is fed to an analysis device as early as during the exposure. Alterations of the immersion liquid are detected during the exposure process on the basis of a comparison with desired values. The triggering of a warning signal indicates the deviations of the parameters of alterations of the immersion liquid from the associated desired values.

    摘要翻译: 提供了一种用于监测浸没式光刻的曝光装置的参数的方法和用于浸没式光刻的曝光装置。 在浸渍光刻过程中,浸入液体在曝光过程中一直被提供给分析装置。 基于与期望值的比较,在曝光过程中检测浸没液体的变化。 触发警告信号表示浸没液体的变化参数与相关联的期望值的偏差。

    METHOD FOR OPERATING A GAS SENSOR ELEMENT AND DEVICE FOR CARRYING OUT SAID METHOD
    3.
    发明申请
    METHOD FOR OPERATING A GAS SENSOR ELEMENT AND DEVICE FOR CARRYING OUT SAID METHOD 有权
    用于操作气体传感器元件的方法和用于执行该方法的装置

    公开(公告)号:US20140157869A1

    公开(公告)日:2014-06-12

    申请号:US14111525

    申请日:2012-02-17

    IPC分类号: G01M15/10

    摘要: A method for operating at least one sensor element for detecting at least one property of a gas in a measured-gas space is described. The method comprises at least the following steps: at least one first step, in the first step at least one parameter being ascertained; at least one second step, in the second step the parameter being compared with at least one comparison value, in accordance with that comparison at least one feature being allocated to the sensor element or to at least one part of the sensor element. An apparatus for carrying out the method is also described.

    摘要翻译: 描述了用于操作至少一个用于检测测量气体空间中的气体的特性的传感器元件的方法。 该方法至少包括以下步骤:至少一个第一步骤,在第一步骤中确定至少一个参数; 至少一个第二步骤,在第二步骤中,将参数与至少一个比较值进行比较,根据该比较,将至少一个特征分配给传感器元件或传感器元件的至少一部分。 还描述了用于执行该方法的装置。

    Timepiece
    5.
    发明授权
    Timepiece 有权
    钟表

    公开(公告)号:US08038340B2

    公开(公告)日:2011-10-18

    申请号:US12206213

    申请日:2008-09-08

    申请人: Jens Schneider

    发明人: Jens Schneider

    IPC分类号: G04B15/00 G04B23/00 G04B19/02

    CPC分类号: G04B15/10

    摘要: A timepiece comprising a main energy storing device, a gear train coupled to the main energy storing device, a tensioning element coupled to the gear train, the tensioning element configured to be driven about a tensioning axis in cyclic steps, a tensioning control system configured to control the tensioning element, a storage hairspring having a first end and a second end, the first end connected to the tensioning element, a wheel connected to the second end of the storage hairspring, a clockwork movement rotatably driven by the wheel, an escapement coupled to the clockwork movement and a device configured to be switched in a stepwise manner and driven rotatably in cyclic steps by an element of the gear train.

    摘要翻译: 一种钟表,包括主能量存储装置,耦合到主能量存储装置的齿轮系,联接到齿轮系的张紧元件,所述张紧元件构造成围绕张紧轴循环地被驱动;张紧控制系统,被配置为 控制张紧元件,具有第一端和第二端的存储游丝,连接到张紧元件的第一端,连接到存储游丝的第二端的轮,由轮可旋转地驱动的发条机构,擒纵机构 到发条机构,以及被构造成以逐步方式切换并通过齿轮系的元件以循环步进的方式驱动的装置。

    Measuring sensor
    6.
    发明授权
    Measuring sensor 有权
    测量传感器

    公开(公告)号:US07998327B2

    公开(公告)日:2011-08-16

    申请号:US10540652

    申请日:2003-11-17

    IPC分类号: G01N27/409 G01N27/26

    CPC分类号: G01N27/4077

    摘要: A measuring sensor is described for determining a physical property of a measured gas, especially for determining the oxygen concentration or the pollutant concentration in the exhaust gas of internal combustion engines, which has a sensor element that is exposable to the measured gas which is at least partially coated with a protective layer that protects against harmful components in the measured gas. In order to achieve producing a “contamination protection”, that is cost-effective from a manufacturing technology point of view, particularly against silicon compounds and phosphorus compounds, the protective layer (26) is made of highly active γ- or δ-aluminum oxide (Al2O3) having additives of compounds of the alkaline metals group, the alkaline earths group, the IV B subgroup or the lanthanides group.

    摘要翻译: 描述了测量传感器,用于确定测量的气体的物理性质,特别是用于确定内燃机排气中的氧浓度或污染物浓度,其具有可暴露于测量气体的传感器元件,该传感器元件至少为 部分涂覆有保护层,防止测量气体中的有害成分。 为了实现生产“污染防护”,从制造技术的观点来看,特别是硅化合物和磷化合物是成本有效的,保护层(26)由高活性的γ-或δ-氧化铝 (Al 2 O 3),其具有碱金属基团,碱土金属组,IVB族或镧系元素族的化合物的添加剂。

    METHOD AND DEVICE FOR DETERMINING THE COMPOSITION OF A FUEL MIXTURE
    7.
    发明申请
    METHOD AND DEVICE FOR DETERMINING THE COMPOSITION OF A FUEL MIXTURE 审中-公开
    用于确定燃料混合物的组合物的方法和装置

    公开(公告)号:US20110030664A1

    公开(公告)日:2011-02-10

    申请号:US12864385

    申请日:2008-11-14

    IPC分类号: F02D19/08 F02D41/00

    摘要: The invention relates to a method and device for determining the composition of a fuel mixture made of one first fuel and at least one second fuel for operating an internal combustion engine, wherein said internal combustion engine has a fuel metering apparatus and at least one exhaust gas probe in an exhaust gas channel. According to the method of the invention, it is provided that the fuel mixture is at least temporarily supplied to the exhaust gas probe at least partially uncombusted, and the composition of the fuel mixture is determined from an output signal of the exhaust gas probe. According to the device of the invention, it is provided that the exhaust gas probe is situated proximal to the motor in the direction of the exhaust gas flow before a first catalytic converter, and the fuel mixture can be supplied at least partially uncombusted to the exhaust gas probe at least temporarily. The method allows the precise and reliable determination of the composition of a fuel mixture in internal combustion engines operated in flex fuel operation existing components.

    摘要翻译: 本发明涉及一种用于确定由一个第一燃料和至少一个用于操作内燃机的第二燃料组成的燃料混合物的组成的方法和装置,其中所述内燃机具有燃料计量装置和至少一个废气 探测排气通道。 根据本发明的方法,提供燃料混合物至少临时供应至废气探针至少部分未燃烧,并且燃料混合物的组成由废气探测器的输出信号确定。 根据本发明的装置,提供了排气探针在第一催化转化器之前沿废气流动方向位于马达附近,并且燃料混合物可以至少部分地未燃烧到排气 气体探头至少暂时。 该方法允许精确和可靠地确定在柔性燃料操作现有部件中操作的内燃机中的燃料混合物的组成。

    DRILL HEAD FOR ROCK DRILLS
    8.
    发明申请
    DRILL HEAD FOR ROCK DRILLS 有权
    钻石头钻头

    公开(公告)号:US20100158625A1

    公开(公告)日:2010-06-24

    申请号:US12640612

    申请日:2009-12-17

    IPC分类号: B28D1/14

    摘要: A drill head extending along a drill axis made of hard metal for rock drills is disclosed. The drill head features at least one major cutting edge and at least one minor cutting edge, where the major cutting edge extends from a first radially inner end to a first radial outer end which lies on a first diameter and where the minor cutting edge extends from a second radially inner end to a second radially outer end which lies on a second diameter that is smaller than the first diameter. A first enveloping surface defined by the minor cutting edge projects completely axially over a second enveloping surface defined by the major cutting edge.

    摘要翻译: 公开了一种沿着用于岩石钻头的硬金属制成的钻孔轴延伸的钻头。 钻头具有至少一个主切削刃和至少一个次切削刃,其中主切削刃从第一径向内端延伸到位于第一直径上的第一径向外端,并且其中次切削刃从 第二径向内端到第二径向外端,其位于小于第一直径的第二直径上。 由次切削刃限定的第一包封表面完全轴向地突出在由主切削刃限定的第二包络面上。