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    Excimer or molecular fluorine laser with several discharge chambers
    1.
    发明授权
    Excimer or molecular fluorine laser with several discharge chambers 有权
    具有多个放电室的准分子或分子氟激光

    公开(公告)号：US06987790B2

    公开(公告)日：2006-01-17

    申请号：US10776137

    申请日：2004-02-11

    申请人： Sergei V. Govorkov ,  Rainer Paetzel ,  Igor Bragin ,  Rainer Desor ,  Andreas Targsdorf ,  Andriy Knysh

    发明人： Sergei V. Govorkov ,  Rainer Paetzel ,  Igor Bragin ,  Rainer Desor ,  Andreas Targsdorf ,  Andriy Knysh

    IPC分类号： H01S3/22 ,  H01S3/223 ,  H01S3/097

    CPC分类号： H01S3/225 ,  H01S3/09713 ,  H01S3/2366

    摘要： Precise timing control can be obtained for a gas discharge laser, such as an excimer or molecular fluorine laser, using a timed trigger ionization. Instead of using a standard approach to control the timing of the emission or amplification of an optical pulse using the discharge of the main electrodes, the timing of which can only be controlled to within about 10 ns, a trigger ionization pulse applied subsequent to the charging of the main electrodes can be used to control the timing of the discharge, thereby decreasing the timing variations to about 1 ns. Since ionization of the laser gas can consume relatively small amounts of energy, such a circuit can be based on a fast, high-voltage, solid state switch that is virtually free of jitter. Trigger ionization also can be used to synchronize the timing of dual chambers in a MOPA configuration. In one such approach, ionization trigger can include at least a portion of the optical pulse from the oscillator in a MOPA configuration.

    摘要翻译： 使用定时触发电离可以为气体放电激光器（例如准分子激光或分子氟激光）获得准确的时序控制。 代替使用标准方法来控制使用主电极的放电的光脉冲的发射或放大的定时，其定时只能被控制在约10ns内，在充电之后施加的触发电离脉冲 的主电极可以用于控制放电的定时，从而将定时变化减小到大约1ns。 由于激光气体的离子化可以消耗相对少量的能量，所以这种电路可以基于实际上没有抖动的快速，高电压的固态开关。 触发电离也可用于同步MOPA配置中双室的时序。 在一种这样的方法中，电离触发可以包括来自MOPA配置中的来自振荡器的光脉冲的至少一部分。

    Master oscillator/power amplifier excimer laser system with pulse energy and pointing control
    2.
    发明授权
    Master oscillator/power amplifier excimer laser system with pulse energy and pointing control 有权
    具有脉冲能量和指向控制的主振荡器/功率放大器准分子激光系统

    公开(公告)号：US07158553B2

    公开(公告)日：2007-01-02

    申请号：US10776404

    申请日：2004-02-11

    申请人： Sergei V. Govorkov ,  Alexander O. Wiessner ,  Rainer Paetzel ,  Igor Bragin

    发明人： Sergei V. Govorkov ,  Alexander O. Wiessner ,  Rainer Paetzel ,  Igor Bragin

    IPC分类号： H01S3/22

    CPC分类号： H01S3/2366 ,  H01S3/10 ,  H01S3/225 ,  H01S3/2333

    摘要： Pulse parameters of a gas discharge laser system can be optimized and controlled for precision applications such as microlithography. Important laser pulse parameters typically vary in the beginning of a pulse burst, and the directionality of the output beam typically varies throughout the burst. In order to improve the performance of the laser system, the variation at the beginning of a pulse burst can be eliminated by extending the pulse pattern and shuttering the output during periods of significant parameter variation. A fast shutter such as an acousto-optical modulator can be used to prevent output during the burst transition processes. Elements such as acousto-optical cells also can be used in combination with a fast position sensor to steer the direction of the output beam, in order to adjust for variations in the direction of the beam between pulses in a burst.

    摘要翻译： 可以优化和控制气体放电激光系统的脉冲参数，用于精密应用，如微光刻。 重要的激光脉冲参数通常在脉冲脉冲串的开始时变化，并且输出光束的方向性通常在整个脉冲串中变化。 为了提高激光系统的性能，可以通过在显着的参数变化期间延长脉冲模式并对输出进行快门来消除脉冲脉冲串开始时的变化。 诸如声光调制器之类的快门可用于在突发转换过程期间防止输出。 诸如声光单元的元件也可以与快速位置传感器组合使用以控制输出光束的方向，以便调整在脉冲串中的脉冲之间的波束方向上的变化。

    Master oscillator—power amplifier excimer laser system
    8.
    发明授权
    Master oscillator—power amplifier excimer laser system 有权
    主振荡器 - 功率放大器准分子激光系统

    公开(公告)号：US07227881B2

    公开(公告)日：2007-06-05

    申请号：US11371411

    申请日：2006-03-09

    申请人： Sergei V. Govorkov ,  Rainer Paetzel

    发明人： Sergei V. Govorkov ,  Rainer Paetzel

    IPC分类号： H01S3/22

    CPC分类号： H01S3/2366 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/225 ,  H01S3/2325 ,  H01S3/2333 ,  H01S3/235

    摘要： A Master Oscillator (MO)—Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers demand powers of 40 W or more in order to support the throughput requirements of advanced lithography scanner systems. A MOPA-based laser system can provide both high pulse energies and high spectral purity. A MOPA system can utilize a multi-pass PA, as well as a special beam path capable of reducing the amount of ASE (Amplified Spontaneous Emission) and feedback to the MO. Lithography scanner optics are primarily fused silica, such that the peak pulse power must be kept low to avoid material compaction when a MOPA system is used with lithography applications. This conflict between the demand for high average power and the low peak power requirement of the pulsed excimer laser source can be resolved by using a novel beam path to generate a sufficiently long pulse length.

    摘要翻译： 主振荡器（MO） - 功率放大器（PA）配置（MOPA）可以有利地用于微光刻应用的准分子激光系统，其中半导体制造商需要40W或更高的功率，以支持先进的吞吐量要求 光刻扫描仪系统。 基于MOPA的激光系统可以提供高脉冲能量和高光谱纯度。 MOPA系统可以利用多通道PA，以及能够减少ASE（放大自发发射）量和向MO的反馈的特殊光束路径。 平版印刷扫描仪光学器件主要是熔融石英，使得峰值脉冲功率必须保持较低，以避免当MOPA系统与光刻应用一起使用时的材料压实。 可以通过使用新颖的光束路径来产生足够长的脉冲长度来解决脉冲准分子激光源的高平均功率需求和低峰值功率需求之间的这种冲突。

    Diode-laser marker with one-axis scanning mirror mounted on a translatable carriage
    10.
    发明授权
    Diode-laser marker with one-axis scanning mirror mounted on a translatable carriage 有权
    具有安装在可平移滑架上的单轴扫描镜的二极管激光标记

    公开(公告)号：US07952603B2

    公开(公告)日：2011-05-31

    申请号：US12240126

    申请日：2008-09-29

    申请人： Sergei V. Govorkov ,  John H. Jerman

    发明人： Sergei V. Govorkov ,  John H. Jerman

    IPC分类号： B41J15/14 ,  B41J27/00

    CPC分类号： B41J15/14 ,  B41J2/471 ,  G02B26/0858 ,  G02B26/105

    摘要： Apparatus for marking a bitmap image on tape includes a source of a modulatable laser-beam. The beam is directed to an oscillating mirror on a carriage translatable across the width direction of the tape. The oscillating mirror directs the beam to a focusing lens mounted on the carriage. The focusing lens is arranged to focus the beam to a focal-spot on the tape. As the carriage is translated, the focal-spot is swept reciprocally in a wave-like path across the tape. Modulation of the beam is arranged such that pixels of a plurality of rows of the bitmap image are printed in one traverse of the carriage. The tape is advanced incrementally and repeated traverses of the carriage are made to complete printing of the bitmap image.

    摘要翻译： 用于在磁带上标记位图图像的设备包括可调制激光束的源。 光束被引导到可跨越带的宽度方向平移的滑架上的振动反射镜。 振动镜将光束引导到安装在滑架上的聚焦透镜。 聚焦透镜被布置成将光束聚焦到胶带上的焦斑上。 当托架被翻译时，焦斑以波浪状轨迹往复扫过磁带。 布置波束的调制使得位图图像的多行的像素被打印在滑架的一个横越中。 磁带是递增的，并且重复的滑动遍历被完成打印位图图像。