Method of fabricating semiconductor device using deuterium annealing
    2.
    发明授权
    Method of fabricating semiconductor device using deuterium annealing 有权
    使用氘退火制造半导体器件的方法

    公开(公告)号:US08669165B2

    公开(公告)日:2014-03-11

    申请号:US13216706

    申请日:2011-08-24

    IPC分类号: H01L21/02

    摘要: A method of fabricating a semiconductor device is disclosed, the method generally including the steps of: forming a gate dielectric layer on a semiconductor substrate; forming a gate electrode on the gate dielectric layer; forming an etch stop layer on the gate electrode; forming a capacitor on the semiconductor substrate adjacent to the gate electrode; after forming the capacitor, forming a contact hole passing through the etch stop layer on the gate electrode; and, diffusing deuterium into the gate dielectric layer through the contact hole.

    摘要翻译: 公开了制造半导体器件的方法,该方法通常包括以下步骤:在半导体衬底上形成栅介质层; 在所述栅极电介质层上形成栅电极; 在栅电极上形成蚀刻停止层; 在与栅电极相邻的半导体衬底上形成电容器; 在形成电容器之后,形成穿过栅电极上的蚀刻停止层的接触孔; 并且通过接触孔将氘扩散到栅极电介质层中。

    SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
    3.
    发明申请
    SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
    半导体器件及其制造方法

    公开(公告)号:US20120280310A1

    公开(公告)日:2012-11-08

    申请号:US13456261

    申请日:2012-04-26

    IPC分类号: H01L29/78 H01L21/336

    摘要: A semiconductor device including an isolation layer structure including a doped polysilicon layer pattern doped with first and second impurities of first and second conductivity types at lower and upper portions thereof, the doped polysilicon layer pattern being on an inner wall of a first trench on a substrate including an active region in which the first trench is not formed and a field region including the first trench, and an insulation structure filling a remaining portion of the first trench; a gate structure on the active region; a well region at a portion of the active region adjacent to lower portions of the doped polysilicon layer pattern and being doped with third impurities of the second conductivity type; and a source/drain at a portion of the active region adjacent to upper portions of the doped polysilicon layer pattern and being doped with fourth impurities of the first conductivity type.

    摘要翻译: 一种包括隔离层结构的半导体器件,所述隔离层结构包括在其下部和上部掺杂有第一和第二导电类型的第一和第二杂质的掺杂多晶硅层图案,所述掺杂多晶硅层图案位于衬底上的第一沟槽的内壁上 包括不形成第一沟槽的有源区和包括第一沟槽的场区,以及填充第一沟槽的剩余部分的绝缘结构; 活动区域上的栅极结构; 在有源区的与掺杂多晶硅层图案的下部相邻并且掺杂有第二导电类型的第三杂质的部分的阱区; 以及在有源区的与掺杂多晶硅层图案的上部相邻并且掺杂有第一导电类型的第四杂质的部分处的源极/漏极。

    METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING DEUTERIUM ANNEALING
    4.
    发明申请
    METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING DEUTERIUM ANNEALING 有权
    使用真空退火法制造半导体器件的方法

    公开(公告)号:US20120142160A1

    公开(公告)日:2012-06-07

    申请号:US13216706

    申请日:2011-08-24

    IPC分类号: H01L21/02 H01L21/28

    摘要: A method of fabricating a semiconductor device is disclosed, the method generally including the steps of: forming a gate dielectric layer on a semiconductor substrate;forming a gate electrode on the gate dielectric layer;forming an etch stop layer on the gate electrode;forming a capacitor on the semiconductor substrate adjacent to the gate electrode;after forming the capacitor, forming a contact hole passing through the etch stop layer on the gate electrode;and, diffusing deuterium into the gate dielectric layer through the contact hole.

    摘要翻译: 公开了一种制造半导体器件的方法,所述方法通常包括以下步骤:在半导体衬底上形成栅极电介质层;在栅极电介质层上形成栅电极;在栅电极上形成蚀刻停止层; 在形成电容器之后形成穿过栅电极上的蚀刻停止层的接触孔;以及通过接触孔将氘扩散到栅介质层中。

    Semiconductor device and method of manufacturing the same
    6.
    发明授权
    Semiconductor device and method of manufacturing the same 有权
    半导体装置及其制造方法

    公开(公告)号:US08610239B2

    公开(公告)日:2013-12-17

    申请号:US13456261

    申请日:2012-04-26

    IPC分类号: H01L21/70

    摘要: A semiconductor device including an isolation layer structure including a doped polysilicon layer pattern doped with first and second impurities of first and second conductivity types at lower and upper portions thereof, the doped polysilicon layer pattern being on an inner wall of a first trench on a substrate including an active region in which the first trench is not formed and a field region including the first trench, and an insulation structure filling a remaining portion of the first trench; a gate structure on the active region; a well region at a portion of the active region adjacent to lower portions of the doped polysilicon layer pattern and being doped with third impurities of the second conductivity type; and a source/drain at a portion of the active region adjacent to upper portions of the doped polysilicon layer pattern and being doped with fourth impurities of the first conductivity type.

    摘要翻译: 一种包括隔离层结构的半导体器件,所述隔离层结构包括在其下部和上部掺杂有第一和第二导电类型的第一和第二杂质的掺杂多晶硅层图案,所述掺杂多晶硅层图案位于衬底上的第一沟槽的内壁上 包括不形成第一沟槽的有源区和包括第一沟槽的场区,以及填充第一沟槽的剩余部分的绝缘结构; 活动区域上的栅极结构; 在有源区的与掺杂多晶硅层图案的下部相邻并且掺杂有第二导电类型的第三杂质的部分的阱区; 以及在有源区的与掺杂多晶硅层图案的上部相邻并且掺杂有第一导电类型的第四杂质的部分处的源极/漏极。

    Coil component, powder-compacted inductor and winding method for coil component
    7.
    发明授权
    Coil component, powder-compacted inductor and winding method for coil component 有权
    线圈组件,粉末压电感器和线圈组件的绕组方法

    公开(公告)号:US08864060B2

    公开(公告)日:2014-10-21

    申请号:US13449976

    申请日:2012-04-18

    摘要: A coil component includes an air-core winding wire portion wound by a wire with a plurality of wound layers by alignment winding, a spiral shaped wound portion in which the wire wound in a spiral shape from an inner edge of an end surface toward an outer edge thereof along the end surface while in contact with the end surface on one side in the axis direction of the winding wire portion, a first lead portion extended and extracted outward from a winding first end point of the spiral shaped wound portion, and a second lead portion extended and extracted outward from a winding second end point at the outer circumference of the winding wire portion.

    摘要翻译: 线圈部件包括由具有通过对准绕组的多个卷绕层的线缠绕的空心绕组线,螺旋形缠绕部分,其中线从端表面的内边缘向外部缠绕成螺旋形状 其沿着所述端面与所述绕线部的轴线方向的一侧的端面接触,从所述螺旋状卷绕部的卷绕的第一端部向外延伸并向外伸出的第一引导部, 引线部分从卷绕线部分的外周上的绕组第二端点向外延伸和提取。

    Electronic device
    8.
    发明授权
    Electronic device 有权
    电子设备

    公开(公告)号:US08385077B2

    公开(公告)日:2013-02-26

    申请号:US12900390

    申请日:2010-10-07

    申请人: Satoru Yamada

    发明人: Satoru Yamada

    摘要: An electronic device includes a housing having an accommodation space, a first support body being slidably insertable into the accommodation space in parallel with a predetermined plane, a second support body coupled with the first support body rotatably around a rotation axis parallel to a front side of the housing and being rotatable between a reference attitude disposed in the same plane with respect to the first support body and an inclined attitude disposed at a given angle with respect to the first support body, and a drive mechanism for changing the attitude of the second support body.

    摘要翻译: 电子设备包括具有容纳空间的壳体,与预定平面平行地可滑动地插入到容纳空间中的第一支撑体;与第一支撑体可旋转地围绕平行于预定平面的旋转轴线可旋转地连接的第二支撑体 所述壳体能够相对于所述第一支撑体设置在同一平面中的基准姿态和相对于所述第一支撑体以给定角度设置的倾斜姿态之间旋转;以及驱动机构,用于改变所述第二支撑件的姿态 身体。

    Semiconductor device having a device isolation structure
    9.
    发明授权
    Semiconductor device having a device isolation structure 有权
    具有器件隔离结构的半导体器件

    公开(公告)号:US08368169B2

    公开(公告)日:2013-02-05

    申请号:US12897095

    申请日:2010-10-04

    IPC分类号: H01L21/70

    摘要: An example semiconductor device includes a trench formed in a semiconductor substrate to define an active region, a filling dielectric layer provided within the trench, an oxide layer provided between the filling dielectric layer and the trench, a nitride layer provided between the oxide layer and the filling dielectric layer, and a barrier layer provided between the oxide layer and the nitride layer.

    摘要翻译: 示例性半导体器件包括形成在半导体衬底中以限定有源区的沟槽,设置在沟槽内的填充介电层,设置在填充介电层和沟槽之间的氧化物层,设置在氧化物层和 填充介电层,以及设置在氧化物层和氮化物层之间的阻挡层。