摘要:
The vacuum chuck according to the present invention is provided with a sucking plate for sucking and holding an object to be sucked, in which a sucking layer made of a porous ceramic and a dense material layer are integrated, the sucking layer being located on the side for sucking the object to be sucked, wherein the dense material layer is formed by impregnating the porous ceramic with a metal.
摘要:
The vacuum chuck according to the present invention is provided with a sucking plate for sucking and holding an object to be sucked, in which a sucking layer made of a porous ceramic and a dense material layer are integrated, the sucking layer being located on the side for sucking the object to be sucked, wherein the dense material layer is formed by impregnating the porous ceramic with a metal.
摘要:
A honeycomb structure includes a ceramic block formed by a plurality of pillar-shaped honeycomb fired bodies each having a large number of cells longitudinally disposed in parallel with one another with a cell wall between the cells. The plurality of honeycomb fired bodies are combined with one another by interposing an adhesive layer with a sealing material layer formed on a peripheral face of the ceramic block and include a plurality of different shapes of the honeycomb fired bodies. A thickness of a peripheral wall forming the peripheral face of the ceramic block is virtually even. A shape of a cell located at an outermost periphery of the ceramic block is virtually identical with a shape of a cell located at a place other than the outermost periphery of the ceramic block. On the peripheral wall of the honeycomb fired body, a step is provided.
摘要:
A method for manufacturing a wafer holding plate for a wafer grinding apparatus wherein the plate includes a substrate having a wafer adhering surface to which a semiconductor wafer is adhered by an adhesive. The wafer adhering surface includes a mirror-like surface portion and a groove pattern, which anchors the adhesive. When the plate is used for grinding wafers, the quality and accuracy of the finished wafers is greatly improved.
摘要:
A honeycomb structure includes a plurality of honeycomb fired bodies. Each of the plurality of honeycomb fired bodies is combined with one another by an adhesive layer interposed between the honeycomb fired bodies to form a ceramic body. Each of the honeycomb fired bodies has a peripheral wall around each of the honeycomb fired bodies and has a plurality of cells each of which extends along a longitudinal direction of the honeycomb fired body and in parallel with one another. The cells are separated from one another with a cell wall disposed between the cells. The ceramic body includes at least one center-high-heat-capacity honeycomb fired body which is a honeycomb fired body having a heat capacity per unit volume in a central part in a plane perpendicular to the longitudinal direction larger than a heat capacity per unit volume in a peripheral part in the plane.
摘要:
A honeycomb structure includes a plurality of honeycomb fired bodies each having cells. The honeycomb fired bodies include a center-portion honeycomb fired body and a peripheral-portion honeycomb fired body. An area of the center-portion honeycomb fired body is at least about 900 mm2 and at most about 2500 mm2 in a cross section. A shape of the peripheral-portion honeycomb fired body is different from the shape of the center-portion honeycomb fired body in the cross section. An area of the peripheral-portion honeycomb fired body is at least about 0.9 times and at most about 1.3 times larger than the area of the center-portion honeycomb fired body in the cross section.
摘要:
A honeycomb structure is provided that includes a plurality of pillar-shaped honeycomb fired bodies, each having a number of cells longitudinally disposed in parallel with one another with a cell wall therebetween. An adhesive layer is interposed between adjacent honeycomb fired bodies of the plurality of honeycomb fired bodies to combine the plurality of honeycomb fired bodies together, and a sealing material layer is formed on an outer peripheral face of the combined plurality of honeycomb fired bodies. At least two honeycomb fired bodies of the plurality of honeycomb fired bodies have an outer wall that forms a portion of the outer peripheral face of the combined plurality of honeycomb fired bodies. At least one of the outer walls has a protruding portion extending from a surface thereof, and the protruding portion is made from a same material as a material of the at least one outer wall.
摘要:
A method is provided that includes extrusion-molding a raw material composition containing ceramic powder and a binder to manufacture a coupled honeycomb molded body having a shape in which a plurality of pillar-shaped honeycomb molded bodies, each having a number of cells disposed in parallel with one another in a longitudinal direction with a cell wall therebetween, are integrated with one another by interposing a coupling portion. The method includes firing the coupled honeycomb molded body to manufacture a coupled honeycomb fired body, cutting the coupling portion to manufacture coupling-portion-cut honeycomb fired bodies, and binding a plurality of honeycomb fired bodies by interposing an adhesive layer, where at least one of the bound honeycomb fired bodies is a coupling-portion-cut honeycomb fired body.