摘要:
Lower members each have a bolt bore comprising a large-diameter portion larger than the head of a bolt in diameter, and a small diameter portion extending downward from the large-diameter portion with a stepped portion formed therebetween and having a diameter intermediate between the diameter of the bolt head and the diameter of the shank of the bolt. The small-diameter portion of the bolt bore has fitted therein a hollow cylindrical spacer with an inside diameter larger than the diameter of the bolt shank. The spacer has a lower end supported by a support member and an upper end positioned in the large-diameter portion. A hollow cylindrical elastic member is interposed between the bolt head and the stepped portion for biasing the lower member toward the support member.
摘要:
Bolt bores in lower members each comprise a large-diameter portion larger than the head of a bolt in diameter, and a small diameter portion extending downward from the large-diameter portion with a stepped portion formed therebetween and having a diameter intermediate between the diameter of the bolt head and the diameter of the shank of the bolt. A heat insulator has a spacer inserting hole. A hollow cylindrical spacer having an inside diameter larger than the diameter of the bolt shank is inserted through the small-diameter portion of the bolt bore and the spacer inserting hole so that the upper end of the spacer is positioned in the large-diameter portion. The spacer has a lower end bearing on a support member. A hollow cylindrical elastic member is interposed between the bolt head and the stepped portion for biasing the lower member toward the support member.
摘要:
A fluid control apparatus comprises a mass flow controller, two on-off valves disposed at the inlet side of the controller and three on-off valves disposed at the outlet side of the controller. At the inlet side, a main fluid on-off valve is positioned on a purge fluid on-off valve, and at the outlet side, a vent on-off valve is positioned on a vacuum suction on-off valve, with a main passage on-off valve further positioned on the vent on-off valve.
摘要:
A regulator for regulating a flow rate is provided with an upper connector having a downwardly opened channel in communication with the regulator. An on-off valve connected to the regulator is provided with a lower connector having an upwardly opened channel in communication with the on-off valve. The upper connector is lapped over the lower connector and removably joined thereto with a screw so as to cause the downwardly opened channel to communicate with the upwardly opened channel. Accordingly, the regulator can be removed singly, for example, when malfunctioning.
摘要:
A diaphragm valve is provided with a removable metallic elastic seating ring (7) having a first passage (10) and at least one second passage (11) extending through it. The first passage communicates with an inlet passage (8) of the valve while the second passage communicates with the outflow passage (9). A first surface (7a) of the seating ring is provided with a valve seat (12) against which the diaphragm (6) may be pressed to block fluid flow through the valve. A second surface (7b) of the seating ring has two annular and axially extending projections (15, 16). The first projection (15) contacts a bottom surface (2a) of valve chamber (2) in a region surrounding the opening where the inflow passage joins the valve chamber. The second projection (16) contacts the bottom surface of the valve chamber around the periphery of the valve chamber. The first projection extends axially of the seating ring to a slightly greater extent than the second projection so that when a diaphragm holder ( 5) presses the diaphragm against the periphery of the seating ring, the seating ring flexes thus causing increased contact pressure between the first projection and the bottom surface of the valve chamber. This reduces the possibility of leakage flow between the bottom wall and the seating ring from the inflow passage to the outflow passage.
摘要:
A fluid controller 2 comprises a controller main body 6 formed with an inlet channel 42 and an outlet channel 43 each having a downwardly open end, an operating portion 7 provided on the main body 6 and integral therewith for opening and closing the outlet channel 43, and a connector 11 provided beneath the main body 6. The connector 11 has an inlet channel 41 for causing an inlet channel 40 of an inlet pipe joint member 1 to communicate with the inlet channel 42 of the main body 6, and a leftwardly open outlet channel 44 communicating with the outlet channel 43 of the main body 6. The controller main body 6 is fastened to the connector 11 with screws 17. The operating portion 7 can be removed from the connector 11 together with the main body 6.
摘要:
An annular recess is formed in an inner periphery defining a bolt shank bore and has fitted therein an annular elastic member having elasticity radially thereof and having an inside diameter smaller than the outside diameter of the shank of a bolt. The shank bore has at an intermediate part thereof a stepped portion so as to give an increased diameter to a bore portion from the intermediate part to one end of the bore, and a hollow cylindrical member for preventing the elastic member from slipping out is inserted in the shank bore from the bore end so as to form a clearance between the stepped portion and the preventing member, whereby the annular recess is formed.
摘要:
Each of seal projections 7, 8 is positioned radially outward of an inner periphery 1a, 2a of abutting end face of each of joint members 7, 8 and has in section a contour which comprises a circular-arc portion 7b, 8b extending radially outward from the abutting end face, and a straight portion 7a, 8a extending from the circular-arc portion 7b, 8b. The circular-arc portion 7b, 8b has a center positioned radially inward of the point of intersection of the circular-arc portion 7b, 8b and the straight portion 7a, 8a. The straight portion 7a, 8a is inclined at 30 to 60 degrees with respect to the direction of axis of the joint member.
摘要:
A method is provided for tightening up threaded members with proper tightening torque free of unequivalent tightening. In tightening a plurality of threaded members by drive means, the amount of tightening and tightening torque of each threaded member are detected as the members are progressively tightened, and when the tightening amount of each member has reached a value within a specified range, the difference in tightening torque between the threaded members is checked as to whether it is within a predetermined range.
摘要:
In a flow rate control valve having a handle (12) for rotating a stem (9), the handle being locked to a bonnet (3) by a lock screw (14), the handle (12) comprises a handle main body (12') fixed to an upper end of the stem (9), and a tubular lock handle (12") coupled to the lower end of the handle main body (12'). The lock handle is movable in a direction orthogonal to an axial line of elongation Y of the stem 9 relative to the handle main body, with the lock handle enclosing the upper outer circumference of the bonnet (3), and the lock screw (14) being movable in the lock handle (12") in a direction nearly orthogonal to the axial line of elongation Y of the stem (9) to engage the bonnet (3).