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公开(公告)号:US20070111357A1
公开(公告)日:2007-05-17
申请号:US11557111
申请日:2006-11-07
申请人: Shih-Chen Wang , Hsin-Ming Chen , Chun-Hung Lu , Ming-Chou Ho , Shih-Jye Shen , Ching-Hsiang Hsu
发明人: Shih-Chen Wang , Hsin-Ming Chen , Chun-Hung Lu , Ming-Chou Ho , Shih-Jye Shen , Ching-Hsiang Hsu
IPC分类号: H01L21/00
CPC分类号: G11C16/0475 , G11C16/0425 , G11C16/0466 , H01L27/105 , H01L27/115 , H01L27/11521 , H01L27/11568 , H01L29/40114 , H01L29/40117 , H01L29/42324 , H01L29/4234 , H01L29/42368 , H01L29/513 , H01L29/6656 , H01L29/66659 , H01L29/66825 , H01L29/66833 , H01L29/7835 , H01L29/7887 , H01L29/792 , H01L29/7923
摘要: A non-volatile memory formed on a first conductive type substrate is provided. The non-volatile memory includes a gate, a second conductive type drain region, a charge storage layer, and a second conductive type first lightly doped region. The gate is formed on the first conductive type substrate. The second conductive type drain region is formed in the first conductive type substrate at the first side of the gate. The charge storage layer is formed on the first conductive type substrate at the first side of the gate and between the second conductive type drain region and the gate. The second conductive type first lightly doped region is formed in the first conductive type substrate at the second side of the gate. The second side is opposite to the first side.
摘要翻译: 提供了形成在第一导电型基板上的非易失性存储器。 非易失性存储器包括栅极,第二导电型漏极区,电荷存储层和第二导电型第一轻掺杂区域。 栅极形成在第一导电类型的基板上。 第二导电型漏极区域形成在栅极的第一侧的第一导电型衬底中。 电荷存储层形成在栅极的第一侧的第一导电型基板和第二导电型漏极区域与栅极之间。 第二导电型第一轻掺杂区域形成在栅极第二侧的第一导电型衬底中。 第二面与第一面相反。
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公开(公告)号:US07447082B2
公开(公告)日:2008-11-04
申请号:US11555676
申请日:2006-11-01
申请人: Shih-Chen Wang , Hsin-Ming Chen , Chun-Hung Lu , Ming-Chou Ho , Shih-Jye Shen , Ching-Hsiang Hsu
发明人: Shih-Chen Wang , Hsin-Ming Chen , Chun-Hung Lu , Ming-Chou Ho , Shih-Jye Shen , Ching-Hsiang Hsu
IPC分类号: G11C16/04
CPC分类号: G11C16/0475 , G11C16/0425 , G11C16/0466 , H01L21/28273 , H01L21/28282 , H01L27/105 , H01L27/115 , H01L27/11521 , H01L27/11568 , H01L29/42324 , H01L29/4234 , H01L29/42368 , H01L29/513 , H01L29/6656 , H01L29/66659 , H01L29/66825 , H01L29/66833 , H01L29/7835 , H01L29/7887 , H01L29/792 , H01L29/7923
摘要: A single-poly non-volatile memory cell that is fully compatible with nano-scale semiconductor manufacturing process is provided. The single-poly non-volatile memory cell includes an ion well, a gate formed on the ion well, a gate dielectric layer between the gate and the ion well, a dielectric stack layer on sidewalls of the gate, a source doping region and a drain doping region. The dielectric stack layer includes a first oxide layer deposited on the sidewalls of the gate and extends to the ion well, and a silicon nitride layer formed on the first oxide layer. The silicon nitride layer functions as a charge-trapping layer.
摘要翻译: 提供了与纳米级半导体制造工艺完全兼容的单一多晶非易失性存储单元。 单多晶非易失性存储单元包括离子阱,形成在离子阱上的栅极,栅极和离子阱之间的栅极电介质层,栅极侧壁上的电介质叠层,源极掺杂区和 漏极掺杂区域。 电介质堆叠层包括沉积在栅极的侧壁上并延伸到离子阱的第一氧化物层和形成在第一氧化物层上的氮化硅层。 氮化硅层用作电荷捕获层。
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公开(公告)号:US07433243B2
公开(公告)日:2008-10-07
申请号:US11557975
申请日:2006-11-09
申请人: Shih-Chen Wang , Hsin-Ming Chen , Chun-Hung Lu , Ming-Chou Ho , Shih-Jye Shen , Ching-Hsiang Hsu
发明人: Shih-Chen Wang , Hsin-Ming Chen , Chun-Hung Lu , Ming-Chou Ho , Shih-Jye Shen , Ching-Hsiang Hsu
IPC分类号: G11C11/34
CPC分类号: G11C16/0475 , G11C16/0425 , G11C16/0466 , H01L21/28273 , H01L21/28282 , H01L27/105 , H01L27/115 , H01L27/11521 , H01L27/11568 , H01L29/42324 , H01L29/4234 , H01L29/42368 , H01L29/513 , H01L29/6656 , H01L29/66659 , H01L29/66825 , H01L29/66833 , H01L29/7835 , H01L29/7887 , H01L29/792 , H01L29/7923
摘要: A non-volatile memory formed on a first conductive type substrate is provided. The non-volatile memory includes a gate, a second conductive type drain region, a charge storage layer, and a second conductive type first lightly doped region. The gate is formed on the first conductive type substrate. The second conductive type drain region is formed in the first conductive type substrate at the first side of the gate. The charge storage layer is formed on the first conductive type substrate at the first side of the gate and between the second conductive type drain region and the gate. The second conductive type first lightly doped region is formed in the first conductive type substrate at the second side of the gate. The second side is opposite to the first side.
摘要翻译: 提供了形成在第一导电型基板上的非易失性存储器。 非易失性存储器包括栅极,第二导电型漏极区,电荷存储层和第二导电型第一轻掺杂区域。 栅极形成在第一导电类型的基板上。 第二导电型漏极区域形成在栅极的第一侧的第一导电型衬底中。 电荷存储层形成在栅极的第一侧的第一导电型基板和第二导电型漏极区域与栅极之间。 第二导电型第一轻掺杂区域形成在栅极第二侧的第一导电型衬底中。 第二面与第一面相反。
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公开(公告)号:US20070109861A1
公开(公告)日:2007-05-17
申请号:US11555676
申请日:2006-11-01
申请人: Shih-Chen Wang , Hsin-Ming Chen , Chun-Hung Lu , Ming-Chou Ho , Shih-Jye Shen , Ching-Hsiang Hsu
发明人: Shih-Chen Wang , Hsin-Ming Chen , Chun-Hung Lu , Ming-Chou Ho , Shih-Jye Shen , Ching-Hsiang Hsu
IPC分类号: G11C16/04
CPC分类号: G11C16/0475 , G11C16/0425 , G11C16/0466 , H01L21/28273 , H01L21/28282 , H01L27/105 , H01L27/115 , H01L27/11521 , H01L27/11568 , H01L29/42324 , H01L29/4234 , H01L29/42368 , H01L29/513 , H01L29/6656 , H01L29/66659 , H01L29/66825 , H01L29/66833 , H01L29/7835 , H01L29/7887 , H01L29/792 , H01L29/7923
摘要: A single-poly non-volatile memory cell that is fully compatible with nano-scale semiconductor manufacturing process is provided. The single-poly non-volatile memory cell includes an ion well, a gate formed on the ion well, a gate dielectric layer between the gate and the ion well, a dielectric stack layer on sidewalls of the gate, a source doping region and a drain doping region. The dielectric stack layer includes a first oxide layer deposited on the sidewalls of the gate and extends to the ion well, and a silicon nitride layer formed on the first oxide layer. The silicon nitride layer functions as a charge-trapping layer.
摘要翻译: 提供了与纳米级半导体制造工艺完全兼容的单一多晶非易失性存储单元。 单多晶非易失性存储单元包括离子阱,形成在离子阱上的栅极,栅极和离子阱之间的栅极电介质层,栅极侧壁上的电介质叠层,源极掺杂区和 漏极掺杂区域。 电介质堆叠层包括沉积在栅极的侧壁上并延伸到离子阱的第一氧化物层和形成在第一氧化物层上的氮化硅层。 氮化硅层用作电荷捕获层。
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公开(公告)号:US20070108507A1
公开(公告)日:2007-05-17
申请号:US11557974
申请日:2006-11-09
申请人: Shih-Chen Wang , Hsin-Ming Chen , Chun-Hung Lu , Ming-Chou Ho , Shih-Jye Shen , Ching-Hsiang Hsu
发明人: Shih-Chen Wang , Hsin-Ming Chen , Chun-Hung Lu , Ming-Chou Ho , Shih-Jye Shen , Ching-Hsiang Hsu
IPC分类号: H01L29/788
CPC分类号: G11C16/0475 , G11C16/0425 , G11C16/0466 , H01L27/105 , H01L27/115 , H01L27/11521 , H01L27/11568 , H01L29/40114 , H01L29/40117 , H01L29/42324 , H01L29/4234 , H01L29/42368 , H01L29/513 , H01L29/6656 , H01L29/66659 , H01L29/66825 , H01L29/66833 , H01L29/7835 , H01L29/7887 , H01L29/792 , H01L29/7923
摘要: A non-volatile memory formed on a first conductive type substrate is provided. The non-volatile memory includes a gate, a second conductive type drain region, a charge storage layer, and a second conductive type first lightly doped region. The gate is formed on the first conductive type substrate. The second conductive type drain region is formed in the first conductive type substrate at the first side of the gate. The charge storage layer is formed on the first conductive type substrate at the first side of the gate and between the second conductive type drain region and the gate. The second conductive type first lightly doped region is formed in the first conductive type substrate at the second side of the gate. The second side is opposite to the first side.
摘要翻译: 提供了形成在第一导电型基板上的非易失性存储器。 非易失性存储器包括栅极,第二导电型漏极区,电荷存储层和第二导电型第一轻掺杂区域。 栅极形成在第一导电类型的基板上。 第二导电型漏极区域形成在栅极的第一侧的第一导电型衬底中。 电荷存储层形成在栅极的第一侧的第一导电型基板和第二导电型漏极区域与栅极之间。 第二导电型第一轻掺杂区域形成在栅极第二侧的第一导电型衬底中。 第二面与第一面相反。
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公开(公告)号:US20080138956A1
公开(公告)日:2008-06-12
申请号:US11962126
申请日:2007-12-21
申请人: Shih-Chen Wang , Hsin-Ming Chen , Chun-Hung Lu , Ming-Chou Ho , Shih-Jye Shen , Ching-Hsiang Hsu
发明人: Shih-Chen Wang , Hsin-Ming Chen , Chun-Hung Lu , Ming-Chou Ho , Shih-Jye Shen , Ching-Hsiang Hsu
IPC分类号: H01L21/336
CPC分类号: G11C16/0475 , G11C16/0425 , G11C16/0466 , H01L27/105 , H01L27/115 , H01L27/11521 , H01L27/11568 , H01L29/40114 , H01L29/40117 , H01L29/42324 , H01L29/4234 , H01L29/42368 , H01L29/513 , H01L29/6656 , H01L29/66659 , H01L29/66825 , H01L29/66833 , H01L29/7835 , H01L29/7887 , H01L29/792 , H01L29/7923
摘要: A semiconductor device formed on a first conductive type substrate is provided. The device includes a gate, a second conductive type drain region, a second conductive type source region, and a second conductive type first lightly doped region. The gate is formed on the first conductive type substrate. The second conductive type drain region and the second conductive type source region are formed in the first conductive type substrate at both sides of the gate. The second conductive type first lightly doped region is formed in the first conductive type substrate between the gate and the second conductive type source region.
摘要翻译: 提供了形成在第一导电类型基板上的半导体器件。 该器件包括栅极,第二导电型漏极区域,第二导电型源极区域和第二导电型第一轻掺杂区域。 栅极形成在第一导电类型的基板上。 第二导电型漏极区域和第二导电型源极区域形成在栅极两侧的第一导电型衬底中。 第二导电类型的第一轻掺杂区域形成在栅极和第二导电型源极区域之间的第一导电型衬底中。
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公开(公告)号:US20070109869A1
公开(公告)日:2007-05-17
申请号:US11557975
申请日:2006-11-09
申请人: Shih-Chen Wang , Hsin-Ming Chen , Chun-Hung Lu , Ming-Chou Ho , Shih-Jye Shen , Ching-Hsiang Hsu
发明人: Shih-Chen Wang , Hsin-Ming Chen , Chun-Hung Lu , Ming-Chou Ho , Shih-Jye Shen , Ching-Hsiang Hsu
IPC分类号: G11C16/04
CPC分类号: G11C16/0475 , G11C16/0425 , G11C16/0466 , H01L21/28273 , H01L21/28282 , H01L27/105 , H01L27/115 , H01L27/11521 , H01L27/11568 , H01L29/42324 , H01L29/4234 , H01L29/42368 , H01L29/513 , H01L29/6656 , H01L29/66659 , H01L29/66825 , H01L29/66833 , H01L29/7835 , H01L29/7887 , H01L29/792 , H01L29/7923
摘要: A non-volatile memory formed on a first conductive type substrate is provided. The non-volatile memory includes a gate, a second conductive type drain region, a charge storage layer, and a second conductive type first lightly doped region. The gate is formed on the first conductive type substrate. The second conductive type drain region is formed in the first conductive type substrate at the first side of the gate. The charge storage layer is formed on the first conductive type substrate at the first side of the gate and between the second conductive type drain region and the gate. The second conductive type first lightly doped region is formed in the first conductive type substrate at the second side of the gate. The second side is opposite to the first side.
摘要翻译: 提供了形成在第一导电型基板上的非易失性存储器。 非易失性存储器包括栅极,第二导电型漏极区,电荷存储层和第二导电型第一轻掺杂区域。 栅极形成在第一导电类型的基板上。 第二导电型漏极区域形成在栅极的第一侧的第一导电型衬底中。 电荷存储层形成在栅极的第一侧的第一导电型基板和第二导电型漏极区域与栅极之间。 第二导电型第一轻掺杂区域形成在栅极第二侧的第一导电型衬底中。 第二面与第一面相反。
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公开(公告)号:US20070108470A1
公开(公告)日:2007-05-17
申请号:US11557112
申请日:2006-11-07
申请人: Shih-Chen Wang , Hsin-Ming Chen , Chun-Hung Lu , Ming-Chou Ho , Shih-Jye Shen , Ching-Hsiang Hsu
发明人: Shih-Chen Wang , Hsin-Ming Chen , Chun-Hung Lu , Ming-Chou Ho , Shih-Jye Shen , Ching-Hsiang Hsu
IPC分类号: H01L31/00
CPC分类号: G11C16/0475 , G11C16/0425 , G11C16/0466 , H01L27/105 , H01L27/115 , H01L27/11521 , H01L27/11568 , H01L29/40114 , H01L29/40117 , H01L29/42324 , H01L29/4234 , H01L29/42368 , H01L29/513 , H01L29/6656 , H01L29/66659 , H01L29/66825 , H01L29/66833 , H01L29/7835 , H01L29/7887 , H01L29/792 , H01L29/7923
摘要: A semiconductor device formed on a first conductive type substrate is provided. The device includes a gate, a second conductive type drain region, a second conductive type source region, and a second conductive type first lightly doped region. The gate is formed on the first conductive type substrate. The second conductive type drain region and the second conductive type source region are formed in the first conductive type substrate at both sides of the gate. The second conductive type first lightly doped region is formed in the first conductive type substrate between the gate and the second conductive type source region.
摘要翻译: 提供了形成在第一导电类型基板上的半导体器件。 该器件包括栅极,第二导电型漏极区域,第二导电型源极区域和第二导电型第一轻掺杂区域。 栅极形成在第一导电类型的基板上。 第二导电型漏极区域和第二导电型源极区域形成在栅极两侧的第一导电型衬底中。 第二导电类型的第一轻掺杂区域形成在栅极和第二导电型源极区域之间的第一导电型衬底中。
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公开(公告)号:US06822286B2
公开(公告)日:2004-11-23
申请号:US10249370
申请日:2003-04-03
申请人: Ching-Hsiang Hsu , Wei-Zhe Wong , Shih-Jye Shen , Hsin-Ming Chen , Shih-Chan Huang , Ming-Chou Ho
发明人: Ching-Hsiang Hsu , Wei-Zhe Wong , Shih-Jye Shen , Hsin-Ming Chen , Shih-Chan Huang , Ming-Chou Ho
IPC分类号: H01L29788
CPC分类号: H01L27/1126 , H01L27/112
摘要: A CMOS-compatible read only memory (ROM) includes a first single-poly PMOS transistor that is serially electrically connected to a second single-poly PMOS transistor for recording digital data “1” or digital data “0”. The first and second single-poly PMOS transistors are both formed on an N-well of a P-type substrate. The first single-poly PMOS transistor includes a select gate electrically connected to a word line, a first P+ source doping region electrically connected to a source line, and a first P+ drain doping region. The second single-poly PMOS transistor includes a floating gate, a second P+ source doping region electrically connected to the first P+ drain doping region, and a second P+ drain doping region electrically connected to a bit line. The second P+ source doping region and the second P+ drain doping region define a floating gate channel region under the floating gate. A fast FPLD-to-ROM conversion method is also disclosed. After the final software code is fixed and the addresses where the memory units to be coded are determined, the FPLD are transformed into a ROM by either changing the layout of a photo mask that is used to define polysilicon gates to cancel the pre-selected floating gates according to the fixed software code, or by ion implanting the pre-selected floating gate channel regions underneath those floating gates where the memory units are to be coded.
摘要翻译: CMOS兼容只读存储器(ROM)包括串联电连接到用于记录数字数据“1”或数字数据“0”的第二单多晶硅PMOS晶体管的第一单多晶硅PMOS晶体管。 第一和第二单多晶硅PMOS晶体管都形成在P型衬底的N阱上。 第一单多晶硅PMOS晶体管包括电连接到字线的选择栅极,电连接到源极线的第一P +源极掺杂区域和第一P +漏极掺杂区域。 第二单多晶硅PMOS晶体管包括浮置栅极,电连接到第一P +漏极掺杂区域的第二P +源极掺杂区域和电连接到位线的第二P +漏极掺杂区域。 第二P +源极掺杂区域和第二P +漏极掺杂区域在浮动栅极下方形成浮置栅极沟道区域。 还公开了一种快速的FPLD到ROM转换方法。 在固定最终软件代码并确定要编码的存储器单元的地址之后,通过改变用于定义多晶硅栅极的光掩模的布局来将FPLD转换成ROM,以取消预先选择的浮动 根据固定软件代码的门,或者通过离子注入要在存储器单元进行编码的那些浮动栅极之下的预先选择的浮置栅极沟道区域。
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公开(公告)号:US20070296034A1
公开(公告)日:2007-12-27
申请号:US11759949
申请日:2007-06-08
申请人: Hsin-Ming Chen , Shih-Chen Wang , Ming-Chou Ho , Shih-Jye Shen
发明人: Hsin-Ming Chen , Shih-Chen Wang , Ming-Chou Ho , Shih-Jye Shen
IPC分类号: H01L27/12
CPC分类号: H01L27/1203 , H01L27/0207 , H01L27/115 , H01L27/11519 , H01L27/11521 , H01L27/11524 , H01L27/11558
摘要: A single-poly SOI memory cell includes a PMOS select transistor serially connected with a floating-gate PMOS transistor on an SOI substrate. The PMOS select transistor includes a select gate, a P+ source region and a P+ drain/source region. The floating-gate PMOS transistor includes a floating gate, a P+ drain region and the P+ drain/source region, wherein the P+ drain/source region is shared by the PMOS select transistor and the floating-gate PMOS transistor. A floating first N+ doping region is disposed within the P+ drain/source region. The first N+ doping region, which is adjacent to the floating gate, acts as a source-tie pick-up.
摘要翻译: 单多晶硅存储单元包括与SOI衬底上的浮栅PMOS晶体管串联连接的PMOS选择晶体管。 PMOS选择晶体管包括选择栅极,P + SUP源极区和P + SUP漏极/源极区。 浮置栅极PMOS晶体管包括浮置栅极,漏极和漏极区域,其中P + 漏极/源极区域由PMOS选择晶体管和浮置栅极PMOS晶体管共享。 漂浮的第一N + +掺杂区域设置在漏极/源极区域内。 与浮动栅极相邻的第一N + H + +掺杂区充当源极接头。
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