公开(公告)号：US08908277B2

公开(公告)日：2014-12-09

申请号：US13567099

申请日：2012-08-06

申请人： Benny Pesach ,  Shimon Yalov ,  Zafrir Mor

发明人： Benny Pesach ,  Shimon Yalov ,  Zafrir Mor

IPC分类号： G02B27/10 ,  G01B11/25 ,  G02B27/09 ,  G02B19/00

CPC分类号： G01B11/25 ,  G01B11/2513 ,  G02B19/0057 ,  G02B27/0905 ,  G02B27/0961

摘要： Optical apparatus includes a matrix of light sources arranged on a substrate with a predetermined, uniform spacing between the light sources. A beam homogenizer includes a first optical surface, including a first microlens array, which has a first pitch equal to the spacing between the light sources and which is aligned with the matrix so that a respective optical axis of each microlens in the array intercepts a corresponding light source in the matrix and transmits light emitted by the corresponding light source. A second optical surface, including a second microlens array, is positioned to receive and focus the light transmitted by the first microlens array and has a second pitch that is different from the first pitch.

摘要翻译： 光学装置包括在光源之间以预定的均匀间隔布置在基板上的光源矩阵。 光束均化器包括第一光学表面，第一光学表面包括第一微透镜阵列，其具有等于光源之间的间隔的第一间距并且与阵列对准，使得阵列中的每个微透镜的相应光轴截取对应的 矩阵中的光源并透射由相应光源发射的光。 包括第二微透镜阵列的第二光学表面被定位成接收和聚焦由第一微透镜阵列传输的光，并具有不同于第一间距的第二间距。

公开(公告)号：US07463352B2

公开(公告)日：2008-12-09

申请号：US11040528

申请日：2005-01-21

申请人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

发明人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

IPC分类号： G01N21/88

CPC分类号： G03F7/70616 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/479 ,  G02B27/48 ,  G03F1/84

摘要： A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.

摘要翻译： 一种用于在用于制造半导体器件（包括晶片，掩模，光掩模和掩模版）的制品的检查期间减少斑点的方法和装置。 通过在光路中设置元件来减少由相干光源（例如脉冲激光）输出的光束的相干性。 这些元件的实例包括光纤束; 光学导光板; 光栅; 积分球; 和声光调制器。 这些各种元件可以根据需要组合，使得由元件组合输出的光束具有的光路长度差大于由相干光源输出的光束的相干长度。

公开(公告)号：US20050128473A1

公开(公告)日：2005-06-16

申请号：US11040528

申请日：2005-01-21

申请人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

发明人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

IPC分类号： G01B11/30 ,  G01N21/47 ,  G01N21/95 ,  G01N21/956 ,  G02B27/48 ,  G03F1/00 ,  G03F7/20 ,  H01L21/027 ,  H01L21/66 ,  G01N21/88

CPC分类号： G03F7/70616 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/479 ,  G02B27/48 ,  G03F1/84

摘要： A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.

公开(公告)号：US06587194B2

公开(公告)日：2003-07-01

申请号：US10044454

申请日：2002-01-11

申请人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

发明人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

IPC分类号： G01N2100

CPC分类号： G03F7/70616 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/479 ,  G02B27/48 ,  G03F1/84

摘要： A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.

公开(公告)号：US08717488B2

公开(公告)日：2014-05-06

申请号：US13351242

申请日：2012-01-17

申请人： Alexander Shpunt ,  Haim Bezdin ,  Shimon Yalov

发明人： Alexander Shpunt ,  Haim Bezdin ,  Shimon Yalov

IPC分类号： H04N5/225 ,  G02B5/28

CPC分类号： G02B5/285 ,  G02B5/28 ,  G02B13/14 ,  G02B27/0018

摘要： Optical apparatus includes an image sensor and an optical assembly, which is configured to focus optical radiation via an aperture stop onto the image sensor. The optical assembly includes a plurality of optical surfaces, consisting of a first, curved surface through which the optical radiation enters the assembly, a final surface through which the rays exit the assembly toward the image sensor, and at least two intermediate surfaces between the first and final surfaces. An interference filter, which has a center wavelength and a passband no greater than 4% of the center wavelength, and includes a coating formed on one of the optical surfaces. All rays of the optical radiation passing through the aperture stop are incident on the coating over a range of incidence angles with a half-width that is no greater than three fourths of the numerical aperture of the optical assembly.

摘要翻译： 光学设备包括图像传感器和光学组件，其被配置为将光学辐射经由孔径光阑聚焦到图像传感器上。 所述光学组件包括多个光学表面，所述多个光学表面包括第一弯曲表面，所述光学辐射穿过所述弯曲表面进入所述组件，所述光线通过所述弯曲表面射出所述组件朝向所述图像传感器;以及至少两个中间表面， 和最终表面。 一种干涉滤光器，其具有中心波长和不大于中心波长的4％的通带，并且包括形成在其中一个光学表面上的涂层。 通过孔径光阑的光学辐射的所有光线在不大于光学组件的数值孔径的四分之三的半宽度的入射角范围内入射到涂层上。

公开(公告)号：US20120182464A1

公开(公告)日：2012-07-19

申请号：US13351242

申请日：2012-01-17

申请人： Alexander Shpunt ,  Haim Bezdin ,  Shimon Yalov

发明人： Alexander Shpunt ,  Haim Bezdin ,  Shimon Yalov

IPC分类号： H04N5/225

CPC分类号： G02B5/285 ,  G02B5/28 ,  G02B13/14 ,  G02B27/0018

摘要： Optical apparatus includes an image sensor and an optical assembly, which is configured to focus optical radiation via an aperture stop onto the image sensor. The optical assembly includes a plurality of optical surfaces, consisting of a first, curved surface through which the optical radiation enters the assembly, a final surface through which the rays exit the assembly toward the image sensor, and at least two intermediate surfaces between the first and final surfaces. An interference filter, which has a center wavelength and a passband no greater than 4% of the center wavelength, and includes a coating formed on one of the optical surfaces. All rays of the optical radiation passing through the aperture stop are incident on the coating over a range of incidence angles with a half-width that is no greater than three fourths of the numerical aperture of the optical assembly.

摘要翻译： 光学设备包括图像传感器和光学组件，其被配置为将光学辐射经由孔径光阑聚焦到图像传感器上。 所述光学组件包括多个光学表面，所述多个光学表面包括第一弯曲表面，所述光学辐射通过该弯曲表面进入所述组件，所述光线通过所述弯曲表面射出所述组件朝向所述图像传感器;以及至少两个中间表面， 和最终表面。 一种干涉滤光器，其具有中心波长和不大于中心波长的4％的通带，并且包括形成在其中一个光学表面上的涂层。 通过孔径光阑的光学辐射的所有光线在不大于光学组件的数值孔径的四分之三的半宽度的入射角范围内入射到涂层上。

公开(公告)号：US06369888B1

公开(公告)日：2002-04-09

申请号：US09443247

申请日：1999-11-17

申请人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

发明人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

IPC分类号： G01N2100

CPC分类号： G03F7/70616 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/479 ,  G02B27/48 ,  G03F1/84

摘要： A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.

公开(公告)号：US20130038941A1

公开(公告)日：2013-02-14

申请号：US13567099

申请日：2012-08-06

申请人： Benny Pesach ,  Shimon Yalov ,  Zafrir Mor

发明人： Benny Pesach ,  Shimon Yalov ,  Zafrir Mor

IPC分类号： G02B27/12

CPC分类号： G01B11/25 ,  G01B11/2513 ,  G02B19/0057 ,  G02B27/0905 ,  G02B27/0961

摘要： Optical apparatus includes a matrix of light sources arranged on a substrate with a predetermined, uniform spacing between the light sources. A beam homogenizer includes a first optical surface, including a first microlens array, which has a first pitch equal to the spacing between the light sources and which is aligned with the matrix so that a respective optical axis of each microlens in the array intercepts a corresponding light source in the matrix and transmits light emitted by the corresponding light source. A second optical surface, including a second microlens array, is positioned to receive and focus the light transmitted by the first microlens array and has a second pitch that is different from the first pitch.

摘要翻译： 光学装置包括在光源之间以预定的均匀间隔布置在基板上的光源矩阵。 光束均化器包括第一光学表面，第一光学表面包括第一微透镜阵列，其具有等于光源之间的间隔的第一间距并且与阵列对准，使得阵列中的每个微透镜的相应光轴截取对应的 矩阵中的光源并透射由相应光源发射的光。 包括第二微透镜阵列的第二光学表面被定位成接收和聚焦由第一微透镜阵列传输的光，并具有不同于第一间距的第二间距。

公开(公告)号：US20130038881A1

公开(公告)日：2013-02-14

申请号：US13567095

申请日：2012-08-06

申请人： Benny Pesach ,  Zafrir Mor ,  Shimon Yalov ,  Alexander Shpunt

发明人： Benny Pesach ,  Zafrir Mor ,  Shimon Yalov ,  Alexander Shpunt

IPC分类号： G01B11/25 ,  H01L21/77 ,  H01S5/42 ,  F21V5/04 ,  F21V13/04

CPC分类号： G01B11/2513 ,  G01B11/25 ,  G02B27/106 ,  G02B27/1086 ,  G06T7/521 ,  H01L2224/48091 ,  H01S5/005 ,  H01S5/423 ,  H01L2924/00014

摘要： Optical apparatus includes a beam source, which is configured to generate an optical beam having a pattern imposed thereon. A projection lens is configured to receive and project the optical beam so as to cast the pattern onto a first area in space having a first angular extent. A field multiplier is interposed between the projection lens and the first area and is configured to expand the projected optical beam so as to cast the pattern onto a second area in space having a second angular extent that is at least 50% greater than the first angular extent.

摘要翻译： 光学装置包括光束源，其被配置为产生具有施加在其上的图案的光束。 投影透镜被配置为接收和投影光束以将图案投射到具有第一角度范围的空间中的第一区域上。 场放大器被插入在投影透镜和第一区域之间，并且被配置为使投影的光束膨胀以将图案投射到空间中的第二区域上，该第二区域具有比第一角度大至少50％的第二角度范围 程度。

公开(公告)号：US20100302644A1

公开(公告)日：2010-12-02

申请号：US12678805

申请日：2008-09-18

申请人： Shimon Yalov

发明人： Shimon Yalov

IPC分类号： G02B27/01

CPC分类号： G02B27/0172 ,  G02B27/0081 ,  G02B27/1086 ,  G02B27/126 ,  G02B2027/011 ,  G02B2027/0123 ,  G02B2027/0174

摘要： An optical device (300) is disclosed. The optical device (300) comprises a planar substrate (316) formed with an input optical element (310) for receiving and redirecting light for propagation of the light within the substrate (316), and a left and a right output optical element (312, 314) for receiving light propagating within the substrate (316) and coupling the light out of the substrate (316). In an embodiment of the invention, the device comprises a mounting member (330) for mounting the substrate (316) in front of a face of a viewer such that the substrate is slanted at a tilt angle with respect to a line of sight of the viewer and the left and the right output optical elements (312, 314) respectively provide the light to a left eye (25) and a right eye of the viewer.

摘要翻译： 公开了一种光学装置（300）。 光学装置（300）包括形成有输入光学元件（310）的平面基板（316），用于接收和重定向光以在基板（316）内传播光，以及左右输出光学元件（312） ，314），用于接收在衬底（316）内传播的光并将光耦合到衬底（316）之外。 在本发明的一个实施例中，该装置包括用于将基底（316）安装在观察者面部前方的安装构件（330），使得基底相对于视线的视线以倾斜角倾斜 观看者和左右输出光学元件（312,314）分别向观察者的左眼（25）和右眼提供光。