摘要:
Methods of fabricating integrated circuit memory cells and integrated circuit memory cells are disclosed. An integrated circuit memory cell can be fabricated by forming a cup-shaped electrode on sidewalls of an opening in an insulation layer and through the opening on an ohmic layer that is stacked on a conductive structure. An insulation filling member is formed that at least partially fills an interior of the electrode. The insulation filling member is formed within a range of temperatures that is sufficiently low to not substantially change resistance of the ohmic layer. A variable resistivity material is formed on the insulation filling member and is electrically connected to the electrode.
摘要:
Methods of fabricating integrated circuit memory cells and integrated circuit memory cells are disclosed. An integrated circuit memory cell can be fabricated by forming a cup-shaped electrode on sidewalls of an opening in an insulation layer and through the opening on an ohmic layer that is stacked on a conductive structure. An insulation filling member is formed that at least partially fills an interior of the electrode. The insulation filling member is formed within a range of temperatures that is sufficiently low to not substantially change resistance of the ohmic layer. A variable resistivity material is formed on the insulation filling member and is electrically connected to the electrode.
摘要:
A multilevel semiconductor device and method of making the same includes a first active semiconductor structure, a first insulating layer on the first active semiconductor structure, a second active semiconductor structure on the first insulating layer and over the first active semiconductor structure, a second insulating layer on the second active semiconductor structure, and a contact structure including a first ohmic contact having a vertical thickness on an upper surface of the first active semiconductor structure and a second ohmic contact of a lateral thickness on a sidewall of the second active semiconductor structure, the vertical thickness being greater than the lateral thickness.
摘要:
Nonvolatile memory devices and methods of fabricating the nonvolatile memory devices are provided. The nonvolatile memory devices may include a stacked structure including a plurality of conductive films and a plurality of interlayer insulating films stacked in an alternate sequence on a substrate and a vertical channel structure extending through the stacked structure. The plurality of conductive films may include a selection line that is closest to the substrate among the plurality of conductive films. The selection line may include a lower portion and an upper portion sequentially stacked on the substrate, and a side of the upper portion of the selection line and a side of the lower portion of the selection line may have different profiles.
摘要:
Nonvolatile memory devices and methods of fabricating the nonvolatile memory devices are provided. The nonvolatile memory devices may include a stacked structure including a plurality of conductive films and a plurality of interlayer insulating films stacked in an alternate sequence on a substrate and a vertical channel structure extending through the stacked structure. The plurality of conductive films may include a selection line that is closest to the substrate among the plurality of conductive films. The selection line may include a lower portion and an upper portion sequentially stacked on the substrate, and a side of the upper portion of the selection line and a side of the lower portion of the selection line may have different profiles.
摘要:
Disclosed is a semiconductor memory device including stacks on a substrate, a vertical channel portion connected to the substrate through each of the stacks, and a separation pattern disposed between the stacks. Each of the stacks may include a plurality of gate electrodes stacked on the substrate and insulating patterns interposed between the gate electrodes. Each of the gate electrodes may include a first metal pattern, which is disposed between the insulating patterns to define a recess region recessed toward the vertical channel portion, and a second metal pattern disposed in the recess region. The first and second metal patterns may contain the same metallic material and may have mean grain sizes different from each other.