公开(公告)号：US09859146B2

公开(公告)日：2018-01-02

申请号：US14238860

申请日：2012-08-13

申请人： Shinji Himori ,  Yoshiyuki Kobayashi ,  Takehiro Kato ,  Etsuji Ito

发明人： Shinji Himori ,  Yoshiyuki Kobayashi ,  Takehiro Kato ,  Etsuji Ito

IPC分类号： H01L21/00 ,  H01L21/687 ,  H01L21/306 ,  H01L21/67

CPC分类号： H01L21/68742 ,  H01L21/30604 ,  H01L21/67063

摘要： A semiconductor manufacturing device includes a stage, a plurality of pins, and a driving unit. The stage includes a mounting surface. The mounting surface has a first region for mounting thereon a substrate, and a second region for mounting thereon a focus ring. The second region is provided to surround the first region. A plurality of holes is formed in the stage. The holes extend in a direction that intersects the mounting surface while passing through the boundary between the first region and the second region. The pins are provided in the respective holes. Each of the pins has a first and a second upper end surface. The second upper end surface is provided above the first upper end surface, and is offset towards the first region with respect to the first upper end surface. The driving unit moves the pins up and down in the aforementioned direction.

公开(公告)号：US20140213055A1

公开(公告)日：2014-07-31

申请号：US14238860

申请日：2012-08-13

申请人： Shinji Himori ,  Yoshiyuki Kobayashi ,  Takehiro Kato ,  Etsuji Ito

发明人： Shinji Himori ,  Yoshiyuki Kobayashi ,  Takehiro Kato ,  Etsuji Ito

IPC分类号： H01L21/687 ,  H01L21/67 ,  H01L21/306

CPC分类号： H01L21/68742 ,  H01L21/30604 ,  H01L21/67063

摘要： A semiconductor manufacturing device includes a stage, a plurality of pins, and a driving unit. The stage includes a mounting surface. The mounting surface has a first region for mounting thereon a substrate, and a second region for mounting thereon a focus ring. The second region is provided to surround the first region. A plurality of holes is formed in the stage. The holes extend in a direction that intersects the mounting surface while passing through the boundary between the first region and the second region. The pins are provided in the respective holes. Each of the pins has a first and a second upper end surface. The second. upper end surface is provided above the first upper end surface, and is offset towards the first region with respect to the first upper end surface. The driving unit moves the pins up and down in the aforementioned direction.

摘要翻译： 半导体制造装置包括台，多个销和驱动单元。 舞台包括安装表面。 安装表面具有用于在其上安装基板的第一区域和用于在其上安装聚焦环的第二区域。 第二区域设置成围绕第一区域。 在台阶上形成多个孔。 这些孔在穿过第一区域和第二区域之间的边界的同时沿着与安装表面相交的方向延伸。 销设置在相应的孔中。 每个销具有第一和第二上端表面。 第二。 上端表面设置在第一上端表面上方，并且相对于第一上端表面偏移到第一区域。 驱动单元在上述方向上上下移动销。

公开(公告)号：US10147633B2

公开(公告)日：2018-12-04

申请号：US13611327

申请日：2012-09-12

申请人： Shinji Himori ,  Takehiro Kato ,  Etsuji Ito

发明人： Shinji Himori ,  Takehiro Kato ,  Etsuji Ito

IPC分类号： B65G43/00 ,  B65G47/90 ,  H01L21/677 ,  H01L21/687

摘要： A transfer apparatus transfers an object to be transferred onto a case. The transfer apparatus includes a transfer arm, an arm shaft, a plurality of electromagnets, and a control unit. The transfer arm has a pick unit on a front end thereof and extends and retracts in a horizontal direction. The object to be transferred is held on the pick unit. The arm shaft supports the transfer arm. The plurality of electromagnets apply an force in upward direction to the transfer arm by generating a magnetic field in the case. The control unit controls the plurality of electromagnets in such a manner that when the transfer arm extends and retracts in the horizontal direction, the force in upward direction applied to the transfer arm increases as a length from the arm shaft to the front end of the transfer arm increases.

公开(公告)号：US07513967B2

公开(公告)日：2009-04-07

申请号：US10381826

申请日：2001-09-27

申请人： Takehiro Kato ,  Kumiko Sango ,  Masato Nomura ,  Kazuo Hayakawa

发明人： Takehiro Kato ,  Kumiko Sango ,  Masato Nomura ,  Kazuo Hayakawa

IPC分类号： B29C65/00 ,  B28B17/00

CPC分类号： D04H1/70 ,  B27N3/002 ,  B27N3/14 ,  D04H1/425 ,  D04H1/4374 ,  D04H1/4382 ,  D04H1/558

摘要： A raw material including a mixture of a natural fiber and a thermoplastic fiber is supplied to a surface of a rotating rotary body. The natural and thermoplastic fibers are scattered toward a carrying surface of a conveyor belt by the rotational force of the rotary body. An air blower may direct pressurized air to the scattered raw material in order to further effect separation of the natural and thermoplastic fibers. Consequently, the natural fibers and the thermoplastic fibers are deposited such that the relative concentration of the natural fibers and the thermoplastic fibers gradually and seamlessly changes or varies across the thickness of depth of the resulting molded fiber material.

摘要翻译： 将包含天然纤维和热塑性纤维的混合物的原料供给到旋转体的表面。 天然和热塑性纤维通过旋转体的旋转力向传送带的承载表面散射。 鼓风机可以将加压空气引导到分散的原料，以进一步实现天然和热塑性纤维的分离。 因此，沉积天然纤维和热塑性纤维，使得天然纤维和热塑性纤维的相对浓度在所得模制纤维材料的深度厚度上逐渐且无缝地变化或变化。

公开(公告)号：US20070131167A1

公开(公告)日：2007-06-14

申请号：US11506773

申请日：2006-08-21

申请人： Akira Kodashima ,  Shinichi Miyano ,  Takehiro Kato

发明人： Akira Kodashima ,  Shinichi Miyano ,  Takehiro Kato

IPC分类号： H01L21/306 ,  C23C16/00

CPC分类号： H01L21/6719

摘要： A substrate processing apparatus which enables the work efficiency of maintenance to be improved. The substrate processing apparatus comprises a plurality of processing chambers 100 for carrying out plasma processing on a wafer to be processed. Each processing chamber 100 has a chamber lid 200 that can be suspended and supported by a crane unit 500. The crane unit 500 comprises an air cylinder 510 and a linear guide 520. The air cylinder 510 holds the chamber lid 200 movably in a vertical direction thereabove. The linear guide 520 holds the chamber lid 200 movably in a horizontal direction.

摘要翻译： 能够提高维护工作效率的基板处理装置。 基板处理装置包括用于对要处理的晶片执行等离子体处理的多个处理室100。 每个处理室100具有可由起重机单元500悬挂和支撑的室盖200。 起重机单元500包括气缸510和直线导轨520。 气缸510沿着其上方的垂直方向可移动地保持室盖200。 线性引导件520沿水平方向可移动地保持室盖200。

公开(公告)号：US06975435B1

公开(公告)日：2005-12-13

申请号：US09511548

申请日：2000-02-23

申请人： Yoshifumi Maitani ,  Michiyuki Suzuki ,  Michiaki Nishimura ,  Kazuya Masuda ,  Noritomo Nakashima ,  Takehiro Kato

发明人： Yoshifumi Maitani ,  Michiyuki Suzuki ,  Michiaki Nishimura ,  Kazuya Masuda ,  Noritomo Nakashima ,  Takehiro Kato

IPC分类号： G03G15/00 ,  G03B27/50 ,  G03B27/72 ,  G03G15/04 ,  G03G15/043 ,  H04N1/00 ,  H04N1/04 ,  H04N1/10 ,  H04N1/12 ,  H04N1/19 ,  H04N1/40 ,  H04N1/401 ,  H04N1/407

CPC分类号： H04N1/00013 ,  H04N1/00002 ,  H04N1/00045 ,  H04N1/00082 ,  H04N1/0464 ,  H04N1/1013 ,  H04N1/12 ,  H04N1/40056 ,  H04N1/401 ,  H04N1/4076 ,  H04N2201/044

摘要： In the correction of the quantity of light of a light source used in an image reader which irradiates an original document with the light source, receives the reflected light by a CCD and reads the original document image, at the time of a document moving mode in which the document moves, correction of the quantity of irradiation light of the light source is performed by reading a first standard white board which extends over the whole area in the main scanning direction, prior to the initiation of readout of the moving document, and upon initiation of readout of the moving document, a second standard white board arranged outside the document passing area is read by using the same light source, with the read operation of the moving document, and correction of the quantity of irradiation light of the light source is performed based on the reflected light from the second white board.

摘要翻译： 在用光源照射原稿的图像读取器中使用的光源的光量校正中，通过CCD接收反射光并读取原始文件图像，在文件移动模式时 文件移动时，通过读取在移动文件的读出开始之前在主扫描方向上遍及整个区域延伸的第一标准白板，并且在 通过使用相同的光源，通过移动文档的读取操作和光源的照射光量的校正来读取布置在文档通过区域之外的第二标准白板的读取的开始， 基于来自第二白板的反射光进行。

公开(公告)号：US09608071B2

公开(公告)日：2017-03-28

申请号：US14378366

申请日：2012-02-14

申请人： Takehiro Kato ,  Toru Onishi

发明人： Takehiro Kato ,  Toru Onishi

IPC分类号： H01L29/10 ,  H01L29/66 ,  H01L29/739 ,  H01L29/08

CPC分类号： H01L29/1095 ,  H01L29/0834 ,  H01L29/6634 ,  H01L29/66348 ,  H01L29/7396 ,  H01L29/7397

摘要： An IGBT manufacturing method is provided. The IGBT has an n-type emitter region, a p-type top body region, an n-type intermediate region, a p-type bottom body region, an n-type drift region, a p-type collector region, trenches penetrating the emitter region, the top body region, the intermediate region and the bottom body region from an upper surface of a semiconductor substrate and reaching the drift region, and gate electrodes formed in the trenches. The method includes forming the trenches on the upper surface of the semiconductor substrate, forming the insulating film in the trenches, forming an electrode layer on the semiconductor substrate and in the trenches after forming the insulating film, planarizing an upper surface of the electrode layer, and implanting n-type impurities to a depth of the intermediate region from the upper surface side of the semiconductor substrate after planarizing the upper surface of the electrode layer.

公开(公告)号：US07883579B2

公开(公告)日：2011-02-08

申请号：US11506773

申请日：2006-08-21

申请人： Akira Kodashima ,  Shinichi Miyano ,  Takehiro Kato

发明人： Akira Kodashima ,  Shinichi Miyano ,  Takehiro Kato

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306

CPC分类号： H01L21/6719

摘要： A substrate processing apparatus which enables the work efficiency of maintenance to be improved. The substrate processing apparatus comprises a plurality of processing chambers 100 for carrying out plasma processing on a wafer to be processed. Each processing chamber 100 has a chamber lid 200 that can be suspended and supported by a crane unit 500. The crane unit 500 comprises an air cylinder 510 and a linear guide 520. The air cylinder 510 holds the chamber lid 200 movably in a vertical direction thereabove. The linear guide 520 holds the chamber lid 200 movably in a horizontal direction.

摘要翻译： 能够提高维护工作效率的基板处理装置。 基板处理装置包括用于对要处理的晶片执行等离子体处理的多个处理室100。 每个处理室100具有能够由起重机单元500悬挂和支撑的室盖200.起重机单元500包括气缸510和直线导轨520.气缸510沿垂直方向可移动地保持室盖200 在上面 线性引导件520沿水平方向可移动地保持室盖200。

公开(公告)号：US20150008479A1

公开(公告)日：2015-01-08

申请号：US14378366

申请日：2012-02-14

申请人： Takehiro Kato ,  Toru Onishi

发明人： Takehiro Kato ,  Toru Onishi

IPC分类号： H01L29/10 ,  H01L29/66 ,  H01L29/739

CPC分类号： H01L29/1095 ,  H01L29/0834 ,  H01L29/6634 ,  H01L29/66348 ,  H01L29/7396 ,  H01L29/7397

摘要： An IGBT manufacturing method is provided. The IGBT has an n-type emitter region, a p-type top body region, an n-type intermediate region, a p-type bottom body region, an n-type drift region, a p-type collector region, trenches penetrating the emitter region, the top body region, the intermediate region and the bottom body region from an upper surface of a semiconductor substrate and reaching the drift region, and gate electrodes formed in the trenches. The method includes forming the trenches on the upper surface of the semiconductor substrate, forming the insulating film in the trenches, forming an electrode layer on the semiconductor substrate and in the trenches after forming the insulating film, planarizing an upper surface of the electrode layer, and implanting n-type impurities to a depth of the intermediate region from the upper surface side of the semiconductor substrate after planarizing the upper surface of the electrode layer.

摘要翻译： 提供了IGBT制造方法。 IGBT具有n型发射极区域，p型顶体区域，n型中间区域，p型底部区域，n型漂移区域，p型集电极区域， 发射极区域，顶体区域，中间区域和底体区域，并且到达漂移区域，以及形成在沟槽中的栅极电极。 该方法包括在半导体衬底的上表面上形成沟槽，在沟槽中形成绝缘膜，在半导体衬底上形成电极层，在形成绝缘膜之后在沟槽中形成电极层的上表面， 以及在平坦化电极层的上表面之后，从半导体衬底的上表面侧将n型杂质注入到中间区域的深度。

公开(公告)号：US07416779B2

公开(公告)日：2008-08-26

申请号：US10663672

申请日：2003-09-17

申请人： Masanori Hashiba ,  Takehiro Kato ,  Kousuke Tamaki ,  Osamu Mito ,  Kazuya Matsumura ,  Tomomichi Fujiyama ,  Yuhei Maeda ,  Eiji Sugiyama ,  Takashi Inoh ,  Hiroshi Urayama ,  Hisashi Okuyama

发明人： Masanori Hashiba ,  Takehiro Kato ,  Kousuke Tamaki ,  Osamu Mito ,  Kazuya Matsumura ,  Tomomichi Fujiyama ,  Yuhei Maeda ,  Eiji Sugiyama ,  Takashi Inoh ,  Hiroshi Urayama ,  Hisashi Okuyama

IPC分类号： D04H1/00 ,  B32B1/08

CPC分类号： B27N3/002 ,  C08L67/04 ,  Y10T428/1369 ,  Y10T428/1372 ,  Y10T428/1393 ,  Y10T428/24132 ,  Y10T428/249924 ,  Y10T428/3179 ,  C08L2666/26

摘要： To provide a fiberboard capable of reducing a load on the environment at all states of producing, using, and abolishing and moreover having a high degree of bending strength and a high bending-strength retention rate at high temperature and high humidity so as to be usable for an automobile interior material or building material and a fiber-board producing method. The fiberboard is formed by mixing natural fiber with polylactic acid resin serving as a binder and has an apparent density of 0.2 g/cm3.

摘要翻译： 为了提供能够在生产，使用和消除的所有状态下减轻环境负荷并且在高温高湿下具有高弯曲强度和高弯曲强度保持率的纤维板，以便可用 用于汽车内部材料或建筑材料和纤维板制造方法。 纤维板通过将天然纤维与作为粘合剂的聚乳酸树脂混合并具有0.2g / cm 3的表观密度而形成。