INTEGRATED CIRCUIT PROTECTION DURING HIGH-CURRENT ESD TESTING
    1.
    发明申请
    INTEGRATED CIRCUIT PROTECTION DURING HIGH-CURRENT ESD TESTING 有权
    在高电流ESD测试期间的集成电路保护

    公开(公告)号:US20130271883A1

    公开(公告)日:2013-10-17

    申请号:US13446394

    申请日:2012-04-13

    IPC分类号: H02H9/04

    摘要: A method of protecting devices within an integrated circuit during electro-static discharge (ESD) testing using an ESD test system is provided. The method includes applying a direct current (DC) bias voltage to an input of at least one device of the integrated circuit and applying an ESD simulated signal to at least one other input of the integrated circuit. The applied ESD simulated signal is conducted along a first current path to a first ground, while a low-current signal associated with the at least one device is conducted along a second current path to the second ground. The DC bias voltage is maintained between the input of the at least one device and the second ground at a substantially constant value in response to a signal variation on the second ground that results from the applied ESD simulated signal.

    摘要翻译: 提供了使用ESD测试系统在静电放电(ESD)测试期间保护集成电路内的器件的方法。 该方法包括将直流(DC)偏置电压施加到集成电路的至少一个器件的输入,并将ESD仿真信号施加到集成电路的至少一个其他输入。 施加的ESD模拟信号沿着第一电流路径传导到第一地,而与至少一个装置相关联的低电流信号沿着第二电流路径传导到第二地。 响应于由所施加的ESD模拟信号产生的第二接地上的信号变化,DC偏置电压在至少一个器件的输入和第二接地之间以基本恒定的值保持。

    GATE DIELECTRIC BREAKDOWN PROTECTION DURING ESD EVENTS
    2.
    发明申请
    GATE DIELECTRIC BREAKDOWN PROTECTION DURING ESD EVENTS 有权
    防静电事件期间门电绝缘保护

    公开(公告)号:US20120300349A1

    公开(公告)日:2012-11-29

    申请号:US13115492

    申请日:2011-05-25

    IPC分类号: H02H9/00 G06F17/50

    摘要: Protection circuits, design structures, and methods for isolating the gate and gate dielectric of a field-effect transistor from electrostatic discharge (ESD). A protection field-effect transistor is located between a protected field-effect transistor and a voltage rail. Under normal operating conditions, the protection field-effect transistor is saturated so that the protected field-effect transistor is coupled to the voltage rail. The protection field-effect transistor may be driven into a cutoff condition in response to an ESD event while the chip is unpowered, which increases the series resistance of an ESD current path between the gate of the protected field-effect transistor and the voltage rail. The voltage drop across the protection field-effect transistor may reduce the ESD stress on the gate dielectric of the protected field-effect transistor. Alternatively, the gate and source of an existing field-effect transistor are selectively coupled provide ESD isolation to the protected field-effect transistor.

    摘要翻译: 用于将场效应晶体管的栅极和栅极电介质与静电放电(ESD)隔离的保护电路,设计结构和方法。 保护场效应晶体管位于受保护的场效应晶体管和电压轨之间。 在正常工作条件下,保护场效应晶体管饱和,使受保护的场效应晶体管耦合到电压轨。 保护场效应晶体管可以在芯片无电源时响应于ESD事件而被驱动成截止状态,这增加了受保护的场效应晶体管的栅极与电压轨之间的ESD电流路径的串联电阻。 保护场效应晶体管两端的电压降可以降低受保护的场效应晶体管的栅极电介质上的ESD应力。 或者,现有的场效应晶体管的栅极和源极被选择性地耦合到提供ESD隔离到受保护的场效应晶体管。

    VERTICAL CURRENT CONTROLLED SILICON ON INSULATOR (SOI) DEVICE SUCH AS A SILICON CONTROLLED RECTIFIER AND METHOD OF FORMING VERTICAL SOI CURRENT CONTROLLED DEVICES
    5.
    发明申请
    VERTICAL CURRENT CONTROLLED SILICON ON INSULATOR (SOI) DEVICE SUCH AS A SILICON CONTROLLED RECTIFIER AND METHOD OF FORMING VERTICAL SOI CURRENT CONTROLLED DEVICES 有权
    绝缘体(SOI)器件上的垂直电流控制硅如硅控制整流器及形成垂直SOI电流控制器件的方法

    公开(公告)号:US20080308837A1

    公开(公告)日:2008-12-18

    申请号:US11762811

    申请日:2007-06-14

    CPC分类号: H01L27/0262

    摘要: A Silicon on Insulator (SOI) Integrated Circuit (IC) chip with devices such as a vertical Silicon Controlled Rectifier (SCR), vertical bipolar transistors, a vertical capacitor, a resistor and/or a vertical pinch resistor and method of making the device(s). The devices are formed in a seed hole through the SOI surface layer and insulator layer to the substrate. A buried diffusion, e.g., N-type, is formed through the seed hole in the substrate. A doped epitaxial layer is formed on the buried diffusion and may include multiple doped layers, e.g., a P-type layer and an N-type layer. Polysilicon, e.g., P-type, may be formed on the doped epitaxial layer. Contacts to the buried diffusion are formed in a contact liner.

    摘要翻译: 具有诸如垂直硅控制整流器(SCR),垂直双极晶体管,垂直电容器,电阻器和/或垂直钳位电阻器等器件的绝缘体硅(SOI)集成电路(IC)芯片及其制造方法 s)。 器件通过SOI表面层和绝缘体层形成在晶种孔中。 通过衬底中的种子孔形成例如N型的掩埋扩散。 掺杂的外延层形成在掩埋扩散层上,并且可以包括多个掺杂层,例如P型层和N型层。 可以在掺杂的外延层上形成多晶硅,例如P型。 与埋入扩散部的接触形成在接触衬里中。

    SEMICONDUCTOR-ON-INSULATOR DEVICE WITH ASYMMETRIC STRUCTURE
    6.
    发明申请
    SEMICONDUCTOR-ON-INSULATOR DEVICE WITH ASYMMETRIC STRUCTURE 有权
    具有不对称结构的半导体绝缘体器件

    公开(公告)号:US20120187525A1

    公开(公告)日:2012-07-26

    申请号:US13012137

    申请日:2011-01-24

    IPC分类号: H01L29/12 G06F17/50 H01L21/36

    摘要: Device structures with a reduced junction area in an SOI process, methods of making the device structures, and design structures for a lateral diode. The device structure includes one or more dielectric regions, such as STI regions, positioned in the device region and intersecting the p-n junction between an anode and cathode. The dielectric regions, which may be formed using shallow trench isolation techniques, function to reduce the width of a p-n junction with respect to the width area of the cathode at a location spaced laterally from the p-n junction and the anode. The width difference and presence of the dielectric regions creates an asymmetrical diode structure. The volume of the device region occupied by the dielectric regions is minimized to preserve the volume of the cathode and anode.

    摘要翻译: 在SOI工艺中具有减小的结面积的器件结构,制造器件结构的方法以及横向二极管的设计结构。 器件结构包括位于器件区域中并与阳极和阴极之间的p-n结相交的一个或多个电介质区域,例如STI区域。 可以使用浅沟槽隔离技术形成的电介质区域用于在p-n结和阳极侧向间隔的位置处减小p-n结相对于阴极宽度区域的宽度。 介质区域的宽度差和存在产生不对称二极管结构。 由电介质区域占据的器件区域的体积被最小化以保持阴极和阳极的体积。

    SEMICONDUCTOR-ON-INSULATOR DEVICE STRUCTURES WITH A BODY-TO-SUBSTRATE CONNECTION FOR ENHANCED ELECTROSTATIC DISCHARGE PROTECTION, AND DESIGN STRUCTURES FOR SUCH SEMICONDUCTOR-ON-INSULATOR DEVICE STRUCTURES
    7.
    发明申请
    SEMICONDUCTOR-ON-INSULATOR DEVICE STRUCTURES WITH A BODY-TO-SUBSTRATE CONNECTION FOR ENHANCED ELECTROSTATIC DISCHARGE PROTECTION, AND DESIGN STRUCTURES FOR SUCH SEMICONDUCTOR-ON-INSULATOR DEVICE STRUCTURES 有权
    具有用于增强静电放电保护的基体到基底连接的半导体绝缘体器件结构以及用于这种半导体绝缘体器件结构的设计结构

    公开(公告)号:US20090256202A1

    公开(公告)日:2009-10-15

    申请号:US12102032

    申请日:2008-04-14

    IPC分类号: H01L29/786

    CPC分类号: H01L27/1203 H01L27/0248

    摘要: Semiconductor-on-insulator device structures with enhanced electrostatic discharge protection, and design structures for an integrated circuit with device structures exhibiting enhanced electrostatic discharge protection. A device is formed in a body region of a device layer of a semiconductor-on-insulator substrate, which is bounded by an inner peripheral sidewall of an annular dielectric-filled isolation structure that extends from a top surface of the device layer to the insulating layer of the semiconductor-on-insulator substrate. An annular conductive interconnect extends through the body region and the insulating layer to connect the body region with the bulk wafer of the semiconductor-on-insulator substrate. The annular conductive interconnect is disposed inside the inner peripheral sidewall of the isolation structure, which annularly encircles the body region.

    摘要翻译: 具有增强的静电放电保护的绝缘体上半导体器件结构以及具有增强的静电放电保护的器件结构的集成电路的设计结构。 一种器件形成在绝缘体上半导体衬底的器件层的体区中,该衬底由环形电介质填充的隔离结构的内周侧壁限定,该隔离结构从器件层的顶表面延伸到绝缘体 绝缘体上半导体衬底的层。 环形导电互连延伸穿过主体区域和绝缘层,以将体区域与绝缘体上半导体衬底的体晶片连接。 环形导电互连件设置在隔离结构的内周侧壁的内侧,环形环绕主体区域。

    SEMICONDUCTOR DEVICE HEAT DISSIPATION STRUCTURE
    8.
    发明申请
    SEMICONDUCTOR DEVICE HEAT DISSIPATION STRUCTURE 失效
    半导体器件散热结构

    公开(公告)号:US20090160013A1

    公开(公告)日:2009-06-25

    申请号:US11960030

    申请日:2007-12-19

    IPC分类号: H01L29/00 H01L21/4763

    摘要: A heat generating component of a semiconductor device is located between two heavily doped semiconductor regions in a semiconductor substrate. The heat generating component may be a middle portion of a diode having a light doping, a lightly doped p-n junction between a cathode and anode of a silicon controlled rectifier, or a resistive portion of a doped semiconductor resistor. At least one thermally conductive via comprising a metal or a non-metallic conductive material is place directly on the heat generating component. Alternatively, a thin dielectric layer may be formed between the heat generating component and the at least one thermally conductive via. The at least one thermally conductive via may, or may not, be connected to a back-end-of-line metal wire, which may be connected to higher level of metal wiring or to a handle substrate through a buried insulator layer.

    摘要翻译: 半导体器件的发热元件位于半导体衬底中的两个重掺杂半导体区之间。 发热部件可以是具有轻掺杂的二极管的中间部分,可控硅整流器的阴极和阳极之间的轻掺杂p-n结或掺杂半导体电阻器的电阻部分。 至少一个包含金属或非金属导电材料的导热通孔直接放置在发热部件上。 或者,可以在发热部件和至少一个导热通孔之间形成薄介电层。 至少一个导热通孔可以连接到或可以不连接到后端金属线,其可以通过掩埋绝缘体层连接到较高级别的金属布线或者与手柄基板连接。

    RC-Triggered ESD Clamp Device With Feedback for Time Constant Adjustment
    9.
    发明申请
    RC-Triggered ESD Clamp Device With Feedback for Time Constant Adjustment 有权
    RC触发ESD钳位装置,具有时间常数调整反馈

    公开(公告)号:US20130141823A1

    公开(公告)日:2013-06-06

    申请号:US13312047

    申请日:2011-12-06

    IPC分类号: H02H9/04 G06F17/50

    CPC分类号: H02H9/046

    摘要: Methods for responding to an electrostatic discharge (ESD) event on a voltage rail, ESD protection circuits, and design structures for an ESD protection circuit. An RC network of the ESD protection circuit includes a capacitor coupled to a field effect transistor at a node. The node of the RC network is coupled with an input of the inverter. The field-effect transistor is coupled with an output of the inverter. In response to an ESD event, a trigger signal is supplied from the RC network to the input of the inverter, which drives a clamp device to discharge current from the ESD event from the voltage rail. An RC time constant of the RC network is increased in response to the ESD event to sustain the discharge of the current by the clamp device.

    摘要翻译: 用于响应电压轨上的静电放电(ESD)事件,ESD保护电路以及ESD保护电路的设计结构的方法。 ESD保护电路的RC网络包括耦合到节点处的场效应晶体管的电容器。 RC网络的节点与逆变器的输入端相连。 场效应晶体管与反相器的输出端相连。 响应于ESD事件,触发信号从RC网络提供给逆变器的输入,该驱动器驱动钳位装置以从ESD电压放电来自电压轨。 响应于ESD事件,RC网络的RC时间常数增加以维持钳位装置的电流放电。