公开(公告)号：US06191492B1

公开(公告)日：2001-02-20

申请号：US08161859

申请日：1993-12-06

申请人： Shunpei Yamazaki ,  Mitsunori Tsuchiya ,  Kazuo Urata ,  Itaru Koyama ,  Shinji Imatou ,  Shigenori Hayashi ,  Naoki Hirose ,  Mari Sasaki ,  Noriya Ishida ,  Kouhei Wada

发明人： Shunpei Yamazaki ,  Mitsunori Tsuchiya ,  Kazuo Urata ,  Itaru Koyama ,  Shinji Imatou ,  Shigenori Hayashi ,  Naoki Hirose ,  Mari Sasaki ,  Noriya Ishida ,  Kouhei Wada

IPC分类号： H01L2328

CPC分类号： H01L24/48 ,  H01L23/3135 ,  H01L23/49586 ,  H01L24/45 ,  H01L2224/05624 ,  H01L2224/29339 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2224/48465 ,  H01L2224/48624 ,  H01L2224/8592 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01007 ,  H01L2924/0101 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/01023 ,  H01L2924/01029 ,  H01L2924/01045 ,  H01L2924/01047 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/14 ,  H01L2924/181 ,  H01L2924/00014 ,  H01L2924/05042 ,  H01L2924/00 ,  H01L2924/00012

摘要： An electronic device comprising a substrate having a frame, a metal lead and an electronic parts in a bonding structure, and a molding of an organic resin formed on the substrate, wherein the surface of the organic resin is provided with a hardened water-resistant or carbonaceous film or wherein pores at the surface of the organic resin are filled within an inactive gas such as argon because of a plasma treatment of the resin surface with the inactive gas whereby impurities are prevented from entering into the organic resin through the pores.

摘要翻译： 一种电子设备，包括具有框架，金属引线和接合结构中的电子部件的基板，以及在所述基板上形成的有机树脂的模制件，其中所述有机树脂的表面设置有硬化防水或 碳质膜或其中有机树脂表面的孔被填充在惰性气体如氩气中，因为用惰性气体等离子体处理树脂表面，从而防止杂质通过孔进入有机树脂。

公开(公告)号：US06756670B1

公开(公告)日：2004-06-29

申请号：US09698055

申请日：2000-10-30

申请人： Shunpei Yamazaki ,  Mitsunori Tsuchiya ,  Kazuo Urata ,  Itaru Koyama ,  Shinji Imatou ,  Shigenori Hayashi ,  Naoki Hirose ,  Mari Sasaki ,  Noriya Ishida ,  Kouhei Wada

发明人： Shunpei Yamazaki ,  Mitsunori Tsuchiya ,  Kazuo Urata ,  Itaru Koyama ,  Shinji Imatou ,  Shigenori Hayashi ,  Naoki Hirose ,  Mari Sasaki ,  Noriya Ishida ,  Kouhei Wada

IPC分类号： H01L2306

CPC分类号： H01L23/49586 ,  H01L21/56 ,  H01L23/29 ,  H01L23/3135 ,  H01L24/45 ,  H01L24/48 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2224/48463 ,  H01L2224/8592 ,  H01L2924/01007 ,  H01L2924/0101 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/01029 ,  H01L2924/01079 ,  H01L2924/181 ,  H01L2924/00014 ,  H01L2924/05442 ,  H01L2924/05042 ,  H01L2924/00012

摘要： An electronic device comprising a substrate having a frame, a metal lead and an electronic parts in a bonding structure, and a molding of an organic resin formed on the substrate, wherein the surface of the organic resin is provided with a hardened water-resistant or carbonaceous film or wherein pores at the surface of the organic resin are filled within an inactive gas such as argon because of a plasma treatment of the resin surface with the inactive gas whereby impurities are prevented from entering into the organic resin through the pores.

摘要翻译： 一种电子设备，包括具有框架，金属引线和接合结构中的电子部件的基板，以及在所述基板上形成的有机树脂的模制件，其中所述有机树脂的表面设置有硬化防水或 碳质膜或其中有机树脂表面的孔被填充在惰性气体如氩气中，因为用惰性气体等离子体处理树脂表面，从而防止杂质通过孔进入有机树脂。

公开(公告)号：US5147822A

公开(公告)日：1992-09-15

申请号：US667231

申请日：1991-02-25

申请人： Shunpei Yamazaki ,  Mitsunori Tsuchiya ,  Kazuo Urata ,  Itaru Koyama ,  Shinji Imatou ,  Shigenori Hayashi ,  Naoki Hirose ,  Mari Sasaki ,  Noriya Ishida ,  Kouhei Wada

发明人： Shunpei Yamazaki ,  Mitsunori Tsuchiya ,  Kazuo Urata ,  Itaru Koyama ,  Shinji Imatou ,  Shigenori Hayashi ,  Naoki Hirose ,  Mari Sasaki ,  Noriya Ishida ,  Kouhei Wada

IPC分类号： H01L21/56 ,  H01L23/29 ,  H01L23/31 ,  H01L23/495

CPC分类号： H01L23/49586 ,  H01L21/56 ,  H01L23/29 ,  H01L23/3135 ,  H01L2224/32245 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2224/48464 ,  H01L2224/48465 ,  H01L2224/73265 ,  H01L2224/8592 ,  H01L24/45 ,  H01L24/48 ,  H01L2924/01007 ,  H01L2924/0101 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01029 ,  H01L2924/01079 ,  H01L2924/14 ,  H01L2924/181

摘要： An electronic device comprising a substrate having a frame, a metal lead and electronic parts in a bonding structure, and a molding of an organic resin formed on the substrate, wherein the surface of the organic resin is provided with a hardened water-resistant or carbonaceous film.

摘要翻译： 一种电子设备，包括具有框架，金属引线和接合结构中的电子部件的基板，以及在所述基板上形成的有机树脂的模制品，其中所述有机树脂的表面设置有硬化的耐水或含碳的 电影。

公开(公告)号：US5041201A

公开(公告)日：1991-08-20

申请号：US403821

申请日：1989-09-07

申请人： Shunpei Yamazaki ,  Mitsunori Tsuchiya ,  Shigenori Hayashi ,  Naoki Hirose ,  Noriya Ishida ,  Mari Sasaki ,  Atsushi Kawano

发明人： Shunpei Yamazaki ,  Mitsunori Tsuchiya ,  Shigenori Hayashi ,  Naoki Hirose ,  Noriya Ishida ,  Mari Sasaki ,  Atsushi Kawano

IPC分类号： C23C16/26 ,  C23C16/517

CPC分类号： C23C16/517 ,  C23C16/26

摘要： Plasma CVD method and apparatus are described. The apparatus comprises a vacuum chamber in which two pairs of electrodes are provided. A high frequency voltage is applied to one of the pairs in order to produce a plasma from a reactive gas in the chamber. A substrate to be coated is located between the other of the pairs. A relatively low frequency voltage is applied to the other pair of electrodes. By virtue of the low frequency voltage, the substrate is exposed to the bombardment of ions of the plasma during deposition. The bombardment functions to remove relatively soft portions of the depositing material.

公开(公告)号：US5059502A

公开(公告)日：1991-10-22

申请号：US434783

申请日：1989-11-13

申请人： Narihito Kojima ,  Hiroshi Nagame ,  Mitsuru Seto ,  Shunpei Yamazaki ,  Shigenori Hayashi ,  Noriya Ishida ,  Naoki Hirose ,  Mari Sasaki ,  Junichi Takeyama

发明人： Narihito Kojima ,  Hiroshi Nagame ,  Mitsuru Seto ,  Shunpei Yamazaki ,  Shigenori Hayashi ,  Noriya Ishida ,  Naoki Hirose ,  Mari Sasaki ,  Junichi Takeyama

IPC分类号： G03G5/082 ,  G03G5/147

CPC分类号： G03G5/14704 ,  G03G5/08285

摘要： An electrophotographic photoconductor comprises an electroconductive substrate, an organic photoconductive layer formed on the electroconductive substrate, and a protective layer formed on the organic photoconductive layer, comprising carbon or a carbon-based material as its main component, in which the difference in the Vickers hardness between the organic photoconductive layer and the protective layer is 2500 Kg/mm.sup.2 or less, and the oxygen concentration at the interface or in the vicinity of the interface between the organic photoconductive layer and the protective layer is 1 atom % or less.

摘要翻译： 电子照相感光体包括导电性基体，形成在导电性基体上的有机光电导层和形成在有机光电导层上的保护层，其包含碳或碳类材料作为其主要成分，其中维氏硬度 有机光电导层和保护层之间的氧浓度为2500kg / mm 2以下，有机光电导层与保护层界面附近的氧浓度为1原子％以下。

公开(公告)号：US5185179A

公开(公告)日：1993-02-09

申请号：US417311

申请日：1989-10-05

申请人： Shunpei Yamazaki ,  Shigenori Hayashi ,  Noriya Ishida ,  Mari Sasaki ,  Junichi Takeyama ,  Kenji Itou ,  Masahiro Kojima ,  Masaya Kadono

发明人： Shunpei Yamazaki ,  Shigenori Hayashi ,  Noriya Ishida ,  Mari Sasaki ,  Junichi Takeyama ,  Kenji Itou ,  Masahiro Kojima ,  Masaya Kadono

IPC分类号： C23C16/26 ,  C23C16/34

CPC分类号： C23C16/345 ,  C23C16/26

摘要： Carbonaceous films are coated on a surface by chemical vapor reation. In advance of the deposition of carbonaceous film, a silicon nitride film as coated on the surface to prevent interdiffusion between the carbonaceous film and the underlying surface.

公开(公告)号：US4949004A

公开(公告)日：1990-08-14

申请号：US307190

申请日：1989-02-08

申请人： Shunpei Yamazaki ,  Takashi Inujima ,  Kazuo Urata ,  Mamoru Tashiro ,  Yuji Tanamura ,  Shinji Imato ,  Kenji Itoh ,  Seiichi Odaka ,  Shigenori Hayashi ,  Naoki Hirose

发明人： Shunpei Yamazaki ,  Takashi Inujima ,  Kazuo Urata ,  Mamoru Tashiro ,  Yuji Tanamura ,  Shinji Imato ,  Kenji Itoh ,  Seiichi Odaka ,  Shigenori Hayashi ,  Naoki Hirose

IPC分类号： H01J61/52

CPC分类号： H01J61/52

摘要： A mercury-vapor lamp is provided with a reservoir in which a superfluous amount of mercury is stored in the form of liquid state. The liquid mercury in the reservoir is cooled to a certain temperature. The pressure of mercury-vapor is automatically reduced to the saturated pressure of the liquid mercury cooled. In this configuration, the pressure of mercury-vapor is controlled by adjusting the temperature of the liquid mercury stored in the reservoir.

公开(公告)号：US4887548A

公开(公告)日：1989-12-19

申请号：US193680

申请日：1988-05-13

申请人： Kazuo Urata ,  Naoki Hirose ,  Shigenori Hayashi

发明人： Kazuo Urata ,  Naoki Hirose ,  Shigenori Hayashi

IPC分类号： H01L21/31 ,  C23C16/34 ,  C23C16/48 ,  H01L21/205

CPC分类号： C23C16/488

摘要： A thin film manufacturing system comprises a reaction vessel with a window that is transparent to ultraviolet radiation; a means of exhausting gas from the reaction vessel to a reduced pressure condition, a means of introducing a gas into the reaction vessel to form a thin film, a source of ultraviolet radiation that activates the gas, and slits provided at a predetermined interval on the window that is transparent to ultraviolet radiation.

摘要翻译： 薄膜制造系统包括具有对紫外线辐射透明的窗口的反应容器; 将气体从反应容器排出到减压状态的方法，将气体引入反应容器中以形成薄膜，激活气体的紫外线辐射源，以及以预定间隔设置的狭缝的方法 对紫外线辐射透明的窗户。

公开(公告)号：US4910044A

公开(公告)日：1990-03-20

申请号：US240364

申请日：1988-09-01

申请人： Shunpei Yamazaki ,  Kazuo Urata ,  Mamoru Tashiro ,  Yuji Tanamura ,  Shinji Imato ,  Takashi Inujima ,  Shigenori Hayashi

发明人： Shunpei Yamazaki ,  Kazuo Urata ,  Mamoru Tashiro ,  Yuji Tanamura ,  Shinji Imato ,  Takashi Inujima ,  Shigenori Hayashi

IPC分类号： B01J19/12 ,  C23C16/48

CPC分类号： B01J19/123 ,  C23C16/482

摘要： Ultraviolet light is emitted mainly with 185 nm in wave length so that a thick silicon layer is fabricated by decomposition of silane gas at a high deposition speed. As a light source, a bulb is filled with an amount of mercury gas without dosing argon gas which enhances preferentially light with 254 nm in wave length.

摘要翻译： 紫外线主要以波长185nm发射，从而通过以高沉积速度分解硅烷气体来制造厚硅层。 作为光源，灯泡充满一定数量的汞气体，而不投入氩气，其优先增强波长为254nm的光。

公开(公告)号：US5183511A

公开(公告)日：1993-02-02

申请号：US352644

申请日：1989-05-12

申请人： Shunpei Yamazaki ,  Shigenori Hayashi ,  Takashi Inujima ,  Naoki Hirose

发明人： Shunpei Yamazaki ,  Shigenori Hayashi ,  Takashi Inujima ,  Naoki Hirose

IPC分类号： C23C16/48 ,  H01J37/32

CPC分类号： H01J37/32458 ,  C23C16/482 ,  C23C16/488 ,  H01J37/32862

摘要： A photo CVD apparatus includes a reaction chamber, a light source for radiating light to the inside of the chamber through a light window, and a pair of electrodes disposed in the chamber for glow discharge, one of the electrodes being located on the light window. After deposition by photo CVD, a light window for transmission of UV light is cleaned by plasma etching by virtue of glow discharge taking place between the electrodes. The light source and the electrodes for plasma etching share one power supply for supplying high frequency electric power.

摘要翻译： 照相CVD装置包括反应室，通过光窗将光照射到室内的光源，以及设置在用于辉光放电的室中的一对电极，其中一个电极位于光窗上。 在通过光CVD沉积之后，通过在电极之间发生辉光放电，通过等离子体蚀刻来清洁用于透射UV光的光窗口。 用于等离子体蚀刻的光源和电极共享用于提供高频电力的一个电源。