Scatterometry measurement of asymmetric structures
    1.
    发明授权
    Scatterometry measurement of asymmetric structures 有权
    不对称结构的散射测量

    公开(公告)号:US08525993B2

    公开(公告)日:2013-09-03

    申请号:US12696974

    申请日:2010-01-29

    IPC分类号: G01J4/00

    摘要: Asymmetry metrology is performed using at least a portion of Mueller matrix elements, including, e.g., the off-diagonal elements of the Mueller matrix. The Mueller matrix may be generated using, e.g., a spectroscopic or angle resolved ellipsometer that may include a rotating compensator. The Mueller matrix is analyzed by fitting at least a portion of the elements to Mueller matrix elements calculated using a rigorous electromagnetic model of the sample or by fitting the off-diagonal elements to a calibrated linear response. The use of the Mueller matrix elements in the asymmetry measurement permits, e.g., overlay analysis using in-chip devices thereby avoiding the need for special off-chip targets.

    摘要翻译: 使用Mueller矩阵元素的至少一部分(包括例如Mueller矩阵的非对角线元素)来执行不对称度量。 可以使用例如可以包括旋转补偿器的分光镜或角度分辨椭圆偏振器来生成Mueller矩阵。 通过将至少一部分元素装配到使用样品的严格电磁模型计算的Mueller矩阵元素或通过将非对角元素拟合到校准的线性响应来分析Mueller矩阵。 在不对称测量中使用Mueller矩阵元件允许例如使用片上器件的覆盖分析,从而避免需要特殊的片外目标。

    Scatterometry Measurement of Asymmetric Structures
    2.
    发明申请
    Scatterometry Measurement of Asymmetric Structures 有权
    不对称结构的散射测量

    公开(公告)号:US20110080585A1

    公开(公告)日:2011-04-07

    申请号:US12696974

    申请日:2010-01-29

    IPC分类号: G01J4/00

    摘要: Asymmetry metrology is performed using at least a portion of Mueller matrix elements, including, e.g., the off-diagonal elements of the Mueller matrix. The Mueller matrix may be generated using, e.g., a spectroscopic or angle resolved ellipsometer that may include a rotating compensator. The Mueller matrix is analyzed by fitting at least a portion of the elements to Mueller matrix elements calculated using a rigorous electromagnetic model of the sample or by fitting the off-diagonal elements to a calibrated linear response. The use of the Mueller matrix elements in the asymmetry measurement permits, e.g., overlay analysis using in-chip devices thereby avoiding the need for special off-chip targets.

    摘要翻译: 使用Mueller矩阵元素的至少一部分(包括例如Mueller矩阵的非对角线元素)来执行不对称度量。 可以使用例如可以包括旋转补偿器的分光镜或角度分辨椭圆偏振器来生成Mueller矩阵。 通过将至少一部分元素装配到使用样品的严格电磁模型计算的Mueller矩阵元素或通过将非对角元素拟合到校准的线性响应来分析Mueller矩阵。 在不对称测量中使用Mueller矩阵元件允许例如使用片上器件的覆盖分析,从而避免需要特殊的片外目标。

    Hydraulic Oil Cylinder, Correlative Device Thereof, Hydraulic Cushion System, Excavator And Concrete Pump Truck
    3.
    发明申请
    Hydraulic Oil Cylinder, Correlative Device Thereof, Hydraulic Cushion System, Excavator And Concrete Pump Truck 审中-公开
    液压油缸,相关设备,液压缓冲系统,挖掘机和混凝土泵车

    公开(公告)号:US20130209296A1

    公开(公告)日:2013-08-15

    申请号:US13811636

    申请日:2011-06-21

    IPC分类号: F04B7/04

    CPC分类号: F04B7/04 F15B15/222

    摘要: A hydraulic oil cylinder has a cushion collar, which is sleeved in the cushion position of a piston rod and can axially slide along the piston rod. In the oil cylinder cavity between an oil hole of the rod cavity and the terminal position of the piston end surface of the rod cavity during the piston extending movement, a sealing end surface of the rod cavity is provided, which can block the cushion collar and contact with the first end surface of the cushion collar to form a sealing surface. At least a throttle oil channel is provided between the cushion collar and the piston rod.

    摘要翻译: 液压油缸具有缓冲套环,其套在活塞杆的缓冲位置,并可沿活塞杆轴向滑动。 在活塞延伸运动期间,在杆腔的油孔和杆腔的活塞端面的终端位置之间的油缸腔中设置有杆腔的密封端面,其可以阻塞缓冲环和 与缓冲套环的第一端面接触以形成密封表面。 在缓冲套环和活塞杆之间至少设有节流油通道。

    Hydraulic oil cylinder and related equipments, hydraulic buffer system, excavator and concrete pump truck
    4.
    发明授权
    Hydraulic oil cylinder and related equipments, hydraulic buffer system, excavator and concrete pump truck 有权
    液压油缸及相关设备,液压缓冲系统,挖掘机和混凝土泵车

    公开(公告)号:US09394927B2

    公开(公告)日:2016-07-19

    申请号:US13811244

    申请日:2011-06-21

    IPC分类号: F15B15/20 F15B15/22

    CPC分类号: F15B15/20 F15B15/222

    摘要: A hydraulic oil cylinder has a buffer sleeve (4), a rodless cavity sealing end face (1-2) and at least one throttle oil channel (3-1). The buffer sleeve (4) is sleeved on an additional section (3a) of a piston rod in the rodless cavity (2-2) and axially slidable along the additional section (3a) of the piston rod. The rodless cavity sealing end face (1-2) is provided in an oil cylinder cavity between a rodless cavity oil passing hole (1-1) and the termination of the rodless cavity end face of the piston for the retraction process of the piston rod (3), and enables to block the buffer sleeve (4) and attach to the first end surface (4-1) of the buffer sleeve thereby forming a sealing surface.

    摘要翻译: 液压油缸具有缓冲套筒(4),无杆腔密封端面(1-2)和至少一个节气门油通道(3-1)。 缓冲套筒(4)套在无杆空腔(2-2)中的活塞杆的附加部分(3a)上,并且沿着活塞杆的附加部分(3a)可轴向滑动。 无杆腔密封端面(1-2)设置在无杆空腔通油孔(1-1)和活塞的无杆腔端面的终端之间的油缸腔中,用于活塞杆的回缩过程 (3),并且能够阻挡缓冲套筒(4)并附接到缓冲套筒的第一端面(4-1),从而形成密封表面。

    Biosensors including metallic nanocavities
    5.
    发明申请
    Biosensors including metallic nanocavities 有权
    生物传感器包括金属纳米孔

    公开(公告)号:US20100256016A1

    公开(公告)日:2010-10-07

    申请号:US11497581

    申请日:2006-08-02

    摘要: A biomolecular assay includes a substrate with a metallic layer on at least one surface thereof. The metallic film includes nanocavities. The nanocavities are configured to enhance signals that are representative of the presence or amount of one or more analytes in a sample or sample solution, and may be configured to enhance the signal by a factor of about two or more or by a factor of about three or more. Such signal enhancement may be achieved with nanocavities that are organized in an array, randomly positioned nanocavities, or nanocavities that are surrounded by increased surface area features, such as corrugation or patterning, or nanocavities that have quadrilateral or triangular shapes with tailored edge lengths, or with a plurality of nanoparticles. Methods for fabricating biomolecular substrates and assay techniques in which such biomolecular substrates are used are also disclosed.

    摘要翻译: 生物分子测定包括在其至少一个表面上具有金属层的基底。 金属膜包括纳米孔。 纳米结构被配置为增强代表样品或样品溶液中一种或多种分析物的存在或量的信号,并且可以被配置为将信号增强约两个或更多个因子或约三分之一 或者更多。 这种信号增强可以通过以阵列,随机定位的纳米空间或纳米空间组织的纳米腔实现,纳米空间被增加的表面积特征(例如波纹或图案化)或具有具有定制的边缘长度的四边形或三角形形状的纳米腔包围,或 与多个纳米颗粒。 还公开了制备生物分子底物的方法和其中使用这种生物分子底物的测定技术。

    Hydraulic oil cylinder, hydraulic cushion system, excavator and concrete pump truck

    公开(公告)号:US09863407B2

    公开(公告)日:2018-01-09

    申请号:US13811594

    申请日:2011-06-21

    IPC分类号: F15B15/22 F04B1/00

    CPC分类号: F04B1/00 F15B15/222

    摘要: The present application discloses a hydraulic oil cylinder, of which a piston rod (3) is provided with at least two cushion collars (4, 11) which are axially slidable along the piston rod (3). Axial throttle oil channels (301a, 301b) are provided between the cushion collars (4, 11) and a piston (6). A first cushion collar (4) is provided with a sealing end face (401), and an end cover of a rod cavity (1) is provided with a sealing end face (101). The sealing end face (401) of the first cushion collar contacts with the sealing end face (101) of the end cover of the rod cavity to form a seal. Hydraulic oil within the rod cavity is discharged through one axial throttle oil channel (301a) to an oil passage B.

    Hydraulic Oil Cylinder and Related Equipments, Hydraulic Buffer System, Excavator and Concrete Pump Truck
    7.
    发明申请
    Hydraulic Oil Cylinder and Related Equipments, Hydraulic Buffer System, Excavator and Concrete Pump Truck 有权
    液压油缸及相关设备,液压缓冲系统,挖掘机和混凝土泵车

    公开(公告)号:US20130199367A1

    公开(公告)日:2013-08-08

    申请号:US13811244

    申请日:2011-06-21

    IPC分类号: F15B15/20

    CPC分类号: F15B15/20 F15B15/222

    摘要: A hydraulic oil cylinder has a buffer sleeve (4), a rodless cavity sealing end face (1-2) and at least one throttle oil channel (3-1). The buffer sleeve (4) is sleeved on an additional section (3a) of a piston rod in the rodless cavity (2-2) and axially slidable along the additional section (3a) of the piston rod. The rodless cavity sealing end face (1-2) is provided in an oil cylinder cavity between a rodless cavity oil passing hole (1-1) and the termination of the rodless cavity end face of the piston for the retraction process of the piston rod (3), and enables to block the buffer sleeve (4) and attach to the first end surface (4-1) of the buffer sleeve thereby forming a sealing surface.

    摘要翻译: 液压油缸具有缓冲套筒(4),无杆腔密封端面(1-2)和至少一个节气门油通道(3-1)。 缓冲套筒(4)套在无杆空腔(2-2)中的活塞杆的附加部分(3a)上,并且沿着活塞杆的附加部分(3a)可轴向滑动。 无杆腔密封端面(1-2)设置在无杆空腔通油孔(1-1)和活塞的无杆腔端面的终端之间的油缸腔中,用于活塞杆的回缩过程 (3),并且能够阻挡缓冲套筒(4)并附接到缓冲套筒的第一端面(4-1),从而形成密封表面。

    Biosensors including metallic nanocavities
    8.
    发明授权
    Biosensors including metallic nanocavities 有权
    生物传感器包括金属纳米孔

    公开(公告)号:US09012207B2

    公开(公告)日:2015-04-21

    申请号:US11497581

    申请日:2006-08-02

    摘要: A biomolecular assay includes a substrate with a metallic layer on at least one surface thereof. The metallic film includes nanocavities. The nanocavities are configured to enhance signals that are representative of the presence or amount of one or more analytes in a sample or sample solution, and may be configured to enhance the signal by a factor of about two or more or by a factor of about three or more. Such signal enhancement may be achieved with nanocavities that are organized in an array, randomly positioned nanocavities, or nanocavities that are surrounded by increased surface area features, such as corrugation or patterning, or nanocavities that have quadrilateral or triangular shapes with tailored edge lengths, or with a plurality of nanoparticles. Methods for fabricating biomolecular substrates and assay techniques in which such biomolecular substrates are used are also disclosed.

    摘要翻译: 生物分子测定包括在其至少一个表面上具有金属层的基底。 金属膜包括纳米孔。 纳米结构被配置为增强代表样品或样品溶液中一种或多种分析物的存在或量的信号,并且可以被配置为将信号增强约两个或更多个因子或约三分之一 或者更多。 这种信号增强可以通过以阵列,随机定位的纳米空间或纳米空间组织的纳米腔实现,纳米空间被增加的表面积特征(例如波纹或图案化)或具有具有定制的边缘长度的四边形或三角形形状的纳米腔包围,或 与多个纳米颗粒。 还公开了制备生物分子底物的方法和其中使用这种生物分子底物的测定技术。

    HYDRAULIC OIL CYLINDER, HYDRAULIC CUSHION SYSTEM, EXCAVATOR AND CONCRETE PUMP TRUCK
    9.
    发明申请
    HYDRAULIC OIL CYLINDER, HYDRAULIC CUSHION SYSTEM, EXCAVATOR AND CONCRETE PUMP TRUCK 有权
    液压油缸,液压缸系统,挖掘机和混凝土泵车

    公开(公告)号:US20130255245A1

    公开(公告)日:2013-10-03

    申请号:US13811594

    申请日:2011-06-21

    IPC分类号: F04B1/00

    CPC分类号: F04B1/00 F15B15/222

    摘要: The present application discloses a hydraulic oil cylinder, of which a piston rod (3) is provided with at least two cushion collars (4, 11) which are axially slidable along the piston rod (3). Axial throttle oil channels (301a, 301b) are provided between the cushion collars (4, 11) and a piston (6). A first cushion collar (4) is provided with a sealing end face (401), and an end cover of a rod cavity (1) is provided with a sealing end face (101). The sealing end face (401) of the first cushion collar contacts with the sealing end face (101) of the end cover of the rod cavity to form a seal. Hydraulic oil within the rod cavity is discharged through one axial throttle oil channel (301a) to an oil passage B. A second cushion collar (11) is provided with a sealing end face (111), and an end cover of a rodless cavity (12) is provided with a sealing end face (121). The sealing end face (111) of the second cushion collar contacts with the sealing end face (121) of the end cover of the rodless cavity to form a seal. Hydraulic oil within the rodless cavity is discharged through another axial throttle oil channel (301b) to another oil passage A. The hydraulic oil cylinder can operate reliably and achieve a buffer function in a large load, high frequency operating condition, and thus has a longer operating life. And also, precision requirements for manufacturing the hydraulic oil cylinder are low, thereby facilitating production of the hydraulic oil cylinder. The present application also discloses a hydraulic cushion system, an excavator and a concrete pump truck which use the above hydraulic oil cylinder.

    摘要翻译: 本申请公开了一种液压油缸,其中活塞杆(3)设置有沿着活塞杆(3)可轴向滑动的至少两个缓冲套环(4,11)。 轴向节流油通道(301a,301b)设置在缓冲套环(4,11)和活塞(6)之间。 第一缓冲环(4)设置有密封端面(401),并且杆腔(1)的端盖设置有密封端面(101)。 第一缓冲衬套的密封端面(401)与杆腔的端盖的密封端面(101)接触以形成密封。 杆腔内的液压油通过一个轴向节流油通道(301a)排放到油通道B上。第二缓冲套环(11)设有密封端面(111)和无杆空腔的端盖 12)设置有密封端面(121)。 第二缓冲衬套的密封端面(111)与无杆腔的端盖的密封端面(121)接触以形成密封。 无杆空腔内的液压油通过另一个轴向节流油通道(301b)排放到另一个油路A.液压油缸可以可靠运行,并在大负荷,高频运行状态下实现缓冲功能,从而具有更长的 使用寿命。 另外,液压油缸的制造精度要求低,从而便于生产液压油缸。 本申请还公开了使用上述液压油缸的液压缓冲系统,挖掘机和混凝土泵车。

    Correction of optical metrology for focus offset
    10.
    发明授权
    Correction of optical metrology for focus offset 有权
    光学测量校正用于对焦偏移

    公开(公告)号:US07450225B1

    公开(公告)日:2008-11-11

    申请号:US11735266

    申请日:2007-04-13

    IPC分类号: G01J1/00 G01B9/00

    CPC分类号: G01B11/0625

    摘要: A metrology system performs optical metrology while holding a sample with an unknown focus offset. The measurements are corrected by fitting for the focus offset in a model regression analysis. Focus calibration is used to determine the optical response of the metrology device to the focus offset. The modeled data is adjusted based on the optical response to the focus offset and the model regression analysis fits for the focus offset as a variable parameter along with the sample characteristics that are to be measured. Once an adequate fit is determined, the values of the sample characteristics to be measured are reported. The adjusted modeled data may be stored in a library, or alternatively, modeled data may be adjusted in real-time.

    摘要翻译: 测量系统执行光学测量,同时保持未知聚焦偏移的样本。 通过在模型回归分析中拟合聚焦偏移来校正测量值。 聚焦校准用于确定测量设备对焦偏移的光学响应。 基于对焦偏移的光学响应来调整建模数据,并且模型回归分析适合于将偏移量作为可变参数以及要测量的样本特征。 一旦确定了适当的拟合,就报告要测量的样品特性的值。 经调整的建模数据可以存储在库中,或者可以实时调整建模的数据。