公开(公告)号：US06054029A

公开(公告)日：2000-04-25

申请号：US803842

申请日：1997-02-24

申请人： Stefan Kempf ,  Eggo Sichmann

发明人： Stefan Kempf ,  Eggo Sichmann

IPC分类号： C23C14/50 ,  C23C14/56 ,  H01L21/00 ,  H01L21/687 ,  C23C14/34

CPC分类号： H01L21/67161 ,  C23C14/505 ,  C23C14/568 ,  H01L21/67196 ,  H01L21/68707

摘要： Apparatus 1 for gripping, holding and/or transporting substrates 2, components of which are an entry station 3 and several processing station 4 to 9 arranged in series or in a circle for receiving the substrate 2, to which the substrate 2 is passed on by means of a transporting device 1 disposed on gripper arms 13 and having gripper elements 24, or a turntable 12, and subsequently is deposited in one or several deposit stations 14, wherein several gripper arms 13 can be shifted in the horizontal and/or vertical direction by means of the turntable 12. Some of the gripper elements 24 can be shifted together in the horizontal or vertical direction by means of the turntable 12 and at least one gripper arm 13' can be shifted in at least one of the movement directions independently of the remaining gripper arms 13.

摘要翻译： 用于夹持，保持和/或传送基板2的装置1，其部件是入口台3和几个串联布置或圆形的处理台4至9，用于接收基板2，基板2通过 设置在夹持臂13上并具有夹持元件24或转盘12的输送装置1的装置，随后沉积在一个或多个沉积站14中，其中若干个夹臂13能够在水平和/或垂直方向上移动 通过转盘12，一些夹持元件24可以通过转台12在水平或垂直方向上一起移动，并且至少一个夹持臂13'可以在至少一个移动方向上移动，独立于 剩余的夹臂13。

公开(公告)号：US20110195199A1

公开(公告)日：2011-08-11

申请号：US12737900

申请日：2009-08-26

申请人： Marco Huber ,  Wolfgang Becker ,  Patrick Binkowska ,  Bemhard Cord ,  Oliver Hohn ,  Stefan Kempf ,  Michael Reising ,  Björn Roos ,  Edgar Rüth ,  Eggo Sichmann ,  Peter Wohlfart

发明人： Marco Huber ,  Wolfgang Becker ,  Patrick Binkowska ,  Bemhard Cord ,  Oliver Hohn ,  Stefan Kempf ,  Michael Reising ,  Björn Roos ,  Edgar Rüth ,  Eggo Sichmann ,  Peter Wohlfart

IPC分类号： H01L31/18 ,  C23C16/50 ,  C23C16/44

CPC分类号： H01L21/67213 ,  C23C16/54 ,  H01L21/67167

摘要： The invention provides a coating system for coating substrates in a cyclic mode. The process stations of the coating system are disposed in a circular fashion. A handling mechanism is provided for transferring the substrates between the process stations. The process stations comprise a lock for loading and unloading the substrates, at least two coating chambers, each of which comprises a plasma source for stationary coating of the substrate, and preferably a heating station.

摘要翻译： 本发明提供了一种用于以循环模式涂覆基材的涂布系统。 涂布系统的处理站以圆形方式设置。 提供了处理机构，用于在处理站之间传送基板。 处理站包括用于装载和卸载衬底的锁，至少两个涂覆室，每个涂覆室包括用于衬底的固定涂覆的等离子体源，并且优选地为加热站。

公开(公告)号：US5612068A

公开(公告)日：1997-03-18

申请号：US350684

申请日：1994-12-07

申请人： Stefan Kempf ,  Eggo Sichmann

发明人： Stefan Kempf ,  Eggo Sichmann

IPC分类号： B65G49/07 ,  G11B7/26 ,  H01L21/00 ,  H01L21/677 ,  B29C45/06

CPC分类号： H01L21/67161 ,  G11B7/265 ,  H01L21/67196 ,  H01L21/68764 ,  H01L21/68771 ,  Y10S414/141 ,  Y10S425/81

摘要： In an apparatus for the transfer of substrates (9) from an initial station (3) through several process stations (4 to 8) and back to this initial station (3), manipulators (10 to 14) having pivoting gripper arms (15 to 19) and carousel transfer systems (20,21) for the transfer of the substrates (9) are provided. One of the carousels (20) provided with substrate holders (22) cooperates both with a two-armed first manipulator (11) and with a two-armed second manipulator (10). The second manipulator (10) lifts several substrates (9) simultaneously from the first carousel (20) in one period of time and feeds them to the corresponding second process station (5) which is configured for the simultaneous processing of several substrates. The second manipulator (11), in the same period of time, lifts one substrate (9) at a time from the first carousel (20) in several swings of its two gripper arms (16,16') and feeds them to the first process station (4) for the processing of one substrate at a time and carries them back from this process station (4) onto the first carousel (20). Two injection molding machines can be associated with the first carousel (20) and can feed the substrates directly through an additional manipulator.

摘要翻译： 在用于将基板（9）从初始台（3）传送到几个处理站（4至8）并且返回到该初始站（3）的装置中，具有枢转夹持臂（15至15）的操纵器（10至14） 提供用于传送基板（9）的转盘传送系统（20,21）。 设置有基板保持器（22）的转盘（20）之一与双臂第一操纵器（11）和双臂第二操纵器（10）配合。 第二操纵器（10）在一段时间内同时从第一转盘（20）提升多个基板（9）并将其馈送到相应的第二处理站（5），该第二处理站被配置为同时处理若干基板。 第二操纵器（11）在相同的时间段内，在其两个夹持臂（16,16'）的几个摆动中一次从第一转盘（20）提起一个基板（9）并将它们馈送到第一 处理站（4），用于一次处理一个基板，并将其从该处理站（4）返回到第一转盘（20）上。 两个注塑机可以与第一转盘（20）相关联，并且可以通过附加的操纵器直接供给基板。

公开(公告)号：US20120027543A1

公开(公告)日：2012-02-02

申请号：US13138713

申请日：2010-04-23

申请人： Michael Reising ,  Stefan Kempf

发明人： Michael Reising ,  Stefan Kempf

IPC分类号： B65G49/05 ,  H01L21/683 ,  H01L21/677

CPC分类号： H01L21/67751 ,  H01L21/67126 ,  H01L21/6719 ,  H01L21/67201

摘要： The invention describes a method and a device for introducing and removing substrates. Substrates (5) are transported into a lock (2) by a transport means (4). A collection container (3) is located in said lock below the substrates (5) for collecting possible substrate fragments (19). The substrates (5) are removed together with the collection container (3) and the lock cover (18) once the lock (2) has been flooded. The lock cover (18) and the collection container (3) form an almost closed box around the substrates (5). After the substrates (5) have been replaced and the collection container (3) has been emptied, the new substrates (5) are introduced together with the collection container. All the steps are carried out in the machine cycle to ensure an effective production process.

摘要翻译： 本发明描述了一种用于引入和去除衬底的方法和装置。 基板（5）由输送装置（4）输送到锁（2）中。 收集容器（3）位于基底（5）下面的所述锁中，用于收集可能的底物碎片（19）。 一旦锁（2）淹没，基板（5）与收集容器（3）和锁盖（18）一起被移除。 锁定盖（18）和收集容器（3）围绕基板（5）形成几乎闭合的盒子。 在更换基板（5）并且已经排空收集容器（3）之后，将新的基板（5）与收集容器一起引入。 所有步骤都在机器周期中进行，以确保有效的生产过程。

公开(公告)号：US5451130A

公开(公告)日：1995-09-19

申请号：US267793

申请日：1994-06-28

申请人： Stefan Kempf

发明人： Stefan Kempf

IPC分类号： G11B17/24 ,  B65G47/80 ,  B65G47/90 ,  B65G49/07 ,  C23C14/56 ,  H01L21/687 ,  B65G57/00

CPC分类号： C23C14/56 ,  H01L21/68707 ,  Y10S414/139 ,  Y10S414/141

摘要： A first turntable (4) has a plurality of posts (6) equidistantly distributed and arranged in a circle on the turntable (4), wherein a plurality of substrates (7) can be stacked on each post (6). Stationary loading (9) and unloading stations (10 11) are provided and the distance between each pair of adjacent stations (9, 10, 11) corresponds to the distance between each pair of adjacent posts (6), the first turntable being rotated stepwise so that each post can be stopped successively at adjacent stations. A second turntable (12) is rotated stepwise through a loading station (15), a transfer station (16) and an unloading station (17). A loading arm transfers substrates from the loading station of the first turntable to the loading station of the second turntable, a transfer arm transfers the substrates from the transfer station to a coating station, and an unloading arm transfers coated substrates from the unloading station of the second turntable to either of the two unloading stations of the first turntable. A control system (33) includes a sensor (29), a counting device (30) and a servo motor (31), the servo motor (31) driving the unloading arm (21), the unloading station which receives a substrate being selected by the control system (33).

摘要翻译： 第一转盘（4）具有多个等距分布并且设置在转台（4）上的圆周上的柱（6），其中多个基板（7）可以堆叠在每个支柱（6）上。 提供固定装载（9）和卸载站（10 11），并且每对相邻站（9,10,11）之间的距离对应于每对相邻站（6）之间的距离，第一转台逐步旋转 使得每个帖子可以在相邻站点连续停止。 第二转台（12）通过装载站（15），转运站（16）和卸载站（17）逐步旋转。 装载臂将基板从第一转台的装载站传送到第二转台的装载站，传送臂将传送站从传送站传送到涂布站，卸载臂将涂覆的基板从卸载站 第二转盘到第一转盘的两个卸载站中的任一个。 控制系统（33）包括传感器（29），计数装置（30）和伺服电动机（31），驱动卸载臂（21）的伺服电动机（31），接收正在选择的衬底的卸载站 通过控制系统（33）。

公开(公告)号：US08365579B2

公开(公告)日：2013-02-05

申请号：US12733991

申请日：2008-09-24

申请人： Kai Dierssen ,  Stefan Kempf ,  Jochen Goebels ,  Federico Buganza ,  Anton Kantschar ,  Frédéric Gabel ,  Carsten Kluth ,  Oskar Torno ,  Werner Haeming ,  Robert Sloboda ,  Jan Boettger ,  Rudi Eichhorn ,  Andreas Meinken

发明人： Kai Dierssen ,  Stefan Kempf ,  Jochen Goebels ,  Federico Buganza ,  Anton Kantschar ,  Frédéric Gabel ,  Carsten Kluth ,  Oskar Torno ,  Werner Haeming ,  Robert Sloboda ,  Jan Boettger ,  Rudi Eichhorn ,  Andreas Meinken

IPC分类号： G01L23/22

CPC分类号： G01L23/225 ,  F02D35/027

摘要： An apparatus for furnishing an amplified sensor signal of a knock sensor, encompassing an analog amplifier for amplifying the sensor signal in accordance with a first definable gain factor; an analog/digital converter for digitizing the amplified sensor signal into a digitized sensor signal; a digital amplifier for amplifying the digitized sensor signal in accordance with a second definable gain factor; and a control unit in order to furnish the first and the second gain factor as a function of a baseline sound level of the sensor signal, the baseline sound level corresponding to the component of the solid-borne sound signal generated in normal operation without knocking.

摘要翻译： 一种用于提供爆震传感器的放大的传感器信号的装置，包括用于根据第一可定义增益因子放大传感器信号的模拟放大器; 用于将放大的传感器信号数字化为数字化传感器信号的模拟/数字转换器; 数字放大器，用于根据第二可定义增益因子放大数字化的传感器信号; 以及控制单元，以便提供作为传感器信号的基线声级的函数的第一增益因子和第二增益因子，所述基线声级与在正常操作中产生的固体声音信号的分量相对应而不发生敲击。

公开(公告)号：US20120027952A1

公开(公告)日：2012-02-02

申请号：US13138714

申请日：2010-04-23

申请人： Michael Reising ,  Stefan Kempf ,  Georg Roth

发明人： Michael Reising ,  Stefan Kempf ,  Georg Roth

IPC分类号： B65G49/00 ,  B65G29/00 ,  C23C16/513 ,  B65G49/05

CPC分类号： H01L21/67126 ,  H01L21/6719 ,  H01L21/67742

摘要： The invention describes a device for transporting a substrate (5) into a working area (2, 3, 22) which can be temporarily separated in a vacuum-tight manner, and a corresponding method. A transport means (4) transports a substrate (5) in the plane (XY) to a defined working area (2, 3, 22) of a chamber (1). The transport means (4) has a deflectable sealing frame (6) which can be moved in a Z-direction perpendicular with respect to the XY-plane. The sealing frame (6) has two opposing sealing surfaces (10, 11) in the Z-direction. By pressing a closure means (16, 21, 24) against a first sealing surface (10, 11) and thus pressing the second sealing surface (11, 10) against a chamber wall (32, 31), the space of the working area (2, 3, 22) of the chamber (1) can be sealed.

摘要翻译： 本发明描述了一种用于将基板（5）输送到可以以真空密封方式临时分离的工作区域（2,3,22）的装置和相应的方法。 传送装置（4）将平面（XY）中的基板（5）传送到室（1）的限定的工作区域（2,3,22）。 传送装置（4）具有可偏转的密封框架（6），其可相对于XY平面垂直于Z方向移动。 密封框架（6）在Z方向上具有两个相对的密封面（10,11）。 通过将闭合装置（16,21,24）压靠在第一密封表面（10,11）上，从而将第二密封表面（11,10）压靠在室壁（32,31）上，工作区域的空间 （1）的腔室（2,3,22）可被密封。

公开(公告)号：US20110030452A1

公开(公告)日：2011-02-10

申请号：US12733991

申请日：2008-09-24

申请人： Kai Dierssen ,  Stefan Kempf ,  Jochen Goebels ,  Federico Buganza ,  Anton Kantschar ,  Frédéric Gabel ,  Carsten Kluth ,  Oskar Torno ,  Werner Haeming ,  Robert Sloboda ,  Jan Boettger ,  Rudi Eichhorn ,  Andreas Meinken

发明人： Kai Dierssen ,  Stefan Kempf ,  Jochen Goebels ,  Federico Buganza ,  Anton Kantschar ,  Frédéric Gabel ,  Carsten Kluth ,  Oskar Torno ,  Werner Haeming ,  Robert Sloboda ,  Jan Boettger ,  Rudi Eichhorn ,  Andreas Meinken

IPC分类号： G01L23/22 ,  H03G3/30

CPC分类号： G01L23/225 ,  F02D35/027

摘要： An apparatus for furnishing an amplified sensor signal of a knock sensor, encompassing an analog amplifier for amplifying the sensor signal in accordance with a first definable gain factor; an analog/digital converter for digitizing the amplified sensor signal into a digitized sensor signal; a digital amplifier for amplifying the digitized sensor signal in accordance with a second definable gain factor; and a control unit in order to furnish the first and the second gain factor as a function of a baseline sound level of the sensor signal, the baseline sound level corresponding to the component of the solid-borne sound signal generated in normal operation without knocking.

摘要翻译： 一种用于提供爆震传感器的放大的传感器信号的装置，包括用于根据第一可定义增益因子放大传感器信号的模拟放大器; 用于将放大的传感器信号数字化为数字化传感器信号的模拟/数字转换器; 数字放大器，用于根据第二可定义增益因子放大数字化的传感器信号; 以及控制单元，以便提供作为传感器信号的基线声级的函数的第一增益因子和第二增益因子，所述基线声级与在正常操作中产生的固体声音信号的分量相对应而不发生敲击。

公开(公告)号：US5913653A

公开(公告)日：1999-06-22

申请号：US833987

申请日：1997-04-11

申请人： Stefan Kempf

发明人： Stefan Kempf

IPC分类号： B65G49/07 ,  C23C14/50 ,  C23C14/56 ,  B65G65/02

CPC分类号： C23C14/50 ,  C23C14/56 ,  Y10S414/121

摘要： Apparatus for transporting substrates to and from at least one device (1) for holding substrates (2), the at least one device having a substrate support (5) disposed in a vacuum chamber (4, 4', 4"). The apparatus includes at least one displaceably disposed gripper (75), which can be displaced by a mechanical and/or electro-magnetically or magnetically operating positioning device (130) between a substrate gripping position and a substrate release position, and a centering device (157, 157', 161) for centering a substrate relative to the substrate support in conjunction with transport of the substrate by the apparatus to the substrate support.

摘要翻译： 用于将基板输送到至少一个用于保持基板（2）的装置（1）的装置，所述至少一个装置具有设置在真空室（4,4'，4“）中的基板支撑件（5）。 该装置包括至少一个可置换地布置的夹持器（75），其可以通过机械和/或电磁或磁力操作的定位装置（130）在基板夹持位置和基板释放位置之间移位，并且定心装置 157,157'，161），用于将衬底相对于衬底支架定中心，同时将衬底通过该装置运送到衬底支架。

公开(公告)号：US4886592A

公开(公告)日：1989-12-12

申请号：US196724

申请日：1988-05-20

申请人： Friedrich Anderle ,  Dan L. Costescu ,  Stefan Kempf ,  Emmerich Novak ,  Jaroslav Zejda

发明人： Friedrich Anderle ,  Dan L. Costescu ,  Stefan Kempf ,  Emmerich Novak ,  Jaroslav Zejda

IPC分类号： C23C14/50 ,  C23C14/56 ,  H01L21/00 ,  H01L21/687

CPC分类号： H01L21/6719 ,  C23C14/505 ,  C23C14/566 ,  C23C14/568 ,  H01L21/67126 ,  H01L21/6715 ,  H01L21/68764 ,  H01L21/68771 ,  Y10S414/139

摘要： A rotatable substrate holder (6) which has a plurality of substrate pickups in a circular arrangement at equal distances apart is disposed in a vacuum chamber (1). A corresponding number of substrates are driven stepwise on a circular path from an air lock station (8, 9) through at least one coating station (10, 11) to the air lock station. To increase the throughput of substrates, the vacuum chamber (1) has two air lock stations (8, 9) and two coating stations (10, 11) one following the other. The step size of the drive (36) on the one hand, and the angular position of each coating station (10 and 11, respectively) with respect to the air lock station associated with it (8 and 9, respectively) with reference to the axis of rotation of the substrate holder (6) on the other hand, are selected such that one and the same coating station (10 and 11, respectively), through the step-wise movement of a particular substrate pickup (63), is associated in each case with one and the same air lock station (8 and 9, respectively).

摘要翻译： 在真空室（1）中设置有可旋转的基板保持器（6），该基板保持器（6）具有多个间隔开的圆形布置的基板拾取器。 相应数量的基板在从空气锁定站（8,9）通过至少一个涂布站（10,11）到空气锁定站的圆形路径上逐步驱动。 为了增加基板的生产量，真空室（1）具有两个紧邻的空气锁定站（8,9）和两个涂覆站（10,11）。 一方面驱动器（36）的台阶大小以及相对于与其相关联的空气锁定站（分别为8和9）的每个涂覆站（分别为10和11）的角位置参考 另一方面，衬底保持器（6）的旋转轴线被选择成使得通过特定衬底拾取器（63）的逐步移动的相同的涂覆站（10和11）分别相关联 在每种情况下都有同一个空气锁定站（分别为8和9）。