Microwave plasma generator
    9.
    发明授权
    Microwave plasma generator 有权
    微波等离子发生器

    公开(公告)号:US07381290B2

    公开(公告)日:2008-06-03

    申请号:US10491776

    申请日:2002-10-25

    IPC分类号: C23C16/00 C23F1/00 H01L21/306

    摘要: A microwave plasma generator including field-enhancing electrodes consisting of opposed laminae (108,109) with a gap (110) between them orthogonal to the direction of propagation through the plasma generator of microwave radiation. Gas inlet (106) and outlet (107) ports are arranged so that a gaseous medium to be excited into the plasma state passes through the gap (110).

    摘要翻译: 一种微波等离子体发生器,其包括由相对的薄片(108,109)组成的场增强电极,其间具有与通过微波辐射的等离子体发生器的传播方向正交的间隙(110)。 气体入口(106)和出口(107)端口被布置成使得被激发成等离子体状态的气态介质通过间隙(110)。

    Plasma enhanced gas reactor
    10.
    发明授权
    Plasma enhanced gas reactor 有权
    等离子体增强气体反应器

    公开(公告)号:US06863870B2

    公开(公告)日:2005-03-08

    申请号:US10363414

    申请日:2001-08-22

    IPC分类号: H05H1/46 B01J19/08 H01J37/32

    摘要: A reaction chamber (12, 49) is adapted to be coupled to a source of microwave radiation. A pair of opposed field enhancing electrodes (18, 21; 62, 63) concentrate microwave energy so as to form plasma in a localised region between the electrodes. Gas passages are arranged for passing a gaseous medium into and out of the chamber so that the gaseous medium passes through the said localised region of plasma. The electrodes comprise electrically conducting tubes (18, 21; 62, 63) held in electrode holders (17, 19; 53, 54) located in the chamber wall, the electrode tubes being removable and replaceable from outside of the apparatus.

    摘要翻译: 反应室(12,49)适于耦合到微波辐射源。 一对相对的场增强电极(18,21,62,63)集中微波能量,以在电极之间的局部区域中形成等离子体。 气体通道布置成使气体介质通入和流出室,使得气态介质通过所述等离子体的局部区域。 电极包括保持在位于室壁中的电极保持器(17,19; 53,54)中的导电管(18,21; 62,63),电极管可从设备的外部移除和更换。