Method of fabricating microlens, and depth sensor including microlens
    7.
    发明授权
    Method of fabricating microlens, and depth sensor including microlens 有权
    微透镜的制造方法,以及微透镜的深度传感器

    公开(公告)号:US09029785B2

    公开(公告)日:2015-05-12

    申请号:US13407879

    申请日:2012-02-29

    摘要: A method of fabricating a microlens includes forming layer of photoresist on a substrate, patterning the layer of photoresist, and then reflowing the photoresist pattern. The layer of photoresist is formed by coating the substrate with liquid photoresist whose viscosity is 150 to 250 cp. A depth sensor includes a substrate and photoelectric conversion elements at an upper portion of the substrate, a metal wiring section disposed on the substrate, an array of the microlenses for focusing incident light as beams onto the photoelectric conversion elements and which beams avoid the wirings of the metal wiring section. The depths sensor also includes a layer presenting a flat upper surface on which the microlenses are formed. The layer may be a dedicated planarization layer or an IR filter, interposed between the microlenses and the metal wiring section.

    摘要翻译: 制造微透镜的方法包括在衬底上形成光致抗蚀剂层,图案化光致抗蚀剂层,然后回流光致抗蚀剂图案。 通过用粘度为150至250cp的液体光致抗蚀剂涂覆基底来形成光致抗蚀剂层。 深度传感器包括基板和在基板的上部的光电转换元件,设置在基板上的金属布线部分,用于将入射光聚焦到光电转换元件上的微透镜阵列,并且这些光束避免了布线 金属配线部。 深度传感器还包括呈现其上形成有微透镜的平坦上表面的层。 该层可以是介于微透镜和金属布线部之间的专用平坦化层或IR滤光器。

    High density data storage device and data recording or reproduction method using the same
    8.
    发明授权
    High density data storage device and data recording or reproduction method using the same 失效
    高密度数据存储设备和使用其的数据记录或再现方法

    公开(公告)号:US07911928B2

    公开(公告)日:2011-03-22

    申请号:US11710430

    申请日:2007-02-26

    IPC分类号: G11B9/00

    摘要: A high density data storage device and a data recording or reproduction method using the same, which can record or reproduce high density data without contact, thereby preventing data errors due to contact are provided. The high density data storage device uses a recording medium and a probe. The recording medium is a thin film made from phase change material or oxide resistance change material, and the probe has a tip formed in a lower portion thereof, which moves with a spacing from the top of the recording medium. Further, recording or reproduction of data is performed through electric field or heat emission, which is generated in the tip of the probe, without direct contact between the recording medium and the probe, so that it is possible to remove instability caused by contact between the recording medium and the probe and to stably record or reproduce data in or from the recording medium without errors.

    摘要翻译: 提供一种高密度数据存储装置和使用该高密度数据存储装置的数据记录或再现方法,其可以不接触地记录或再现高密度数据,从而防止由于接触而引起的数据错误。 高密度数据存储装置使用记录介质和探针。 记录介质是由相变材料或氧化物电阻改变材料制成的薄膜,并且探针具有形成在其下部的尖端,其与记录介质的顶部间隔地移动。 此外,通过在探针的尖端中产生的电场或发热进行数据的记录或再现,而不会在记录介质和探针之间直接接触,从而可以消除由于接触引起的不稳定性 记录介质和探头,并且在没有错误的情况下稳定地在记录介质中记录或再现数据。

    High density data storage device and data recording or reproduction method using the same
    9.
    发明申请
    High density data storage device and data recording or reproduction method using the same 失效
    高密度数据存储设备和使用其的数据记录或再现方法

    公开(公告)号:US20080049589A1

    公开(公告)日:2008-02-28

    申请号:US11710430

    申请日:2007-02-26

    IPC分类号: G11B9/04

    摘要: A high density data storage device and a data recording or reproduction method using the same, which can record or reproduce high density data without contact, thereby preventing data errors due to contact are provided. The high density data storage device uses a recording medium and a probe. The recording medium is a thin film made from phase change material or oxide resistance change material, and the probe has a tip formed in a lower portion thereof, which moves with a spacing from the top of the recording medium. Further, recording or reproduction of data is performed through electric field or heat emission, which is generated in the tip of the probe, without direct contact between the recording medium and the probe, so that it is possible to remove instability caused by contact between the recording medium and the probe and to stably record or reproduce data in or from the recording medium without errors.

    摘要翻译: 提供一种高密度数据存储装置和使用该高密度数据存储装置的数据记录或再现方法,其可以不接触地记录或再现高密度数据,从而防止由于接触而引起的数据错误。 高密度数据存储装置使用记录介质和探针。 记录介质是由相变材料或氧化物电阻改变材料制成的薄膜,并且探针具有形成在其下部的尖端,其与记录介质的顶部间隔地移动。 此外,通过在探针的尖端中产生的电场或发热进行数据的记录或再现,而不会在记录介质和探针之间直接接触,从而可以消除由于接触引起的不稳定性 记录介质和探头,并且在没有错误的情况下稳定地在记录介质中记录或再现数据。