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公开(公告)号：US20050005583A1
公开(公告)日：2005-01-13
申请号：US10885210
申请日：2004-07-06
CPC分类号： B65G51/03 , B65G37/005 , B65G49/063 , B65G49/065 , B65G2249/02 , Y10S414/135 , Y10S414/136 , Y10S414/139
摘要： It is an object of the present invention to provide a plate-shaped work piece transporting apparatus that has a fan, a dust-removal filter disposed above this fan, and a plate-shape porous member disposed above the dust-removal filter. By forming a chamber in which air can accumulate between the porous member and the dust-removal filter, it is possible to suppress air pulsations. Further, by providing support members on the porous member, the plate-shaped work piece can be supported and damage thereto can be avoided when the plate-shaped work piece, which is supported by air from the fan, drops to below a set height.
摘要翻译： 本发明的目的是提供一种板状工件输送装置，其具有设置在风扇上方的风扇，除尘过滤器和设置在除尘过滤器上方的板状多孔体。 通过形成空气可以在多孔构件和除尘过滤器之间积聚的室，可以抑制空气脉动。 此外，通过在多孔构件上设置支撑构件，当由来自风扇的空气支撑的板状工件下降到设定高度以下时，可以支撑板状工件并且可以避免板损坏。
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公开(公告)号：US07329299B2
公开(公告)日：2008-02-12
申请号：US10885210
申请日：2004-07-06
IPC分类号： B65G49/07
CPC分类号： B65G51/03 , B65G37/005 , B65G49/063 , B65G49/065 , B65G2249/02 , Y10S414/135 , Y10S414/136 , Y10S414/139
摘要： It is an object of the present invention to provide a plate-shaped work piece transporting apparatus that has a fan, a dust-removal filter disposed above this fan, and a plate-shape porous member disposed above the dust-removal filter. By forming a chamber in which air can accumulate between the porous member and the dust-removal filter, it is possible to suppress air pulsations. Further, by providing support members on the porous member, the plate-shaped work piece can be supported and damage thereto can be avoided when the plate-shaped work piece, which is supported by air from the fan, drops to below a set height.
摘要翻译： 本发明的目的是提供一种板状工件输送装置，其具有设置在风扇上方的风扇，除尘过滤器和设置在除尘过滤器上方的板状多孔体。 通过形成空气可以在多孔构件和除尘过滤器之间积聚的室，可以抑制空气脉动。 此外，通过在多孔构件上设置支撑构件，当由来自风扇的空气支撑的板状工件下降到设定高度以下时，可以支撑板状工件并且可以避免板损坏。
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公开(公告)号：US20050002743A1
公开(公告)日：2005-01-06
申请号：US10823408
申请日：2004-04-13
IPC分类号： B65G49/02 , B65G49/06 , H01L21/677
CPC分类号： H01L21/67784 , B65G49/063 , B65G49/065 , B65G49/067 , B65G2249/02 , B65G2249/045
摘要： It is an object to provide a plate-shaped work piece transporting apparatus provided with a blowing mechanism for contactlessly supporting a plate-shaped work piece that is transported, where the blowing mechanism is provided with a dust-removal filter and a blowing mechanism for sending air to the lower surface of the plate-shaped work piece via the dust-removal filter. In a first embodiment, a driving mechanism for contacting the plate-shaped work piece and moving it in the transporting direction is provided.
摘要翻译： 本发明的目的是提供一种板状工件输送装置，其具有用于非接触地支撑被输送的板状工件的吹风机构，在该吹塑机构中，吹送机构设置有除尘过滤器和送风机构 通过除尘过滤器将空气通向板状工件的下表面。 在第一实施例中，提供了用于使板状工件接触并沿传送方向移动的驱动机构。
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公开(公告)号：US07108474B2
公开(公告)日：2006-09-19
申请号：US10823408
申请日：2004-04-13
IPC分类号： B65G49/06
CPC分类号： H01L21/67784 , B65G49/063 , B65G49/065 , B65G49/067 , B65G2249/02 , B65G2249/045
摘要： It is an object to provide a plate-shaped work piece transporting apparatus provided with a blowing mechanism for contactlessly supporting a plate-shaped work piece that is transported, where the blowing mechanism is provided with a dust-removal filter and a blowing mechanism for sending air to the lower surface of the plate-shaped work piece via the dust-removal filter. In a first embodiment, a driving mechanism for contacting the plate-shaped work piece and moving it in the transporting direction is provided.
摘要翻译： 本发明的目的是提供一种板状工件输送装置，其具有用于非接触地支撑被输送的板状工件的吹风机构，在该吹塑机构中，吹送机构设置有除尘过滤器和送风机构 通过除尘过滤器将空气通向板状工件的下表面。 在第一实施例中，提供了用于使板状工件接触并沿传送方向移动的驱动机构。
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公开(公告)号：US07955044B2
公开(公告)日：2011-06-07
申请号：US11900650
申请日：2007-09-12
申请人： Susumu Moriya , Yoshiteru Ikehata
发明人： Susumu Moriya , Yoshiteru Ikehata
IPC分类号： B65H1/00
CPC分类号： B65G1/02 , B65G1/0435 , H01L21/67017 , H01L21/6734 , H01L21/67363 , H01L21/67393 , H01L21/67769
摘要： A method for processing substrates for a substrate processing facility includes the steps of: performing ventilation of a container with a fan filter unit while a lid of the container is in a closed state, when the container is stored in a storage shelf, and when the container is transferred with a substrate transfer device, and ventilating the container with the fan filter with the lid of the container in an open state, when substrates are transferred in a substrate loading/unloading section with the substrate transfer device.
摘要翻译： 一种用于处理基板处理设备的基板的方法包括以下步骤：当容器的盖子处于关闭状态时，当容器存储在存放架中时，执行具有风扇过滤器单元的容器的通风，并且当 容器用基板输送装置转印，并且当基板在基板装载/卸载部分中被转移到基板传送装置时，通过容器的盖子将风扇过滤器的容器换向打开状态。
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公开(公告)号：US20080089765A1
公开(公告)日：2008-04-17
申请号：US11900650
申请日：2007-09-12
申请人： Susumu Moriya , Yoshiteru Ikehata
发明人： Susumu Moriya , Yoshiteru Ikehata
CPC分类号： B65G1/02 , B65G1/0435 , H01L21/67017 , H01L21/6734 , H01L21/67363 , H01L21/67393 , H01L21/67769
摘要： The method for processing substrates for substrate processing facility includes the steps of performing ventilation a the fan filter unit while putting a lid of a container in a closed state, when the container is stored in a storage shelf, and is transferred with a substrate transfer device, and ventilating the container with the fan filter with the lid of the container in an open state, when substrates are transferred in a substrate loading/unloading section with the substrate transfer device.
摘要翻译： 用于处理基板处理设备的基板的方法包括以下步骤：当将容器的盖子放置在存储架中时，将容器的盖子置于封闭状态下进行风扇过滤器单元的通风，并且用基板传送装置 并且当基板被输送到具有基板传送装置的基板装载/卸载部分中时，使容器的容器与容器的盖子处于打开状态的风扇过滤器通风。
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公开(公告)号：US20060245860A1
公开(公告)日：2006-11-02
申请号：US11394095
申请日：2006-03-31
申请人： Susumu Moriya , Takayoshi Ono
发明人： Susumu Moriya , Takayoshi Ono
IPC分类号： B65G1/00
CPC分类号： H01L21/67766 , H01L21/67265 , H01L21/67769
摘要： A cassette storage equipment. The cassette storage equipment comprises a cassette storage spatially storing a cassette receiving a plurality of substrates in multiple levels, a transporting unit moving along the cassette storage, comprising a elevating structure and a cassette moving device disposed thereon, and a substrate transporting device transporting the substrate piece by piece to the processing device from the transporting unit. A substrate detecting device is disposed on the elevating structure to obtain a mapping data from the substrates transported form the cassette storage to a cassette on the elevating structure.
摘要翻译： 盒式存储设备。 盒式磁带存储设备包括：盒式存储器，其空间上存储容纳多层的多个基板的盒，沿着盒存储器移动的传送单元，包括设置在其上的升降结构和盒移动装置，以及传送基板的基板传送装置 从运送单元逐个地连接到处理装置。 基板检测装置设置在升降结构上，以获得从盒式存储器运送到基板上的映射数据到升降结构上的盒。
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公开(公告)号：US08411197B2
公开(公告)日：2013-04-02
申请号：US10968111
申请日：2004-10-20
CPC分类号： H01L31/0203 , H01L24/97 , H01L27/14618 , H01L27/14625 , H01L27/14627 , H01L31/02325 , H01L31/02327 , H01L2224/32225 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/73265 , H01L2224/97 , H01L2924/12043 , H01L2924/15311 , H01L2924/181 , H01L2924/1815 , H01L2924/3025 , H04N5/2254 , H01L2924/00014 , H01L2924/00
摘要： An image pickup device is disclosed that has little deformation caused by thermal expansion of a transparent resin for sealing an image pickup element. The image pickup device includes an image pickup element having a light receiving surface, a micro-lens for condensing incident light to the image pickup element, a first transparent plate disposed on the light receiving surface of the image pickup element with the micro-lens in between, a transparent resin that seals the image pickup element and the first transparent plate, and a second transparent plate disposed on the transparent resin to face the first transparent plate.
摘要翻译： 公开了一种由用于密封图像拾取元件的透明树脂的热膨胀引起的变形小的图像拾取装置。 图像拾取装置包括具有光接收表面的图像拾取元件，用于将入射光聚焦到图像拾取元件的微透镜，设置在图像拾取元件的光接收表面上的第一透明板，微透镜 密封图像拾取元件的透明树脂和第一透明板，以及设置在透明树脂上以面对第一透明板的第二透明板。
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公开(公告)号：US08194162B2
公开(公告)日：2012-06-05
申请号：US12720949
申请日：2010-03-10
申请人： Susumu Moriya , Izumi Kobayashi , Takao Ohno
发明人： Susumu Moriya , Izumi Kobayashi , Takao Ohno
CPC分类号： H04N5/2253 , H01L27/14618 , H01L27/14625 , H01L2224/0554 , H01L2224/05548 , H01L2224/05568 , H01L2224/05573 , H01L2224/13 , H01L2924/00014 , H04N5/2257 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要： An imaging device includes an image sensing device provided on a semiconductor substrate; a transparent member provided on a light-receiving area of the image sensing device; and a circuit element provided on the transparent member, wherein the image sensing device and the circuit element are electrically coupled to each other.
摘要翻译： 一种成像装置包括设置在半导体衬底上的图像感测装置; 透明构件，设置在所述图像感测装置的光接收区域上; 以及设置在所述透明构件上的电路元件，其中所述图像感测装置和所述电路元件彼此电耦合。
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公开(公告)号：US07638367B2
公开(公告)日：2009-12-29
申请号：US11483593
申请日：2006-07-11
申请人： Yoshito Akutagawa , Izumi Kobayashi , Naoyuki Watanabe , Susumu Moriya , Toshiyuki Honda , Noboru Hayasaka
发明人： Yoshito Akutagawa , Izumi Kobayashi , Naoyuki Watanabe , Susumu Moriya , Toshiyuki Honda , Noboru Hayasaka
IPC分类号： H01L21/00
CPC分类号： H01L21/565 , H01L24/73 , H01L24/97 , H01L2224/32225 , H01L2224/32245 , H01L2224/48091 , H01L2224/48227 , H01L2224/48247 , H01L2224/48465 , H01L2224/73265 , H01L2224/97 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01033 , H01L2924/01082 , H01L2924/12041 , H01L2924/14 , H01L2924/15311 , H01L2924/181 , H01L2924/00014 , H01L2224/85 , H01L2924/00 , H01L2924/00012 , H01L2224/92247
摘要： A method of resin sealing an electronic part, includes the steps of: providing a board where one or more of the electronic parts are mounted in an upper mold; melting a resin material received in a cavity forming part of a lower mold; and dipping the electronic part held by the upper mold into the molten resin so that the resin sealing is achieved. The resin material is received in the cavity forming part of the lower mold after the resin material is pressurized and dispersed in a sealing resin supply apparatus.
摘要翻译： 一种树脂密封电子部件的方法，包括以下步骤：提供一个板，其中一个或多个电子部件安装在上模具中; 熔化容纳在形成下模的一部分的腔中的树脂材料; 并将由上模保持的电子部件浸入熔融树脂中，从而实现树脂密封。 在将树脂材料加压并分散在密封树脂供给装置中之后，树脂材料被容纳在形成下模具的腔的部分中。
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