Plate-shaped work piece transporting apparatus
    1.
    发明授权
    Plate-shaped work piece transporting apparatus 有权
    板状工件输送装置

    公开(公告)号:US07329299B2

    公开(公告)日:2008-02-12

    申请号:US10885210

    申请日:2004-07-06

    IPC分类号: B65G49/07

    摘要: It is an object of the present invention to provide a plate-shaped work piece transporting apparatus that has a fan, a dust-removal filter disposed above this fan, and a plate-shape porous member disposed above the dust-removal filter. By forming a chamber in which air can accumulate between the porous member and the dust-removal filter, it is possible to suppress air pulsations. Further, by providing support members on the porous member, the plate-shaped work piece can be supported and damage thereto can be avoided when the plate-shaped work piece, which is supported by air from the fan, drops to below a set height.

    摘要翻译: 本发明的目的是提供一种板状工件输送装置,其具有设置在风扇上方的风扇,除尘过滤器和设置在除尘过滤器上方的板状多孔体。 通过形成空气可以在多孔构件和除尘过滤器之间积聚的室,可以抑制空气脉动。 此外,通过在多孔构件上设置支撑构件,当由来自风扇的空气支撑的板状工件下降到设定高度以下时,可以支撑板状工件并且可以避免板损坏。

    Cassette storage equipment
    2.
    发明申请
    Cassette storage equipment 审中-公开
    盒式存储设备

    公开(公告)号:US20060245860A1

    公开(公告)日:2006-11-02

    申请号:US11394095

    申请日:2006-03-31

    IPC分类号: B65G1/00

    摘要: A cassette storage equipment. The cassette storage equipment comprises a cassette storage spatially storing a cassette receiving a plurality of substrates in multiple levels, a transporting unit moving along the cassette storage, comprising a elevating structure and a cassette moving device disposed thereon, and a substrate transporting device transporting the substrate piece by piece to the processing device from the transporting unit. A substrate detecting device is disposed on the elevating structure to obtain a mapping data from the substrates transported form the cassette storage to a cassette on the elevating structure.

    摘要翻译: 盒式存储设备。 盒式磁带存储设备包括:盒式存储器,其空间上存储容纳多层的多个基板的盒,沿着盒存储器移动的传送单元,包括设置在其上的升降结构和盒移动装置,以及传送基板的基板传送装置 从运送单元逐个地连接到处理装置。 基板检测装置设置在升降结构上,以获得从盒式存储器运送到基板上的映射数据到升降结构上的盒。

    Method for processing substrates
    6.
    发明授权
    Method for processing substrates 有权
    处理基板的方法

    公开(公告)号:US07955044B2

    公开(公告)日:2011-06-07

    申请号:US11900650

    申请日:2007-09-12

    IPC分类号: B65H1/00

    摘要: A method for processing substrates for a substrate processing facility includes the steps of: performing ventilation of a container with a fan filter unit while a lid of the container is in a closed state, when the container is stored in a storage shelf, and when the container is transferred with a substrate transfer device, and ventilating the container with the fan filter with the lid of the container in an open state, when substrates are transferred in a substrate loading/unloading section with the substrate transfer device.

    摘要翻译: 一种用于处理基板处理设备的基板的方法包括以下步骤:当容器的盖子处于关闭状态时,当容器存储在存放架中时,执行具有风扇过滤器单元的容器的通风,并且当 容器用基板输送装置转印,并且当基板在基板装载/卸载部分中被转移到基板传送装置时,通过容器的盖子将风扇过滤器的容器换向打开状态。

    Imaging apparatus
    9.
    发明授权
    Imaging apparatus 有权
    成像设备

    公开(公告)号:US07564111B2

    公开(公告)日:2009-07-21

    申请号:US11657590

    申请日:2007-01-25

    IPC分类号: H01L31/0232

    摘要: In an imaging apparatus constituted of a case body for mounting an imaging device and a flexible substrate bonding to an external connection terminal provided on the case body, the flexible substrate is bent along each face of case body 41 so as to surround case body 41. By bending the flexible substrate, a load applied to the flexible substrate is received at the bent portion of the flexible substrate, there is formed a structure hard to transmit the load to the bonding portion to the external connection terminal. Further, by fixing the case body to a portion of the flexible substrate with an adhesive agent, etc., there is formed a structure not to transmit a stress to the direction of peeling the flexible substrate from the external connection terminal. Also, the case body is covered with the flexible substrate equipped with an electromagnetic wave shield material.

    摘要翻译: 在由用于安装成像装置的壳体和与设置在壳体上的外部连接端子接合的柔性基板构成的成像装置中,柔性基板沿着壳体41的每个面弯曲以围绕壳体41。 通过弯曲柔性基板,施加到柔性基板的负载被容纳在柔性基板的弯曲部分处,形成难以将负载传递到外部连接端子的接合部分的结构。 此外,通过利用粘合剂等将壳体固定到柔性基板的一部分上,形成了不向外部连接端子向柔性基板剥离的方向施加应力的结构。 此外,壳体被配备有电磁波屏蔽材料的柔性基板覆盖。

    Method for processing substrates
    10.
    发明申请
    Method for processing substrates 有权
    处理基板的方法

    公开(公告)号:US20080089765A1

    公开(公告)日:2008-04-17

    申请号:US11900650

    申请日:2007-09-12

    IPC分类号: B65G65/00 F24F7/06

    摘要: The method for processing substrates for substrate processing facility includes the steps of performing ventilation a the fan filter unit while putting a lid of a container in a closed state, when the container is stored in a storage shelf, and is transferred with a substrate transfer device, and ventilating the container with the fan filter with the lid of the container in an open state, when substrates are transferred in a substrate loading/unloading section with the substrate transfer device.

    摘要翻译: 用于处理基板处理设备的基板的方法包括以下步骤:当将容器的盖子放置在存储架中时,将容器的盖子置于封闭状态下进行风扇过滤器单元的通风,并且用基板传送装置 并且当基板被输送到具有基板传送装置的基板装载/卸载部分中时,使容器的容器与容器的盖子处于打开状态的风扇过滤器通风。